LEYBOLD DISPLAY TWO Instruction Manual

23 6.3 Operating Modes The multichannel gauge may be operated in one of the following operating modes: Measurement Mode The measurement mode is the standard operating mode. Here the measured values or status messages are displayed.  Chapter 6.4 Measurement Mode, page 23 Parameter Mode In the parameter mode you have access to different parameters. You can simply view the parameters all change them with the aid of the arrow keys. In this way you can configure the multichannel gauge.  Chapter 6.5 Parameter Mode, page 26 6.4 Measurement Mode 6.4.1 Selection After switching on the multichannel gauge it will automatically run the measurement mode. If running the parameter mode and when not operating a key for 10 seconds the instrument will then automatically revert back to the measurement mode. 6.4.2 Description In the measurement mode the measured values of the sensors are displayed. When the pressure is outside the permissible range, then a status message is displayed. Measurement channels to which no gauge head has been connected will indicate noSEn. This status message is erased after 30 seconds and 4 dots are displayed. Display Description  or . Above the permissible range (DU Sensors excluded)  Above the measurement range (DU Sensors only) . Within the permissible range . Below the permissible range (DU Sensors excluded)  PENNINGVAC sensor PTR81N, PTR225, PTR225N, PTR225S, PTR225SN, PTR237 or PTR237N has been switched off  PENNINGVAC sensor PTR81N, PTR225, PTR225N, PTR225S, PTR225SN, PTR237 or PTR237N is on (Switching-on procedure, still no valid measured value available)  Lowly below the measurement range (DU Sensors only)  Middle below the measurement range (DU Sensors only)  Large below the measurement range (DU Sensors only) Table 6 – Display in the measurement mode

6.4.3 Pushbutton Functions 6.4.3.1 Measurement Channel Selection  Press the pushbutton CH. The instrument selects the next measurement channel. The display of Para for the selected measurement channel will flash for 10 seconds. Figure 13 – Operating the pushbutton CHANNEL 6.4.3.2 Parameter Mode Selection  Press the pushbutton PARA and keep it depressed for approximately 2 seconds. The instrument will change to the parameter mode ( Chapter 6.5 Parameter Mode, page 26). When not operating any pushbutton within 10 seconds, the instrument will then automatically return to the measurement mode. Figure 14 – Operating the pushbutton PARA 6.4.3.3 Switching on the High Vacuum Measurement Circuit The high vacuum measurement circuit of the following sensors can be switched on manually: PENNINGVAC sensors PTR81N, PTR225, PTR225N, PTR225S, PTR225SN, PTR237 and PTR237N. For this the sensor control must be set to HAnd ( Chapter 7.2.5 Sensor Switch-on Type (S-on), page 31).  Keep the key marked CH pressed so as to select the respective measurement channel.  Keep the key marked UP pressed for approximately two seconds. The sensor for the selected measurement channel is switched on. Either the measured value or a status message will be displayed.  Table 6, page 23. Figure 15 – Operating the pushbutton UP

25 6.4.3.4 Switching off the High Vacuum Measurement Circuit The high vacuum measurement circuit of the following sensors can be switched off manually: PENNINGVAC sensors PTR81N, PTR225, PTR225N, PTR225S, PTR225SN, PTR237 and PTR237N. For this in the sensor control must be set to HAnd ( Chapter 7.2.7 Sensor Switch-off Type (S-oFF), page 32).  Keep the key marked CH pressed so as to select the respective measurement channel.  Keep the key marked DOWN pressed for approximately two seconds. The sensor for the selected measurement channel is switched off. The display will indicate the status oFF. Figure 16 – Operating the pushbutton DOWN 6.4.3.5 Sensor Identification  Keep the keys UP and DOWN pressed for approximately one second. On the displays for the individual measurement channels the in each case connected sensors are indicated.  Table 7, page 25. Figure 17 – Operating the pushbuttons UP and DOWN Display Sensor type () THERMOVAC (TTR81N, TTR90, TTR91, TTR91N,TTR96S, TTR96SN, TTR211, TTR216S, TTR911, TTR911N, TTR916, TTR916N) () THERMOVAC (TTR100, TTR100S2, TTR101, TTR101N, TTR101S2, TTR101S2N)  PENNINGVAC (PTR81N, PTR225, PTR225N, PTR225S, PTR225SN, PTR237, PTR237N)  PENNINGVAC (PTR82N, PTR90, PTR90N)  DU sensor (DU200, DU201)  DU sensor (DU2000, DU2001)  DU relative pressure sensor (DU2001 rel.)  No sensor connected (no sensor). The indication will disappear after 30 seconds. . . . . No sensor connected (no sensor). Table 7 – Sensor identification

