VAT 075 Series Installation, Operating, & Maintenance Instructions

Maintenance Instructions 601899EC Edition 2014-08-20 Door L-VAT with double acting pneumatic actuator Series 075 50 × 336 mm (1.97" × 13.23") This manual is valid for the following product ordering numbers: 075..- .... - .... Sample picture

Website: Phone: Fax: Email: www.vatvalve.com +41 81 771 61 61 +41 81 771 48 30 [email protected] Publisher VAT Vakuumventile AG, CH-9469 Haag, Switzerland Editor VAT Vakuumventile AG, CH-9469 Haag, Switzerland Print VAT Vakuumventile AG, CH-9469 Haag, Switzerland Copyright © VAT Vakuumventile AG 2014 No part of these instructions may be reproduced in any way (photo- copies, microfilms or any other reproduction processes) nor may it be manipulated with electronic systems, duplicated or distributed without written permission from VAT. Offenders are liable to pay damages. The original VAT firmware and updated state of the art versions of the VAT firmware are intended for use with VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people. The use of trade names, brand names, trademarks, etc. in these Instructions does not entitle third parties to consider these names to be unprotected and to use them freely. This is in accordance with the meaning of the laws and acts covering brand names and trademarks.

1.1 Identification of product.................................................................................... 5 1.2 Use of product ................................................................................................. 5 1.3 Used abbreviations .......................................................................................... 5 1.4 Related documents.......................................................................................... 5 1.5 Important information ....................................................................................... 5 1.6 Technical data ................................................................................................. 5 2 Safety ................................................................................................... 6 2.1 Compulsory reading material ........................................................................... 6 2.2 Danger levels .................................................................................................. 6 2.3 Personnel qualifications ................................................................................... 7 2.4 Safety labels .................................................................................................... 7 3 Design and Function ........................................................................... 8 3.1 Design ............................................................................................................. 8 3.2 Function .......................................................................................................... 9 4 Installation ......................................................................................... 10 4.1 Unpacking ..................................................................................................... 10 4.2 Installation into the system............................................................................. 11 4.3 Compressed air connection ........................................................................... 12 4.4 Electrical connection ...................................................................................... 12 4.5 Initial operation .............................................................................................. 13 5 Operation ........................................................................................... 14 5.1 Normal operation ........................................................................................... 15 5.2 Operation under increased temperature ......................................................... 15 5.3 Behavior in case of air pressure drop ............................................................. 15 5.4 Behavior in case of power failure ................................................................... 15 5.5 Trouble shooting ............................................................................................ 16 6 Maintenance ...................................................................................... 17 6.1 Maintenance intervals .................................................................................... 17 6.2 Required tools ............................................................................................... 17 6.3 Replacement of actuator pneumatic seals ...................................................... 18 6.4 Replacement of gate ..................................................................................... 20 7 Repairs ............................................................................................... 22 8 Dismounting and Storage ................................................................. 23 8.1 Dismounting .................................................................................................. 24 8.2 Storage ......................................................................................................... 24 9 Packaging and Transport ................................................................. 25 9.1 Packaging ..................................................................................................... 26 9.2 Transport ....................................................................................................... 26

11 Spare parts ........................................................................................ 28

601899EC Edition 2014-08-20 5/29 1 Description of product 1.1 Identification of product The fabrication number and order number are fixed on the product directly or by means of an identification plate. made in Switzerland Fabrication No.: 075 . . - . . . . - . . . . / . . . . A - . . . . . .

Fabrication number Order number 1.2 Use of product Use product for clean and dry vacuum applications only. Other applications are only allowed with the written permission of VAT. 1.3 Used abbreviations Abbreviation Description ATM Atmospheric CDA Compressed dry air Table 1-1 1.4 Related documents • Product data sheet • Dimensional drawing 1.5 Important information This symbol points to a very important statement that requires particular attention. Example: VAT disclaims any liability for damages resulting from inappropriate packaging. 1.6 Technical data See product data sheet and dimensional drawing.

Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life. NOTICE Lack of knowledge Failing to read this manual may result in property damage. Firstly, read manual. These Installation, Operating & Maintenance Instructions are an integral part of a comprehensive documentation belonging to a complete technical system. They must be stored together with the other documentation and accessible for anybody who is authorized to work with the system at any time. 2.2 Danger levels DANGER High risk Indicates a hazardous situation which, if not avoided, will result in death or serious injury. WARNING Medium risk Indicates a hazardous situation which, if not avoided, could result in death or serious injury. CAUTION Low risk Indicates a hazardous situation which, if not avoided, may result in minor or moderate injury. NOTICE Command Indicates a hazardous situation which, if not avoided, may result in property damage.

