LEYBOLD GRAPHIX ONE Instruction Manual

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Brand: LEYBOLD
Category: Controller
Model: GRAPHIX ONE (Instruction Manual)
File Type: PDF
File Size: —
Pages: 120

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Vacuum Gauge Controller

Instruction Manual GA300550402_002_C1

GA300550402_002_C1 – 10/2016

3 0. Table of Contents 0. Table of Contents 3 0.1 List of Figures 8 0.2 List of Tables 10 1. Legal Notices 12 1.1 Validity 12 1.1.1 Part Numbers 12 1.1.2 Label 12 1.2 Conforming Utilisation 12 1.3 Instrument Versions 13 1.4 Assuming of Responsibility and Warranty 13 1.5 Shipping Damage 13 2. Safety 14 2.1 General Information 14 2.2 Key to the Symbols 14 2.3 Basic Safety Information 14 3. General Description of the Instrument 15 3.1 GRAPHIX controller 15 3.2 Suitable Sensors 15 4. Technical Data 16 4.1 General Data 16 4.1.1 Mechanical Data 16 4.1.2 Default Parameters (factory defaults) 17 4.1.3 Ambient 18 4.1.4 Standards 18 4.2 Mains Power Connection 18 4.3 Measurement Channels 19 4.3.1 Sensor Powering 19 4.3.2 Measurement Technology 20 4.4 TFT Touch Display 20 4.5 Switching Functions / Relay Outputs 20 4.5.1 Relay Switching Functions 20 4.5.2 Error Signal Relay 20

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4.6 Outputs and Inputs 21 4.6.1 Analogue Output 21 4.6.2 Chart Recorder Output 21 4.6.3 External Control 21 4.6.4 Serial Interface 21 4.6.4.1 RS232 21 4.6.4.2 RS485 22 4.6.5 USB-A Interface (front side) 22 5. Installation 23 5.1 Supplied Equipment 23 5.2 Mechanical Installation 23 5.2.1 Rack Installation 24 5.2.2 Front Panel Installation 24 5.2.3 Benchtop Instrument 25 5.3 Connections 26 5.3.1 Rear of the Instrument 26 5.3.2 Mains Power Connection 26 5.3.3 Earthing 27 5.3.4 Measurement Channel (CH1 … CH3) 27 5.3.5 Relay Output 28 5.3.6 Analogue Output, Chart Recorder Output and External Control (Control) 29 5.3.7 Interfaces RS232/RS485 (RS232/RS485) 29 6. Operation 30 6.1 Front Panel 30 6.1.1 USB-A Interface 30 6.1.2 Display 30 6.1.2.1 Display Mode – Normal 31 6.1.2.2 Display Mode – Chart 33 6.1.2.3 Display Mode – Big 33 6.1.2.4 Display Mode Speedo 34 6.1.2.5 Display Mode Leak Test 34 6.1.3 Controls 35 6.1.4 Symbols 36 6.1.4.1 Symbols for the Controls 36 6.1.4.2 Symbols for the Language Selection 37 6.1.4.3 Status and Warning Symbols 38 6.2 Switching ON and OFF 39 6.2.1 Switching ON 39 6.2.2 Switching OFF 39 6.3 Operating Modes 39 6.4 Measurement Mode 40 6.4.1 Description 40 6.4.2 Button Functions 40 6.4.2.1 Invoking the Help Function 40 6.4.2.2 Changing Display Mode 41 6.4.2.3 Switching the High Vacuum Measurement Circuit On 42 6.4.2.4 Switching the High Vacuum Measurement Circuit Off 42 6.4.2.5 Switching the Emission On 43 6.4.2.6 Switching the Emission Off 43 6.4.2.7 Switching the Degas Function On 44 6.4.2.8 Switching the Degas Function Off 44 6.4.2.9 Starting the Leak Test Function 45 6.4.2.10 Stopping the Leak Test Function 45

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5 6.5 Parameter and Function Mode 46 6.5.1 Operating Concept 46 6.5.2 Parameter Groups 48 7. Parameters 53 7.1 Channel 1 … 3 53 7.1.1 Sensor Type 56 7.1.1.1 Specifying the Sensor Type for THERMOVAC Sensors 57 7.1.1.2 Specifying the Sensor Type for PENNINGVAC Sensors 61 7.1.1.3 Specifying the Sensor Type for CERAVAC Sensors 65 7.1.2 Sensor Detection (Detection) 67 7.1.3 Sensor Name 67 7.1.4 Measured Values Filter (Filter) 68 7.1.5 Gas Typ Correction (Gas Type) 69 7.1.6 Gas Type Correction Factor (Correction Factor) 69 7.1.7 Emission Switching On and Switching Off Type (Emission) 69 7.1.8 Filament Selection (Filament) 70 7.1.9 Offset On / Off 70 7.1.10 Offset Value 70 7.1.11 Take Current Pressure 70 7.1.12 Zero Alignment (Zero Adjust) 71 7.1.13 Sensor Switch-on Type (Sensor On) 72 7.1.14 Sensor Switch-on Value (T-On) 72 7.1.15 Sensor Switch-off Type (Sensor Off) 73 7.1.16 Sensor Switch-off Value (T-Off) 73 7.1.17 Entering the Characteristics for Further Sensors 73 7.1.17.1 Curve Type 74 7.1.17.2 Characteristic Curve (U-Start, p-Start, U-End, p-End, F-Start, F-End) 74 7.2 Setpoints 75 7.2.1 Basic Terms 75 7.2.2 Configuring the Switching Functions 76 7.2.3 Adjustment Range 79 7.3 System 81 7.3.1 Displayed Unit of Measurement (Unit) 81 7.3.2 Key Tone 82 7.3.3 Error Relay 82 7.3.4 Baud Rate (Data Rate) 82 7.3.5 Com Port 83 7.3.6 Address 83 7.3.7 Clock (Time) 83 7.3.8 Date 83 7.3.9 System Information 83 7.4 Display 84 7.4.1 Display Mode 84 7.4.2 Resolution 84 7.4.3 Brightness 84 7.5 Logging 85 7.5.1 Interval (s) 85 7.5.2 File Size (h) 85 7.5.3 Enable / Disable Logging 85 7.6 Recorder 86 7.6.1 Analog Mode 86 7.6.2 Channel 91

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7.7 Chart 92 7.7.1 Interval (s) 92 7.7.2 Channel 1 92 7.7.3 Channel 2 92 7.7.4 Channel 3 93 7.8 Leak Test 94 7.8.1 Interval (min) 95 7.8.2 Volume (l) 95 7.8.3 Channel 95 7.9 Menu Language (Language) 96 8. Computer Interface 97 8.1 Basic Information 97 8.1.1 Connection 97 8.1.2 Nomenclature 97 8.2 Communication 98 8.2.1 Protocol 98 8.2.2 General String Structure 98 8.2.2.1 Send String Structure (as seen from the Master) 98 8.2.2.2 Receiving String Structure (as seen from the Master) 99 8.2.2.3 Error Number (Receiving String) 100 8.2.2.4 Calculation of the Checksum 100 8.3 The Command Set (Mnemonics) 101 8.3.1 Parameter Group 101 8.3.2 Parameter Number 101 9. Maintenance and Servicing 108 9.1 Maintenance 108 9.1.1 Cleaning 108 9.2 Configuration 108 9.2.1 Save Data 108 9.2.2 Restore Data 109 9.2.3 Factory Setup 109 9.3 Update Function 110 9.3.1 Preparations 110 9.3.2 Updating 110 10. Troubleshooting 111 10.1 Indication of Errors 111 10.1.1 Sensor Errors 111 10.1.2 System Errors 112 10.2 Error Log 112 10.3 Help in Case of Malfunctions 113 10.4 Replacing the Built-in Fuses 113 10.5 Repair 113

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7 11. Storing and Waste Disposal 114 11.1 Packaging 114 11.2 Shelving 114 11.3 Waste Disposal 114 Annex 1 - EU Declaration of Conformity 118 Annex 2 - Declaration of Contamination 119

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0.1 List of Figures Figure 1 – Label (example) 12 Figure 2 – Dimensions of the GRAPHIX controller (in mm) 16 Figure 3 – Rack installation 24 Figure 4 – Front panel cut-out (in mm) 24 Figure 5 – Preparing the top side of the instrument for utilisation as a benchtop unit 25 Figure 6 – Preparing the bottom side of the instrument for utilisation as a benchtop unit 25 Figure 7 – Rear of the instrument 26 Figure 8 – Sensor connection (modular socket, 8-way) 27 Figure 9 – Sensor connection (SUB-D socket, 15-way) 27 Figure 10 – Connection socket for relay output (SUB-D, 25-way) 28 Figure 11 – Connection plug for analogue output, chart recorder output and external control (SUB-D, 15-way) 29 Figure 12 – Connection socket for interface (SUB-D, 9-way) 29 Figure 13 – Front panel 30 Figure 14 – Display mode Normal 31 Figure 15 – Display field for a measurement channel 31 Figure 16 – Display mode Chart 33 Figure 17 – Display mode Big 33 Figure 18 – Display mode Speedo 34 Figure 19 – Display mode Leak Test 34 Figure 20 – Main menu 1/2 35 Figure 21 – Main menu 2/2 35 Figure 22 – Channel menu (example) 35 Figure 23 – Invoking the Help function 40 Figure 24 – Changing display mode 41 Figure 25 – Switching the high vacuum measurement circuit on 42 Figure 26 – Switching the high vacuum measurement circuit off 42 Figure 27 – Switching the emission on 43 Figure 28 – Switching the emission off 43 Figure 29 – Switching the degas function On 44 Figure 30 – Switching the degas function Off 44 Figure 31 – Starting Leak Test 45 Figure 32 – Stopping Leak Test 45 Figure 33 – Parameter groups in the main menu 46 Figure 34 – Parameters of a parameter group 46 Figure 35 – Values entry field 47 Figure 36 – Text entry field 47 Figure 37 – Selection list 47 Figure 38 – Display of sensor type TTR? 57 Figure 39 – Opening the main menu 57 Figure 40 – Selection of parameter group Channel 57 Figure 41 – Selection of parameter Sensor Type 58 Figure 42 – Selection of the desired sensor 58 Figure 43 – Display of selected sensor type 58 Figure 44 – Display of sensor type TTR10X 59 Figure 45 – Opening the main menu 59 Figure 46 – Selection of the parameter group Channel 59 Figure 47 – Selection of parameter Sensor Type 60 Figure 48 – Selection of desired sensor 60 Figure 49 – Display of selected sensor type 60 Figure 50 – Display of sensor type PTR? 61 Figure 51 – Opening the main menu 61 Figure 52 – Selection of parameter group Channel 61 Figure 53 – Selection of parameter Sensor Type 62 Figure 54 – Selection of the desired sensor 62 Figure 55 – Display of selected sensor type 62 Figure 56 – Display of sensor type PTR90? 63 Figure 57 – Opening the main menu 63 Figure 58 – Selection of the parameter group Channel 63 Figure 59 – Selection of parameter Sensor Type 64 Figure 60 – Selection of desired sensor 64

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9 Figure 61 – Display of selected sensor type 64 Figure 62 – Display of sensor type CTR? 65 Figure 63 – Opening the main menu 65 Figure 64 – Selection of parameter group Channel 65 Figure 65 – Selection of parameter Sensor Type 66 Figure 66 – Selection of desired sensor 66 Figure 67 – Display of selected sensor type 66 Figure 68 – Measured values filter Fast (example) 68 Figure 69 – Measured values filter Medium (example) 68 Figure 70 – Measured values filter Slow (example) 68 Figure 71 – Configuration for the specific characteristics of further sensors 74 Figure 72 – Response of the switching function in case of pressure changes 75 Figure 73 – Opening the main menu 76 Figure 74 – Selection of parameter group Setpoints 76 Figure 75 – Selection of the parameter Channel 76 Figure 76 – Selection of the desired channel 77 Figure 77 – Selection for parameter SP-On / SP-Off 77 Figure 78 – Selection of the switching threshold value 78 Figure 79 – Display switching threshold 78 Figure 80 – Sample file of recorded data 85 Figure 81 – Error log 113

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0.2 List of Tables Table 1 – Part numbers 12 Table 2 – Suitable sensors 15 Table 3 – Default parameters (factory defaults) 17 Table 4 – Supplied equipment 23 Table 5 – Symbols for the controls 37 Table 6 – Symbols for language selection 37 Table 7 – Status indicating and warning symbols 38 Table 8 – Status messages in the measured values display 40 Table 9 – Parameter groups and corresponding parameters 52 Table 10 – Available sensor parameters for THERMOVAC sensors 53 Table 11 – Available sensor parameters for THERMOVAC sensors (combination sensors) 53 Table 12 – Available sensor parameters for IONIVAC sensors (combination sensors) 54 Table 13 – Available sensor parameters for PENNINGVAC sensors 54 Table 14 – Available sensor parameters for PENNINGVAC sensors (combination sensors) 54 Table 15 – Available sensor parameters for CERAVAC sensors 55 Table 16 – Available sensor parameters for DU sensors 55 Table 17 – Available sensor parameters for further sensors 55 Table 18 – Values for the parameter Emission 69 Table 19 – Values for the parameter Filament 70 Table 20 – Values for the parameter Type of Characteristic 74 Table 21 – Adjustment range for the threshold value of THERMOVAC sensors 79 Table 22 – Adjustment range for the threshold value of THERMOVAC sensors (combination sensors) 79 Table 23 – Adjustment range for the threshold value of IONIVAC sensors (combination sensors) 79 Table 24 – Adjustment range for the threshold value of PENNINGVAC sensors 80 Table 25 – Adjustment range for the threshold value of PENNINGVAC sensors (combination sensors) 80 Table 26 – Adjustment range for the threshold value of CERAVAC sensors 80 Table 27 – Adjustment range for the threshold value of DU sensors 81 Table 28 – Adjustment range for the threshold value of further sensors 81 Table 29 – Values for the parameter Unit 81 Table 30 – Values for the parameter Key Tone 82 Table 31 – Values for the parameter Error Relay 82 Table 32 – Values for the parameter Data Rate 82 Table 33 – Values for the parameter Com Port 83 Table 34 – Values for the parameter Display mode 84 Table 35 – Values for the parameter Display digits 84 Table 36 – Values for the parameter Brightness 84 Table 37 – Chart recorder output – Calculation formula for the parameter Log 86 Table 38 – Chart recorder output – Calculation formula for the parameter Log A 86 Table 39 – Chart recorder output – Calculation formula for the parameter Log -6 87 Table 40 – Chart recorder output – Calculation formula for the parameter Log -3 87 Table 41 – Chart recorder output – Calculation formula for the parameter Log +0 87 Table 42 – Chart recorder output – Calculation formula for the parameter Log +3 87 Table 43 – Chart recorder output – Calculation formula for the parameter LogC1 87 Table 44 – Chart recorder output – Calculation formula for the parameter Lin -10 88 Table 45 – Chart recorder output – Calculation formula for the parameter Lin -9 88 Table 46 – Chart recorder output – Calculation formula for the parameter Lin -8 88 Table 47 – Chart recorder output – Calculation formula for the parameter Lin -7 88 Table 48 – Chart recorder output – Calculation formula for the parameter Lin -6 89 Table 49 – Chart recorder output – Calculation formula for the parameter Lin -5 89 Table 50 – Chart recorder output – Calculation formula for the parameter Lin -4 89 Table 51 – Chart recorder output – Calculation formula for the parameter Lin -3 89 Table 52 – Chart recorder output – Calculation formula for the parameter Lin -2 89 Table 53 – Chart recorder output – Calculation formula for the parameter Lin -1 89 Table 54 – Chart recorder output – Calculation formula for the parameter Lin +0 90 Table 55 – Chart recorder output – Calculation formula for the parameter Lin +1 90 Table 56 – Chart recorder output – Calculation formula for the parameter Lin +2 90 Table 57 – Chart recorder output – Calculation formula for the parameter Lin +3 90 Table 58 – Chart recorder output – Calculation formula for the parameter IM221 90 Table 59 – Chart recorder output – Calculation formula for the parameter LogC4 91 Table 60 – Values for the parameter Channel 91 Table 61 – Overview for display duration [hh:mm:ss] 92