6.5 Parameter Mode 6.5.1 Selection By operating the PARA pushbutton for approximately 2 seconds the instrument changes from the measurement mode to the parameter mode. The Para indicator comes on for the channel selected in each case. When the instrument is running in the parameter mode and if no pushbutton is operated for 10 seconds, then the instrument will automatically return back to the measurement mode. The Para indicator for the channel which was selected in each case is turned off. 6.5.2 Parameter Groups In the parameter mode you have access to different parameters. You may view these parameters or change these with the aid of the arrow pushbuttons. In this way you can configure the instrument. Table 8, page 26 depicts all available parameters. Parameter group Parameter       (only with deselected ready function)  (only with deselected ready function)                 Table 8 – Parameter groups and corresponding parameters The available parameters have been divided into the following parameter sets: Switching function parameters (PArA SP) These parameters affect only the sensor of the selected measurement channel. Per measurement channel, two switching functions are available.  Chapter 7.1 Switching Function Parameters (PArA SP), page 28. Sensor parameters (PArA SEn) These parameters affect only the selected measurement channel. For each measurement channel a separate set of parameters is available which will depend on the type of connected sensor.  Chapter 7.2 Sensor Parameters (PArA SEn), page 29. General parameters (PArA GEn) With the aid of these parameters you can generally configure the instrument. The parameter is applied to all measurement channels.  Chapter 7.3 General Parameters (PArA GEn), Page 33.

27 6.5.3 Operating Concept From the measurement mode, you can select and change a certain parameter as follows:  Press the pushbutton CH, so as to select the desired measurement channel (only necessary when wanting to change a sensor parameter) The Para status indicator flashes for the selected channel.  Press the PARA pushbutton for about 2 seconds. You have now invoked the parameter menu.  Use the arrow pushbuttons to select the desired parameter group. The name of the parameter group is displayed.  Press the PARA pushbutton to select the desired parameter. The name and the value of the parameter are displayed.  Use the arrow pushbuttons and to change the value of the parameter. The value of the parameter is changed.  Repeat the last 2 steps so as to change further parameters of the same parameter group. After having accessed the last parameter of a parameter group, the instrument will switch back to the measurement mode. Changes to the parameters become effective immediately and are automatically saved to the EEPROM. When the instrument is running in the parameter mode and if for a period of 10 seconds no changes are made to the parameters, then the instrument will automatically return to the measurement mode. Any parameter changes made up to this point are automatically saved to the EEPROM. NOTICE: When the instrument is running in the parameter mode, and when not entering a change for more than 10 seconds, then the instrument will automatically return back to the measurement mode. Any changes, which have been entered and confirmed up to this point of time, are automatically saved in the EEPROM.

