Inficon VGC083B Operating Manual

tinb29e1 (2016 Vacu VGC083 Manual ation of Conform 6-11) um G 3A, VGC mity Gauge C083B e Con ntroller 1

ameplate: his document 399- 399- he part numbe not indicated orrespond to t We reserve the All dimensions here are oper lectromechan re a variety of ment must take ation of this eq n no event will amages that r Any examples ve purposes. B articular instal ctual use base No patent liabil uits, equipmen hroughout this ymbols and sa dentifies inform hysical hazard erious injury, p dentifies inform hysical hazard moderate injury CAU cations with IN t applies to pro -700 -701 er (PN) can be otherwise in t the unit VGC0 e right to make are indicated rational charac ical equipmen f uses for solid e every precau quipment is sa l INFICON be result from the or diagrams in Because of th llation, INFICO ed on the exa lity is assumed nt, or software s manual we u afety message mation about p ds which, if pr property dama mation about p ds which, if pr y, property da UTION NFICON, plea oducts with pa (VGC083A, use w (VGC083B, use w e taken from t the legends, th 083A.They app e technical cha in mm. cteristic differe nt. Because of d state equipm ution and satis afe and used i responsible o e use or applic ncluded in this he many variab ON cannot ass mples and dia d by INFICON e described in use notes, not es to make yo practices or ci recautions are age, or econo practices or ci recautions are mage, or econ se specify the art numbers: with BAG050 and with BAG051 or BA the product na he illustrations ply to the VGC anges without ences between f these differen ment, all perso sfy themselves in an acceptab or liable for ind cation of this e s manual are p bles and requi sume respons agrams. N with respect this manual. tices and appl u aware of sa rcumstances t not taken, co mic loss. rcumstances t not taken, co nomic loss. tinb29e1 e information o PGEG050) AG052/053 and P ameplate. s in this docum C083B by ana t prior notice. n solid state e nces, and bec ons that apply s that the inte ble manner. direct or conse equipment. provided solel irements impo sibility or liabili to use of infor ly internationa afety considera that can cause ould result in d that can cause ould result in m 1 (2016-11) VGC083A_B.o on the product PEG050) ment logy. equipment and cause there this equip- nded appli- equential y for illustra- osed on any ity for any rmation cir- ally recognized ations. e electrical or eath or e electrical or minor or om t d d

3 Identifies information that is critical for successful application and understanding of the product. Labels may be located on or inside the device to alert people that dangerous voltages may be present. INFICON assumes no liability and the warranty is rendered null and void if the end- user or third parties • disregard the information in this document • use the product in a non-conforming manner • make any kind of interventions (modifications, alterations etc.) on the product • use the product with accessories not listed in the corresponding product docu- mentation. Liability and Warranty NOTICE SHOCK HAZARD

Contents Product Identification 2 Validity 2 Important User Information 2 Liability and Warranty 3 1 Introduction / General Information 6 1.1 VGC083A 6 1.2 VGC083B 7 2 Technical Data 8 3 Important Safety Information 11 3.1 Safety Precautions - General 11 3.2 Safety Precautions - Service and Operation 11 3.3 Electrical Conditions 12 3.3.1 Proper Equipment Grounding 13 3.3.2 Electrical Interface and Control 13 3.4 Overpressure and use with hazardous gases 13 3.5 Gases other than Nitrogen / air 13 4 Installation 15 4.1 Mechanical Installation - Controller 15 4.1.1 Panel Mount 15 4.1.2 Rack Mount 15 4.1.3 Mechanical Installation - Ionization Gauge 17 4.1.4 Mechanical Installation - Convection Gauge 17 4.2 Electrical Installation 18 4.2.1 Grounding 18 4.2.2 Installation 19 4.2.3 Connecting the Ionization Gauge Cable 19 4.2.3.1 Standard Nude and Glass IG Cable 20 4.2.3.2 Bakeable Nude IG Cable 21 4.2.3.3 Standard IG Cable Connector Pin Out 22 4.2.4 Connecting the PGE050 - connectors labeled "2" and "3" 23 4.2.5 Power Connection 24 4.2.6 Relay Connection 24 4.2.7 Analog Output Connection 24 4.2.8 Analog Input Connection (Capacitance Diaphragm Gauges, etc.) 24 4.2.9 Digital I/O Connection 25 4.2.10 RS232 / RS485 Serial Communications Connection 26 5 Operation - IG and CG 28 5.1 IG Emission Current 28 5.2 IG Degas 28 5.3 IG Filament Material Selection / Venting the Chamber 28 5.4 IG Over Pressure Shut Down 29 5.5 IG Over Temperature Shut Down 29 5.6 Convection Gauge (CG) Initial Setup 30 6 Setup and programming 31 6.1 Applying Power 31 6.2 Front Panel Display 31 6.3 User Interface Basics 32 6.4 Factory-Set Default Parameters 32 6.5 Programming 34 6.5.1 SETUP UNIT 34 6.5.2 ION GAUGE 35 6.5.3 ION GAUGE 40 6.5.4 RELAYS 40 6.5.5 Analog Output 42 6.5.6 SERIAL COMM 47 6.5.7 DISPLAY 47

