LEYBOLD 911-202-G1 Manuals

Vacuum Technology Part Number 074-201 Measuring and Analytical TechnologyO LEYBOLD TRANSPECTOR@ Gas Analysis System MANUAL Vacuum Process Engineering LEYBOLD INFICON INC. Vacuum Process Engineering Vacuum Technology Measuring and Analytical Technology LEYBOLD INFICON INC. Part Number 074-201 TRANSPECTOR@ Gas Analysis System MANUAL JUNE 1996 LEYBO LD Two Technology Place. East Syracuse, NY 13057-9714.Telephone 315-434-1100'Telefax 315-437-3803 Table of Contents Sectlon 3 - llow the Tnnrpector Worke ffneory ol0perdlon) 3.1 About Section 3 .............. ...............3_1 3.2 Overyicw.... ................3-z 3.3 Thc lon Sourcc ..........3.g 3.4 Thc Quadrupolc Mass Fi1ter............ ."................3.5 3.4.1 Scanning Charactcristbr............... ........3-g 3.1.2 Thc Zcro Blaet ........... ........3-9 3.5 Thc lon Dctcctor .....3-10 3.5.1 Thc Fanday Cup (FC) Dctccror ..........3-10 3.5.2 The Elcctron Multiplicr (EM) Dctcctor .................. ...3-11 3.5.3 The channctElccrron Multipticr/Faraday cup (cEtwFc) ocrccror.................3-12 3.5.4 ThcMicrochannctPlatc/Faradaycup(MCp/FC)Dctcctor .........3.14 LEYBOLD INFICON INC. HHffiM Transpector Gas Analysis Syslem vilt ilHffiM LTYBOLD INFICON INC Sectlon 4 - lnterpretlng the ilass Spectra 4.3 4.4 About Sec,tion 4................ ................4-1 Qualhative lnterpretation ol Mass Spoctra........ .......................4.2 4.2.1 lonization Process 4.2.2 lsotope Ratioe .......... ...........4-5 4.2.3 Electron Energy Effects .......4-7 4.2.4 A Oualitative lnterpretation Guide "......... ......................4-g ouantitative lnl€rprstation ol Mass spactra (calculating Partialpressures)............... 4-10 Addilional lnformation lor lnterpreting Mass Spectra........ ... 4-15 4.4.1 lon Source CharaAeristics................. .., 4-15 4.1.2 Scanning Characteristics ................ ...... 4-17 4.1.3 Fragmentalion Factors .... 4-17 Sectlon 5 - Electronlc Clrcultry 5.1 About Seclion 5..."........... .................5-1 5.2 Transpector .................5-1 5.3 CPU Card ....................5-3 5.4 PowerSupply Card .....5-5 5.5 RF/DC Generator Card............. .......S-8 5.6 Anplifier Card............ ................... 5-10 Sectlon 6 - llasterQuad Softwue (lt Maste0uad soltware is purchased, please relcrerenca yutr soft*are package lor IPN O74-Z1S - soltware inetruc{ion rnan ual. ) Sectlon 7 - Operatlng the llulllplerlng QX (Ll0[ end the Slngle 0X (SOX) Software (lt MO)USOX software is purchased, plcasa relerercncc your soltwarc package lor IPN 074-216 - soltware instnrction rnanual. ) Section I - Troubbshootlng 8.1 About Section 8................ ................8-1 8.2 Symptom Check List............... .........8-2 8.3 Service Diagnostics via RS232 Serial Port .........g-6 8.4 Bakeout of Quadrupole Sensor..... .................... g-1 1 8.5 Sensor Spare Parts List .............. ..................... 8-13 8.5.1 H100, H200 & H300 Models ................. 8-13 8.5.2 C100F & C200M Modets......... .............. 8.13 8.6 Filament Raplacement (for all RGA sourca sensors) ......... g-14 8.7 lon Source Removal ...... ............... g-15 8.8 Replacing the Electron Multiplier (H1OOM, H2OOM, H3OOM) .................. 8-16 8.9 Replacing th€ Elecrron Muttiplier (C10OM) ..... B-17 Appenclh (lt OEll software is purchased, please refererence your sottware package lor IPN 074-212 - software instruction rnanual, ) 4.1 4.2 IX Transpector Gas Analysis System