7. Parameters 7.1 Switching Function Parameters (PArA SP) In this parameter group you can configure the switching functions. The multichannel gauge provides the following switching function parameters:  SP1-Lo  SP1-Hi  SP2-Lo (only with deselected ready function)  SP2-Hi (only with deselected ready function) 7.1.1 Basic Terms Switching functions The DISPLAY TWO contains four relays with change-over contacts, from which two for switching functions and two are available as ready function. The relays for the ready functions can be used alternatively also for switching functions. The DISPLAY THREE contains six relays with change-over contacts, from which three for switching functions and three are available as ready function. The relays for the ready functions can be used alternatively also for switching functions. The contacts of the relays are floating and may be used for switching purposes through the connection marked Relay Output ( 5.3.5 Relay, page 19). Threshold values The switching behaviour of individual relays is defined in each case through two parameters: the lower threshold and the upper threshold value of the switching function. Lower threshold value SPx-Lo The lower threshold value governs switching on of the assigned switching function. When the pressure drops below the lower threshold value, then the relay is energised. The common contact of the relay is then connected to the normally open contact. Upper threshold value SPx-Hi The upper threshold value governs switching off of the assigned switching function. When the pressure exceeds the upper switching threshold, then the relay is de-energised. The common contact of the relay is then connected to the normally closed contact. Hysteresis In the pressure range between the two thresholds, the current relay status is maintained. Within this range the relay will not switch over and the relay status depends on the history ( Figure 18, page 29).

29 Figure 18 – Behaviour of a switching function in response to pressure changes p Pressure t Time NO Normally open contact COM Common contact NC Normally closed contact The range between the lower and the upper threshold value produces a certain amount of hysteresis between switching on and switching off of the relay. The hysterisis prevents rapid switching on and off of the switching function when the pressure is close to a switching threshold. 7.1.2 Configuring the Switching Functions  Select the desired measurement channel by operating the pushbutton CH several times.  Keep the pushbutton PARA depressed for approximately 2 seconds. The instrument is now running the parameter mode in the parameter group SP.  Press the pushbutton PARA to select the desired parameter. The name and the value of the parameter are displayed.  Use the arrow pushbuttons so as to change the threshold value. The value of the parameter is changed.  Repeat the steps to change further parameters of the parameter group. 7.1.3 Adjustment Range The upper and the lower threshold value can be changed depending on the type of sensor in the range between 1·103 and 1·10-12 mbar. Hysteresis amounts to at least 10% of the lower threshold value. CAUTION: Select the threshold values only within the range of the selected sensor. CAUTION: The threshold values have to be adjusted when the sensor type on a measuring channel has been changed.

7.2 Sensor Parameters (PArA SEn) For each measurement channel there exists a separate set of sensor parameters. Depending on which sensor is connected to the respective measurement channel, different parameters are available ( Table 9, page 30). Sensor PrE FiLt rAEdY Cor S-on S-oFF ()    ()                      Table 9 – Available sensor parameters  Select the desired measurement channel by operating the pushbutton CH several times.  Keep the pushbutton PARA depressed for approximately 2 seconds The instrument is now running the parameter mode.  Use the arrow keys to access the parameter group SEn.  Press the pushbutton PARA to select the desired parameter. The name and the value of the parameter are displayed.  Use the arrow keys to change the parameter setting.  Repeat the steps to change further parameters of the parameter group. 7.2.1 Pirani Range Extension (PrE) Pirani range extension for THERMOVAC sensors. Display Description  Pirani range extension deactivated Sensor indicated as  or   Pirani range extension activated Sensor indicated as  or  Table 10 – Values for the parameter PrE 7.2.2 Measured Value Filter (FiLt) The measurement value filter improves processing of unstable signals or signals suffering from interference. The filter has an effect on the display and on the switching functions. However, the analog outputs are not influenced. For the measured value filter you may select between the values 1, 3, 7 and 15. Here 1 stands for fast and 15 for slow. The values 3 and 7 are corresponding intermediate values. In case of a two digit display the use of filter factor of 3 is recommended, in the case of a three digit display filter factor 15 is recommended.