5 7 Analog Output Charts & Equations (Nitrogen/Air Only) 49 7.1 Analog Output wide range measurement for IG - CG1 0.5 - 7V (Nitrogen / Air only) 49 7.2 Analog Output for IG LOG N - 10 (Nitrogen / Air only) 50 7.3 Analog Output for IG LOG N - 11 (Nitrogen / Air only) 51 7.4 Analog Output for IG LOG N - 12 (Nitrogen / Air only) 52 7.5 Analog Output for IG 1.8 - 8.7 V (Nitrogen / Air only) 53 7.6 Analog Output for IG LINEAR (Nitrogen / Air only) 54 7.7 Analog Output for CG1 or CG2 1 - 8 V (Nitrogen / Air only) 54 7.8 Analog Output for CG1 or CG2 0 - 7 V (Nitrogen / Air only) 56 7.9 Analog Output for CG1 or CG2 NON - LIN (Nitrogen / Air only) 57 7.10 Analog Output for CG1 or CG2 LINEAR (Nitrogen / Air only) 59 8 Using the Gauge with Different Gases 60 8.1 Ion Gauge Display Correction Factors for Selected Gases 60 8.2 Effects of Different Gases on Convection Gauge Display 61 8.3 Effects of Different Gases on Analog Output 64 8.3.1 Ion Gauge Analog Output Correction Factors for Selected Gases 64 8.3.2 IG - CG1 0.5 - 7V Analog Output Correction Factors for Selected Gases 64 8.3.2.1 IG-CG1 0.5 - 7V Analog Output Correction Factors - Ion Gauge Range 64 8.3.2.2 IG-CG1 0.5 - 7V Analog Output Correction Factors - Convection Gauge Range 66 8.3.3 Convection gauge analog output for selected gases 66 8.3.3.1 CG1 1 - 8 V or CG2 1 - 8 V Analog Output Correction Factors - Convection Gauge 67 8.3.3.2 CG1 0 - 7 V or CG2 0 - 7 V Analog Output Correction Factors - Convection Gauge 68 8.3.3.3 CG1 NON-LIN or CG2 NON-LIN Analog Output Correction Factors - Convection Gauge 69 9 Communication Protocol (Serial Interface) 70 9.1 Device Specific Serial Communication Info 70 9.2 INFICON RS232 / RS485 Command Protocol Summary 70 9.3 INFICON RS232 and RS485 Command Protocol Summary 71 9.4 RS232 GP 307 and 358 Protocol 74 9.5 RS485 GP 307 and 358 Protocol 75 10 Service 77 10.1 Calibration 77 10.2 Troubleshooting - IG Operation 77 10.3 Troubleshooting - IG Error Messages 78 10.4 Clearing Error Messages - IG 78 10.5 Research Screen 78 10.5.1 Research Screen (Diagnostic Display - IG) 78 10.6 Maintenance 80 11 Repair 81 12 Accessories 81 13 Storage 82 14 Disposal 82 EU Declaration of Conformity 83 For cross-references within this document, the symbol (→  XY) is used; for cross- references to further documents listed under ‘Literature’, use is made of the symbol (→  [Z]).

ponents of th cuum Pressu nt System neral Info T sy • • • • 1) T th B co T e h im P d ex he ure ormation he Vacuum G ystem which is The VGC08 One INFICO ionization g One or two Cables to in The VGC083A vacuum gauge ypical compon he figure below BAG050 hot ion ontrol for up to he VGC083A ither rack or in igh rack-moun mportant inform PGE050 Opera evice you inte xternal device n Gauge Control s comprised o 83A Vacuum G ON BAG050 n gauge or other INFICON PG nterconnect th A will also operate e head. nents of the co w. The VGC08 n gauge head o two enhance , a controller u nstrument pan nt panels are a mation about t ating Manual. end to connect es and cables ler VGC083A of the following Gauge Contro nude UHV EB- r brands of nud GE050 convect he VGC083A a the Granville-Phil omplete vacuu 83A provides d (IG). Addition ed convection unit capable o nel mountable available to m the PGE050 c Read the Ope t to the VGC0 that the VGC0 is a vacuum p g: oller -degas Bayard de UHV EB-de tion enhanced and point-of-us lips® Convectron® um measurem power and op nally, it provide gauges (CG) VG Co BA PG 1 & f controlling m . Optional indu ount the unit i convection gau erating Manua 83A prior to co 083A is intend tinb29e1 pressure meas d-Alpert hot ca egas B-A gau d pirani heads se devices ® convection enha ment system a perating contro es power and ). GC083A Vaco ontroller AG050 Ion Ga GE050 Convec & 2 (CVG 1 & multiple gauge ustry standard into rack enclo uge please re als in their enti onnecting and ded to be used 1 (2016-11) VGC083A_B.o surement athode ges 1) anced pirani re shown in ol for the operating om Gauge uge ction Gauges 2) heads, is d 19-inch, 2U osures. For fer to the irety for any d using the d with. om

1.2 VGC0 Typica comple Measu 83A_B.om 083B al Componen ete Vacuum urement Syst nts of the Pressure tem The Vac system • The • One cath gaug • One • Cab 1) The V vacuu Typical the figur BAG051 and ope The VG either ra high rac importan PGE050 device y external cuum Gauge C which is comp VGC083B Va e INFICON BA hode ionization ges e or two INFIC les to intercon VGC083B will also um gauge head. components o re below. The 1 or BAG052 / erating control or GC083B, a con ack or instrum ck-mount pane nt information 0 Operating M you intend to c l devices and Controller VG prised of the fo acuum Gauge AG051 nude or n gauge or oth ON PGE050 c nnect the VGC o operate the Gran of the complet VGC083B pro / 053 ion gaug for up to two ntroller unit cap ent panel mou els are availab about the PG Manual. Read t connect to the cables that th C083B is a va ollowing: Controller r BAG052 / 05 her equivalent convection en C083B and po nville-Phillips® Co te vacuum me ovides power ge heads (IG). enhanced con pable of contro untable. Optio ble to mount th GE050 convect the Operating e VGC083B pr e VGC083B is acuum pressu 53 glass I2R B brands of I2R nhanced pirani int-of-use dev onvectron® convec easurement sy and operating . Additionally, nvection gaug VGC083 Controlle BAG051 BAG052 PGE050 1 & 2 (CV rolling multiple onal industry s he unit into rac ction gauge ple Manuals in th rior to connect s intended to re measureme Bayard-Alpert h R glass/nude B i heads1) vices ction enhanced pir ystem are show g control for ei it provides po ges (CG). B Vacoom Ga er Ion Gauge or / 053 Ion Gau Convection G VG 1 & 2) e gauge heads tandard 19-inc ck enclosures ease refer to t heir entirety fo ting and using be used with. 7 ent hot B-A rani wn in ither the ower auge uge Gauges s, is ch, 2U . For he r any g the