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11 Table 62 – Values for the parameter Channel 1 92 Table 63 – Values for the parameter Channel 2 92 Table 64 – Values for the parameter Channel 3 93 Table 65 – Values for the parameter Channel 95 Table 66 – Values for the parameter Language 96 Table 67 – Computer interface terms 97 Table 68 – Control characters of the computer interface 97 Table 69 – Error numbers of receiving string 100 Table 70 – Parameter groups 101 Table 71 – Parameter numbers for parameter groups 1 … 3 (Parameter Channel 1 … 3) 103 Table 72 – Parameter numbers for parameter group 4 (Setpoint parameters) 105 Table 73 – Parameter numbers for parameter group 5 (System parameters) 107 Table 74 – Sensor errors 111 Table 75 – System errors 112

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1. Legal Notices 1.1 Validity 1.1.1 Part Numbers This document applies to the following products: Part Number Product Version Serial Number 230680V01 GRAPHIX ONE controller Single-channel measuring instrument for active vacuum sensors 1.11.00 et seq. 1 et seq. 230681V01 GRAPHIX TWO controller Two-channel measuring instrument for active vacuum sensors 1.11.00 et seq. 1 et seq. 230682V01 GRAPHIX THREE controller Three-channel measuring instrument for active vacuum sensors 1.11.00 et seq. 1 et seq. Table 1 – Part numbers 1.1.2 Label A label is located on the left-hand side of the instrument. When communicating with Leybold GmbH, the information given on this label is important. Therefore, enter this information here: Figure 1 – Label (example) 1.2 Conforming Utilisation The GRAPHIX controller is a display and operating unit with a graphic user interface for sensors with an analogue or digital interface of the company Leybold GmbH or from other manufacturers. Depending on the version, the unit offers one or several channels, and it is used in combination with the sensors from the series THERMOVAC, IONIVAC, PENNINGVAC and CERAVAC as well as DU sensors for the measurement of pressures above and below atmospheric pressures (vacuum). It is also possible to use sensors made by other manufacturers by entering a variable analogue logarithmic or analogue linear characteristic ranging from 0 – 10 Volt. Operate all connected sensors in agreement with the information given in the corresponding Operating Instructions. NOTICE: Based on the technical data please check first whether your measuring instrument is suited to your kind of application.

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13 1.3 Instrument Versions The GRAPHIX controller is available in three different versions: GRAPHIX ONE (single-channel measuring instrument) GRAPHIX TWO (two-channel measuring instrument) GRAPHIX THREE (three-channel measuring instrument) The three versions differ as to the following:  Number of measurement channels  Power consumption  Weight  Chapter 4 -Technical Data, page 16 Described in these Operating Instructions are all three versions of the GRAPHIX controller. 1.4 Assuming of Responsibility and Warranty Leybold GmbH will not assume any responsibility or warranty in case the operator or third persons  do not observe the information given in this document.  do not use the product as intended.  modify the product in any way (conversions, repair work etc).  operate the product with accessories not listed in the corresponding product documentation. Subject to technical alterations without prior notice. The figures are not binding. 1.5 Shipping Damage  Examine the shipping package as to any external damage.  In case any damage is determined, file a damage report to the forwarding agent and the insurer.  Retain the packaging material since damages can only be claimed when returning the instrument in the original packaging of the manufacturer.  Examine the delivery to ensure that it is complete.  Examine the instrument as to any visually apparent damage. DANGER: Damaged product. Commissioning or operating a damaged product is dangerous to life.

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2. Safety 2.1 General Information The GRAPHIX is supplied ready for immediate operation. Even so, we recommend that you carefully read these Operating Instructions so as to ensure optimum working conditions right from the start. These Operating Instructions contain important information as to understanding, placing, commissioning, operating and troubleshooting the GRAPHIX controller. 2.2 Key to the Symbols Important instructions relating to technical safety and safe operation are emphasised by symbols. DANGER or WARNING: Information designed to prevent any kind of injury to persons. DANGER: Information designed to prevent injury to persons and damage to equipment in connection with electricity.  NOTICE: General information pointing to further information, respectively reference sections. 2.3 Basic Safety Information  During all work like installation, maintenance and repair activities, comply with the pertinent safety regulations. DANGER: Mains Voltage Coming into contact with components at mains voltage level within the instrument can be dangerous to life when inserting objects or allowing liquids to enter the instrument. WARNING: Improper usage. Improper usage can damage the instrument. Use the instrument only in agreement with the specifications issued by the manufacturer. WARNING: Wrong Connection and Operating Data. Wrong connection and operating data can damage the instrument. Comply with all specified connection and operating data.

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15 3. General Description of the Instrument 3.1 GRAPHIX controller The GRAPHIX controller is a display and operating unit with a graphic user interface for sensors with an analogue or digital interface of the company Leybold GmbH or from other manufacturers. Depending on the version, the unit offers one or several channels, and it is used in combination with the sensors from the series THERMOVAC, IONIVAC, PENNINGVAC and CERAVAC as well as DU sensors for the measurement of pressures above and below atmospheric pressures (vacuum). It is also possible to use sensors made by other manufacturers by entering a variable analogue logarithmic or analogue linear characteristic ranging from 0 – 10 Volt. Operate all connected sensors in agreement with the information given in the corresponding Operating Instructions. 3.2 Suitable Sensors The following sensors can be operated with the GRAPHIX controller: Sensor Typ Anzeige THERMOVAC TTR81N TTR90 / TTR91 / TTR91N TTR96S / TTR96SN TTR211 / TTR216S TTR911 / TTR911N TTR916 / TTR916N TTR… (TTR?) TTR911N (RS232) TTR911N_D THERMOVAC TTR100 / TTR100S2 TTR101 / TTR101N TTR101S2 / TTR101S2N TTR… (TTR10X) TTR101N (RS232) TTR101N_D TTR200N (RS232) TTR200N IONIVAC ITR90 / ITR90N ITR200S / ITR200SN ITR200SL / ITR200SLN ITR… PENNINGVAC PTR81N PTR225 / PTR225N PTR225S / PTR225SN PTR237 / PTR237N PTR… (PTR?) PTR225N (RS232) PTR225N_D PENNINGVAC PTR82N PTR90 / PTR90N PTR… (PTR90?) PTR90N (RS232) PTR90N_D PTR200N (RS232) PTR200N CERAVAC CTR90 / CTR91 CTR100 / CTR100N CTR101 / CTR101N CTR… (CTR?) DU sensor DU200 / DU201 DU2000 / DU2001 DU… DU relative pressure sensor DU2001 rel. DUrel Further sensors Corresponding to characteristics CUSTOM Table 2 – Suitable sensors

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4. Technical Data 4.1 General Data 4.1.1 Mechanical Data Dimensions: Width: 106.4 mm (1/4 19“) Height: 128.4 mm (3 HU) Depth: 174.0 mm Mass: ≤ 1.7 kg Installation depth: ≤ 230 mm (including connected plug) Installation: Rack installation Front panel installation Benchtop instrument Figure 2 – Dimensions of the GRAPHIX controller (in mm)

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17 4.1.2 Default Parameters (factory defaults) Parameter Group Parameter Selection Channel 1 … 3 Sensor Type  TTR?  TTR10X  PTR?  PTR90?  CTR? Detection  Auto Sensor Name  no value Filter  Slow Gas Type  N2 Correction Factor  1.00 Emission  Auto Filament  Auto Offset On / Off  Off Offset Value  0.000 Sensor On  Manual Sensor Off  Manual Setpoints Channel  Off System Unit  mbar Key Sound  Off Error Relay  All Data Rate  38400 Com Port  RS232 Display Display Mode  Normal Resolution  Standard Brightness  Medium Logging Interval (s)  1 File Size (h)  24 Recorder Analog Mode  Log Channel  1 Chart Interval (s)  1 Channel 1  On Channel 2  On Channel 3  On Leak Test Interval (min)  10 Volume (l)  1.0 Channel  1 Language Language EN (English) Table 3 – Default parameters (factory defaults)

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4.1.3 Ambient Temperature: Storage: -20 – +60 °C Operating: +5 – +45 °C (sea level) +5 – +30 °C (2000 m above sea level) Relative atmospheric humidity: 80 % max. (up to 30 °C) decreasing to 50 % max. (over 40 °C) Use: indoors (altitude 2000 m max. above sea level) Ingress protection type: IP20 Contamination level: 2 4.1.4 Standards  Conformity with respect to Low Voltage Directive 2014/35/EU  Conformity with respect to EMC Directive 2014/30/EU  Conformity with respect to RoHS Directive 2011/65/EU International/national standards as well as specifications:  DIN EN 61010-1 (2011) (Safety requirements for electrical equipment for measurement, control and laboratory use).  DIN EN 61326-1 (2013) (Electrical equipment for measurement, control and laboratory use – EMC requirements. Industrial interference immunity; electromagnetic emissions household sector Class B). 4.2 Mains Power Connection Voltage: 100 – 240 VAC Frequency: 50/60 Hz Fuses: 2 x T1.6A H Power consumption: GRAPHIX ONE < 50 W GRAPHIX TWO < 70 W GRAPHIX THREE < 100 W Current consumption: 1.4 – 0.7 A max. Overvoltage category: II Protection class: 1 Connection: Cold-device plug IEC 320 C14

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19 4.3 Measurement Channels Number: GRAPHIX ONE 1 GRAPHIX TWO 2 GRAPHIX THREE 3 Connection: analogue sensors: RJ45 (FCC 68) IONIVAC, CERAVAC: SUB-D, 15-way, socket Suitable sensors: THERMOVAC TTR81N TTR90 / TTR91 / TTR91N TTR96S / TTR96SN TTR211 / TTR216S TTR911 / TTR911N TTR911N (RS232) TTR916 / TTR916N THERMOVAC TTR100 / TTR100S2 TTR101 / TTR101N TTR101S2 / TTR101S2N TTR101N (RS232) TTR200N (RS232) IONIVAC ITR90 / ITR90N ITR200S / ITR200SN ITR200SL / ITR200SLN PENNINGVAC PTR81N PTR225 / PTR225N PTR225S / PTR225SN PTR225N (RS232) PTR237 / PTR237N PENNINGVAC PTR82N PTR90 / PTR90N PTR90N (RS232) PTR200N (RS232) CERAVAC CTR90 / CTR91 CTR100 / CTR100N CTR101 / CTR101N DU sensor DU200 / DU201 DU2000 / DU2001 DU relative pressure sensor DU2001 rel. further sensors with 0 – 10 V characteristic CUSTOM 4.3.1 Sensor Powering Voltage: +24 VDC ±5 % Current: 500 mA (1000 mA briefly) Fusing: 1000 mA, self-resetting after switching the instrument off or pulling the sensor plug Power feeding complies with the requirements of a safety extra-low voltage (SELV-E in accordance with EN 61010).

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4.3.2 Measurement Technology Measurement ranges: Sensor dependent Measurement error: Gain error ≤ 0.02 % FS Offset error ≤ 0.05 % FS Measurement rate: Analogue ≥ 15 s-1 Digital ≥ 50 s-1 Display rate: 4 s-1 Filter time constant: Fast, Medium, Slow Unit of measurement: mbar, Torr, Pa, psi, Micron Correction options: Zero alignment for linear sensors correction factor 0.10 – 10.0 for logarithmic sensors A/D converter resolution: > 16 bit 4.4 TFT Touch Display Implementation: 3.5-in. TFT display with resistive touchscreen (glove operation is possible) Resolution: 320 x 240 pixels 4.5 Switching Functions / Relay Outputs 4.5.1 Relay Switching Functions Number: 6 Assignment: freely assignable Response time: < 50 ms Adjustment range: Sensor dependent Hysteresis: Adjustable ≥ 10 % of measured value of for sensors with a logarithmic characteristic; 0.1 % FS for sensors with a linear characteristic Contact type: Changeover contact, floating Load (resistive) Switched current: 1 A max. Switched voltage: 30 VAC / 30 VDC max. Service life: Mechanical: 5·106 switching cycles Electrical: 105 switching cycles at maximum load Connection: SUB-D, 25-way, plug 4.5.2 Error Signal Relay Number: 1 Response time: < 50 ms Contact type: Changeover contact, floating Load (resistive): Switched current: 1 A max. Switched voltage: 30 VAC / 30 VDC max. Service life: Mechanical: 5·106 switching cycles Electrical: 105 switching cycles at max. load Connection: SUB-D, 25-way, plug

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21 4.6 Outputs and Inputs 4.6.1 Analogue Output Number: 1 per measurement channel Voltage range: 0 – 10 VDC (limit values 0 – 10.5 VDC) Output voltage in case of error: 10.3 – 10.5 VDC Deviation of displayed value: ± 0.2 % Internal resistance: 100 Ohm Characteristic curve: Sensor dependent Response time: 100 ms approx. Resolution: 12 bit Connection: SUB-D, 9-way, plug (jointly used with external control connection) 4.6.2 Chart Recorder Output Number: 1 Voltage range: 0 – 10 VDC (limit values 0 – 10.5 VDC) Deviation of displayed value: ± 0.2 % Internal resistance: 100 Ohm Characteristic curve: Programmable Response time: 100 ms approx. Resolution: 12 bit Connection: SUB-D, 9-way, plug (shared with external control connection) 4.6.3 External Control Signal level: Low = 0 VDC High = 24 VDC Contact input via relay: 24 VDC approx., is provided by the instrument via a self-resetting fuse (100 mA) Connection: SUB-D, 9-way, plug (shared with external control connection) 4.6.4 Serial Interface 4.6.4.1 RS232 Standard: RS232 Parameters: 8 data bits, 1 stop bit, no parity, no protocol Signals: RXD and TXD Baud rate: 9600, 19200, 38400 Baud Connection: SUB-D, 9-way, socket (shared with RS485)

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4.6.4.2 RS485 Standard: RS485 (half duplex) Parameters: 8 data bits, 1 stop bit, no parity, no protocol Signals: A and B Baud rate: 9600, 19200, 38400 Baud Connection: SUB-D, 9-way, socket (shared with RS232) 4.6.5 USB-A Interface (front side) Connection: USB-A, socket NOTICE: Storage Media. For proper operation, we recommend that you use a USB memory stick compliant with USB standard 2.0 and a memory capacity of 1 – 4 GB.