31 7.2.3 Ready Function (rAEdY) The second relay per channel makes according to standard a ready signal available. Alternatively, this relay can be used in addition, as the second switching function. Display Description  Ready signal function activeted  Switching function activeted Table 11 – Values for the parameter rEAdY 7.2.4 Type of Gas Correction (Cor) Sensors have normally been calibrated for measurements in nitrogen or air. With the aid of the parameter Cor you can adjust the measurement channel to other type of gases (PENNINGVAC sensors PTR81N, PTR225, PTR225N, PTR225S, PTR225SN, PTR237 and PTR237N only). For this proceed as follows  Select the parameter Cor.  Press the key marked PARA. The correction factor is displayed.  Use the arrow keys to change the correction factor. The value of the parameter is changed. You can adjust the correction factor for a sensor within the range of 0.1 – 1.0 – 9.9. The setting of 1.0 supplies the uncorrected measured values (for nitrogen or air). 7.2.5 Sensor Switch-on type (S-on) This parameter defines how the PENNINGVAC sensors PTR81N, PTR225, PTR225N, PTR225S, PTR225SN, PTR237 and PTR237N are switched on. You can set up the switch-on type to the following: HAnd Manual. The sensor can be switched on by pressing the key marked UP. ( Chapter 6.4.3.3 Switching on the High Vacuum Measurement Circuit, page 24) ECt Externally through optocoupler (static signal +12 – 24 V DC) Hot Warm start. The sensor is switched on automatically upon switching on the instrument. After a power failure the measurement is started automatically. CH 1 Through measurement channel 1. With the aid of the next parameter t-on you can define a switch-on threshold. As soon as the pressure in measurement channel 1 drops below the switch-on threshold, the sensor will be switched on.

CH 2 Through measurement channel 2. With the aid of the next parameter t-on you can define a switch-on threshold. As soon as the pressure in measurement channel 2 drops below the switch-on threshold, the sensor will be switched on. CH 3 Through measurement channel 3. This setting is only available in the case of the DISPLAY THREE. With the aid of the next parameter t-on you can define a switch-on threshold. As soon as the pressure in measurement channel 3 drops below the switch-on threshold, the sensor will be switched on. 7.2.6 Sensor Switch-on Value (t-on) This parameter will only appear when the sensor switch-on time has been set to CH 1, CH 2 or CH 3 ( Chapter 7.2.5 Sensor Switch-on type (S-on), page 31). Through the parameter t-on you can define a switch-on value. If the pressure in the respective measurement channel drops below the switch-on value, the PENNINGVAC sensors PTR81N, PTR225, PTR225N, PTR225S, PTR225SN, PTR237 and PTR237N are switched on. 7.2.7 Sensor Switch-off type (S-oFF) This parameter defines how the PENNINGVAC sensors PTR81N, PTR225, PTR225N, PTR225S, PTR225SN, PTR237 and PTR237N are switched off. You can set the switch-off type to the following: HAnd Manual. The sensor can be switched off by pressing the key marked DOWN. ( Chapter 6.4.3.4 Switching off the High Vacuum Measurement Circuit, page 25) ECt Externally through optocoupler (static signal +12 – 24 V DC) SELF Self monitoring. With the aid of the next parameter t-off you can define a switch-off threshold. When the pressure at the sensor exceeds the switch off threshold, the sensor will be switched off. CH 1 Through measurement channel 1. With the aid of the next parameter t-off you can define a switch-off threshold. As soon as the pressure in measurement channel 1 exceeds the switch-off threshold, the sensor will be switched off. CH 2 Through measurement channel 2. With the aid of the next parameter t-off you can define a switch-off threshold. As soon as the pressure in measurement channel 2 exceeds the switch-off threshold, the sensor will be switched off. CH 3 Through measurement channel 3. This setting is only available in the case of the DISPLAY THREE. With the aid of the next parameter t-off you can define a switch-off threshold. As soon as the pressure in measurement channel 3 exceeds the switch-off threshold, the sensor will be switched off.