2 Technical Data VGC083A with BAG050 with PGE050 2×10-11 …1×10-3 Torr 1×10-4 …1000 Torr VGC083B with BAG051 or BAG052/053 with PGE050 4×10-10 …1×10-3 Torr 1×10-4 …1000 Torr Units of measurement Torr, mbar, Pa (user selectable) Pressure indication LED - 3 independent pressure display channels, 3 digit plus 2 digit exponent per channel Set-up & programming screen OLED - displays state of all setpoint relays, IG emission current, error messages for fault conditions VGC083A (IG) powers & operates one INFICON BAG050 nude UHV EB-Degas B-A hot cathode or other equivalent brands , (CG) powers & operates up to 2 INFICON PGE050 convection or Granville-Phillips® (GP) Convectron® VGC083B (IG) powers & operates one BAG051 or BAG052 / 053 or other equivalent brands of glass or nude I2R B-A hot cathode , (CG) powers & operates up to 2 INFICON PGE050 convection or Granville-Phillips® (GP) Convectron® IG sensor on/off, degas on/off and emission current can all be controlled via front panel soft-keys, remote input signals (digital I/O) or serial communications. IG sen- sor can also be automatically turned on/off using measurements from one of the user selectable convection or alternate gauges. IG sensor on/off, degas on/off and emission current can also be set by applying momentary continuity to ground. Also the 9-pin D-sub remote input DIGITAL I/O connector provides pin-pin compatible signals with the GP 358 controller as well as compatible signals with the GP 307. Number 6 single-pole, double-throw (SPDT), user as- signable to any of the gauges Contact rating 5 A at 30 V (dc), 5 A at 250 V (ac), resistive load Measurement range Display Functionality IG sensor control IG remote input signals (digital I/O) Setpoint relays

9 IG analog output Log-linear 0 … 10 V (dc), 1 V/decade, or 1.7 … 9.3 V (dc) (nominal 1.8 … 8.7 V (dc)), 0.8 V/decade Linear 0 … 10 V (dc) (useable over 3 decades) Combination IG + CG analog Log-linear 0.5 … 7 V (dc), 0.5 V/decade CG analog output Log-linear 1 … 8 V (dc), 1 V/decade, or 0 … 7 V (dc), 1 V/decade Linear 0 … 10 V (dc) (useable over 3 decades) Non-linear analog S-curve 0.375 … 5.659 V (dc) CDG one 0 … 10 V (dc) analog input signal from a CDG when used as an alternate gauge to CG2, or analog input from one of the following INFICON modules: PGE300, PGE500, BAG300 Protocol RS485 / RS232 - ASCII protocol IG sensor on/off status message is displayed on the front panel, by serial commu- nications and by SPDT relay (DIGITAL I/O Connector) rated at 1 A at 30 V (dc) resistive, or 1 A at 30 V (ac) non-inductive. IG degas on/off status or IG error conditions are displayed on the front panel, by serial communications and by an open collector transistor output (ground emitter) rated at 40 V max. VCE, 50 mA IC max. IG filament switching User selectable between filament 1 or 2 using the front panel soft-keys or RS232 / RS485 serial comm IG emission current 100 μA, 4 mA, 10 mA or automatic switching of emission current (auto ranging) IG degas 40 W, resistive IG overpressure protection (turns ion gauge off at the following factory default settings) 1 × 10-3 Torr at 100 μA emission current 5 × 10-4 Torr at 4 mA emission current 1 × 10-4 Torr at 10 mA emission current Temperature Operation Storage 0 … +40 °C –40 … +50 °C Relative humidity 0 … 95, non-condensing Altitude Operating Storage max. 2500 m (8200 ft.) max. 12500 m (41000 ft.) Pollution degree II Degree of protection IP20 Housing aluminum extrusion - black powder paint finish Analog output Analog input Serial communications Status output IG (Ionization Gauge) Ambience Housing

Digital I/O Serial comm RS232 RS485 analog I/O, power mm (inch) .7 kg (1.7 lb.) munications 2 5 setpoint relay 20 … 2 power ys, gauge 9-pin D 9-pin D 9-pin D plugga include 28 V (dc), 200 reversal and cable assemb D-sub male D-sub female D-sub male able terminal b ed) tinb29e1 0 W protected transient over blies provided block (mating 1 (2016-11) VGC083A_B.o against r-voltages d by INFICON connectors om

