Inficon Porter CDG020D Operating Manual

Porter™ CDG020D Operating Manual Incl. EC Declaration of Conformity

mation given on the product nameplate. For convenient refer- ence copy that information into the space provided below. Model: PN: SN: V W

Part numbers of standard products are indicated below. OEM products have other part numbers and different parameter settings (e.g. customized measurement range) as defined in the corresponding ordering information. 5  Torr (x 133 Pa; x 1.3 mbar) 6  mbar (x 100 Pa) 1  DN 16 ISO-KF C  4VCR male D  4VCR female E  8VCR female 0  FCC 1  D-Sub, 9-pin A  Binder M12, 8-pin 3CAx-xxx-0x00 9  10 A  20 B  50 C  100 D  200 E  500 F  1000 (Torr only) G  1100 (mbar only) Flange Unit Measurement range (F.S.) 3  1% 4  0.5% Accuracy Receptacle The part number (PN) can be taken from the product nameplate. If not indicated otherwise in the legends, the illustrations in this document correspond to gauges with D-Sub receptacle and the DN 16 ISO-KF vacuum connection. They apply to other gauges by analogy. We reserve the right to make technical changes without prior notice. All dimensions in mm.

are intended for absolute pressure measurement of gases in their respective pressure ranges (→  3). The gauges can be operated in connection with an INFICON Vacuum Gauge Controller (VGC series) or another appropriate measuring unit. Function The Capacitance Diaphragm Gauge consists of a capacitive sensor element made of aluminum oxide ceramics and electro- nics which convert the capacitance into a DC voltage output sig- nal. The output signal is linear to the measured pressure and inde- pendent of the gas type. Trademarks Porter™ INFICON GmbH VCR® Swagelok Marketing Co. Patents EP 1070239 B1, 1040333 B1 US 6528008 B1, 6591687 B1, 7107855 B2, 7140085 B2, 7536915 B2

6 1.2 Personnel Qualifications 6 1.3 General Safety Instructions 7 1.4 Liability and Warranty 7 2 Technical Data 8 3 Installation 13 3.1 Vacuum Connection 13 3.2 Power Connection 16 3.2.1 FCC68, 8-pin Connector 17 3.2.2 D-Sub, 9-pin Connector 18 3.2.3 Binder M12, 8-pin 19 4 Operation 20 4.2 Zeroing the Gauge 20 4.2.1 Zero Adjustment 20 5 Deinstallation 22 6 Maintenance, Repair 23 7 Returning the Product 24 8 Disposal 25 Further Information 26 ETL Certification 26 EC Declaration of Conformity 27 For cross-references within this document, the symbol (→  XY) is used, for cross-references to further documents, listed under "Further Information", the symbol (→  [Z]).

WARNING Information on preventing extensive equipment and environ- mental damage. Caution Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Notice 1.2 Personnel Qualifications Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the neces- sary experience or who have been instructed by the end-user of the product.

• Adhere to the applicable regulations and take the necessary precautions for the process media used. Consider possible reactions with the product materials. • Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document. • Before beginning to work, find out whether any vacuum com- ponents are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contamin- ated parts. Communicate the safety instructions to all other users. 1.4 Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end-user or third parties • disregard the information in this document • use the product in a non-conforming manner • make any kind of interventions (modifications, alterations etc.) on the product • use the product with accessories not listed in the product documentation. The end-user assumes the responsibility in conjunction with the process media used. Gauge failures due to contamination or wear and tear are not covered by the warranty.