33 7.2.8 Sensor Switch-off Value (t-off) This parameter will only appear when the sensor switch-off type has been set to CH 1, CH 2 or CH 3 ( Chapter 7.2.7 Sensor Switch-off type (S-oFF), page 32). Through the parameter t-off you can define a switch-off value. If the pressure in the respective measurement channel exceeds the switch-off value, the PENNINGVAC sensors PTR81N, PTR225, PTR225N, PTR225S, PTR225SN, PTR237 and PTR237N are switched off. 7.3 General Parameters (PArA GEn) With the aid of these parameters you can generally configure the instrument. The parameters apply to all measurement channels.  Keep the pushbutton PARA depressed for approximately 2 seconds. The instrument is now in the parameter mode.  Use the arrow pushbuttons so as to access the parameter group GEn.  Press the pushbutton PARA to select the desired parameter. The name and the value of the parameter are displayed.  Use the arrow pushbuttons so as to change the parameter setting.  Repeat the steps so as to change further parameters of the parameter group. 7.3.1 Unit of Measurement (unit) Unit of measurement for pressure values. This unit of measurement affects the displayed pressure values, threshold values etc. Display Description  Unit of measurement mbar  Unit of measurement Torr  Unit of measurement Pascal Table 12 – Values for the parameter unit The unit of measurement is indicated on the display ( Figure 12, page 21). 7.3.2 Display Format (diGit) Number of digits on the display. Display Description  2 digits, for example 2,5-1 or 370  3 digits, for example 2,47-1 or 373 Table 13 – Values for the parameter diGit

7.3.3 Display Brightness (bri) Display brightness. Display Description  High brightness  Low brightness Table 14 – Values for the parameter bri 7.3.4 Analog Output (AnALoG) Voltage at the analog output. Display Description  Analog output voltage same as at the sensor output  Halved Analog output Table 15 – Values for the parameter AnA

35 8. Maintenance and Service 8.1 Maintenance 8.1.1 General Maintenance Information For external cleaning please only use a dry piece of cotton cloth. Do not use any aggressive or abrasive cleaning agents. DANGER: Mains voltage The instrument contains voltage carrying components inside. Do not insert any objects into the openings of the instrument. Protect the instrument against moisture. Do not open the instrument. 8.2 Troubleshooting 8.2.1 Fault Indication A malfunction affecting the multichannel gauge is indicated by an error message on the display. ( Chapter 8.2.2 Error Messages, page 35) 8.2.2 Error Messages Error (display) Fault cause and remedy  Significantly below the measurement range. The Ready relay switches off.  Significantly above the measurement range. The Ready relay switches off.  Sensor error. Malfunction affecting the connection to the sensor. The message will only be displayed in the display field for the affected measurement channel. Acknowledge by pressing any key.  No sensor connected to the measurement channel. The status message disappears after 30 seconds.  Error affecting the switch-on or switch-off channel. No switch-on or switch-off threshold has been defined for the PENNINGVAC sensors PTR81N, PTR225, PTR225N, PTR225S, PTR225SN, PTR237 or PTR237N. Table 16 – Error messages

8.2.3 Help the Case of Faults If the malfunction persists even after having replaced the sensors, please contact your nearest Leybold GmbH service office. 8.2.4 Fuse Replacement To replace blown fuses use only the type of fuse T1.6A H specified on the rear of the instrument. The two fuses of the instrument are located in the fuse insert at the mains filter ( Figure 7, page 18), which may be levered out using a small screwdriver. 8.2.5 Repair Send defective products for repair to your nearest Leybold GmbH service office. The compa- ny Leybold GmbH will not assume any responsibility or honour a warranty if the operator or third persons have attempted repair work on the multichannel gauge.

37 9. Storing and Waste Disposal 9.1 Packaging Please retain the original packaging. You will need this packaging material when wanting to store the multichannel gauge or when returning it to the Leybold GmbH. 9.2 Shelving The multichannel gauge must only be stored in dry room. During storage, the following ambient conditions need to be maintained:  Ambient temperature: -20 – +60 °C  Humidity of the air: As low as possible. Preferably in a sealed plastic bag with desiccant. 9.3 Waste Disposal As to waste disposal, the branch-specific and local waste disposal and environment regulations for equipment containing electronic components apply. When returning the equipment to the Leybold GmbH, proper and professional separation of the recyclable fraction and its disposal is ensured.