3 Impo 3.1 Safet Gene 3.2 Safet Servi 83A_B.om rtant Saf ty Precaut eral ty Precaut ice and Op fety Infor tions - tions - peration rmation INFICO provided this man To avoi ment. F bodily h Failure t and inte tomer's Althoug INFICO operatio installat This dev Hazardo product tection o provided WA the prod Do not m INFICO service use this WA perform After se service specified shock o product To redu moisture not spill have be duct if it Due to t is possib that the equipme has bee Ensure ground. Ensure electrica Use a p power s N has designe d it is installed nual. Please r id serious inj Failure to com harm, includi to comply with ended use of t failure to com h every attem N cannot antic on, or mainten ion and use o vice meets FC ous voltages a should never of the operato d. ARNING! Th duct enclosure modify this pro N service train and repair cen s product if una ARNING! So ing any servic ervicing this pr person. When d by INFICON or other hazard will void the w ce the risk of e. These prod any type of liq een damaged. t is damaged. the possibility ble that the pr product be pe ent grounding en compromise the enclosure that the vacuu ally grounded. power source o supplies. WARNIN ed and tested d and operated read and follo ury or death, mply with thes ing death, an h these warnin his instrument mply with these mpt has been m cipate every c nance of the m f this product, CC part 15 req are present wi be operated w r from acciden ere are no ope e. Refer servic oduct or subst ned personne nter to ensure authorized mo ource power m cing. oduct, ensure n replacement N Substitutions ds. Use of una warranty. fire or electric ducts are not w quid onto thes Immediately of corrosion w roduct’s safety eriodically insp . Do not use if ed. e of the unit is um port on wh of 20 … 28 V NG this product to d within the str ow all warnin follow the sa se safety pro d or property ngs violates th t. INFICON dis e instructions. made to consid contingency th module. If you h please conta quirements for th this produc with the cover ntal contact wi erator service cing to service titute any parts l. Return the p e that all safety odifications ha must be remove that all safety t parts are req s of non-qualif authorized par shock, do not waterproof and se products. D contact INFIC when used in c y could be com pected for sou f the equipme connected dir hich the vacuu (dc), 200 W or o provide safe rict safety guid gs and instru afety informa ocedures cou y damage. he safety stand sclaims all liab der most poss hat arises from have any que act INFICON. r an unintentio ct during norm rs removed un with hazardous eable parts or a e trained perso s without auth product to an y features are ave been made ed from the pr y checks are m quired, ensure fied parts may rts or modifica ot expose this d careful atten Do not use the CON to arrang certain environ mpromised ov und electrical c ent grounding o rectly to a goo um gauge sens r use INFIOCN e and reliable delines provid uctions. ation in this d ld result in se dards of instal bility for the cu sible installatio m various insta stions about th onal radiator, c al operation. T nless equivale internal volta adjustments in onnel. horization of qu INFICON qua maintained. D e. roduct prior to made by a qua that the parts y result in fire, ations made to product to rain ntion must be p se products if e return of the nmental condi er time. It is im connections a or electrical in od quality earth sors are moun N series optio 11 service, ded in docu- erious llation us- ons, allations, he safe class A. The nt pro- ges is nside ualified lified Do not o alified s are electric o this n or paid to f they e pro- itions, it mportant nd nsulation h nted is nal

urn off power ng normally ac ice personnel y this operatin is important t ections and eq lectrical insula Do not use if th Contact INFICO o INFICON for measured pre onditions, the The pressu The pressu The pressu During the Deg will turn off but Ensure vacuum Degas of the B Do not attempt ere. Never use an a when the Ion G f other gauges eading to filam efore pressure you are using perating the io xtended perio ain emission c minated by res he most comm or or head ele ll possible ind haracterized a lectrodes, or B Sensors that fa After servicing ed service per WARNING ning electrical re maintained ontact with the gaseous envi rounded cond oming in conta age potential. he gas inside t to the unit be to the unit if a ccording to this for any servic ng manual. that the produc quipment grou ation has been he unit has bee ON for return a r evaluation. essure exceed ion gauge wil re exceeds 1. re exceeds 5. re exceeds 1. gas cycle, if th the filament w m level is less BAG05x series t to turn the IG auxiliary or con Gauge filamen s may not allo ment damage. e is allowed to g dual filamen on gauge filam od of time may current in appl idual applicati mon cause of ectrodes. Nois ications of ga as either: A) a B) an accumu ail due to conta these product rson G! When high l shock hazard d at earth grou e gas containe ironment may ductor of electr act with an ex This condition the vacuum ch fore attemptin a cable or plug s instruction m ce or troublesh ct be periodica unding. Do no n compromise en dropped or authorization a ds the thresho l turn off: 00 × 10-3 Torr 00 × 10-4 Torr 00 × 10-4 Torr e measured p will remain turn than 5.00 x 10 s ionization ga G on if the pres nvection gaug t in use is con ow for timely tu Always turn o o rise above 1 t IGs, it is high ments 1 and 2 y result in failu ications where ion or process all vacuum ga y or erratic rea uge contamina chemical reac lation of mate amination are ts, ensure that voltage is pre d may exist un nd potential. T ed in vacuum y couple dange ricity. A perso xposed, ungrou n applies to all hamber (vacu ng to service th g is damaged o manual. Conta hooting condit ally inspected t use if the eq d. r the enclosure and instruction olds that are d r at 100 μA em r at 4 mA emis r at 10 mA em pressure excee ned on. 0-5 Torr before uge heads. ssure is near t ge to automatic nstructed of tu urn off of the t ff the IG filam .00E-03 (1.00 hly recommen . An inactive fi re of that filam e the filament s related chem auge failures is adings and tot ation. Contam ction of proces rial on the hea not covered u t all safety che esent in any va nless all expos This applies to chambers. An erous high vol n could be ser unded electric products that um/pressure c tinb29e1 he controller. or the product act qualified IN tion that may n for sound ele quipment grou e has been da ns for returnin defined under t mission curren ssion current. mission current eds 1.00 × 10 e attempting to the threshold l cally turn off t ungsten. The tungsten filam ment (tungsten 0 × 10-3) Torr. nded to period filament not op ment to establi coating may b mistries. s contaminatio tal gauge hea mination can ge ss gases with ad (sensor) el under warrant ecks are made acuum system sed electrical o all products n electrical dis ltage directly t riously injured cal conductor a t may come in containment v 1 (2016-11) VGC083A_B.o t is not operat NFICON ser- not be covered ectrical con- nding or amaged. ng the product the following nt. t. -4 Torr, Degas o initiate limits defined he Ion Gauge response time ment possibly ) manually ically alternate perating for an ish and main- become conta on of the sen- d failures are enerally be head / senso ectrodes. y. e by a quali- m, a life threat- conductors that come in scharge within to any un- d or killed by at high vol- n contact with vessel). om - d s e e n a- - or -