≤0.5% of reading Temperature effect on zero 0.02% F.S./ °C Temperature effect on span 0.02% of reading/ °C Resolution 0.05% F.S. Gas type dependence none Output signal analog (measuring signal) Voltage range –0.2 … +10.24 V Measuring range 0 … +10 V Relationship voltage-pressure linear Output impedance 10 Ω (short-circuit proof) Loaded impedance >10 kΩ Response time 100 ms Gauge identification Resistance 13.2 kΩ refer- enced to supply common 1) Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C ambient operating temperature without temperature effects after operation of 2 h.

plies, instruments or control devices that conform to the requirements of a grounded protective extra- low voltage (SELV) and limited power source (LPS), Class 2. The connection to the gauge has to be fused 2). Supply voltage at the gauge ripple +13 … +32 VDC Class 2 / LPS ≤50 mVpp Current consumption <20 mA Power consumption ≤0.3 W Fuse required 2) 1 AT (slow), automatic reset (Polyfuse) The gauge is protected against reverse polarity of the supply voltage. Electrical connection 3CAx-xxx-0xxx 3CAx-xxx-1xxx 3CAx-xxx-Axxx FCC68/RJ45, 8-pin, socket D-Sub, 9-pin, male Binder M12, 8-pin, male Sensor cable 3CAx-xxx-0xxx 3CAx-xxx-1xxx 3CAx-xxx-Axxx 8-pin plus shielding 9-pin plus shielding 8-pin plus shielding Cable length ≤100 m (0.14 mm² conductor) For longer cables, larger conductor cross-sections are required. Grounding concept Vacuum flange - signal common → "Power Connection" Supply common - signal common conducted separately; for dif- ferential measurement (10 Ω) 2) INFICON controllers fulfill this requirement.

Flange, tube Sensor, feedthrough stainless steel AISI 316L ceramics (Al2O3 ≥99.5%) Internal volume DN 16 ISO-KF 4 VCR male 4 VCR female 8 VCR female ≤3.7 cm3 ≤6.1 cm3 ≤5.6 cm3 ≤5.1 cm3 Admissible pressure (absolute) ≥500 Torr/mbar (F.S.) 50 … 200 Torr/mbar (F.S.) 10 … 30 Torr/mbar (F.S.) 4 bar 3 bar 2 bar Bursting pressure (absolute) 6 bar Temperature compensated range +10 °C … +50 °C Admissible temperatures Storage Operation Bakeout (not in operation) –20 °C … +85 °C 0 °C … +70 °C ≤110 °C at the flange Relative humidity ≤80% at temperatures ≤+31 °C decreasing to 50% at +40°C Use indoors only, altitude up to 4000 m NN Degree of protection IP 40

49.2 4 VCR female 30.7 8 VCR female 64.2 4 VCR male 23.8 23.8 6 Weight ≤159 g

1 2 3 4 5 6 7 8 9 10 0 0.9×F.S. 0.5×F.S. 0.6×F.S. 1.0×F.S. 0.7×F.S. 0.8×F.S. 0.1×F.S. 0.2×F.S. 0.3×F.S. 0.4×F.S. 1.1×F.S. Pressure p Measuring signal Uout [V] 0.0×F.S. p = (Uout / 10 V) × p (F.S.) Conversion Torr ↔ Pascal Torr mbar 3) Pa 3) c 1.00 1013.25 / 760 = 1.3332… 101325 / 760 = 133.3224… Example: Gauge with 10 Torr F.S. Measuring signal Uout = 6 V p = (6 V / 10 V) × 10 Torr = 0.6 × 10 Torr = 6 Torr 3) Source: NPL (National Physical Laboratory) Guide to the Measurement of Pressure and Vacuum, ISBN 0904457x / 1998

The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. 3.1 Vacuum Connection DANGER DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. Do not open any clamps while the vacuum system is pressurized. Use the type clamps which are suited to overpressure. DANGER DANGER: overpressure in the vacuum system >2.5 bar KF flange connections with elastomer seals (e.g. O-rings) cannot withstand such pressures. Process media can thus leak and possibly damage your health. Use O-rings provided with an outer centering ring.

Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the gauge to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection ac- cording to EN 61010: • VCR flanges fulfill this requirement. • For gauges with a KF flange, use a conductive metallic clamping ring. Caution Caution: vacuum component Dirt and damages impair the function of the vac- uum component. When handling vacuum components, take appro- priate measures to ensure cleanliness and prevent damages. Caution Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area.

may be mounted in any orientation. To keep conden- sates and particles from getting into the measuring chamber preferably choose a horizontal to upright posi- tion and possibly use a seal with a centering ring and filter. If adjustment should be possible after the gauge has been installed, be sure to install it so that the button can be accessed with a pin (→  20). Remove the protective lid and connect the product to the vac- uum system. Clamp Seal with centering ring Seal with centering ring and filter Protective lid or Keep the protective lid.