Declaration of Contamination of Compressors, Vacuum Pumps and Components The repair and / or servicing of compressors, va cuum pumps and components will be carried out only if a correctly completed de claration has been submitted. Non-completion will result in delay. The manufacturer can refuse to accept any equipment without a declaration. A separate declaration has to be completed for each single component. This declaration may be completed and signed only by authorized and qualified staff. Customer/Dep./Institute : Reason for return: applicable please mark Address : Repair: chargeable warranty Exchange: chargeable warranty Exchange already arranged / received Person to contact: Return only: rent loan for credit Phone : Fax: Calibration: DKD Factory-calibr. End user: Quality test certificate DIN 55350-18-4.2.1 A. Description of the Leybold product: Failure description: Material description : Catalog number: Additional parts: Serial number: Application-Tool: Type of oil (ForeVacuum-Pumps) : Application- Process: B. Condition of the equipment No1) Yes No Contamination : No1) Yes 11.. Has the equipment been used toxic 2. Drained (Product/service fluid) corrosive 3. All openings sealed airtight flammable 4. Purged explosive 2) If yes, which cleaning agent radioactive 2) and which method of cleaning microbiological 2) 1) If answered with “No”, go to D. other harmful substances C. Description of processed substances (Please fill in absolutely) 1. What substances have come into contact with the equipment ? Trade name and / or chemical term of service fluids and substances processed, properties of the substances According to safety data sheet (e.g. toxic, inflammable, corrosive, radioactive) X Tradename: Chemical name: a) b) c) d) No Yes 2. Are these substances harmful ? 3. Dangerous decomposition products when heated ? If yes, which ? 2) Components contaminated by microbiological, explosive or radioactive products/substances will not be accepted without written evidence of decontamination. D. Legally binding declaration I / we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level. Name of authorized person (block letters) : Date signature of authorized person firm stamp