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23 5. Installation 5.1 Supplied Equipment Designation Quantity GRAPHIX controller 1 Mains power cord with safety plug (EU) 1 Mains power cord with safety plug (US) 1 Operating Instructions (each EN and DE) 1 USB stick with operating instructions (multi-language) 1 Spare fuse 2 Collar screw 4 Plastic sleeve 4 Edge protection rubber 2 Rubber foot 2 Dust protection cap for USB socket 1 Table 4 – Supplied equipment 5.2 Mechanical Installation The GRAPHIX controller can be used as follows:  Rack installation  Front panel installation  Benchtop instrument WARNING: Powering down Install the instrument or place it so that you are in a position to operate the mains power switch at any time or ensure that the instrument can be deenergised at any time.

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5.2.1 Rack Installation The GRAPHIX controller has been designed for installation in a module rack in accordance with DIN 41 494 (19-in., 3 HU) ( Figure 3, page 24). For this, the delivery scope includes 4 collar screws and four plastic sleeves. Figure 3 – Rack installation  Affix the module rack.  Push the GRAPHIX controller into the module rack.  Affix the instrument in the module rack with the collar screws and plastic sleeves included in the delivery. 5.2.2 Front Panel Installation Installation in a front panel requires a cut-out as given below ( Figure 4, page 24): Figure 4 – Front panel cut-out (in mm)  Guide the GRAPHIX controller into the cut-out.  Affix the instrument to the sub-rack with the neck collar screws and the plastic sleeves included in the delivery.

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25 5.2.3 Benchtop Instrument When planning to use the GRAPHIX controller as a benchtop instrument, proceed as follows:  Push one of the two edge protection rubber pieces included in the delivery over the top edge of the front panel ( Figure 5, page 25)  Place the GRAPHIX controller on its back ( Figure 6, page 25)  Push the second edge protection rubber piece included in the delivery onto the bottom edge of the front panel WARNING: Risk of suffering injury. When using the GRAPHIX controller as a benchtop instrument fit the two edge protection rubber pieces onto the top and bottom edge of the front panel so as to avoid injury by sharp edges.  Stick the two rubber feet included in the delivery onto the bottom of the housing. Figure 5 – Preparing the top side of the instrument for utilisation as a benchtop unit Figure 6 – Preparing the bottom side of the instrument for utilisation as a benchtop unit  Turn the GRAPHIX controller over again and move it to the desired place.

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5.3 Connections 5.3.1 Rear of the Instrument Depicted in Figure 7, page 26 is the rear side of the GRAPHIX controller. The pin assignment of the different connectors is described in the following sections. Figure 7 – Rear of the instrument A Mains power connection with mains switch and instrument fuses B Earth connection C1/C2 Connection of measurement channel 1 for sensors (CH1 A and CH1 B) D1/D2 Connection of measurement channel 2 (for GRAPHIX TWO and THREE only) for sensors (CH2 A and CH2 B) E1/E2 Connection of measurement channel 3 (for GRAPHIX THREE only) for sensors (CH3 A and CH3 B) F Relay output connection (Relay Output) G Analogue output, chart recorder output and external control connection (Control) H RS232 or RS485 interface connection (RS232/RS485) 5.3.2 Mains Power Connection The mains connection on the rear side ( Figure 7, A, page 26) has been designed to accept a mains cord which on the instrument side is equipped with a cold-device plug. NOTICE: Mains cord Included in the delivery of the instrument is a mains cord. If the plug on the mains power side is not compatible with your mains power outlets, you will need a mains cord which meets the following specifications:  Three-wire cable with protective earthing.  Conductor cross-section: 3 x 0.75 mm² or greater.  Cable length 2.5 m maximum. DANGER: Mains voltage Appliances, which have not been professionally connected to Earth, can be life-threatening in the event of a malfunction. For this reason use three-wire mains cords, respectively extension cords with protective earthing only. Insert the mains plug into a mains power socket, which provides an Earth contact.  Insert the plug of the mains cord into the mains socket provided on the instrument.  Insert the mains plug of the mains cord into the mains outlet.

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27 5.3.3 Earthing Through the earthing screw ( Figure 7, B, page 26) the GRAPHIX controller is connected to the Earth connection on the vacuum chamber. NOTICE: Earthing Connect the Earth connection on the vacuum chamber by means of a protective earth conductor to the earthing screw on the instrument 5.3.4 Measurement Channel (CH1 … CH3) The connector marked Channel serves the purpose of connecting sensors. For each measurement channel two sockets connected in parallel are available: one each 8-way modular socket ( Figure 7, C1, D1, E1, page 26 and Figure 8, page 27) and a 15-way SUB-D- socket ( Figure 7, C2, D2, E2, page 26 and Figure 9, page 27). Figure 8 – Sensor connection (modular socket, 8-way) 1 +24 VDC 2 Ground 3 Signal 4 Identification resistor 5 Signal ground 6 Status 7 Not available 8 HV On Figure 9 – Sensor connection (SUB-D socket, 15-way) 1 Not available 2 Signal 3 Not available 4 HV On 5 Ground 6 Not available 7 Degas 8 +24 VDC 9 Not available 10 Identification resistor 11 +24 VDC 12 Signal ground 13 RXD 14 TXD 15 Ground CAUTION: Impermissible Sensors. Connecting sensors which have not been designed to be operated in connection with the GRAPHIX controller or which do not comply with current EMC guidelines can impair operation of the instrument or even damage it. Always operate the GRAPHIX controller with approved sensors.  Chapter 3.2 Suitable Sensors, page 15. CAUTION: Multiple Sensors. Only a single sensor may be connected to each measurement channel. Otherwise, the connected sensors will suffer damage. Connect to each measurement channel precisely one sensor only. Connecting: Measurement channel 1: Connect the sensor using a shielded straight through (1:1) cable to connector CH1 A or CH1 B. Measurement channel 2: Connect the sensor using a shielded straight through (1:1) cable to connector CH2 A or CH2 B (for two- and three-channel instruments only). Measurement channel 3: Connect the sensor using a shielded straight through (1:1) cable to connector CH3 A or CH3 B an (for three-channel instruments only).

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NOTICE: Sensor exchange. Switch the GRAPHIX controller off for the change of the configuration of the attached sensors (sensor exchange). 5.3.5 Relay Output Through the connector marked Relay Output ( Figure 7, F, page 26 and Figure 10, page 28) you may utilise the floating relay contacts for switching functions and for error monitoring. Figure 10 – Connection socket for relay output (SUB-D, 25-way) 1 Ground 2 Not available 3 Error NC 4 SP1 NC 5 SP1 COM 6 SP1 NO 7 Ground 8 SP2 NC 9 SP2 COM 10 SP2 NO 11 SP3 NC 12 SP3 COM 13 SP3 NO 14 Error NO 15 Error COM 16 SP4 NC 17 SP4 COM 18 SP4 NO 19 SP5 NC 20 SP5 COM 21 SP5 NO 22 SP6 NC 23 SP6 COM 24 SP6 NO 25 + 24 VDC, 200 mA Corresponds to the requirements of a protected safety extra-low voltage (SELV-E in accordance with EN 61010). COM Common NC Normally closed contact NO Normally open contact NOTICE: Contact 25 serves the purpose of powering relays with a higher switching capacity. The contact is protected by means of a PTC resistor limiting the maximum current to 200 mA. The PTC resistor is self-resetting when switching the instrument off or pulling the plug out of the socket marked Relay Output. DANGER: Dangerous voltage Voltages exceeding 60 VDC or 30 VAC are dangerous when touched. You may only switch at the connector marked Relay Output voltages of 30 VDC or 30 VAC with a maximum current of 1 A. The voltage must comply with the requirements of a safety extra-low voltage (SELV-E in accordance with EN 61010). Connecting:  Connect the peripheral components using a shielded connecting cable to the connector marked Relay Output on the rear of the GRAPHIX controller.

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29 5.3.6 Analogue Output, Chart Recorder Output and External Control (Control) The connector marked Control ( Figure 7, G, page 26 and Figure 11, page 29) provides the connections for the analogue outputs for the signals of the individual measurement channels, the chart recorder output (programmable analogue output ) as well as the inputs for externally controlling the IONIVAC sensors and PENNINGVAC sensors PTR81N, PTR225, PTR225N, PTR225S, PTR225SN, PTR237 and PTR237N. Figure 11 – Connection plug for analogue output, chart recorder output and external control (SUB-D, 15-way) 1 Analogue output CH1 2 Analogue output CH3 3 Analogue ground 4 HV On CH3 5 HV On CH1 6 Analogue output CH2 7 Chart recorder output 8 Analogue ground 9 HV On CH2 Connecting:  Connect the peripheral components using a shielded connecting cable to the connector marked Control on the rear of the GRAPHIX controller. 5.3.7 Interfaces RS232/RS485 (RS232/RS485) The connector marked RS232/RS485 ( Figure 7, H, page 26 and Figure 12, page 29) allows you to operate the instrument by means of a computer or a terminal. Figure 12 – Connection socket for interface (SUB-D, 9-way) 1 B (RS485) 2 TxD (RS232) 3 RxD (RS232) 4 Link to 6 5 Ground 6 Link to 4 7 Link to 8 8 Link to 7 9 A (RS485) Connecting:  Connect the serial interface of the computer using a shielded connecting cable to the connector marked RS232/RS485 on the rear of the GRAPHIX controller. WARNING: When using the RS232 interface, use a serial extension cable equipped with a 9-way plug and a 9-way socket. The cable must be of the straight through type. To utilise the RS485 interface, a special cable will be required.

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6. Operation 6.1 Front Panel Figure 13, page 30 depicts the front panel of the GRAPHIX controller. Figure 13 – Front panel A Graphic TFT touch display (resistive) B USB-A interface 6.1.1 USB-A Interface Located on the front of the instrument is an USB-A socket for connecting suitable USB storage media ( Chapter 4.6.5 USB-A Interface (front side), page 22) for recording data and software updating. 6.1.2 Display The GRAPHIX controller makes different display modes possible. You may select between the following display modes: Normal Default display mode, which provides all important information on the connected sensors. Chart Graphic display of the pressure history of the connected sensors. Besides the pressure history, also the measured values for the individual channels are displayed. Big The display is limited to displaying the measured values of the connected sensors using a large font.

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31 Speedo Pressure reading for the connected sensor of one selected channel is in the shape of a speedometer. The mantissa is displayed as a round progress, whereas the exponent is displayed centrally. Leak Test Display mode for the Leak Test function. Besides the leak rate, current pressure, total time and remaining time are displayed. The selection is made using the channel menu button ( Chapter 6.4.2.2 Changing Display Mode, page 41) or the parameter Display Mode in the parameter group Display of the main menu ( Chapter 7.4.1 Display Mode, page 84). 6.1.2.1 Display Mode – Normal The display mode Normal is the default display mode of the GRAPHIX controller. Here all important information on the connected sensors can be viewed at a glance. Figure 14 – Display mode Normal A Display field for measurement channel 1 B Display field for measurement channel 2 (GRAPHIX TWO and THREE only) C Display field for measurement channel 3 (GRAPHIX THREE only) Figure 15 – Display field for a measurement channel A Measurement channel B Sensor type (automatic detection) C Sensor name (can be entered freely) D Status or warning symbols E Display unit F Measured value or status message G Switching function status Measurement Channel For each measurement channel, a separate display field is provided ( Figure 14, A, B, C, page 31). Sensor Type The sensor type for the measurement channel is displayed on the left at the bottom of the display field ( Figure 15, B, page 31). The GRAPHIX controller will automatically detect the connected sensors or sensor groups of the respective measurement channel by means of an identification resistor.

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Sensor Name At the centre bottom area of the display field for the measurement channel, the sensor name ( Figure 15, C, page 31) is displayed. Through the main menu, you may describe the connected sensor in greater detail or label it by entering information as to where it is installed. Status or Warning Symbols At the right-hand bottom area of the display field for the measurement channel, the status or warning symbols ( Figure 15, D, page 31) are displayed. The status and warning symbols are explained in Table 7, page 38. Display Unit At the right-hand top area of the display field for the measurement channel, the unit of measurement is displayed directly after the measured value ( Figure 15, E, page 31). Through the main menu, you may select the unit of measurement. The unit of measurement is the same for all channels. Measured value or status message In the central upper area of the display field for the measurement channel, the measured value or a status message ( Figure 15, F, page 31) are displayed. In the case of linear sensors, negative measured values can be displayed depending on the measurement range or the zero adjustment. For further information, refer to the manual for the respective sensor. Switching Function Status In the left-hand upper area of the display field for the measurement channel, the status of the switching functions ( Figure 15, G, page 31) is displayed. When the yellow triangle comes on above the number, then the pressure is higher than the switching threshold. The switching threshold is not yet active. When the green triangle under the number comes on, then the pressure is lower than the switching threshold. The switching threshold is still active. Through the main menu, you may configure the switching functions. The entry range for the values will depend on the connected sensor. The switching functions can be freely assigned to the channels. Only those switching thresholds, which have been assigned to the channel, are displayed.

