Brooks SLA5850 Manuals

3 pdf manual(s) Brooks SLA5850 for free download (Document Types: Installation and operation manual)

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Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG April, 2013 Brooks® Digital MFC's & MFM's Brooks® SLA5850, SLA5851, SLA5853 Mass Flow Controllers Models and Models SLA5860, SLA5861, SLA5863 Mass Flow Meters Model SLA5850S Analog I/O MFC with RS-485 Model SLA5850S Analog I/O MFC with RS-485 Elastomer Downport Model SLA5853S Analog I/O MFC with RS-485 Model SLA5850D Digital I/O DeviceNetTM MFC with Coplanar Valve Model SLA5850F Digital I/O FOUNDATION Fieldbus MFC with Coplanar Valve Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG April, 2013 Brooks® Digital MFC's & MFM's Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG April, 2013 Brooks® Digital MFC's & MFM's Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more. The Brooks product you have just received is of the highest quality available, offering superior performance, reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service. We recommend that you read this manual in its entirety. Should you require any additional information concerning Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www.BrooksInstrument.com Yours sincerely, Brooks Instrument Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG April, 2013 Brooks® Digital MFC's & MFM's THIS PAGE WAS INTENTIONALLY LEFT BLANK

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Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG January, 2017 Brooks® Digital MFC's & MFM's Brooks® SLA5800 Series Elastomer Sealed, Digital, Thermal Mass Flow Meters and Controllers Model SLA5850 with RS485 Communications Model SLA5850 with DeviceNet® Communications Model SLA5850 with Profibus® Communications Model SLA5851 with EtherCAT® Communications Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG January, 2017 Brooks® Digital MFC's & MFM's ESD (Electrostatic Discharge) CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed during the removal, installation or other handling of internal circuit boards or devices. Handling Procedure: 1. Power to unit must be removed. 2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed, removed or adjusted. 3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory. Comments This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function properly, exhibit early failure. Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products. • To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product. • Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover for local sales office contact information. Save this instruction manual for future reference. WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed this warning can result in serious personal injury and / or damage to the equipment. • If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification. • Follow all warnings, cautions and instructions marked on and supplied with the product. WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can result in serious personal injury and / or damage to the equipment. • Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes. Connect all products to the proper electrical and pressure sources. • Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet and outlet connections. If no leaks are present, bring the system up to the operating pressure. • Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation. • Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when maintenance is being performed by qualified persons. WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury. All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED). • The Specifications Section of this manual contains instructions related to the PED directive. • Products described in this manual are in compliance with EN directive 2014/34/EU. • All Brooks Instrument Flowmeters fall under fluid group 1. • Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III. • Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP). The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 2014/30/EU). Special attention however is required when selecting the signal cable to be used with CE marked equipment. Quality of the signal cable, cable glands and connectors: Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification. If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield. “D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping. The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees. The shield should be terminated to an earth ground. Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification. The shield should be terminated to an earth ground. For pin configuration : Please refer to the enclosed Instruction Manual. European Pressure Equipment Directive (PED) European Electromagnetic Compatibility (EMC) Essential Instructions Read before proceeding! Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG January, 2017 Brooks® Digital MFC's & MFM's Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more. The Brooks product you have just received is of the highest quality available, offering superior performance, reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service. We recommend that you read this manual in its entirety. Should you require any additional information concerning Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www.BrooksInstrument.com Yours sincerely, Brooks Instrument Installation and Operation Manual X-TMF-SLA5800-Series-RevB-MFC-eng Part Number: 541B187AAG January, 2017 Brooks® Digital MFC's & MFM's THIS PAGE WAS INTENTIONALLY LEFT BLANK

Document Preview & Text Transcription

Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG June, 2009 Brooks® Digital MFC's & MFM's Brooks® SLA5850, SLA5851, SLA5853 Mass Flow Controllers Models and Models SLA5860, SLA5861, SLA5863 Mass Flow Meters Model SLA5850S Analog I/O MFC with RS-485 Model SLA5850S Analog I/O MFC with RS-485 Elastomer Downport Model SLA5853S Analog I/O MFC with RS-485 Model SLA5850D Digital I/O DeviceNetTM MFC with Coplanar Valve Model SLA5850F Digital I/O FOUNDATION Fieldbus MFC with Coplanar Valve Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG June, 2009 Brooks® Digital MFC's & MFM's ESD (Electrostatic Discharge) Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, using and maintaining Brooks Products. • Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover for local sales office contact information. Save this instruction manual for future reference. • If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification. • Follow all warnings, cautions and instructions marked on and supplied with the product. • Inform and educate your personnel in the proper installation, operation and maintenance of the product. • Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes. Connect all products to the proper electrical and pressure sources. • To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product. • When replacement parts are required, ensure that qualified people use replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation. • Ensure that all equipment doors are closed and protective covers are in place, except when maintenance is being performed by qualified persons, to prevent electrical shock and personal injury. Pressure Equipment Directive (PED) All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED). The Directive is applicable within the European Economic Area (EU plus Norway, Iceland and Liechtenstein). Pressure equipment can be traded freely within this area once the PED has been complied with. • Section 1 of this manual contains important safety and operating instructions related to the PED directive. • Meters described in this manual are in compliance with EN directive 97/23/EC module H Conformity Assessment. • All Brooks Instrument Flowmeters fall under fluid group 1. • Meters larger than 25mm or 1" (inch) are in compliance with category I, II, III of PED. • Meters of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP). Handling Procedure: 1. Power to unit must be removed. 2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed, removed or adjusted. 3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory. Comments This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these devices. Damaged components, even though they appear to function properly, exhibit early failure. Installation and Operation Manual X-TMF-SLA5800-MFC-eng Part Number: 541B027AAG June, 2009 Brooks® Digital MFC's & MFM's Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more. The Brooks product you have just received is of the highest quality available, offering superior performance, reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependable service. We recommend that you read this manual in its entirety. Should you require any additional information concerning Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover of this manual or visit www.BrooksInstrument.com Yours sincerely, Brooks Instrument