(→  13). DANGER The gauge may only be connected to power sup- plies, instruments or control devices that conform to the requirements of a grounded protective extra- low voltage (SELV) and limited power source (LPS), Class 2. The connection to the gauge has to be fused 4). Ground loops, differences of potential, or EMC problems may affect the measurement signal. For optimum signal quality, please do observe the following notes: • Use an overall metal braided shielded cable. The connector must have a metal case. • Connect the cable shield to ground at one side via the connector case. Make sure the connector case has direct contact to the cable's shield on its whole cir- cumference. Do not connect the other side of the shield. • Connect the supply common with protective ground directly at the power supply. • Use differential measurement input (signal common and supply common conducted separately). • Potential difference between supply common and housing ≤16 V (overvoltage protection). 4) INFICON controllers fulfill this requirement.

If no sensor cable is available, make one according to the following diagram. Connect the sensor cable (cable →  9). 100K 4 Ident 3 5 1 2 680nF 16 V 10Ω Measurement signal case Remote Zero Adjust Electrical connection Pin 1 Supply Pin 2 Supply common GND Pin 3 Signal output (measurement signal) Pin 4 Gauge identification or Remote Zero Adjust Pin 5 Signal common Pin 6 N.C. Pin 7 N.C. Pin 8 N.C. case Connector case 1 8 8-pin FCC68 connector

If no sensor cable is available, make one according to the following diagram. Connect the sensor cable (cable →  9). 100K 7 Ident 1 8 4 9 680nF 16 V 10Ω Measurement signal case Remote Zero Adjust Electrical connection Pin 1 Signal output (measurement signal) Pin 2 N.C. Pin 3 N.C. Pin 4 Supply Pin 5 N.C. Pin 6 N.C. Pin 7 Gauge identification or Remote Zero Adjust Pin 8 Signal common Pin 9 Supply common GND case Connector case 9 5 6 1 9-pin D-Sub female soldering side

If no sensor cable is available, make one according to the following diagram. Connect the sensor cable (cable →  9). 100K 4 Ident 3 5 1 2 680nF 16 V 10Ω Measurement signal case Remote Zero Adjust Electrical connection Pin 1 Supply Pin 2 Supply common GND Pin 3 Signal output (measurement signal) Pin 4 Gauge identification or Remote Zero Adjust Pin 5 Signal common Pin 6 N.C. Pin 7 N.C. Pin 8 N.C. case Connector case 5 3 7 4 1 6 2 8 8-pin Binder M12 female soldering side

troller, define the measurement range (→  [2], [3], [4]). Warm-up time: approx. 1 minute. 4.1 Zeroing the Gauge The gauge is factory calibrated while "standing upright". It re- quires no maintenance. Due to mounting orientation, long time operation or contamina- tion, a zero drift could occur and zero adjustment may become necessary. For adjusting the zero, operate the gauge under the same con- stant ambient conditions and in the same mounting orientation as normally. If the gauge is operated via a controller, the zero of the whole measuring system has to be adjusted on the controller: first, adjust the zero of the gauge and then, the zero of the controller. 4.1.1 Zero Adjustment The zero can be adjusted via • the button on the gauge, or • the digital input "Remote Zero Adjust " (briefly apply the supply voltage to pin 7 (D-Sub connector) or to pin 4 (FCC68 and Binder M12 connector)), or • an INFICON Vacuum Gauge Controller (VGC series).