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33 6.1.2.2 Display Mode – Chart The display mode Chart allows you to graphically display the pressure history of the connected sensors by way of a chart. Here in the chart the y-axis (pressure in the preselected unit of measurement) is scaled automatically. The scale for the x-axis (time) defaults to the scale 1:1. Through the buttons and you may change the scale in steps of 1:2, 1:4 or 1:8. Besides the pressure history, also the measured values or status messages for the individual channels are displayed. Error messages are shown in red font. If a notice is present for the attached sensor, the measured value is presented in yellow font. Figure 16 – Display mode Chart A Measured value or status message for channel 1 B Measured value or status message for channel 2 (GRAPHIX TWO and THREE only) C Measured value or status message for channel 3 (GRAPHIX THREE only) D Pressure in the selected unit of measurement (automatic scaling) E Scaling option for timescale (Default scale = 1:1, scale 1:2, 1:4 or 1:8 selectable through buttons or F Pressure history for the active channels G Time scale 6.1.2.3 Display Mode – Big The display mode Big is limited to displaying the measured values or a status message for the connected sensors. Measured value or status message are displayed in a larger font. Error messages are shown in red font. If a notice is present for the attached sensor, the measured value is presented in yellow font. Figure 17 – Display mode Big A Display field for measurement channel 1 B Display field for measurement channel 2 (GRAPHIX TWO and THREE only) C Display field for measurement channel 3 (GRAPHIX THREE only) D Measured value or status message for channel 1 E Measured value or status message for channel 2 (GRAPHIX TWO and THREE only) F Measured value or status message for channel 3 (GRAPHIX THREE only)

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6.1.2.4 Display Mode Speedo The display mode Speedo allows you to display the measured value in the shape of a speedometer. The mantissa is displayed as a round progress, whereas the exponent and the display unit are displayed centrally. Additionally, measured values and status messages of the sensors connected to the other channels are displayed at the bottom. If an error occurs, the warning symbol appears at the right-hand top area of the display field. In case of a notice the warning symbol appears. Error messages for the other channels are shown in red font. If a notice is present, the measured value is presented in yellow font. Figure 18 – Display mode Speedo A Display field for measurement channel B Mantissa of the measured value as progress C Exponent of the measured value or warning symbol D Display unit E Measured value or status message for one further channel (GRAPHIX TWO and THREE only) F Measured value or status message for one further channel (GRAPHIX THREE only) G Warning symbol 6.1.2.5 Display Mode Leak Test The display mode Leak Test allows you to display the leak rate determination using pressure rise method. Besides the current, last and next-to-last leak rate, current pressure, total time since start of the procedure and remaining time for the current interval are displayed. Error messages are shown instead of the current pressure in red font. If a notice is present for the connected sensor, the current pressure is presented in yellow font. Figure 19 – Display mode Leak Test A Display field for measurement channel B Currently determined leak rate C Last determined leak rate D Next-to-last determined leak rate E Currently measured pressure or status message F Total time since start of the procedure [hh:mm:ss] G Remaining time for current interval [hh:mm:ss]

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35 6.1.3 Controls The GRAPHIX controller is operated through the buttons displayed on the graphic TFT touch display. Since this is a resistive type of touchpanel, entries are possible even when using gloves. Main Menu Buttons Pressing the touchscreen for a duration of approximately 1 second displays the main menu ( Figure 20 and Figure 21, page 35). You can also use the display mode selection window ( Chapter 6.4.2.2 Changing Display Mode, page 41). Here you may access different parameters and instrument functions. These have been arranged by way of parameter groups within which you can view or change the corresponding parameters or enable functions. In this way, you may configure your GRAPHIX controller and also utilise further functions offered by the instrument. Channel Menu Buttons Briefly touching the desired channel invokes the channel menu ( Figure 22, page 35) of the respective channel. Here you can control the sensor connected to the respective channel. The available setup options depend on the connected type of sensor. Moreover, you can change in the channel menu the display mode from Measured values display Normal to Chart. Figure 20 – Main menu 1/2 Figure 21 – Main menu 2/2 Figure 22 – Channel menu (example)  To select, tap the centre of the buttons or symbols. NOTICE: The touchscreen is capable of processing only one input at a time. It is not permissible to simultaneously tap the touchscreen at several points since then no defined control will be possible.

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6.1.4 Symbols 6.1.4.1 Symbols for the Controls Symbol Designation Explanation Next Next menu page Previous Previous menu page Up Scroll upward in the selection list Down Scroll downward in the selection list Return Return to the previous display OK Accept / confirm Configuration Start the main menu Display Mode Change display mode Normal Enabling display mode Normal Big Enabling display mode Big Chart Enabling display mode Chart Leak Test Enabling display mode Leak Test Speedo Channel 1 Enabling display mode Speedo for channel 1 Speedo Channel 2 Enabling display mode Speedo for channel 2 Speedo Channel 3 Enabling display mode Speedo for channel 3 Scale up Zoom out time scale Scale down Zoom in time scale Start Start a function ■ Stop Stop a function HV On Switch high vacuum measurement circuit on HV Off Switch high vacuum measurement circuit off

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37 Symbol (continued) Designation Explanation HV On/Off n.a. It is not possible to turn on or off the high vacuum measurement circuit manually because of parameter settings. Degas On Switch degas on Degas Off Switch degas off Help Start help for current function or operation of the instrument Table 5 – Symbols for the controls 6.1.4.2 Symbols for the Language Selection Symbol Designation Explanation Language selection Start language selection menu English Select menu language EN (English) German Select menu language DE (German) Chinese Select menu language CN (Chinese) French Select menu language FR (French) Italian Select menu language IT (Italian) Japanese Select menu language JP (Japanese) Spanish Select menu language ES (Spanish) Korean Select menu language KN (Korean) Russian Select menu language RU (Russian) Polish Select menu language PL (Polish) Turkish Select menu language TR (Turkish) Table 6 – Symbols for language selection

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6.1.4.3 Status and Warning Symbols Symbol Designation Explanation Status Calibration Factor Gas type correction factor differs from 1 Status Offset Offset differs from 0 Status HV On PENNINGVAC sensor is on Status HV 1 On Filament 1 of the IONIVAC sensor is on Status HV 2 On Filament 2 of the IONIVAC sensor is on Status Degas Degassing is active Notice Sensor status indicates “Notice” Error Sensor status indicates “Error” SP Off Switching threshold disabled (pressure high) SP On Switching threshold enabled (pressure low) Table 7 – Status indicating and warning symbols

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39 6.2 Switching ON and OFF 6.2.1 Switching ON  Switch the instrument on through its main switch. After switching on, the GRAPHIX controller will run the following:  Display of the start screen with the version number.  Re-establishing of the most recently setup parameters.  Identification of the connected measuring instruments.  Enabling of the measurement mode in the display mode specified in the parameter group (depending on the most recent setting). 6.2.2 Switching OFF  Switch the instrument off through its main switch. CAUTION: Waiting Time Wait for at least five seconds before switching the instrument on again. 6.3 Operating Modes The GRAPHIX controller can be run in one of the following operating modes: Measurement Mode The Measurement mode is the default operating mode. Here the measured values of the sensors are displayed in the display modes Normal, Chart, Big, Speedo or Leak Test. In the case of an error, a status message is output instead and/or a symbol is displayed. Further symbols are used to indicate the status of different operating and/or error modes of the sensors. Parameter and Function Mode In the parameter and function mode, you may access through the main menu different parameters and instrument functions. These have been arranged in parameter groups within which you may view or change the corresponding parameters or enable specific functions. In this way, you may configure your GRAPHIX controller and utilise further functions offered by the instrument.

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6.4 Measurement Mode 6.4.1 Description The measurement mode is the default operating mode. Here the measured values of the sensors are displayed in the different display modes. Additionally status messages ( Table 8, page 40) and/or error messages ( Table 74, page 111) can be displayed. Display Explanation .... No sensor connected. FS? Full Scale? Connected analogue CERAVAC sensor has not been specified. Make a selection, in order to specify the sensor. S-OFF High vacuum measurement circuit of the PENNINGVAC sensors PTR81N, PTR225, TR225N, PTR225S, PTR225SN, PTR237 or PTR237N has been switched off. Measuring value Connected sensor is identified and in specified measuring range. Measuring value and additional warning symbol in the display mode Normal and Speedo or Measuring value displayed by a yellow font in the display modes Chart, Big and Leak Test as well as for the other channels in the display mode Speedo Description depends on the connected sensor:  Pirani adjustment of the connected IONIVAC sensor of ITR90 series is insufficient.  Filament 1 of the connected IONIVAC sensor of ITR200 series is defective.  Connected CERAVAC sensor of CTR101 series is in the heating phase. Table 8 – Status messages in the measured values display After switching on, the GRAPHIX controller will automatically resume the last measurement display mode, which was selected. When running the main menu and not making an entry for more than 60 seconds, then the instrument will revert back to the measured values display. 6.4.2 Button Functions 6.4.2.1 Invoking the Help Function  Invoke the channel menu by briefly tapping on the desired channel.  Tap on the button . o The help function starts. Figure 23 – Invoking the Help function  To exit the help function tap on the button .

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41 6.4.2.2 Changing Display Mode  Invoke the channel menu by briefly tapping on the desired channel in the display modes Normal, Big or Leak Test.  Tap on button . o The selection of display modes starts.  Tap on display window in the display modes Chart or Speedo. o The selection of display modes starts. Figure 24 – Changing display mode  For choosing display mode Chart tap on button . o Display mode Chart starts.  For choosing display mode Normal tap on button . o Display mode Normal starts.  For choosing display mode Big tap on button . o Display mode Big starts.  For choosing display mode Speedo Channel 1 tap on button . o Display mode Speedo Channel 1 starts.  For choosing display mode Speedo Channel 2 tap on button . o Display mode Speedo Channel 2 starts.  For choosing display mode Speedo Channel 3 tap on button . o Display mode Speedo Channel 3 starts.  For choosing display mode Leak Test tap on button . o Display mode Leak Test starts.  For choosing parameter and function mode tap on button . o Main menu starts. NOTICE: After turning it off and on again, the GRAPHIX Controller returns back to the display mode specified in the parameter group Display.

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6.4.2.3 Switching the High Vacuum Measurement Circuit On For the PENNINGVAC sensors PTR81N, PTR225, PTR225N, PTR225S, PTR225SN, PTR237 and PTR237N, the high vacuum measurement circuit can be switched on manually. For this, the parameter Sensor on in parameter group Channel 1 … 3 must be set to Manual ( Chapter 7.1.13 Sensor Switch-on Type (Sensor On), page 72).  Invoke the channel menu by briefly tapping on the desired channel.  Tap on the button . o The high vacuum measurement circuit is enabled. In the display field for the corresponding measurement channel the yellow status symbol will come on. Figure 25 – Switching the high vacuum measurement circuit on 6.4.2.4 Switching the High Vacuum Measurement Circuit Off For the PENNINGVAC sensors PTR81N, PTR225, PTR225N, PTR225S, PTR225SN, PTR237 and PTR237N, the high vacuum measurement circuit can be switched off manually. For this, the parameter Sensor off in parameter group Channel 1 … 3 must be set to Manual ( Chapter 7.1.15 Sensor Switch-off Type (Sensor Off), page 73).  Invoke the channel menu by briefly tapping on the desired channel.  Tap on the button . o The high vacuum measurement circuit is disabled. In the display field for the corresponding measurement channel the yellow status symbol will turned off. Figure 26 – Switching the high vacuum measurement circuit off

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43 6.4.2.5 Switching the Emission On For the IONIVAC sensors of ITR200 series, the emission can be switched on manually. For this, the parameter Emission in parameter group Channel 1 … 3 must be set to Manual ( Chapter 7.1.7 Emission Switching On and Switching Off Type (Emission), page 69).  Invoke the channel menu by briefly tapping on the desired channel.  Tap on the button . o The emission is enabled. In the display field for the corresponding measurement channel the yellow status symbol or will come on depending on the active filament. Figure 27 – Switching the emission on 6.4.2.6 Switching the Emission Off For the IONIVAC sensors of ITR200 series, the emission can be switched off manually anytime, independent of the settings of the parameter Emission in the parameter group channel 1 … 3.  Invoke the channel menu by briefly tapping on the desired channel.  Tap on the button . o The emission is disabled. In the display field for the corresponding measurement channel the yellow status symbol or will turn off depending on the active filament. Figure 28 – Switching the emission off

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6.4.2.7 Switching the Degas Function On For the IONIVAC sensors of ITR90 series and ITR200 series the degas function can be switched on manually. This requires that the emission has been enabled and that the sensor is operating within a pressure range permissible for running the degas function ( See sensor manual). In the display field for the corresponding measurement channel the yellow status symbol or must be on, depending on the active filament.  Invoke the channel menu by briefly tapping on the desired channel.  Tap on the button . o The degas function is enabled. For the corresponding measurement channel, the yellow status symbol will come on. Figure 29 – Switching the degas function On 6.4.2.8 Switching the Degas Function Off For the IONIVAC sensors of ITR90 series and ITR200 series the degas function can be switched off manually.  Invoke the channel menu by briefly tapping on the desired channel.  Tap on the button . o The degas function is disabled. In the display field for the corresponding measurement channel the yellow status symbol will turn off. Figure 30 – Switching the degas function Off

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45 6.4.2.9 Starting the Leak Test Function The leak test function can be started manually in the display mode Leak Test.  Invoke the channel menu by briefly tapping on the display window.  Tap on the button . o The leak test function starts. Figure 31 – Starting Leak Test  The procedure is canceled automatically, if it comes to an error message.  Eliminate the malfunction.  Invoke the channel menu by briefly tapping on the display window.  Acknowledge the elimination of malfunction by tapping on the button . o The leak test function can be started new. 6.4.2.10 Stopping the Leak Test Function The leak test function can be stopped manually in the display mode Leak Test.  Invoke the channel menu by briefly tapping on the display window.  Tap on the button . o The leak test function stops. Figure 32 – Stopping Leak Test

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6.5 Parameter and Function Mode In the parameter and function mode, you may access through the main menu different parameters and instrument functions. These have been arranged in parameter groups within which you may view or change the corresponding parameters or enable specific functions. In this way, you may configure your GRAPHIX controller and utilise further functions offered by the instrument. 6.5.1 Operating Concept  In the measurement mode, touch the touchscreen surface for approximately 1 second. o You will now see the main menu with an overview of the parameter groups.  To scroll, use the buttons and . o You will then see the each case preceding or following page. In the upper area of the display field, you can see which page is just being displayed.  To exit the parameter and function mode tap on the button . o The instrument will now be running the measurement mode again. Figure 33 – Parameter groups in the main menu Figure 34 – Parameters of a parameter group  In the main menu, tap on the desired parameter group in order to display the parameters of this parameter group, to change these or enable specific functions. o The parameters or functions available for this parameter group are displayed.  To scroll use the buttons and o You will then see the each case preceding or following page. In the upper area of the display field, you can see which page is just being displayed.  To exit the parameter and function mode tap on the button . o The instrument will now display the main menu again.  Tap on the entry window on the right beside the name of the parameter to change the value of this parameter or to start or terminate specific functions.  Depending on the parameter, there are different ways for displaying and changing it. NOTICE: When the instrument is running in the parameter and function mode, and when not entering a change for more than 60 seconds, then the instrument will automatically return back to the measurement mode. Any changes, which have been entered and confirmed up to this point of time, are automatically saved in the EEPROM.