Only qualified personnel are allowed to carry out the described work. 2.4 Safety labels Label Part No. Location on product T-9001-155 Outer side of both horizontal actuators Table 2-1

Series 075 8/29 Edition 2014-08-20 601899EC 3 Design and Function 3.1 Design Door type V Actuator body mounted to bottom of chamber Door type U Actuator body mounted to chamber wall Figure 3-1 26 Actuator body 70 O-ring 42 Position indicator 90 O-ring 68 Set screw 99 Screw

601899EC Edition 2014-08-20 9/29 3.2 Function The 075 ATM door consists of two vertical pneumatic cylinders, one pneumatic box and three horizontal actuators. The vertical cylinders move from open to closed position in the vertical direction. The horizontal actuators move the gate from the open position to the closed position in horizontal direction. The gate moves in a so called L-movement. OPEN CLOSED CLOSED unlocked locked 1 Gate O-ring 2 Gate 3 Pressure element 4 Pneumatic actuator Figure 3-2 1 2 4 3

Only qualified personnel are allowed to carry out the described work. NOTICE Insufficient stability Product will get damaged if it is not stabilized. Assistant staff required to lift and stabilize the product during mounting. 4.1 Unpacking • Make sure that the supplied product is in accordance with your order. • Inspect the quality of the supplied product visually. If it does not meet your requirements, please contact VAT immediately. • Store the original packaging material. It may be useful if the product must be returned to VAT. 1. Cut plastic straps and open the transport box. Remove plastic bag in a cleanroom only. 2. Open the plastic bag to unpack gate and actuator. NOTICE Sensitive product Product will get damaged if not handled carefully. Handle product with care: Do not touch solid objects when lifting the product and place it down slowly and gently. 3. Place products on a clean surface.

WARNING Hazardous components Parts, loaded springs, air cushions etc. may move or release a movement and cause serious injury. Do not connect or supply electrical power and compressed air before the product is completely mounted in the system. NOTICE Contamination Product may get contaminated. Always wear cleanroom gloves when handling the product. NOTICE Insufficient stability Product may get damaged when actuated at this stage. Do not operate before product is installed completely into the vacuum system. NOTICE Wrong tightening torque Door and screws may get damaged. Use tightening torque according to the size of the screws. • Make sure that sealing surfaces of the door and the chamber are undamaged. Mount door to a clean system only. • Make sure that dimensions and tolerances specified on the dimensional drawing are strictly met. 1. Mount actuator to the chamber, use screws (99) M6×50 mm; see «Figure 3-1» on page 8. Quantity of screws depends on mounting position. For U-Type, 3 screws are required, for V-Type, 4 screws are required.

WARNING Product in open position Risk of injury when compressed air is connected to the product. Connect compressed air only when: – product is installed to the vacuum system – moving parts cannot be touched Use clean, dry or slightly oiled air only. Admissible air pressure range, see product data sheet. 1. Connect compressed air according to the product data sheet and dimensional drawing. 4.4 Electrical connection WARNING Product in open position Risk of injury when product is put into operation. Keep human body parts away from movable parts. NOTICE Wrong voltage Electrical components may get damaged. Supply electrical components with the correct voltage. 1. Connect position indicator according to the product data sheet and dimensional drawing.

Keep human body parts away from movable parts. L-movement requires initializing of compressed air system. The door command must be set to open at first. This will pressurize the pneumatic system and ensure the proper L-movement during the following closing cycles. 1. Open the door. 2. Close the door.

Only qualified personnel are allowed to carry out the described work. WARNING Movable parts Human body parts may get jammed and severely injured. Do not operate before product is installed completely into the vacuum system. Until actuation of the door keep human body parts away from movable parts. During operation of the ATM door the pneumatic cylinders move the gate. There are small gaps with danger of injury, see «Figure 5-1». Take appropriate measures to avoid possible human injury. Do not insert body parts through door opening during operation of door. Small gaps Figure 5-1

5.2 Operation under increased temperature Maximum allowed temperature, see product data sheet. 5.3 Behavior in case of air pressure drop See product data sheet. L-movement requires initializing of compressed air system. The door command must be set to open at first. This will pressurize the pneumatic system and ensure the proper L-movement during the following closing cycles. Proper function of internal nonreturn valve depends on speed of air pressure drop. Slow pressure drop in air supply will not trigger the nonreturn valve, therefore the position of the door will be undefined at loss of compressed air pressure. 1. Open the door. 2. Close the door. 5.4 Behavior in case of power failure Depending on customer’s installation.