3.3.1 Prop Grou 3.3.2 Elec Con 3.4 Overp with h 3.5 Gase Nitro 83A_B.om per Equipm unding ctrical Inter trol pressure a hazardous es other th gen / air ment rface and and use s gases han WA present which th grounde groundin intended any con earthing pressure WA harm, s trical di It is the and any are used any sign your sys taken to WA pressur system In cases impleme an autom pressure The vac pressure sure ins an isola sure con lower; fo the gaug correcte CA to incre sure sid may ca into the flamma of the v ment, c expose pressur WA without INFICO Do not a unless y analog o when us WA of flamm of explo incande an explo ARNING! Haz in many vacu he ion gauge a ed. Consult a q ng. Proper gro d operation of ntrol module m g conductor. U e measureme ARNING! In o shield all con ischarges in user’s respon y connections d in a safe ma nals to automa stem design a o prevent injur ARNING! Ins re inside you m components s where an eq ent fail-safe sy matic backfill o es if the press cuum gauge h es above 20 p side the senso ation valve or p nditions. With or example, a ge tube from t ed barometric AUTION! If th ease above lo de), vacuum f use leaks tha e atmosphere able gases are vacuum/press could cause b e the gauge tu re when usin ARNING! Do referring to co N gauges and attempt to use you have appl output to dete sing convectio ARNING! Do mable gases, v osive or combu escent tempera osion which co zardous voltag uum processes and the conve qualified Elect ounding of you f the equipmen must be connec Use a ground l ent devices if n order to prote ductors whic or around the nsibility to ensu made to exter anner. Always ate your proce and ensure saf y and property stall suitable r vacuum cha s are capable uipment failur ystem operatio operation whe sure relief devi eads used wit psia (1000 torr r. If your cham pressure relief h some fittings quick-connec the vacuum ch (atmospheric) he internal pre ocal uncorrec fittings may r at would allow e of the surro e examples o sure containm bodily injury a ube internal v g hazardous not attempt to orrection facto d modules are e with other ga ied correction rmine the true on gauges to m not use the IG vapors or fum ustible gases o atures and co ould result in s ges that could s. Verify that t ection gauges trician if you a ur equipment i nt. The vacuum cted directly to ug on the vac necessary. ect personnel ch are subject e vacuum sys ure that the el rnal devices, f double check ess. Perform a feguards and y damage. protective de amber to less of withstand e could cause on. For examp ere a malfuncti ce was not ins h this product r); DO NOT ex mber goes to h device to prot , actual safe o t, O-ring comp hamber fitting w ) pressure. essure of a v cted barometr release and p w the gas insi unding enviro of hazardous g ment vessel in and possible volume to pre gases. o use with gase r data tables. calibrated for ases such as a factors to bot e measured pr measure press G in an explosi es. Do not use or gas mixture uld become a serious injury o seriously inju the vacuum co are mounted are in doubt ab is essential fo m gauge head o a good qual cuum connecti l from electri ct to potential stem. ectrical signal for example, r k the system s a hazardous o personnel saf evices that wi s than what th ding. e a hazardous ple, use a pres ion could resu stalled on the t are not intend xceed 35 psig higher pressu tect the gauge overpressure c pression fitting with only a few vacuum gauge ric pressure ( possible over ide the gauge onment. Tox gases that if nto the atmos damage to e essure above es other than r direct readou argon (Ar) or c th the displaye ressure. This i sure of gases ive atmospher e the IG to me es. The senso an ignition sou or death. re or cause de onnection port are electrically bout your equi or safety as we ds and enclos ity equipment on flange of th c shock and high voltage ls from this pro elays and sole set-up before u peration analy fety measures ill limit the lev he vacuum ch condition, alw ssure relief de ult in high inter chamber. ded for use at (< 2 ½ bars) p res, you shou e tube from ov conditions may g may forcibly w psi over loca e device is al (atmospheric pressure con e tube to rele xic, pyrophori allowed to le spheric envir quipment. N local atmosp nitrogen (N2) ut of nitrogen o carbon dioxide ed pressure an is particularly other than N2 re or in the pre easure the pre or filaments op rce. This could 13 eath are ts on y pment ell as ure of he bodily e elec- oduct enoids, using ysis of s are vel of hamber ways evice in rnal pres- ld install verpres- y be release al un- llowed c pres- nditions ease ic and ak out ron- ever pheric or air or air. e (CO2) nd the critical 2/Air. esence essure perate at d cause

he pressure of he gauge norm emperature co nd gas mixtur r death. G! Do not use mable gases, v f explosive or mally operates ould exceed th re. This could e the PGE050 vapors or fume combustible g s at 125 °C, bu he ignition tem cause an exp in an explosiv es. Do not use gases or gas m ut if malfunctio mperature of ce losion which c tinb29e1 ve atmosphere e the PGE050 mixtures. The on should occu ertain combus could result in 1 (2016-11) VGC083A_B.o e or in the pre to measure sensor wire in ur, the wire stible gases serious injury om - n y