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47 Entering Values or Text  Enter the value by way of numbers or characters. o The entered value is displayed in the upper area of the display field.  To delete the entire value, tap on the button CLR. o The displayed value is deleted.  To delete the character, which was entered last, tap on the button DEL. o The last character is deleted.  To save and accept, tap on the button OK. o The entered value is saved. o The parameter selection display is displayed once more.  To exit it without saving, tap on the button ESC. o The initially set up value is retained. o The parameter selection display is displayed once more. Figure 35 – Values entry field Figure 36 – Text entry field Selection List  To select in the list, use the buttons and or enter the value directly. o The each case selected value is displayed with a green background.  To save, tap on the button . o The entered value is saved.  To accept, tap on the button . o The parameter selection display is displayed once more. Figure 37 – Selection list

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6.5.2 Parameter Groups In the parameter and function mode, you may access via the main menu all available parameters depend on the number of channels and the connected sensor. You may view or change these parameters. In this way, you may configure your GRAPHIX controller. Depicted in Table 9, page 52 are all parameters available by the instrument. Parameter Group Parameter Selection Channel 1 … 3 Sensor Type  TTR?  TTR81N  TTR90  TTR91  TTR91N  TTR96  TTR96N  TTR211  TTR216  TTR911  TTR911N  TTR916  TTR916N  TTR10X  TTR100  TTR101  TTR101N  PTR?  PTR81N  PTR225  PTR225N  PTR237  PTR237N  PTR90?  PTR82N  PTR90  PTR90N  CTR?  CTR90-0.1  CTR90-1  CTR90-10  CTR90-20  CTR90-100  CTR90-1000  CTR91-0.1  CTR91-1  CTR91-10  CTR91-20  CTR91-100  CTR91-1000  CTR100/N-0.1  CTR100/N-1  CTR100/N-10  CTR100/N-20  CTR100/N-100  CTR100/N-1000

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49 Parameter Group (continued) Parameter Selection Channel 1 … 3 Sensor Type  CTR101/N-0.1  CTR101/N-1  CTR101/N-10  CTR101/N-20  CTR101/N-100  CTR101/N-1000 Detection  Auto  Manual Sensor Name  Text entry Filter  Fast  Medium  Slow Gas Type  N2  Ar  H2  Cor Correction Factor  Entry of values Emission  Auto  Manual Filament  Auto  Filament 1  Filament 2 Offset On / Off  Off  On Offset Value  Entry of values Take Current Pressure Set Zero Adjust Set Sensor On  Manual  External  Hot  Channel 1  Channel 2  Channel 3 T-On  Entry of values (display unit) Sensor Off  Manual  External  Self  Channel 1  Channel 2  Channel 3 T-Off  Entry of values (display unit) Curve Type  Analog Lin  Analog Log U-Start  Entry of values (Volt) p-Start  Entry of values (display unit) U-End  Entry of values (Volt) p-End  Entry of values (display unit) F-Start  Entry of values (Volt) F-End  Entry of values (Volt)

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Parameter Group (continued) Parameter Selection Setpoints Channel  Off  1  2  3 SP-On  Entry of values (display unit) SP-Off  Entry of values (display unit) System Unit  mbar  Torr  Pa  psi  Micron Key Tone  Off  On Error Relay  All  Only Device  Channel 1 & Device  Channel 2 & Device  Channel 3 & Device  All N.C.  Only Device N.C.  Channel 1 & Device N.C.  Channel 2 & Device N.C.  Channel 3 & Device N.C. Data Rate  9600  19200  38400 Com Port  RS232  RS485  Center Address  Entry of values Time  Entry of values (hh:mm:ss) Date  Entry of values (YYYY-MM-DD) System Information Display Display Mode  Normal  Big  Chart  Leak Test  Speedo Channel 1  Speedo Channel 2  Speedo Channel 3 Resolution  Standard  High Brightness  Low  Medium  High Logging Interval (s)  Entry of values (seconds) File Size (h)  Entry of values (hours) Enable / Disable Logging  ►  ■

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51 Parameter group (continued) Parameter Selection Recorder Analog Mode  Log  Log A  Log -6  Log -3  Log +0  Log +3  LogC1  LogC2  LogC3 Recorder Analog Mode  Lin -10  Lin -9  Lin -8  Lin -7  Lin -6  Lin -5  Lin -4  Lin -3  Lin -2  Lin -1  Lin +0  Lin +1  Lin +2  Lin +3  IM221  LogC4  PM411 Channel  1  2  3 Chart Interval (s)  Entry of values (in seconds) Channel 1  Off  On Channel 2  Off  On Channel 3  Off  On Leak Test Interval (min)  Entry of values (Minutes) Volume (l)  Entry of values (Liter) Channel  1  2  3 Language Language EN (English) DE (German) CN (Chinese) FR (French) IT (Italian) JP (Japanese) ES (Spanish) KR (Korean) RU (Russian) PL (Polish) TR (Turkish)

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Parameter group (continued) Parameter Selection Configuration Save Data  Save Data Restore Data  Restore Data Factory Setup  Reset Data Update Start Update  Start Update Error Log Read Error Log (Error 1 – 20) Table 9 – Parameter groups and corresponding parameters

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53 7. Parameters 7.1 Channel 1 … 3 For each measurement channel there is a separate set of sensor parameters. Depending on which sensor is connected to the respective measurement channel, different parameters will be available ( Table 10 to Table 17, page 53 to 55). The parameters available for the respective sensor are marked in the table through the symbol . For more details on the selection and set up options for the individual sensor parameters see Chapter 7.1.1 Sensor Type to 7.1.17 Entering the Characteristics for Further Sensors, page 56 to 73. Sensor Sensor type Detection Sensor Name Filter Gas Type Correction Factor Emission Filament Offset On / Off Offset Value Take Current Pressure Zero Adjust Sensor on T-On Sensor off T-Off TTR81N       TTR90       TTR91       TTR91N       TTR96       TTR96N       TTR211       TTR216       TTR911       TTR911N       TTR911N (RS232)       TTR916       TTR916N       Table 10 – Available sensor parameters for THERMOVAC sensors Sensor Sensor type Detection Sensor Name Filter Gas Type Correction Factor Emission Filament Offset On / Off Offset Value Take Current Pressure Zero Adjust Sensor on T-On Sensor off T-Off TTR100       TTR101       TTR101N       TTR101N (RS232)       TTR200N (RS232)       Table 11 – Available sensor parameters for THERMOVAC sensors (combination sensors)

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Sensor Sensor type Detection Sensor Name Filter Gas Type Correction Factor Emission Filament Offset On / Off Offset Value Take Current Pressure Zero Adjust Sensor on T-On Sensor off T-Off ITR90/N     ITR200/N       Table 12 – Available sensor parameters for IONIVAC sensors (combination sensors) Sensor Sensor type Detection Sensor Name Filter Gas Type Correction Factor Emission Filament Offset On / Off Offset Value Take Current Pressure Zero Adjust Sensor on T-On Sensor off T-Off PTR81N          PTR225          PTR225N          PTR225N (RS232)          PTR237          PTR237N          Table 13 – Available sensor parameters for PENNINGVAC sensors Sensor Sensor type Detection Sensor Name Filter Gas Type Correction Factor Emission Filament Offset On / Off Offset Value Take Current Pressure Zero Adjust Sensor on T-On Sensor off T-Off PTR82N      PTR90      PTR90N      PTR90N (RS232)      PTR200N (RS232)      Table 14 – Available sensor parameters for PENNINGVAC sensors (combination sensors) Sensor Sensor type Detection Sensor Name Filter Gas Type Correction Factor Emission Filament Offset On / Off Offset Value Take Current Pressure Zero Adjust Sensor on T-On Sensor off T-Off CTR90-0.1        CTR90-1        CTR90-10        CTR90-20        CTR90-100        CTR90-1000        CTR91-0.1        CTR91-1        CTR91-10       

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55 Sensor (continued) Sensor type Detection Sensor Name Filter Gas Type Correction Factor Emission Filament Offset On / Off Offset Value Take Current Pressure Zero Adjust Sensor on T-On Sensor off T-Off CTR91-20        CTR91-100        CTR91-1000        CTR100/N-0.1         CTR100/N-1         CTR100/N-10         CTR100/N-20         CTR100/N-100         CTR100/N-1000         CTR101/N-0.1         CTR101/N-1         CTR101/N-10         CTR101/N-20         CTR101/N-100         CTR101/N-1000         Table 15 – Available sensor parameters for CERAVAC sensors Sensor Sensor type Detection Sensor Name Filter Gas Type Correction Factor Emission Filament Offset On / Off Offset Value Take Current Pressure Zero Adjust Sensor on T-On Sensor off T-Off DU200       DU201       DU2000       DU2001       DU2001 rel.       Table 16 – Available sensor parameters for DU sensors Sensor Sensor type Detection Sensor Name Filter Gas Type Correction Factor … … … Curve Type U-Start p-Start U-End p-End F-Start F-End Further sensors            Table 17 – Available sensor parameters for further sensors

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7.1.1 Sensor Type The parameter Sensor Type displays the type designation of the connected sensor. The type of sensor is detected through the identification resistor in the connected sensor in the case of automatic sensor detection or by entering the sensor type in the case of manual sensor detection. NOTICE: THERMOVAC sensors have depending on the type different measurement and display ranges. During first-time commissioning, only a default measurement range of 1000 to 5.00e-04 mbar is displayed. The sensor type TTR? or TTR10X will be displayed automatically. For full utilisation of the sensor type, dependent measurement and display range specify the type ( Chapter 7.1.1.1 Specifying the Sensor Type for THERMOVAC Sensors, page 57). NOTICE: PENNINGVAC sensors have depending on the type different measurement and display ranges. During first-time commissioning, only a default measurement range of 5.00e-02 to 1.00e-09 mbar for the types PTR81N, PTR225, PTR225N, PTR225S, PTR225SN, PTR237 and PTR237N is displayed. The sensor type PTR? will be displayed automatically. For the types PTR82N, PTR90 and PTR90N a default measurement range of 1000 – 1.00e-08 mbar is displayed. The sensor type PTR90? will be displayed automatically. For full utilisation of the sensor type, dependent measurement and display range specify the type ( Chapter 7.1.1.2 Specifying the Sensor Type for PENNINGVAC Sensors, page 61). NOTICE: CERAVAC sensors have different measurement ranges. When connecting the sensors of CTR100 series and CTR101 series through the connectors C2, D2 and E2 on the rear of the instrument ( Figure 7, page 26) these are automatically detected. During first-time commissioning of the sensors through the connections C1, D1 and E1 on the rear of the instrument ( Figure 7, page 26) the user is requested to specify the measurement range. Specify the sensor type ( Chapter 7.1.1.3 Specifying the Sensor Type for CERAVAC Sensors, page 65). The sensor type is displayed in the left bottom area of the display field for the measurement channel ( Figure 15, B, page 31).

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57 7.1.1.1 Specifying the Sensor Type for THERMOVAC Sensors Sensor Type TTR? When connecting the following THERMOVAC sensors then during first-time commissioning TTR? is displayed as the sensor type in the left bottom area of the display field for the measurement channel:  TTR81N  TTR90  TTR91  TTR91N  TTR96S  TTR96SN  TTR211  TTR216S  TTR911  TTR911N  TTR916  TTR916N Figure 38 – Display of sensor type TTR? To specify the connected sensor proceed as follows:  Press in the measurement mode the touchscreen surface for approximately 1 second. o The main menu with an overview of the parameter groups is displayed. Figure 39 – Opening the main menu  Tap in the main menu on the parameter group of the desired channel. o The parameters available for this parameter group are displayed. Figure 40 – Selection of parameter group Channel

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 Tap on the entry window on the right beside the parameter Sensor type to change the value of this parameter. o The selection list with different sensor types opens. Figure 41 – Selection of parameter Sensor Type  To select from the list, use the buttons and or enter the value for the desired sensor directly. o The in each case selected value is displayed with a green background.  To save, tap the button .  The setup value is saved.  To exit, tap the button . o The parameter selection display is displayed again. Figure 42 – Selection of the desired sensor  To exit the parameter selection display, tap the button . o The main menu with an overview of the parameter groups is displayed again.  To exit the main menu, tap the button . o Now the previously selected measured values display mode of the measurement mode is displayed. o As sensor type, the selected sensor is displayed in the left bottom area of the display field of the measurement channel. Figure 43 – Display of selected sensor type

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59 Sensor Type TTR10X When connecting the following THERMOVAC sensors, then during first-time commissioning TTR10X is displayed as the sensor type in the left bottom area of the display field for the measurement channel:  TTR100  TTR100S2  TTR101  TTR101N  TTR101S2  TTR101S2N Figure 44 – Display of sensor type TTR10X To specify the connected sensor proceed as follows:  Press in the measurement mode the touchscreen surface for approximately 1 second. o The main menu with an overview of the parameter groups is displayed. Figure 45 – Opening the main menu  Tap in the main menu on the parameter group of the desired channel. o The parameters available for this parameter group are displayed. Figure 46 – Selection of the parameter group Channel

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 Tap on the entry window on the right beside the parameter Sensor type to change the value of this parameter. o The selection list with different sensor types opens. Figure 47 – Selection of parameter Sensor Type  To select from the list, use the buttons and or enter the value for the desired sensor directly. o The in each case selected value is displayed with a green background.  To save, tap the button .  The setup value is saved.  To exit, tap the button . o The parameter selection display is displayed again. Figure 48 – Selection of desired sensor  To exit the parameter selection display, tap the button . o The main menu with an overview of the parameter groups is displayed again.  To exit the main menu, tap the button . o Now the previously selected measured values display mode of the measurement mode is displayed. o As sensor type, the selected sensor is displayed in the left bottom area of the display field of the measurement channel. Figure 49 – Display of selected sensor type

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61 7.1.1.2 Specifying the Sensor Type for PENNINGVAC Sensors Sensor Type PTR? When connecting the following PENNINGVAC sensors then during first-time commissioning PTR? is displayed as the sensor type in the left bottom area of the display field for the measurement channel:  PTR81N  PTR225  PTR225N  PTR225S  PTR225SN  PTR237  PTR237N Figure 50 – Display of sensor type PTR? To specify the connected sensor proceed as follows:  Press in the measurement mode the touchscreen surface for approximately 1 second. o The main menu with an overview of the parameter groups is displayed. Figure 51 – Opening the main menu  Tap in the main menu on the parameter group of the desired channel. o The parameters available for this parameter group are displayed. Figure 52 – Selection of parameter group Channel

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 Tap on the entry window on the right beside the parameter Sensor type to change the value of this parameter. o The selection list with different sensor types opens. Figure 53 – Selection of parameter Sensor Type  To select from the list, use the buttons and or enter the value for the desired sensor directly. o The in each case selected value is displayed with a green background.  To save, tap the button .  The setup value is saved.  To exit, tap the button . o The parameter selection display is displayed again. Figure 54 – Selection of the desired sensor  To exit the parameter selection display, tap the button . o The main menu with an overview of the parameter groups is displayed again.  To exit the main menu, tap the button . o Now the previously selected measured values display mode of the measurement mode is displayed. o As sensor type, the selected sensor is displayed in the left bottom area of the display field of the measurement channel. Figure 55 – Display of selected sensor type

