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OPERATING INSTRUCTmONS
INTER-
FACE
Turbo.Drive TD20 classic
Frequency Converter for
Turbomolecular Pumps
Part Nos.
B00075V0001 to
B00075V0007
r--.,
b-.Leybold
vacuurTI
Contents
Section
1
1.1
1.2
1.3
1.4
1.5
2
2.1
2.2
2.3
2.4
2.5
3
3.1
3.2
3.2.1
3.2.2
3.2.3
3.2.4
3.2.5
3.2.6
3.2.7
3.2.8
3.2.9
3.2.10
3.3
3.4
3.4.1
3.5
3.6
4
5
Page
Important Safety Information . ................................... 3
Description . .................................................. 4
Design and function ............................................. 4
Supplied equipment ............................................. 4
Technical data .................................................. 6
Ordering information ............................................. 7
Accessories ........... , ....... ,., .... , .. , , ....... , , .... , . , , , , , 7
Installation ................................................... 8
Placement. .................................................... 8
Conforming utilisation ............................................ 8
Providing the connections .......... ' ............................... 9
Replacing the NT 20 ............................................ 1 0
Replacing the NT 151/361 or NT 361 ............................... 11
Operation ..........•........................................ 13
Start-up ..................................................... 13
Interfaces .................................................... 14
9-way PLC interface ............................................ 14
RS 232 interface ............................................... 15
Profibus interface .............................................. 16
RS 485 interface ............................................... 16
25-way PLC interface ........................................... 18
DeviceNet interface ............................................. 20
EthernetllP interface ............................................ 20
Parameter list ................................................. 21
Specific parameter data for the pumps .............................. 25
Error messages ................................................ 26
Start-up of the TURBOVAC ....................................... 27
Operation .................................................... 27
Status table at default settings .................................... 27
Shut-down of the TURBOVAC .................................... 28
Shut-down olthe TurboDrive TD20 classic .......................... 28
Maintenance . ........................•................•...... 28
Troubleshooting . ............................................. 29
EC Conformance Declaration . .................................. 31
21 GA05228_0302 - 08/2006 - © Leybold Vacuum
Safety Information
mmportant
Safety Information
Indicates procedures that must be strictly observed to prevent hazards to
Warning
persons.
Indicates procedures that must be strictly observed to prevent damage to,
Caution
or destruction of the product.
The Leybold Turbo.Drive TD20 classic frequency converter has
been designed for safe and efficient operation when used proper-
ly and in accordance with these Operating Instructions. It is the
responsibility of the user to carefully read and strictly observe all
safety precautions described in this section and throughout the
Operating Instructions. The TurboDrive must only be operated
in the proper condition and under the conditions described
in the Operating Instructions. It must be operated and main-
tained by trained personnel only. Consult local, state, and national
agencies regarding specific requirements and regulations.
Address any further safety, operation and/or maintenance ques-
tions to your nearest Leybold Vacuum office.
Only qualified personnel or the Leybold Service Department may
carry out work on the frequency converter.
Potentially fatal voltages are present inside the frequency conver-
ter.
Open the frequency converter only after it has been isolated from
the mains power supply.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Warning
GA05228_0302 . 08/2006 - © Leybold Vacuum 13
Description
1
Description
1.1
Design and function
The electronic frequency converter Turbo. Drive TD20 classic is used to drive
the following turbo molecular pumps:
TURBOVAC 151, 151 C, 361, 361 C,
TURBOVAC 600, 600 C,
TURBOVAC 1000, 1000 C, 1100 C.
These pumps each comprise a three-phase asynchronous motor with the
appropriate rating to drive the rotor.
The TurboDrive TD20 classic converts the single-phase mains voltage into a
three-phase AC voltage with regulated frequency and amplitude.
Coding
Each installed TURBOVAC has been individually coded. The acceleration
sequence, the regulation during operation, and the output speed will vary
depending on the installed pump model.
The Turbo.Drive TD20 classic has a 9-way PLC interface as standard and
additional interfaces as option. It can be connected directly to mains volta-
ge.
The Turbo.Drive TD20 classic can be connected directly to mains voltage.
1.2
Supplied equipment
TurboDrive TD20 classic table-top electronic frequency converter with hou-
sing, Operating Instructions.
41 GA05228_0302 - 08/2006 - © Leybold Vacuum