D-50968 Cologne T: +49-(0)221-347-0 F: +49-(0)221-347-1250 [email protected] Germany Leybold GmbH Sales, Service, Support Center (3SC) Bonner Strasse 498 D-50968 Cologne T: +49-(0)221-347 1234 F: +49-(0)221-347 31234 [email protected] www.leybold.com Leybold GmbH Sales Area North Branch Office Berlin Industriestrasse 10b D-12099 Berlin T: +49-(0)30-435 609 0 F: +49-(0)30-435 609 10 [email protected] Leybold GmbH Sales Office South Branch Office Munich Karl-Hammerschmidt-Strasse 34 D-85609 Aschheim-Dornach T: +49-(0)89-357 33 9-10 F: +49-(0)89-357 33 9-33 [email protected] [email protected] Leybold Dresden GmbH Service Competence Center Zur Wetterwarte 50, Haus 304 D-01109 Dresden Service: T: +49-(0)351-88 55 00 F: +49-(0)351-88 55 041 [email protected] Europe Belgium Leybold Nederland B.V. Belgisch bijkantoor Leuvensesteenweg 542-9A B-1930 Zaventem Sales: T: +32-2-711 00 83 F: +32-2-720 83 38 [email protected] Service: T: +32-2-711 00 82 F: +32-2-720 83 38 [email protected] France Leybold France S.A.S. Parc du Technopolis, Bâtiment Beta 3, Avenue du Canada F-91940 Les Ulis cedex Sales and Service: T: +33-1-69 82 48 00 F: +33-1-69 07 57 38 [email protected] [email protected] Leybold France S.A.S. Valence Factory 640, Rue A. Bergès B.P. 107 F-26501 Bourg-lès-Valence Cedex T: +33-4-75 82 33 00 F: +33-4-75 82 92 69 [email protected] Great Britain Leybold UK LTD. Unit 9 Silverglade Business Park Leatherhead Road Chessington Surrey (London) KT9 2QL Sales: T: +44-13-7273 7300 F: +44-13-7273 7301 [email protected] Service: T: +44-13-7273 7320 F: +44-13-7273 7303 [email protected] Italy Leybold Italia S.r.l. Via Trasimeno 8 I-20128 Mailand Sales: T: +39-02-27 22 31 F: +39-02-27 20 96 41 [email protected] Service: T: +39-02-27 22 31 F: +39-02-27 22 32 17 [email protected] Netherlands Leybold Nederland B.V. Floridadreef 102 NL-3565 AM Utrecht Sales and Service: T: +31-(30) 242 63 30 F: +31-(30) 242 63 31 [email protected] [email protected] Switzerland Leybold Schweiz AG, Pfäffikon Churerstrasse 120 CH-8808 Pfäffikon Warehouse and shipping address: Riedthofstrasse 214 CH-8105 Regensdorf Sales: T: +41-44-308 40 50 F: +41-44-302 43 73 [email protected] Service: T: +41-44-308 40 62 F: +41-44-308 40 60 [email protected] Spain Leybold Spain, S.A. C/. Huelva, 7 E-08940 Cornellà de Llobregat (Barcelona) Sales: T: +34-93-666 43 11 F: +34-93-666 43 70 [email protected] Service: T: +34-93-666 46 11 F: +34-93-685 43 70 [email protected] America USA Leybold USA Inc. 5700 Mellon Road USA-Export, PA 15632 T: +1-724-327-5700 F: +1-724-325-3577 [email protected] Sales: T: +1-724-327-5700 F: +1-724-333-1217 Service: T: +1-724-327-5700 F: +1-724-325-3577 Brazil Leybold do Brasil Rod. Vice-Prefeito Hermenegildo Tonolli, nº. 4413 - 6B Distrito Industrial Jundiaí - SP CEP 13.213-086 Sales and Service: T: +55 11 3395 3180 F: +55 11 99467 5934 [email protected] [email protected] Asia P. R. China Leybold (Tianjin) International Trade Co. Ltd. Beichen Economic Development Area (BEDA), No. 8 Western Shuangchen Road Tianjin 300400 China Sales and Service: T: +86-22-2697 0808 F: +86-22-2697 4061 F: +86-22-2697 2017 [email protected] [email protected] India Leybold India Pvt Ltd. No. 82(P), 4th Phase K.I.A.D.B. Plot Bommasandra Industrial Area Bangalore - 560 099 Indien Sales and Service: T: +91-80-2783 9925 F: +91-80-2783 9926 [email protected] [email protected] Japan Leybold Japan Co., Ltd. Headquarters Shin-Yokohama A.K.Bldg., 4th floor 3-23-3, Shin-Yokohama Kohoku-ku, Yokohama-shi Kanawaga 222-0033 Japan Sales: T: +81-45-471-3330 F: +81-45-471-3323 [email protected] Leybold Japan Co., Ltd. Tsukuba Technical Service Center 1959, Kami-yokoba Tsukuba-shi, Ibaraki-shi 305-0854 Japan Service: T: +81-29 839 5480 F: +81-29 839 5485 [email protected] Malaysia Leybold Malaysia Leybold Singapore Pte Ltd. No. 1 Jalan Hi-Tech 2/6 Kulim Hi-Tech Park Kulim, Kedah Darul Aman 09000 Malaysia Sales and Service: T: +604 4020 222 F: +604 4020 221 [email protected] [email protected] South Korea Leybold Korea Ltd. 3F. Jellzone 2 Tower Jeongja-dong 159-4 Bundang-gu Sungnam-si Gyeonggi-do Bundang 463-384, Korea Sales: T: +82-31 785 1367 F: +82-31 785 1359 [email protected] Service: 623-7, Upsung-Dong Cheonan-Si Chungcheongnam-Do Korea 330-290 T: +82-41 589 3035 F: +82-41 588 0166 [email protected] Singapore Leybold Singapore Pte Ltd. 8 Commonwealth Lane #01-01 Singapore 149555 Singapore Sales and Service: T: +65-6303 7030 F: +65-6773 0039 [email protected] [email protected] Taiwan Leybold Taiwan Ltd. No 416-1, Sec. 3 Chunghsin Rd., Chutung Hsinchu County 310 Taiwan, R.O.C. Sales and Service: T: +886-3-500 1688 F: +886-3-583 3999 [email protected] [email protected] Sales and Service