15 4 Installation The unit is intended for indoor use only. The unit is offered as a space saving half rack design. It may also be used as a bench top device or easily installed in an instrument panel. Optional EIA-standard rack mount panels are available for either full rack or dual, side-by-side rack mount installation. When mounting multiple units in your rack mount enclosure or mounting the unit below other electronic equip- ment in your rack, allow at least 1U of space (1.75 in., 45 mm) between the units to ensure adequate ventilation.  Make a cutout in your rack panel or instrument control panel as shown in the drawing below. Be sure to allow clearance behind the panel for the in- strument as well as connectors and cables at the back of the instrument. Optional EIA-standard, 19-inch, 2U height rack mount panels are available from INFICON. The optional rack mount panels are provided with panel cut- outs and mounting holes to allow efficient mounting of your VGC083 unit.  Drill four guide holes on each side of the panel cut out (two on each side) with dimensions as shown in the panel cut-out drawing above.  Slide the unit into the panel hole cut-out. Guide the four studs on the back of the unit front panel face plate thru the four holes next to the panel cut-out.  Use four # 10-32 Hex Nut (provided with instrument) to tighten the unit to the panel. Optional EIA-standard 19-inch wide, 2U height rack mount panels available from INFICON (→  81): 4.1 Mechanical Installation - Controller 4.1.1 Panel Mount Procedure 4.1.2 Rack Mount

All dimensions in inches. All dimensions in inches. The single cut-out and dual cut-out rack mountable panels shown above are availa- ble from INFICON. Panel color matches the front panel of VGC083 units. Screws for mounting to rack enclosure are included. Single cut-out panel Single cut-out panel

4.1.3 Mec Ioniz VGC VGC 4.1.4 Mec Con 83A_B.om chanical Ins zation Gau C083A C083B chanical Ins vection Ga stallation - uge stallation - auge NOTIC BA Mount th ure. Lon ween yo pressure may als The ioni mount th condens Do not m Vibratio chanica Shield th or in a s For elec vacuum proper g lic-type Fittings/ installat Use all m pected t For mor the Ope Mount th or restric process changes Mountin and con cooling, Mount th reading 1 Torr, m E T E b or AG051 he ionization g ng or restricted our process ch e changes. M so cause meas ization gauge he gauge with sation collectin mount the ioni ns may cause al stress to com he ionization g sputtering syst ctrical safety p m chamber. Wh grounding. Do flange clamps /Flanges - follo ion and use. metal vacuum to be below 1. re detailed info erating Manua he PGE050as cted, small dia s chamber and s. ng the PGE050 ntrol instability such as heat he PGE050wi errors may oc mounting posi The VGC083A EB-degas Bay brands of equ BAG052 gauge as clos d, small diame hamber and th ounting the io surement and can be moun h port down to ng in the gaug ization gauge e unstable rea mponents in th gauge near io tem. purposes the h hen using KF o not attempt to s. ow the fitting/f m fittings with m .00 × 10-7 Torr ormation abou l for the PGE0 s close as pos ameter tubing d the gauge. T 0too close to a . Do not moun ters or air cond ith its main ax ccur above 1 T ition has little t A can operate yard-Alpert ho ivalent nude U 2, BAG053 e as possible eter tubing will he gauge. This nization gauge control instab ted in any orie help minimize ge. where it will b dings, measur he ionization g n or electron s housing of the flanges, meta o modify your flange manufa metal seals wh r (1.33 × 10-7 m ut the PGE050 050. sible to the pr will create a p This may caus a gas source i nt the PGE050 ditioning vents is horizontal (s Torr if the unit to no effect. one INFICON ot cathode ioni UHV EB-dega The VGC one INFI or one BA enclosed hot catho or other b gauges. to the pressu l create a pres s may cause a e too close to bility. entation, howe e the effect of be subjected to rement errors gauge. sources such gauge must b al clamps must r flange in orde acturer's recom hen operating mbar, 1.33 × 0 convection g ressure you w pressure diffe se a delay in re inlet may also 0near a source s. see diagram b t is not mounte N BAG050 nud ization gauge as B-A gauges C083B can ope CON BAG051 AG052/053 gl d I2R Bayard-A ode ionization brands of equ re you want to ssure differenc a delay in resp a gas source ever, if possibl any particles o excessive vi and possible as an electron be grounded t t be used to e er to use non- mmendations f pressures are 10-5 Pa). gauge, please want to measur rence betwee esponse to pre o cause measu e of heating o below). Pressu ed horizontally 17 de UHV or other s. erate 1 nude ass Alpert gauge ivalent o meas- ce bet- ponse to inlet le, or ibration. me- n beam o the nsure metal- for e ex- refer to re. Long n your essure urement r ure y. Below