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63 Sensor Type PTR90? When connecting the following PENNINGVAC sensors, then during first-time commissioning PTR90? is displayed as the sensor type in the left bottom area of the display field for the measurement channel:  PTR82N  PTR90  PTR90N Figure 56 – Display of sensor type PTR90? To specify the connected sensor proceed as follows:  Press in the measurement mode the touchscreen surface for approximately 1 second. o The main menu with an overview of the parameter groups is displayed. Figure 57 – Opening the main menu  Tap in the main menu on the parameter group of the desired channel. o The parameters available for this parameter group are displayed. Figure 58 – Selection of the parameter group Channel

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 Tap on the entry window on the right beside the parameter Sensor type to change the value of this parameter. o The selection list with different sensor types opens. Figure 59 – Selection of parameter Sensor Type  To select from the list, use the buttons and or enter the value for the desired sensor directly. o The in each case selected value is displayed with a green background.  To save, tap the button .  The setup value is saved.  To exit, tap the button . o The parameter selection display is displayed again. Figure 60 – Selection of desired sensor  To exit the parameter selection display, tap the button . o The main menu with an overview of the parameter groups is displayed again.  To exit the main menu, tap the button . o Now the previously selected measured values display mode of the measurement mode is displayed. o As sensor type, the selected sensor is displayed in the left bottom area of the display field of the measurement channel. Figure 61 – Display of selected sensor type

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65 7.1.1.3 Specifying the Sensor Type for CERAVAC Sensors When connecting all CERAVAC sensors ( Chapter 3.2 Suitable Sensors, page 15) through the connections C1, D1 and E1 on the rear of the instrument ( Figure 7, page 26) then during first-time commissioning the status message Range? and as sensor type CTR? is displayed in the left bottom area of the display field for the measurement channel. Also when connecting the following CERAVAC sensors through connections C2, D2 and E2 on the rear of the instrument ( Figure 7, page 26), then during first-time commissioning the status message Range? and as sensor type CTR? is displayed in the left bottom area of the display field for the measurement channel:  CTR90-0.1Torr  CTR90-1Torr  CTR90-10Torr  CTR90-20Torr  CTR90-100Torr  CTR90-1000Torr  CTR91-0.1Torr  CTR91-1Torr  CTR91-10Torr  CTR91-20Torr  CTR91-100Torr  CTR91-1000Torr Figure 62 – Display of sensor type CTR? To specify the connected sensor proceed as follows:  Press in the measurement mode the touchscreen surface for approximately 1 second. o The main menu with an overview of the parameter groups is displayed. Figure 63 – Opening the main menu  Tap in the main menu on the parameter group of the desired channel. o The parameters available for this parameter group are displayed. Figure 64 – Selection of parameter group Channel

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 Tap on the entry window on the right beside the parameter Sensor type to change the value of this parameter. o The selection list with different sensor types opens. Figure 65 – Selection of parameter Sensor Type  To select from the list, use the buttons and or enter the value for the desired sensor directly. o The in each case selected value is displayed with a green background.  To save, tap the button .  The setup value is saved.  To exit, tap the button . o The parameter selection display is displayed again. Figure 66 – Selection of desired sensor  To exit the parameter selection display, tap the button . o The main menu with an overview of the parameter groups is displayed again.  To exit the main menu, tap the button . o Now the previously selected measured values display mode of the measurement mode is displayed. o As sensor type, the selected sensor is displayed in the left bottom area of the display field of the measurement channel. Figure 67 – Display of selected sensor type

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67 7.1.2 Sensor Detection (Detection) Through the parameter Sensor detection (Detection) you may define in which way the sensor type shall be detected. Auto Automatic. The detection is effected automatically through the identification resistor of the connected sensor. Manual Manual. The type of sensor is entered manually. 7.1.3 Sensor Name The parameter Sensor name allows you to freely enter a term describing the connected sensor in greater detail or the place where it has been installed. The length of the sensor name is limited to 10 characters. The sensor name is displayed in the middle bottom area of the display field for the measurement channel ( Figure 15, C, page 31).

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7.1.4 Measured Values Filter (Filter) The measured values filter (Filter) allows you to better evaluate noisy signals or signals suffering from interference. This filter is applied to the displayed values, the switching functions and the analogue outputs. You may set up the measured values filter to the following values: Fast The GRAPHIX controller will respond rapidly to signal fluctuations. In this mode, it will be relatively sensitive with respect to any signal interferences. Figure 68 – Measured values filter Fast (example) Medium This is the default setting. It offers a good compromise between speed of response and interference immunity. Figure 69 – Measured values filter Medium (example) Slow The GRAPHIX controller responds slowly to signal fluctuations. Because of this, it is less sensitive with respect to any signal interferences. This setting is recommended for precise comparative measurements. Figure 70 – Measured values filter Slow (example) NOTICE: This parameter has an effect only to analogue input signals. It is available therefore only for analogue sensors, which are operated through the connections C1, D1 and E1 on the rear of the instrument ( Figure 7, page 26).

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69 7.1.5 Gas Typ Correction (Gas Type) The sensors are normally calibrated for a measurement in nitrogen or air. With the aid of the parameter Gas type correction (Gas Type), you may set up the measurement channel for other types of gas. N2 Nitrogen, no correction is necessary. No status indicator will come on. Ar Argon. The pressure is converted with the aid of the correction factor for argon (0.830). The status indicator will come on in the display field of the selected channel. H2 Hydrogen. The pressure is converted with the aid of the correction factor for hydrogen (2.440). The status indicator will come on in the display field of the selected channel. Cor Other gases. The pressure is converted with the aid of a variable correction factor. The status indicator will come on in the display field of the selected channel. Entering a gas type correction factor through the parameter Gas type correction factor (Correction factor) is possible. 7.1.6 Gas Type Correction Factor (Correction Factor) This parameter can only be changed when the gas type correction has been set to Cor ( Chapter 7.1.5 Gas Typ Correction (Gas Type), page 69). You may set up the gas type correction factor (correction factor) for a sensor in the range of 0.10 to 1.00 to 10.0. The setting of 1.00 will provide the uncorrected measured value. NOTICE: With IONIVAC sensors of ITR90 series and ITR200 series as well as PENNINGVAC sensors of the type PTR82N, PTR90 and PTR90N the gas type correction is only for p < 1·10-2 mbar effectively, with THERMOVAC sensors of TTR100 series and TTR101 series only for p < 1 mbar. 7.1.7 Emission Switching On and Switching Off Type (Emission) This parameter defines the rules according to which the emission is switched on. Display Explanation Auto Automatic. The emission is switched on and off by the sensor electronics. Manual Manual. The emission is switched on and off manually. Table 18 – Values for the parameter Emission

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7.1.8 Filament Selection (Filament) This parameter defines the rules according to which the active filament is selected. Display Explanation Auto The sensor electronics selects one of the two filaments in alternation. Filament 1 Filament 1 is active. Filament 2 Filament 2 is active. Table 19 – Values for the parameter Filament NOTICE: Filament selection is only possible for IONIVAC sensors of ITR200 series. 7.1.9 Offset On / Off With enabled offset correction, a saved offset value is subtracted from the current measured value. This permits a relative measurement with reference to a reference pressure. The offset correction affects the displayed values, the RS232 output, the chart recorder output and the switching functions. However, the analogue outputs are not influenced. Off The offset correction is switched off. This status indicator goes out in the display field of the selected channel. On The offset correction is switched on. The status indicator comes on in the display field of the selected channel. 7.1.10 Offset Value You may set up the offset value for a sensor. The adjustment range will be sensor dependent. A setting of 0.000 supplies the uncorrected measured value. As soon as setting up an offset value > 0.000, the offset correction will be switched on. The status indicator comes on in the display field of the selected channel. 7.1.11 Take Current Pressure By operating the button Set, the current pressure value is carried over as the offset value. The offset correction facility is switched on. The status indicator comes on in the display field of the selected channel.

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71 7.1.12 Zero Alignment (Zero Adjust) Pressing the button Set, aligns the zero level of the connected sensor. NOTICE: Switch the offset correction facility off before setting up the zero level for a sensor. NOTICE: To utilise this function, CERAVAC sensors of CTR100 series and CTR101 series must be connected using a 15-way SUB-D cable connected to the connections C2, D2 or E2 at the rear of the instrument ( Figure 7, page 26).

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7.1.13 Sensor Switch-on Type (Sensor On) This parameter defines how the sensor is switched on. You can set the switch-on type to the following values: Manual The sensor can be switched on in the channel menu by tapping the button . External Externally via optocoupler (static signal +12 – +24 VDC) Hot Warm start. The sensor is switched on automatically upon switching on the instrument. After a power failure, the measurement is started automatically. Channel 1 Through measurement channel 1. With the aid of the then following parameter Sensor switch-on value you may define a switch-on value. When the pressure in measurement channel 1 drops below the switch on value, the sensor is switched on. Channel 2 Through measurement channel 2. With the aid of the then following parameter Sensor switch-on value you may define a switch-on value. When the pressure in measurement channel 2 drops below the switch-on value, the sensor is switched on. Selecting measurement channel 2 is only available for GRAPHIX TWO and THREE. Channel 3 Through measurement channel 3. With the aid of the then following parameter Sensor switch-on value you may define a switch-on value. When the pressure in measurement channel 3 drops below the switch-on value, the sensor is switched on. Measurement channel 3 is only available for GRAPHIX THREE. 7.1.14 Sensor Switch-on Value (T-On) This parameter can only be changed provided the sensor switch-on type has been set for Channel 1, Channel 2 or Channel 3 ( Chapter 7.1.13 Sensor Switch-on Type (Sensor On), page 72). With the aid of parameter Sensor switch-on value T-On, you may define a switch-on value for the sensor. When the pressure in the affected measurement channel drops below the switch-on value, the sensor is switched on.

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73 7.1.15 Sensor Switch-off Type (Sensor Off) This parameter defines how the sensor is switched off. You can set the switch-off type to the following values: Manual The sensor can be switched off in the channel menu by tapping the button . External Externally via optocoupler (static signal +12 – +24 VDC) Self Self-monitoring. With the aid of the then following parameter Sensor switch-off value you may define a switch-off value. When the pressure at the sensor exceeds the switch-off value then the sensor is switched off. Channel 1 Through measurement channel 1. With the aid of the then following parameter Sensor switch-off value you may define a switch-off value. When the pressure in measurement channel 1 exceeds the switch-off value, then the sensor is switched off. Channel 2 Through measurement channel 2. With the aid of the then following parameter Sensor switch-off value you may define a switch-off value. When the pressure in measurement channel 2 exceeds the switch-of value, then the sensor is switched off. Selecting measurement channel 2 is only available for GRAPHIX TWO and THREE. Channel 3 Through measurement channel 3. With the aid of the then following parameter Sensor switch-off value you may define a switch-off value. When the pressure in measurement channel 3 exceeds the switch-of value, then the sensor is switched off. Selecting measurement channel 3 is only possible for GRAPHIX THREE. 7.1.16 Sensor Switch-off Value (T-Off) This parameter can only be changed provided the sensor switch-off type has been set for Channel 1, Channel 2 or Channel 3 ( Chapter 7.1.15 Sensor Switch-off Type (Sensor Off), page 73). With the aid of parameter Sensor switch-off value T-Off you may define a switch-off value for this sensor. When the pressure in the affected measurement channel exceeds the switch-off value, the sensor is switched off. 7.1.17 Entering the Characteristics for Further Sensors The GRAPHIX controller offers the possibility of connecting besides the sensors detailed in “Chapter 3.2 Suitable Sensors”, page 15 further sensors by entering a variable analogue logarithmic or analogue linear characteristic. This parameter can only be changed when sensor detection has been set to Manual ( Chapter 7.1.2 Sensor Detection (Detection), page 67).

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7.1.17.1 Curve Type First, define through the parameter Type of characteristic, the specific type of characteristic needed. Display Explanation Analog Log Characteristic of the sensor is analogue logarithmic. Analog Lin Characteristic of the sensor is analogue linear. Table 20 – Values for the parameter Type of Characteristic 7.1.17.2 Characteristic Curve (U-Start, p-Start, U-End, p-End, F-Start, F-End) You configure the sensor characteristic by entering the following data for the characteristic specifying the relationship between voltage (data in V) and pressure (pressure value in the current display unit). In addition, the error limits are defined. U-Start Voltage at the lower end of the characteristic. This voltage value defines the start point of the characteristic at the lower end. p-Start Pressure at the lower end of the characteristic. This pressure value defines the start point of the characteristic at the lower end. U-End Voltage at the upper end of the characteristic. This voltage value defines the endpoint of the characteristic at the upper end. p-End Pressure at the upper end of the characteristic. This pressure value defines the endpoint of the characteristic at the upper end. F-Start Error voltage at the lower end of the characteristic. When the voltage drops below the voltage defined here, the error signal for the sensor is output. F-End Error voltage at the upper end of the characteristic. When the voltage exceeds the voltage defined here, the error signal for this sensor is output. Figure 71 – Configuration for the specific characteristics of further sensors p Pressure [display unit] U Voltage [V] U-Start Voltage lower characteristic end p-Start Pressure lower characteristic end U-End Voltage upper characteristic end p-End Pressure upper characteristic end F-Start Error voltage lower characteristic end F-End Error voltage upper characteristic end

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75 7.2 Setpoints In this parameter group, you may configure the switching functions. The GRAPHIX controller is equipped with the following switching function parameters:  SP1-On to SP6-On  SP1-Off to SP6-Off 7.2.1 Basic Terms Switching Functions The GRAPHIX controller provides a total of six switching function relays, which may be freely assigned to the three measurement channels maximum. The relays switch over depending on the measured pressure. The contacts of the relays are floating and may be used through the connection marked Relay Output for switching purposes ( Chapter 5.3.5 Relay Output, page 28). Threshold Values The switching action of the individual relays is defined through two parameters in each case: the lower threshold value and the upper threshold value of the switching function. Lower Threshold Value SPx-On The lower threshold value controls switching on of the related switching function. When the pressure drops below the lower threshold value, the relay switches on. The common contact of the relay is then connected to the normally open contact. Upper Threshold Value SPx-Off The upper threshold value controls switching off of the related switching function. When the pressure exceeds the upper threshold value, the relay switches off. The common contact of the relay is then connected to the normally closed contact. Hysteresis In the pressure range between the two threshold values, the current relay status is maintained. Within this range, the relay will not switch over and the relay status will depend on the previous switching function ( Figure 72, page 75). Figure 72 – Response of the switching function in case of pressure changes p Pressure] t Time NO Normally open contact COM Common contact NC Normally closed contact The range between the lower and the upper threshold value produces a certain degree of hysteresis between switching on and switching off of the relay. Hysteresis prevents rapid cycling between on and off when the pressure is close to a switching threshold.