below: F.S. Recommended final pressure for zero adjustment 1100 mbar 1000 Torr/mbar 200 Torr/mbar 100 Torr/mbar 50 Torr/mbar 20 Torr/mbar 10 Torr/mbar − <5×10-2 Torr <10-2 Torr <5×10-3 Torr <2.5×10-3 Torr <10-3 Torr <5×10-4 Torr <6.65×100 Pa <6.65×100 Pa <1.33×10-0 Pa <6.65×10-1 Pa <3.33×10-1 Pa <1.33×10-1 Pa <6.65×10-2 Pa <5×10-2 mbar <5×10-2 mbar <10-2 mbar <5×10-3 mbar <2.5×10-3 mbar <10-3 mbar <5×10-4 mbar If the final pressure in the gauge is too high for zero ad- justment (>25% of the F.S.), the zero cannot be reached.  Briefly press the button with a pin (max. ø1.1 mm). The zero adjustment runs automatically (duration ≤8 s). Press the button briefly max. ø1.1 mm After zero adjustment the gauge automatically returns to measurement mode.

The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts. DANGER DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant re- gulations and take the necessary precautions when handling contaminated parts. Caution Caution: vacuum component Dirt and damages impair the function of the vac- uum component. When handling vacuum components, take appro- priate measures to ensure cleanliness and prevent damages.

Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area.  Vent the vacuum system.  Put the gauge out of operation.  Disconnect the sensor cable.  Remove the gauge from the vacuum system and install the protective lid. 6 Maintenance, Repair The product requires no maintenance. Gauge failures due to contamination or wear and tear are not covered by the warranty. We recommend checking the zero at regular intervals. INFICON assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties.

WARNING WARNING: forwarding contaminated products Contaminated products (e.g. radioactive, toxic, caustic or microbiological hazard) can be detrimen- tal to health and environment. Products returned to INFICON should preferably be free of harmful substances. Adhere to the forward- ing regulations of all involved countries and for- warding companies and enclose a duly completed declaration of contamination *). *) Form under www.inficon.com Products that are not clearly declared as "free of harmful sub- stances" are decontaminated at the expense of the customer. Products not accompanied by a duly completed declaration of contamination are returned to the sender at his own expense.

Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant re- gulations and take the necessary precautions when handling contaminated parts. WARNING WARNING: substances detrimental to the environ- ment Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimen- tal to the environment. Dispose of such substances in accordance with the relevant local regulations. Separating the components After disassembling the product, separate its components ac- cording to the following criteria: • Contaminated components Contaminated components (radioactive, toxic, caustic or bio- logical hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated according to their materials, and disposed of. • Other components Such components must be separated according to their ma- terials and recycled.

 [2] www.inficon.com Operating Manual Vacuum Gauge Controller VGC032 tinb02e1 INFICON AG, LI–9496 Balzers, Liechtenstein  [3] www.inficon.com Operating Manual Single-Channel Controller VGC401 tinb01e1 INFICON AG, LI–9496 Balzers, Liechtenstein  [4] www.inficon.com Operating Manual Two- & Three-Channel Measurement and Control Unit VGC402, VGC403 tinb07e1 INFICON AG, LI–9496 Balzers, Liechtenstein ETL Certification 3103457 ETL LISTED The product CDG020D complies with the requirements of the following Standards: UL 61010-1, Issued: 2004/07/12 Ed: 2 Rev: 2005/07/22 CAN/CSA C22.2#61010-1, Issued: 2004/07/12

We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electromagnetic compatibility 2004/108/EC and the Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment 2011/65/EU. Capacitance Diaphragm Gauge Porter™ CDG020D Standards Harmonized and international/national standards and specifi- cations: • EN 61000-6-2:2005 (EMC: generic immunity standard) • EN 61000-6-3:2007 (EMC: generic emission standard) • EN 61010-1:2001 (Safety requirements for electrical equipment for measurement, control and laboratory use) Manufacturer / Signatures INFICON AG, Alte Landstraße 6, LI-9496 Balzers 27 June 2012 27 June 2012 Dr. Urs Wälchli Managing Director Alex Nef Product Manager

Fax +423 / 388 3700 Original: German tina80d1 (2012-06) [email protected] t i na80e1 www.inficon.com