articles or con Do not mount t ons may caus tress to compo langes/ Fitting ollowing: NPT fittings: W nt compound wraps of pipe th auge into the he gauge. Be sure th rounded to pro ttings, especia roduce a good onnected to. U measurement d o earth ground hat you conne arth ground co he green color E050 with port ndensation fro the PGE050 w se unstable rea onents in the gs - follow the When connect or wrap the th hread seal tap gauge port. D he vacuum ga otect personn ally those with d electrical co Use a ground device if nece d via a good q ct a separate onnection and red screw prov t down, if poss om collecting in where it will be adings, measu PGE050. manufacturer ting the device hreaded portio pe such as PT Do not use a w auges and the el from shock h O-rings when nnection betw lug on the vac ssary. The VG uality equipme 12-AWG eart d the location m vided) on the sible, to help m n the gauge. subjected to urement errors r's recommend e using a NPT on of the tubing TFE (Teflon®) t wrench or othe rest of your v and injury. Be n not used with ween the gaug cuum connect GC083 control ent earthing co hing conducto marked with th back panel of tinb29e1 minimize the e excessive vib rs and possible dations and no T fitting, apply g with one-an tape and hand er tool which m vacuum system e aware that s th metal clamp ge and the cha tion flange of t l unit should b conductor. It is or between a k he earth groun the VGC083. 1 (2016-11) VGC083A_B.o effect of any ration. Vibra- e mechanical ote the a thread seal- d-a-half to two d tighten the may damage m are properly some vacuum ps, may not amber it is the pressure be connected encouraged known facility nd symbol (via om - o y a

4.2.2 Insta 4.2.3 Con Gau 83A_B.om allation necting the ge Cable e Ionization A good, necting on the b Good, re ing or di brands o propriate low) from of the V easy ori low-leve cable w the BNC CAUTIO trolled b disconn options equipme n recommende or disconnect back panel of t ecommended isconnecting i of equivalent g e length of ion m the ion gau VGC083 labele ientation of the el ion current s with the BNC co C connector la ON! When ch by the VGC083 ect power to t to devices or ent damage o ed practice is t ting it. The ele the device as practice is to t. With INFICO gauges) conn n gauge cable ge head on th ed "1". The circ e mating conn signal from the onnector at th abeled "COL". hanging or ma 3, you must fir the VGC083be removing/inst r possible inju to remove pow ectrical connec shown below. remove powe ONs nude B-A ected to your (see various e vacuum cha cular plastic co nectors. The B e ion collector e controller en king cabling c rst turn power efore either ch alling option c ury to personn wer from any c ctions for the V . er from any ca A ionization ga vacuum cham IG cable conf amber to the b connector (CP BNC connecto r electrode of t nd of your cab connections to r to the VGC08 hanging cable cards in the VG el. cable prior to c VGC083 are lo able prior to co auge head (or mber, connect figurations sho back panel con C) is keyed to r is for connec the head. The ble is connecte o any device c 83 OFF. Failu connections f GC083 may re 19 con- ocated onnect- other an ap- own be- nnector o allow cting the coaxial ed at on- re to from esult in

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VG 4.2.3.2 Bak VG 83A_B.om C083B keable Nude C083A: BAG e IG Cable G050 For the describe system, For the describe system, The bak connect Bakeab for 50 °C with eith from the When u or equiv glass IG, conn ed in the previ connect the h nude IG, conn ed in the previ connect the h keable nude IG tion to the nud le Cable wirin C ambient tem her single or d e VGC083A co sing the bake valent Nude E nect the IG ca ious page. Aft head end of th nect the IG ca ious page. Aft head end of th G cable (PN → de gauge pins g information mperature. All dual filament io ontroller. able IG cable B- degas IG h able (PN →  ter installing th he IG cable as Gla ble (PN →  8 ter installing th he IG cable as BA co →  81) is prov (BAG050 pins below). All oth IG cables prov on gauges and (PN →  81) head according BA eq 81) at the VG he glass IG he s shown below ass IG head c 81) at the VGC he nude IG he s shown below AG051 nude IG onnection vided with pus s) and is bake her cables list ovided by INFI d filament swit connect the V g to wire color AG050 nude U quivalent B-A g C083B contro ead on your va w. cable connecti C083A contro ead on your va w. G head cable sh-on sockets eable to 200 °C ed above are CON can be u tching is contr VGC083A to B rs listed below UHV EB-degas gauge pin patt 21 oller as acuum ion oller as acuum for C (See rated used rolled BAG050 w. s IG or tern

or Pin Out C is u si m T co B fo w fr W G Base View BAG051 as - single filam BAG051 or eq C is u si m T co a w ca T G ca th co sw ca d Changing cable s not only bad ser of this equ ituation, equip CAUTION ment before co he bakeable n onnection to th Bakeable Cable or 50 °C ambie with either sing rom the VGC0 When using the Gauge accordin ment quivalent nude Changing cable s not only bad ser of this equ ituation, equip CAUTION ment before co he information onnection of a lready have in with INFICON p able with the V he pin-out of t Gauge cables i ables such as he control unit ontact no. 7 fo witch filament able and phys esired to switc es from one d electronics ha uipment, may pment damage N! It is always onnecting or d nude IG cable he nude gaug e wiring inform ent temperatu gle or dual filam 083B controlle e bakeable IG ng to wire colo e I2R (resistive es from one d electronics ha uipment, may pment damage N! It is always onnecting or d n presented in a B-A type ion nstalled on you product desig VGC083. the CPC conn is shown belo s those for use t, e.g., the VG or FIL2. This ty ts from the con sically remove ch filaments. evice to anoth andling proced lead to errone e and possible good industry isconnecting c e (PN →  81) ge pins (BAG0 mation below). re. All IG cabl ment ion gaug r. G cable connec ors listed belo I e degas) B-A g evice to anoth andling proced lead to errone e and possible good industry isconnecting c n this section i ization gauge ur vacuum ves ns, and you w nector used on w. When usin e with controlle C083, there is ype of cable a ntrol unit - the e, rotate and re her when powe dure, it is not a eous measure e operator inju y practice to tu cables. is provided w 51 pins) and i . All other cab es provided b ges and filame ct to BAG051 w. Base V BAG0 2R Degas - du gauge pin pat her when powe dure, it is not a eous measure e operator inju y practice to tu cables. s intended to head or an IG ssel which ma wish to continu n Granville-Ph g INFICON tw ers capable of s an additional and control uni re is no need econnect the c tinb29e1 er is applied to advised and, i ement results, ury. urn off power t with push-on so is bakeable to bles listed abov by INFICON ca ent switching is or equivalent View 051 ual filament ttern er is applied to advised and, i ement results, ury. urn off power t address the in G cable that yo ay not be direc ue using either hillips® and INF wo-filament sw f switching the l pin / socket c it will allow the to go to the he cable connect 1 (2016-11) VGC083A_B.o o the module if done by the a hazardous to the instru- ockets for o 200 °C (See ve are rated an be used s controlled nude I2R B-A o the module if done by the a hazardous to the instru- nstallation / ou may ctly compatible r that head / FICON Ion witch capable e filament from connection at e user to ead end of the or when it is om e m e