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7.2.2 Configuring the Switching Functions Proceed as follows to configure the switching thresholds:  In the measurement mode, touch the touchscreen surface for approximately 1 second. o You will now see the main menu with an overview of the parameter groups. Figure 73 – Opening the main menu  Tap in the main menu on the parameter group Setpoints. Figure 74 – Selection of parameter group Setpoints  Tap on the entry window on the right beside the parameter SP1 – SP6, in order to assign the corresponding switching threshold to a channel. o The selection list for the channel assignments opens. Figure 75 – Selection of the parameter Channel  To select from the list, use the buttons and or directly enter the value for the desired sensor. o The in each case selected value is displayed with a green background..  To save, tap the button .  The setup value is saved.

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77 Figure 76 – Selection of the desired channel  To accept, tap the button . o Now the parameter selection display is displayed again. o In the entry windows for the parameters SP-ON and SP-OFF automatically the smallest possible values for these parameters are displayed corresponding to the connected sensor.  Tap on the entry window in order to configure the values for the parameters SP-ON and SP-OFF according to your requirements. o The window for entering the values for the switching thresholds opens. Figure 77 – Selection for parameter SP-On / SP- Off  Enter the value by way of numbers and characters. o The entered value is displayed in the upper area of the display field.  To delete the entire value tap the button CLR. o The displayed value is deleted.  To delete the last character, which was entered, tap the button DEL. o The last character is deleted.  To save and accept, tap the button OK. o The set up value is saved. o The parameter selection menu is displayed again.  To exit without saving, tap the button ESC. o The initially set up value is retained. o The parameter selection menu is displayed again.

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Figure 78 – Selection of the switching threshold value  To exit the parameter selection menu, tap the button . o The main menu with an overview of the parameter groups is displayed again.  To exit the main menu, tap the button . o You are now returned to the previously selected measured value display type of the measurement mode. o The configured switching threshold is displayed in the left at the top of the display field for the in each case assigned measurement channel. Figure 79 – Display switching threshold NOTICE: In case of a sensor fault or a connection fault between sensor and GRAPHIX controller, the switching thresholds assigned to the sensor, respectively channel are disabled. The pressure values for the parameters SP-On and SP- Off persist in the instrument’s memory. When reassigning these switching thresholds to a channel, the saved values for the parameters SP-On and SP-Off are automatically taken over provided these are within the adjustment range for the type of sensor connected to the channel. Otherwise values are proposed which match the adjustment range of the sensor type.

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79 7.2.3 Adjustment Range The lower and the upper threshold value may be selected depending on the sensor. The possible entry range ( Table 21 to Table 28, page 79 to 81) results automatically through the connected sensor. Hysteresis amounts to at least 10% of the lower threshold value for sensors with a logarithmic characteristic and 0.1% of the FS for sensors with a linear characteristic. Sensor type Lower threshold value [Data in mbar] Upper threshold value [Data in mbar] TTR81N 5.50e-04 9.00e+02 TTR90 5.50e-04 9.00e+02 TTR91 5.50e-04 9.00e+02 TTR91N 5.50e-04 9.00e+02 TTR96 5.50e-04 9.00e+02 TTR96N 5.50e-04 9.00e+02 TTR211 5.50e-04 9.00e+02 TTR216 5.50e-04 9.00e+02 TTR911 5.50e-04 9.00e+02 TTR911N 5.50e-04 9.00e+02 TTR911N (RS232) 5,50e-04 9,00e+02 TTR916 5.50e-04 9.00e+02 TTR916N 5.50e-04 9.00e+02 Table 21 – Adjustment range for the threshold value of THERMOVAC sensors Sensor type Lower threshold value [Data in mbar] Upper threshold value [Data in mbar] TTR100 5.50e-04 1.35e+03 TTR101 5.50e-04 1.35e+03 TTR101N 5.50e-04 1.35e+03 TTR101N (RS232) 5,50e-04 1,35e+03 TTR200N (RS232) 5,50e-04 1,35e+03 Table 22 – Adjustment range for the threshold value of THERMOVAC sensors (combination sensors) Sensor type Lower threshold value [Data in mbar] Upper threshold value [Data in mbar] ITR90/N 5.50e-10 9,00e+02 ITR200/N 5.50e-10 9,00e+02 Table 23 – Adjustment range for the threshold value of IONIVAC sensors (combination sensors)

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Sensor type Lower threshold value [Data in mbar] Upper threshold value [Data in mbar] PTR81N 1.10e-09 9.00e-03 PTR225 1.10e-09 9.00e-03 PTR225N 1.10e-09 9.00e-03 PTR225N (RS232) 1,10e-09 9,00e-03 PTR237 1.10e-09 9.00e-03 PTR237N 1.10e-09 9.00e-03 Table 24 – Adjustment range for the threshold value of PENNINGVAC sensors Sensor type Lower threshold value [Data in mbar] Upper threshold value [Data in mbar] PTR82N 1.10e-08 9.00e+02 PTR90 5.50e-09 9.00e+02 PTR90N 5.50e-09 9.00e+02 PTR90N (RS232) 5,50e-09 9,00e+02 PTR200N (RS232) 5,50e-09 9,00e+02 Table 25 – Adjustment range for the threshold value of PENNINGVAC sensors (combination sensors) Sensor type Lower threshold value [Data in mbar] Upper threshold value [Data in mbar] CTR90-1000 CTR91-1000 CTR100/N-1000 CTR101/N-1000 1.300e-01 1.320e+03 CTR91-100 CTR91-100 CTR100/N-100 CTR101/N-100 1.300e-02 1.320e+02 CTR90-20 CTR91-20 CTR100/N-20 CTR101/N-20 2.700e-03 2.640e+01 CTR90-10 CTR91-10 CTR100/N-10 CTR101/N-10 1.300e-03 1.320e+01 CTR90-1 CTR91-1 CTR100/N-1 CTR101/N-1 1.300e-04 1.320e+00 CTR90-0.1 CTR91-0.1 CTR100/N-0.1 CTR101/N-0.1 1.300e-05 1.320e-01 Table 26 – Adjustment range for the threshold value of CERAVAC sensors

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81 Sensor type Lower threshold value [Data in mbar] Upper threshold value [Data in mbar] DU200 2.00e-01 1.98e+02 DU201 2.00e-01 1.98e+02 DU2000 2.00e+00 1.98e+03 DU2001 2.00e+00 1.98e+03 DU2001 rel. -9.00e+02 9.90e+02 Table 27 – Adjustment range for the threshold value of DU sensors Sensor type Lower threshold value [Data in mbar] Upper threshold value [Data in mbar] CUSTOM 1.00e±xx 1.00e±xx Table 28 – Adjustment range for the threshold value of further sensors CAUTION: Entering a value outside the input range will give rise to an error message. 7.3 System Through the parameters of this parameter group you may generally configure your instrument. The parameters apply to all measurement channels. 7.3.1 Displayed Unit of Measurement (Unit) This parameter defines the unit of measurement for displayed pressure values, threshold values etc. Display Explanation mbar Unit of measurement mbar Torr Unit of measurement Torr Pascal Unit of measurement Pascal psi Unit of measurement psi Micron Unit of measurement Micron Table 29 – Values for the parameter Unit The unit of measurement is in each case displayed in the right upper field of the display field for the meas. channel directly after the measured value ( Figure 15, E, page 31).

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7.3.2 Key Tone Through this parameter you define whether or not an audible signal shall be output when operating a button. Display Explanation Off Key tone Off On Key tone On Table 30 – Values for the parameter Key Tone 7.3.3 Error Relay With the aid of this parameter you define for which error type the error signal relay shall switch. Select the required relay output: no separate labelling = N.O. (Normally Open) or N.C. (Normally Closed). Display Explanation All All errors Only Device Device errors only Channel 1 & Device Sensor at Channel 1 and device error Channel 2 & Device Sensor at Channel 2 and device error (for GRAPHIX TWO and THREE only) Channel 3 & Device Sensor at Channel 3 and device error (for GRAPHIX THREE only) All N.C. All errors Only Device N.C. Device errors only Channel 1 & Device N.C. Sensor at Channel 1 and device error Channel 2 & Device N.C. Sensor at Channel 2 and device error (for GRAPHIX TWO and THREE only) Channel 3 & Device N.C. Sensor at Channel 3 and device error (for GRAPHIX THREE only) Table 31 – Values for the parameter Error Relay 7.3.4 Baud Rate (Data Rate) The baud rate defines the communication speed for the serial interface. Display Explanation 9600 9600 Baud 19200 19200 Baud 38400 38400 Baud Table 32 – Values for the parameter Data Rate

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83 7.3.5 Com Port Selection of interface type. Display Explanation RS232 Com port RS232 RS485 Com port RS485 Center Com port compatible with RS232 interface of the multi-channel measuring instruments CENTER TWO and THREE Table 33 – Values for the parameter Com Port NOTICE: Utilising the Com port Center When using the Com port Centre please observe the information given in Chapter 6 Computer Interface, page 57 in the Operating Instructions GA 09.035/7.01 of the multi-channel measuring instruments CENTER TWO and THREE. 7.3.6 Address This parameter can only be changed when the parameter Interface has been set to RS485 ( Chapter 7.3.5 Com Port, page 83). You may assign any address within the range from 1 to 126 for the RS485 Interface. 7.3.7 Clock (Time) Set the time in the format hh:mm:ss (h = hour, m = minute, s = second ). 7.3.8 Date Set the date in the format YY:MM:DD (YY = year, M = month, D = day). 7.3.9 System Information In this window you receive important information to the device. The following system information are shown to you:  Description  Part Number  Serial Number  Version NOTICE: Use these information, if in case of service the information of the label is not available.

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7.4 Display 7.4.1 Display Mode This parameter controls the way in which data is displayed. Display Explanation Normal Measured values and status display Big Large display of measured data Chart Graph of the pressure history Leak Test Leak rate determination Speedo Channel 1 Speedometer-shaped display of channel 1 pressure Speedo Channel 2 Speedometer-shaped display of channel 2 pressure Speedo Channel 3 Speedometer-shaped display of channel 3 pressure Table 34 – Values for the parameter Display mode 7.4.2 Resolution This parameter controls the resolution for the measured values display. Display Explanation Standard Default resolution High High resolution Table 35 – Values for the parameter Display digits 7.4.3 Brightness This parameter controls the brightness of the display. Display Explanation Low Low display brightness Medium Medium display brightness High High display brightness Table 36 – Values for the parameter Brightness

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85 7.5 Logging Through this parameter group you can configure the rules controlling the way in which data are logged. For this, a suitable storage device must be connected to the USB interface ( Figure 13, B, page 30). The memory requirements depend on the specified interval and the file size. For a logging interval of 1 s and a file size of 24 h the memory requirements are approx. 4 MB. In this case you can record the data of 250 days with a storage device of 1 GB. 7.5.1 Interval (s) This parameter defines the data logging interval. The value is here entered in seconds. You may set up a data recording interval in the range between 1 – 900 seconds. The default setting is one second. 7.5.2 File Size (h) This parameter restricts the length of the recorded data per created file. The value is here entered in hours. You may set up a data recording length in the range between 1 – 999 hours. The default setting is 24 hours. NOTICE: After reaching the value entered for this parameter, a new file is created automatically which will then hold data for the given time span. 7.5.3 Enable / Disable Logging  Start to record data by tapping the button Start. o The directory DATALOG is created on the storage device connected to the USB interface. o Measured values and important data relating to the recording of data are saved in a file having the format YYYYMMDD_hhmmss_snXXXXXX.txt (Y = year, M = month, D = day, h = hour, m = minute, s = second, snXXXXXX = 6-digit serial number) to the USB memory in the directory DATALOG.  Stop the recording of data by tapping the button Stop.  The file created, respectively saved to the USB storage device will then be available for further data processing. Figure 80 – Sample file of recorded data

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7.6 Recorder The chart recorder output is a programmable analogue output. The voltage at the chart recorder output is a function of the pressure at the sensor. The relationship between pressure and voltage is termed output characteristic. It may be selected through the parameter Analogue mode. 7.6.1 Analog Mode Through the parameter Analog Mode you can define at which pressure value the maximum voltage shall be reached. In the following, the available output characteristics are described. Here information is provided in each case how the pressure p (in mbar) is calculated from the output voltage U (in Volt). Note here that a difference is made between a logarithmic and linear output characteristic. Using a logarithmic characteristic is preferred when the measurement range extends over many decades of pressure. In this case, the pressure value is logarithmized and thereafter scaled suitably. Using a linear characteristic is preferred when the measurement range extends only over a few pressure decades. In this case, the voltage at the chart recorder output is proportional to the pressure value. Log Logarithmic representation of the entire measurement range. Sensor Pressure [mbar] TTR p = 10^[U/(10/7) – 4] TTR100 p = 10^[U/(10/7) – 4] ITR p = 10^[U/(10/12) – 9] PTR p = 10^[U/(10/7) – 9] PTR90 p = 10^[U/(10/12) – 9] CTR p = 10^[U/(10/4) – 4] * FS DU p = 10^[U/(10/4) – 4] * FS Table 37 – Chart recorder output – Calculation formula for the parameter Log Log A Logarithmic representation of the entire measurement range (compatible to A-series). Sensor Pressure [mbar] TTR p = 10^[U/(10/6) – 3] TTR100 p = 10^[U/(10/7) – 4] ITR90 p = 10^[(U – 7.75)/0.75] ITR200 p = 10^[U – 8] PTR p = 10^[U/(9/7) – 9 – 7/9] PTR90 p = 10^[U/(10/11) – 8] CTR p = 10^[U/(10/4) – 4] * FS DU p = 10^[U/(10/4) – 4] * FS Table 38 – Chart recorder output – Calculation formula for the parameter Log A

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87 Log -6 Logarithmic representation of a partial measurement range (2.5 V/decade). Sensor Pressure [mbar] All sensor types p = 10^[U/(10/4) – 10] Table 39 – Chart recorder output – Calculation formula for the parameter Log -6 Log -3 Logarithmic representation of a partial measurement range (2.5 V/decade). Sensor Pressure [mbar] All sensor types p = 10^[U/(10/4) – 7] Table 40 – Chart recorder output – Calculation formula for the parameter Log -3 Log +0 Logarithmic representation of a partial measurement range (2.5 V/decade). Sensor Pressure [mbar] All sensor types p = 10^[U/(10/4) – 4] Table 41 – Chart recorder output – Calculation formula for the parameter Log +0 Log +3 Logarithmic representation of a partial measurement range (2.5 V/decade). Sensor Pressure [mbar] All sensor types p = 10^[U/(10/4) – 1] Table 42 – Chart recorder output – Calculation formula for the parameter Log +3 LogC1 Logarithmic representation for the following combination:  TTR connected to measurement channel 1  PTR connected to measurement channel 2 Sensor Pressure [mbar] TTR + PTR p = 10^[U/(10/12) – 9] Table 43 – Chart recorder output – Calculation formula for the parameter LogC1 LogC2 Logarithmic representation for the following combination:  CTR or DU connected to measurement channel 1  CTR or DU connected to measurement channel 2 This output characteristic is only preferred when the sensors offer different measurement ranges. The total measurement range supplied by the combination is displayed in the range of 0 to 10 V logarithmically. This parameter can only be selected for GRAPHIX TWO and THREE.

