Omron E8F Manual 

Digital Display Two output modes ensure easy pressure control. Compact model incorporates a self-diagnostic function. Washable (IP66). SI-compatible models are available. Ordering Information Pressure range ON/OFF output Linear output Model Positive pressure 0 to 98 kPa NPN open collector 1 to 5 V E8F-A01C os e essu e 0 to 980 kPa o e co ec o o 5 E8F-B10C Negative pressure 0 to –101 kPa E8F-AN0C Positive pressure 0 to 1 kgf/cm2 E8F-01C os e essu e 0 to 10 kgf/cm2 E8F-10C Negative pressure 0 to –76 cmHg E8F-CN0C Application Examples Checking the wafer pick-up Air leakage test on container pin holes or cracks E8F E8F Checking the chip pick-up E8F Checking the air press machine pressure E8F Checking the PCB and wafer pick-up E8F Output Control of air chuck clamp pressure E8F

E8F-B10C E8F-01C E8F-CN0C (see note 1) E8F-10C Supply voltage 12 to 24 VDC ±10% with a ripple (p-p) of 10% max. Current consumption 30 mA max. Pressure type Gauge pressure Permissible pressure range 0 to 98 kPa 0 to –101 kPa 0 to 980 kPa 0 to 1 kgf/cm2 (0 to 98 kPa) 0 to –76 cmHg (0 to –101 kPa) 0 to 10 kgf/cm2 (0 to 980 kPa) Pressure setting range 0 to 98 kPa 0 to –101 kPa 0 to 980 kPa 0 to 1 kgf/cm2 (0 to 98 kPa) 0 to –76 cmHg (0 to –101 kPa) 0 to 10 kgf/cm2 (0 to 980 kPa) Withstand pressure 490 kPa 2.0 MPa 5 kgf/cm2 (490 kPa) 20 kgf/cm2 (2 MPa) Applicable fluid Non-corrosive gasses, inert gasses Operating mode (see note 2) Hysteresis mode and wind mode Repeat accuracy (ON/OFF output) ±1% FS max. Accuracy (linear output) ±3% FS max. Linearity (linear output) ±1% FS max. Response time (ON/OFF output) 6 ms max. Linear output 1 to 5 V with output impedance of 1 kΩ and permissible resistive load of 500 kΩ min. ON/OFF output NPN open collector (NO/NC) Load current 100 mA max. Output applied voltage 30 VDC max. Residual voltage 1 V max. (with load current of 100 mA) or 0.4 V max. (with load current of 20 mA) Error output NPN open collector Load current 50 mA max. Output applied voltage 30 VDC max. Residual voltage 1 V max. (with load current of 50 mA) or 0.4 V max. (with load current of 20 mA) Power-ON reset time 200 ms max. Display (see note 2) 21/2-digit LCD Red indicator ON with output transistor turned ON Green indicator ON in normal operation (OFF at the time of malfunctioning or error detection) Display accuracy ±3% FS ±1 digit max. Circuit protection Reversed connection and load short-circuiting Ambient temperature Operating: 0°C to 50°C (with no icing) Storage: –10°C to 60°C Ambient humidity 35% to 85% (with no condensation) Accessories (provided) Mounting brackets (horizontal bracket, vertical bracket, and two mounting screws) and operation manual

2. Refer to the following for the operation modes available at the time of initial settings. Hysteresis Mode Pressure valve OFF set value ON set value Output 0.98Mpa 98 kPa –101 kPa 10 kgf/cm2 1kgf/cm2 –76cmHg In the above, the ON point is set larger than the OFF point. Wind Mode Pressure valve ON set value OFF set value Output 0.98Mpa 98 kPa –101 kPa 10 kgf/cm2 1kgf/cm2 –76cmHg In the above, the ON point is set smaller than the OFF point. 3. The 21/2-digit display refers to a display in which the third digit displays only 0 or 1. 0 or 1 0 to 9 0 to 9 Third digit Second digit First digit Characteristics Voltage influence ±1.5% FS max. Temperature influence ±3% FS max. Degree of protection IEC IP66 Dielectric strength 1,000 VAC for 1 min Insulation resistance 100 MΩ min. (at 500 VDC) between current carry parts and case Vibration resistance Destruction: 10 to 500 Hz, 1.5-mm double amplitude or 100 m/s2 (approx. 10G) for 2 hours each in X, Y, and Z directions Shock resistance Destruction: 500 m/s2 (approx. 50G) 2 times each in X, Y, and Z directions. Pressure port R(PT) 1/8 taper screw and M5 x P0.8 female screw for zinc die-cast pressure port Cord 2-m-long UL-approved cord Weight 60 g (excluding cord)