Check seals and sealing surfaces Clean sealing surfaces Product data sheet Damage of gate Replace gate «6.4 Replacement of gate» Seal compression of gate Check compressed air Product data sheet and dimensional drawing Door cannot be operated Connection of air lines Check compressed air lines Product data sheet and dimensional drawing Connection of power Check power lines Product data sheet and dimensional drawing Gate slides at chamber wall Installation and initial command 1. Move door to open position 2. Attach door to chamber 3. Connect air to “OPEN”- port” only. 4. Block port “P” so no air can leave this port 5. Connect air tubing to “P- port” and apply CDA to this port 6. Move door to “CLOSED”- position Product data sheet and dimensional drawing Compressed air Check compressed air pressure, requirement: 4 – 7 bar Air tubing Check correct length and diameter of compressed air supply tubing. Connection of air lines Check compressed air lines Table 5-1 If you need any further information, please contact one of our service centers. You will find the addresses on our website www.vatvalve.com.

Only qualified personnel are allowed to carry out the described work. WARNING Hazardous components Human body parts may get jammed and severely injured. Before starting maintenance: – disconnect compressed air supply – disconnect electrical power supply WARNING Movable parts Human body parts may get jammed and severely injured. Keep human body parts away from movable parts. 6.1 Maintenance intervals Under clean operating conditions the product does not require any maintenance during specified lifetime. • Influences from the process may require more frequent maintenance. • If the door has reached the specified life cycle – see product data sheet – we recommend a general overhaul by VAT. Please contact one of our service centers. You will find the contact data on our website www.vatvalve.com. 6.2 Required tools • Allen wrench size 3, 4 and 5 • Torque wrench 4.5 Nm / 6 Nm / 9 Nm • Cleanroom wiper soaked with alcohol (2% methyl ethyl ketone) • O-Ring removal tool; see «Table 11-1» on page 28 Figure 6-1

NOTICE Wrong tightening torque Door body and screws may get damaged. Use tightening torque according to size of the screws. NOTICE Contamination Product may get contaminated. Always wear cleanroom gloves when handling the product. NOTICE Inappropriate tools Sealing surfaces may get damaged. Do not use sharp-edged tools. The item numbers in brackets refer to «Figure 3-1» on page 8. 1. Vent chambers. 2. Open the door. 3. Disconnect compressed air. 4. Disconnect electrical power supply. 5. Remove the 4 set screws (68) on the back of the pressure plate. 6. Remove pressure plate assembly from the actuator shafts, also remove the 2 O-rings (70) from the actuator shafts; place these parts in an area where they are protected from contamination and damage. 7. Remove the screws (99). 8. Remove the actuator assembly from the system. 9. Remove the 4 dowel pins (20) (2 per actuator shaft) and pull the bushing out of the actuator body «Figure 6-2». Make sure that the bushings do not get damaged during this action. 10. Remove the actuator shafts from the actuator body.

details, use O-ring removal tool. 12. Clean and lubricate all grooves for all seals removed in the previous step. 13. Put new seals (10), (11), (12), (14), (15), (18), taken out of the actuator service kit, into the appropriate grooves. 14. Clean and lubricate the pneumatic cylinder walls in the actuator body. 15. Assemble the door in reverse order Make sure that both O-rings (70) are in the correct position before the pressure plate is mounted on the actuator shafts. 16. Tighten the 3 (Type U) or 4 (Type V) screws (99) with a torque of 6 Nm. Figure 6-2 17. Connect electrical power supply. 18. Connect compressed air supply. 19. Perform one cycle, see chapter «4.5 Initial operation» Door is ready for use.