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LogC3 Logarithmic representation for the following combination:  CTR or DU connected to measurement channel 1  CTR or DU connected to measurement channel 2  CTR or DU connected to measurement channel 3 This output characteristic is only preferred when the sensors offer different measurement ranges. The total measurement range supplied by the combination is displayed in the range of 0 to 10 V logarithmically. This parameter can only be selected for GRAPHIX THREE. NOTICE: The three sensors need to be sorted as to the end value of their measurement range. The sorting sequence may be either increasing or decreasing. Lin -9 Linear representation, U = 10 V corresponds to p = 10-10 mbar. Sensor Pressure [mbar] All sensor types p = U/10 * 10-10 Table 44 – Chart recorder output – Calculation formula for the parameter Lin -10 Lin -9 Linear representation, U = 10 V corresponds to p = 10-9 mbar. Sensor Pressure [mbar] All sensor types p = U/10 * 10-9 Table 45 – Chart recorder output – Calculation formula for the parameter Lin -9 Lin -8 Linear representation, U = 10 V corresponds to p = 10-8 mbar. Sensor Pressure [mbar] All sensor types p = U/10 * 10-8 Table 46 – Chart recorder output – Calculation formula for the parameter Lin -8 Lin -7 Linear representation, U = 10 V corresponds to p = 10-7 mbar. Sensor Pressure [mbar] All sensor types p = U/10 * 10-7 Table 47 – Chart recorder output – Calculation formula for the parameter Lin -7

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89 Lin -6 Linear representation, U = 10 V corresponds to p = 10-6 mbar. Sensor Pressure [mbar] All sensor types p = U/10 * 10-6 Table 48 – Chart recorder output – Calculation formula for the parameter Lin -6 Lin -5 Linear representation, U = 10 V corresponds to p = 10-5 mbar. Sensor Pressure [mbar] All sensor types p = U/10 * 10-5 Table 49 – Chart recorder output – Calculation formula for the parameter Lin -5 Lin -4 Linear representation, U = 10 V corresponds to p = 10-4 mbar. Sensor Pressure [mbar] All sensor types p = U/10 * 10-4 Table 50 – Chart recorder output – Calculation formula for the parameter Lin -4 Lin -3 Linear representation, U = 10 V corresponds to p = 10-3 mbar. Sensor Pressure [mbar] All sensor types p = U/10 * 10-3 Table 51 – Chart recorder output – Calculation formula for the parameter Lin -3 Lin -2 Linear representation, U = 10 V corresponds to p = 10-2 mbar. Sensor Pressure [mbar] All sensor types p = U/10 * 10-2 Table 52 – Chart recorder output – Calculation formula for the parameter Lin -2 Lin -1 Linear representation, U = 10 V corresponds to p = 10-1 mbar. Sensor Pressure [mbar] All sensor types p = U/10 * 10-1 Table 53 – Chart recorder output – Calculation formula for the parameter Lin -1

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Lin +0 Linear representation, U = 10 V corresponds to p = 100 mbar. Sensor Pressure [mbar] All sensor types p = U/10 * 100 Table 54 – Chart recorder output – Calculation formula for the parameter Lin +0 Lin +1 Linear representation, U = 10 V corresponds to p = 101 mbar. Sensor Pressure [mbar] All sensor types p = U/10 * 101 Table 55 – Chart recorder output – Calculation formula for the parameter Lin +1 Lin +2 Linear representation, U = 10 V corresponds to p = 102 mbar. Sensor Pressure [mbar] All sensor types p = U/10 * 102 Table 56 – Chart recorder output – Calculation formula for the parameter Lin +2 Lin +3 Linear representation, U = 10 V corresponds to p = 103 mbar. Sensor Pressure [mbar] All sensor types p = U/10 * 103 Table 57 – Chart recorder output – Calculation formula for the parameter Lin +3 IM221 Logarithmic representation IM221 Controller (1 V / decade). U = 8 V corresponds to p = 10-2 mbar. Controller Pressure [mbar] IM221 p = 10^[U – 10] Table 58 – Chart recorder output – Calculation formula for the parameter IM221

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91 LogC4 Logarithmic representation over 12 decades (0.83 V/decade) for the following combination:  TTR100 or TTR101 connected to measurement channel 1  ITR200 connected to measurement channel 2 Sensor Pressure [mbar] TTR100 + ITR200 p = 10^[U/(10/12) – 9] TTR101 + ITR200 p = 10^[U/(10/12) – 9] Table 59 – Chart recorder output – Calculation formula for the parameter LogC4 U = 10 V corresponds to p = 1000 mbar. The switchover level between the sensors is at 10- 2 mbar. This parameter can only be selected for GRAPHIX TWO and THREE. PM411 Non-linear output characteristic as for the PM411 plug-in board. 7.6.2 Channel Through this parameter you define which measurement channel shall be assigned to the chart recorder output. Display Explanation 1 Assigned to measurement channel 1 2 Assigned to measurement channel 2 (GRAPHIX TWO and THREE only) 3 Assigned to measurement channel 3 (GRAPHIX THREE only) Table 60 – Values for the parameter Channel

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7.7 Chart 7.7.1 Interval (s) This parameter defines the interval for the display of pressure values in the measured values display mode Chart. The value here is entered in seconds. You may set up the interval for recording of data within the range from 1 – 900 seconds. The default setting is one second. Table 61, page 92 gives an overview for temporally maximally possible representation within the visible chart range as a function of interval and scaling. Scale Interval [s] 1:1 1:2 1:4 1:8 1 00:04:48 00:09:36 00:19:12 00:38:24 30 02:24:00 04:48:00 09:36:00 19:12:00 60 04:48:00 09:36:00 19:12:00 38:24:00 120 09:36:00 19:12:00 38:24:00 76:48:00 300 24:00:00 48:00:00 96:00:00 192:00:00 600 48:00:00 96:00:00 192:00:00 384:00:00 900 72:00:00 144:00:00 288:00:00 576:00:00 Table 61 – Overview for display duration [hh:mm:ss] 7.7.2 Channel 1 Through this parameter you define whether the measured values of measurement channel 1 shall be displayed in the chart. Display Explanation Off The measured values of measurement channel 1 are not shown in the chart. On The measured values of measurement channel 1 are shown in the chart. Table 62 – Values for the parameter Channel 1 7.7.3 Channel 2 Through this parameter you define whether the measured values of measurement channel 2 shall be displayed in the chart. Selecting measurement channel 2 is available only for GRAPHIX TWO and THREE. Display Explanation Off The measured values of measurement channel 2 are not shown in the chart. On The measured values of measurement channel 2 are shown in the chart. Table 63 – Values for the parameter Channel 2

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93 7.7.4 Channel 3 Through this parameter you define whether the measured values of measurement channel 3 shall be displayed in the chart. Selecting measurement channel 3 is available only for GRAPHIX THREE. Display Explanation Off The measured values of measurement channel 3 are not shown in the chart. On The measured values of measurement channel 3 are shown in the chart. Table 64 – Values for the parameter Channel 3

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7.8 Leak Test The leak test function integrated into the GRAPHIX Controller operates on the principle of pressure rise method over a known time interval at a known volume. The leak rate QL in mbar · l s calculated as follows: QL = ∆p · V ∆t Where  Δp is the pressure rise, the difference between the pressure at time te = end of the time interval and the pressure at the beginning t0  V is the volume  Δt is the time interval te – t0 The device calculates the leak rate using this function after each time interval and displays the value. Examble: Once the vacuum vessel with a volume of 20 l has been isolated from the pump, the pressure in the apparatus rises from 30 mbar to 40 mbar during a measuring time of 30 minutes (= 1800 seconds). Thus, in accordance with the above-mentioned equation, the leak rate will be: QL= (40 - 30) · 20 1800 = 10 · 20 1800 = 1.1·10-1 mbar · l s To evaluate the measurement quality, besides the recently determined value ( Figure 19, B, page 34), the two previously determined values ( Figure 19, C, D, page 34) are also displayed. If the values are continuously dropping, this can be a hint for a variable contribution to the leak rate through outgassing which adds to the actual leak rate by a leak (constant value). The result can be improved by waiting until this variable contribution is becoming small, compared to the actually sought leak rate. However, if the values are jumpy and perhaps increasing or even negative, this is an evidence for a too short time interval. Further usages for the leak test function emerge:  Principally, with a known test leak you can reversely conduct a volume determination. For this purpose, enter a volume of 1 l and calculate the volume by division of the known leak rate by the measured leak rate. For the choice of the time interval the afore- mentioned applies. It is not considered for volume calculation.  For a test volume known to be sufficiently tight you can document the outgassing behaviour. This can be very helpful, especially for the examination of residual humidity.  When utilising pressure measuring principles with high gas type dependence (e.g. THERMOVAC sensors in the range > 5 mbar), besides an integral leak test you can also carry out a local leak detection – with limited possibilities – by external sprinkling of the suspect spot. However, for this, a certain amount of experience is required.

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95  Principally, a leak test in the overpressure range would also be possible with the pressure rise method. The leak rate would then be negative, since the leakage is leaving the test volume. Because of the principal temperature dependence of the test pressure large measuring errors can thereby arise, which require an experienced operator, so that all in all the pressure rise method in the vacuum range is more recommendable. 7.8.1 Interval (min) Through this parameter you define the duration of the leak test. The value is entered in minutes. You may set up the interval for leak test within the range from 1 – 1999 minutes. The default setting is 10 minutes. 7.8.2 Volume (l) Enter the volume of the test vessel. The value is entered in liter. You may set up the volume within the range from 0.1 – 100000.0 liter. The default setting is 1.0 liter. 7.8.3 Channel Through this parameter you define which channel shall be used for the leak test. Display Explanation 1 Assigned to measurement channel 1 2 Assigned to measurement channel 2 (GRAPHIX TWO and THREE only) 3 Assigned to measurement channel 3 (GRAPHIX THREE only) Table 65 – Values for the parameter Channel

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7.9 Menu Language (Language) Always the currently selected menu language is indicated through a symbolic flag typical for the specific language ( Chapter 6.1.4.1 Symbols for the Controls, page 36). The desired menu language is selected by tapping the button showing the symbolic flag typical for the specific language. Display Explanation Menu language EN (English) Menu language DE (German) Menu language CN (Chinese) Menu language FR (French) Menu language IT (Italian) Menu language JP (Japanese) Menu language ES (Spanish) Menu language KN (Korean) Menu language RU (Russian) Menu language PL (Polish) Menu language TR (Turkish) Table 66 – Values for the parameter Language

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97 8. Computer Interface 8.1 Basic Information 8.1.1 Connection The GRAPHIX controller is capable of communicating with a computer via a serial interface. Either a RS232 or an RS485 interface is available. The pin assignment of the corresponding connection socket and the necessary connection cable are described in Chapter 5.3.7 Interfaces RS232/RS485 (RS232/RS485), page 29. 8.1.2 Nomenclature To describe the computer interface, the following terms and symbolic notations are used. Terms Explanation Send Data transfer from the host to the device Receive Data transfer from the device to the host Host Terminal (Computer) ASCII American Standard Code for Information Interchange Table 67 – Computer interface terms Terms Value Explanation ‘;‘ 0x3B Separating character EOT 0x04 End character SI 0x0F Read detection SO 0x0E Write detection ACK 0x06 Parameter value is accepted NACK 0x15 Parameter value is not accepted Table 68 – Control characters of the computer interface

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8.2 Communication 8.2.1 Protocol The following protocol is used for communication:  8 data bits  No parity bit  1 stop bit The baud rate is selectable ( Chapter 7.3.4 Baud Rate (Data Rate), page 82). No hardware handshake is used. Messages are transferred by way of ASCII strings. A semicolon (0x3B) in the string is processed as a separating character. Space characters (0x20) or tab stop characters (0x09) may be contained in the string. As to communication, the computer is always the master. The input buffer of the computer must offer a capacity of at least 512 bytes. 8.2.2 General String Structure When using the interfaces RS232 or RS485, the send and receive strings differ inasmuch when using the RS485 interface the respective string is preceded by the address of the RS485 interface. For the send string, state the address in hexadecimal notation (for example address 10 = 0A). You may assign an address from the range of 1 to 126. 8.2.2.1 Send String Structure (as seen from the Master) Read: Address RS485 (Only necessary for RS485!) Read (0x0F) [SI] Parameter group Separating character Parameter No. CRC [EOT] Write: Address RS485 (Only necessary for RS485!) Write (0x0E) [SO] Parameter group Separating character Parameter No. Separating character Value Space character CRC [EOT]

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99 8.2.2.2 Receiving String Structure (as seen from the Master) Read: The requested value is readable. Address RS485 (Only necessary for RS485!) [ACK] Value CRC [EOT] The requested value is not readable. Address RS485 (Only necessary for RS485!) [NACK] Error No. 1 CRC [EOT] 1 ( Table 69 – Error numbers of receiving string, page 100) Write: Value has been successfully written. Address RS485 (Only necessary for RS485!) [ACK] CRC [EOT] Value has not been written. Address RS485 (Only necessary for RS485!) [NACK] Error No. 1 CRC [EOT] 1 ( Table 69 – Error numbers of receiving string, page 100)

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8.2.2.3 Error Number (Receiving String) Error-No. Explanation -6 CRC sum error -8 Format error -9 Group not available -10 Parameter not available for sensor type -11 Parameter read-only -12 Parameter value incorrect -13 Number of parameter values wrong -14 Value currently not changeable -15 Parameter generally not available -16 Error data handling with USB Table 69 – Error numbers of receiving string 8.2.2.4 Calculation of the Checksum The checksum (CRC) consists of an ASCII character, the byte value of which results as follows from the preceding characters of the send or receive string (without address RS485): CRC = 255 – [(Byte sum of all preceding characters) mod 256] If this value is lower than 32 (control character of the ASCII code), then 32 must be added. Example: Send string ahead of CRC designating the first channel: [SO]1;5;vacuum[space character] CRC = 255 – [(14+49+59+53+59+118+97+99+117+117+109+32) mod 256] = 255 – [923 mod 256] = 255 – 155 = 100 In this case the checksum character is a “d”.

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