Fluctuation (Typical) E8F-01C Temperature vs. Operating Pressure (Typical) E8F-01C Linear output fluctuation (% FS) Temperature (°C) Operation pressure fluctuation (% FS) Temperature (°C) Pressure vs. Linear Output (Typical) E8F-01C Linearity (Typical) E8F-01C Linear output voltage (V) Pressure (kgf/cm2) Linearity deviation %FS) Pressure (kgf/cm2) Nomenclature LCD display (21/2 digit display) DOWN Key UP Key Green indicator Normal operation: ON Detection of error or malfunctioning: OFF Load short-circuiting or overcurrent: Flashing Red indicator: Lit when the ON/OFF output transistor turns ON. MODE Key: Used for the selection of measurement or setting mode. ZERO Key: Used for zero-point adjustment.

1 to 5 V 0 V 50 mA max. 100 mA max. Output Timing Charts Normally Open Output in Hysteresis Mode Pressure ON point Output (see note) ON OFF OUT indicator (red) RUN indicator (green) ON OFF ON OFF Pressure ON point OFF point OFF point Output (see note) ON OFF OUT indicator (red) RUN indicator (green) ON OFF ON OFF Normally Closed Output in Hysteresis Mode OFF point: 3 digits ON point: 3 digits OFF point: 3 digits ON point: 3 digits Note: In the above examples, the ON- and OFF-delay timers are both set to 0 ms. Normally Open Output in Wind Mode Pressure ON point Output (see note) ON OFF OUT indicator (red) RUN indicator (green) ON OFF ON OFF Pressure ON point OFF point OFF point Output (see note) ON OFF OUT indicator (red) RUN indicator (green) ON OFF ON OFF Normally Closed Output in Wind Mode

(The decimal point will not be displayed under the setting mode.) Press the MODE Key ON point setting Press the MODE Key OFF point setting Press the MODE Key ON-delay setting Press the MODE Key OFF-delay setting Press the MODE Key Normally open (NO) or nor- mally closed (NC) setting Press the MODE Key Buzzer setting Press the MODE Key (1) (2) (3) (4) (6) (5) LCD indication ON �� The LCD flashes. The dis- play changes between 0 and the rated value by pressing the Up or Down Key. LCD indication OFF �� LCD indication ON �� LCD indication OFF �� LCD indication �� LCD indication �� The LCD flashes. The dis- play changes between 0 and the rated value by pressing the Up or Down Key. The LCD flashes. The display changes between d0 and d9 (i.e., 0 and 90 ms) by press- ing the Up or Down Key. The LCD flashes. The display changes between d0 and d9 (i.e., 0 and 90 ms) by press- ing the Up or Down Key. The LCD flashes. The display changes between NO and NC by pressing the Up or Down Key. The LCD flashes. The display changes between b0 and b5 by pressing the Up or Down Key. Setting completed. (proceeds to measurement mode) Set values are stored in the EEPROM and not lost when the E8F is turned OFF. If the Up Key is pressed in mea- surement mode, the set ON point will be displayed for two seconds. If the Down Key is pressed instead, the set OFF point will be displayed for two seconds. (1) (2) ON/OFF Point Settings ON point value > OFF point value: The E8F will be in hysteresis mode. ON point value < OFF point value: The E8F will be in wind mode. ON point = OFF point: No ON/OFF operation is possible. Note: The ON and OFF points are both set to 30 before shipping. Hysteresis Mode Wind Mode Pressure value OFF set value ON set value Pressure value OFF set value ON set value Output Output *See note. *See note. Note: Allowable pressure varies with the model. (3), (4) ON- and OFF-delay Timer Settings It is possible to set ON- or OFF-delay timer within a range of 0 and 90 ms in 10-ms increments. Set the timer to 0 ms if the timer function is not required. Note: The timer is set to 0 ms before shipping. ON-delay Delay Sensing point Output Output Delay Sensing point OFF-delay (5) Normally Open (NO) and Normally Closed (NC) Settings Note: The E8F is set to NO before shipping. Hysteresis Mode Pressure ON point OFF point ON OFF ON OFF Output transistor NO output NC output Wind Mode Pressure ON point: 3 digits OFF point: 3 digits ON OFF ON OFF Output transistor NO output NC output ON point OFF point