NOTICE Wrong tightening torque Door body and screws may get damaged. Use tightening torque according to size of the screws. NOTICE Contamination Product may get contaminated. Always wear cleanroom gloves when handling the product. NOTICE Inappropriate tools Sealing surfaces may get damaged. Do not use sharp-edged tools. 1. Vent chambers. 2. Open the door. 3. Disconnect electrical power supply. 4. Disconnect compressed air supply. 5. Remove the 4 set screws (68); see «Figure 3-1», on the back of the pressure plate. 6. While pulling the pressure plate from the shafts, make sure that the 2 O-rings (70) stay on the shaft or put them back in position right after removing the plate. 7. Remove the 3 screws (75) and washers (61); see «Figure 6-3», and remove gate. Never use the old, used screws (75) again. If a screw is removed, it has to be replaced by a new one with fresh adhesive coating; otherwise no safe lock is guaranteed. 8. Clean or replace gate. 9. Use only the new screws (75) supplied with the spare gate or ordered separately to reassemble the gate. 10. Before reassembling the gate to the pressure plate, make sure that all the pistons and washers are at the correct position according to the assembly drawing. 11. Tighten the 3 screws (75) with a torque of 9 Nm; see «Figure 6-3».

(70) are in the correct position. 13. Tighten the 4 set screws (68) with a torque of 4.5 Nm; These 4 screws have to be tightened step by step, cross-wise to evenly distribute force on the pressure bar. Make sure that the tips of the set screws fit into the 90° countersunk in the shafts. During system maintenance it is advised to check if the 3 screws (75) are still tightened properly according point 11. 14. Connect electrical power supply of position indicator. 15. Connect compressed air supply. 16. Perform one cycle, see chapter «4.5 Initial operation». Door is ready for use.

customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com.

601899EC Edition 2014-08-20 23/29 8 Dismounting and Storage WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Hazardous components Human body parts may get jammed and severely injured. Before dismounting the product: – disconnect compressed air supply – disconnect electrical power supply WARNING Movable parts Human body parts may get jammed and severely injured. Keep human body parts away from movable parts. NOTICE Contamination Product may get contaminated. Always wear cleanroom gloves when handling the product.

Series 075 24/29 Edition 2014-08-20 601899EC 8.1 Dismounting NOTICE Sensitive product Product will get damaged if not handled carefully. Handle product with care: Do not touch solid objects when lifting the product and place it down slowly and gently. 1. Open the door. 2. For dismounting the door follow the steps of chapter «4 Installation», however in reverse order. Pay attention to the safety instructions! 8.2 Storage NOTICE Wrong storage Inappropriate temperatures and humidity may cause damage to the product. Door must be stored at: – relative humidity between 10% and 70% – temperature between +10 °C and +50 °C – non-condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. 1. Clean / decontaminate product. 2. Cover the gate plate with protective foil. 3. Pack product appropriately by using the original packaging material.

601899EC Edition 2014-08-20 25/29 9 Packaging and Transport WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Harmful substances Risk of injury in case of contact with harmful substances. Remove harmful substances (e. g. toxic, caustic or microbiological ones) from valve before you return the valve to VAT. NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. • When returning products to VAT, please fill out the VAT form «Declaration of Chemical Contamination» and send it to VAT in advance. The form can be downloaded from our website www.vatvalve.com. • If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. • If products are sent to VAT in contaminated condition, VAT will carry out the decontamination procedure at the customer's expense.

Series 075 26/29 Edition 2014-08-20 601899EC 9.1 Packaging 1. Cover the gate with protective foil. 2. Pack product appropriately by using the original packaging material. VAT disclaims any liability for damages resulting from inappropriate packaging. 9.2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. VAT disclaims any liability for damages resulting from inappropriate packaging.

Non-original spare parts may cause damage to the product. Use original spare parts from VAT only. • Please specify the fabrication number of the product when you place an order for spare parts; see chapter «1.1 Identification of product». This is to ensure that the appropriate spare parts are supplied. • VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff. • «Table 11-1» only contains spare parts that may be replaced by the customer. If you need any other spare parts, please contact one of our service centers. You will find the addresses on our website www.vatvalve.com. Description Part No. Quantity per valve Maintenance procedure see chapter Gate with O-ring groove on request 1 «6.4 Replacement of gate» O-ring for gate on request 1 «6.4 Replacement of gate» Vulcanized gate on request 1 «6.4 Replacement of gate» Revision kit actuator 556366 1 «6.3 Replacement of actuator pneumatic seals» Lubricant N-6951-403 1 «6.3 Replacement of actuator pneumatic seals» O-ring removal tool 234859 1 – Table 11-1