Set the buzzer mode to 0 if the buzzer function is not required. Note: The mode is set to 3 before shipping. Set value Contents 0 The buzzer is always OFF. 1 The buzzer is ON when the ON/OFF output transistor is ON. 2 The buzzer is ON when an error is detected. 3 The buzzer is ON when the Up or Down Key is pressed when setting the values. 4 The functions of set values 1 and 3. 5 The functions of set values 2 and 3. Error Indication LCD Meaning Remedy E1 The ON/OFF output and error output transistor have excessive current. Change the load to a proper one. E2 No zero point adjustment is possible when the ZERO Key is pressed because pressure is imposed on the pressure port. Eliminate the pressure imposed on the pressure port. E3 Excessive pressure is imposed on the pressure port. Reduce the pressure to the rated value or less. E4 Reversed pressure is imposed. Do not impose reversed pressure. E5 The Sensor has a failure. Contact your OMRON representatives. E6 The voltage imposed on the Sensor is not within the rated value. Impose the voltage within the rated value. Note: 1. If the load is short-circuited or excessive current flows to the load, the green indicator will flash and the ON/OFF output and error output will be turned OFF. 2. If there is an error other than a load short-circuit or excessive current error (i.e., E2 to E6), the green indicator will be turned OFF and the error output transistor will be turned ON. Therefore, nullify the ON/OFF output at the time of error detection. Zero Point Adjustment Usually, no zero point adjustment is necessary. If the zero point should shift due to secular changes (i.e., a value other than 00 is dis- played with no pressure imposed), press the ZERO Key for zero point adjustment. Perform zero point adjustment with no pressure imposed. ON/OFF Set Value Check on E8F in Operation Press the Up Key to check the ON set value. Press the Down Key to check the OFF set value. Mounting The zinc die-cast pressure leading part incorporates an R(PT) 1/8 taper screw and M5 x P0.8 female screw. The taper screw must be used in combination with an Rc(PT) 1/8 female taper screw. Apply sealing tape around the taper screw so that there will be no pressure leakage. Make sure that the tightening torque of the taper screw is 9.8 N � m (100 kgf � cm) or less. Make sure that the tightening torque of the M5 female screw is 2.3 N � m (23 kgf � cm) or less. When tightening the male screw, apply a 12-mm wrench to the hex- agonal portion of the pressure port. Do not tighten the male screw while holding the plastic case. When attaching the mounting bracket to the E8F, make sure that the tightening torque applied to the M2.5 screw is 0.29 N � m (3 kgf � cm) or less. Hexagonal portion

E8F Wiring cord Atmosphere inlet (*) M5 screw (depth: 6) R(PT) 1/8 zinc die-cast 1-dia. hole Two, M2.5 x P0.45 Wiring cord 3 dia. (*) Mounting Bracket Mounting Dimensions Material: SPCC uni-chrome plating (t=1.2) Material: SPCC uni-chrome plating (t=1.2) Two, 3.5 dia. Two, 3.5 dia. Two, 3.5 dia. 20.5

Filter the gas with an appropriate air filter so that the applied gas will be free of moisture or oil. Make sure that the pressure applied is within the rated range. If the silicone diaphragm is damaged, the E8F will not operate prop- erly. Do not insert a screwdriver or steel wire into the interior of the pressure-sensitive parts through the pressure leading part. The E8F has a display error of ±3% FS ±1 digit at the time of ON or OFF point setting at room temperature. If a highly precise pressure setting is required, use a manometer. Nullify the ON/OFF output at the time of error detection. If the use of the E8F requires the IP66 enclosure rating (e.g., wash- ing the E8F with water), be sure to connect a standard silicone tube to the atmosphere inlet. The silicone tube must have a 2-mm inner diameter and 4-mm outer diameter. Reset Time: The E8F is ready to operate within 200 ms after the E8F is turned ON. Make sure that the Sensor is free from ultrasonic vibration when mounting the E8F. Others: If no linear or error output is used, cut off the black and orange lead wires and apply insulation tape to the lead wires so that they will not come in contact with any other terminal.

Sensing Devices and Components Division H.Q. 28th Fl., Crystal Tower Bldg. 1-2-27, Shiromi, Chuo-ku, Osaka 540-6028 Japan Phone: (81)6-949-6012 Fax: (81)6-949-6021 ALL DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527. Cat. No. D070-E1-1 In the interest of product improvement, specifications are subject to change without notice. Printed in Japan 0498-1M (0498) �