23 The view shown below is the CPC connector end of the IG cable: VGC083 Connector End of Cable View Pin/Socket Contact Number Description (compatible with Granville-Phillips® ion gauge cables) 1 Shield, chassis ground 7 FIL 2 (this contact is only present on dual filament IG cables available from INFICON) 8 FIL COM 11 FIL 1 13 Grid Source (supply) 14 Grid return Used only for I2R degas design using the VGC083B Not used for VGC083A EB-degas design PN 399-580 … -582 are a custom cable assemblies provided in different lengths from INFICON for connecting the VGC083 to INFICON PGE050 gauge or MKS Instruments / Granville-Phillips® 275 Convectron® vacuum gauge sensor. Connect the DE-9 D-subminiature connector to VGC083 and PGE050 connectors to "2" or "3". For your reference, the wiring chart for the PGE050 cable provided by INFICON is shown below. In addition to INFICON provided standard cable assembly lengths, INFICON will provide custom length cable assemblies upon request. VGC083 pin no. connects to PGE050 gauge pin no. (INFICON molded, custom connector) 1  NC 2  cable shield 3  3 4  3 5  2 6  5 7  1 8  1 9  NC 4.2.4 Connecting the PGE050 - connectors labeled "2" and "3"

ach 2-contact o the power co PN →  81). Power contacts) + – A total of six se luggable term elay contactor RLY6. Each rel nd I (common RLY1 thru RLY (contacts) = ≠ I A total of three ignals are pro acuum gauge re provided fo anel analog o as a contact la AO1 , AO2, A (contacts) + – One analog inp his input can b NFICON vacuu act mating plug nalog input co A1. Each conne nput ground) a A1 contacts) + – D equires an inp t pluggable ter ontactors. Opt Con Power input P etpoint relays a minal strip mati rs. The VGC08 lay has a cont n). Y6 Relay analog outpu portional to th s. Three each or connection t utput connect abeled + (ana AO3 Ana Ana put is provided be accepted f um module se ggable termin ontactor. The V ector has a co and D (power d C An Analog Inp De put power of 2 rminal strip ma tional power s tact Descriptio (20 … 28 V (d Power ground are provided b ng connectors 83 back panel tact labeled = Contact Des Relay #1 to (NORMALY Relay #1 to (NORMALLY y #1 to Relay ts are provide he displayed p h 2-contact plu to the analog o tors are marke alog output sig Contact De alog Output #1 alog Output G (Signal R d by the VGC0 from one capa eries PGE300 al strip conne VGC083 back ontact labeled detect). Contact Descrip nalog Input (Si put Ground (S etect (power d 0 … 28 V (dc) ating connecto upplies are als on dc), 200 W) by the VGC08 s are provided relay connec (Normally Op scription Relay #6 Y OPEN) Relay #6 CLOSED) #6 (COMMON ed by the VGC ressure for an uggable termin output contact ed AO1, AO2 a nal) and – (an scription to #3 (Signal round #1 to #3 Return) 083 for using a acitance diaph , PGE500 or B ctor is provide k panel analog + (analog inp ption ignal) ignal Return) etect) tinb29e1 ), 200 W to op or is provided so available fr Analo Con 83. Two each 9 d for easy con ctors are mark pen), ≠ (Norma Relay N) C083. These o ny of the user nal strip matin ctors. The VGC and AO3. Eac nalog output g Ana Co l) 3 as an alternate hragm gauge o BAG302. One ed for connect g input connec put signal) and An Co 1 (2016-11) VGC083A_B.o perate. One for connection rom INFICON g Output nectors 9-contact nection to the ed RLY1 thru ally Closed) y Connectors utput voltage assigned g connectors C083 back ch connector round). alog Output onnectors e gauge to "2" or other each 3-con- tion to the ctor is marked d – (analog alog Input onnectors om n ".

25 When using a capacitance manometer / diaphragm gauge or INFICON modules such as the PGE300, PGE500, BAG302 as an ALTERNATE GAUGE, the gauge must be connected to the VGC083 as shown below. The alternate gauge must be provided power from an auxiliary power supply capable of providing the power re- quired by the alternate gauge connected to the VGC083. The D contact is used in this configuration to protect the IG from being turned on at high pressure in case power to the alternate gauge is lost. The IG can be controlled manually using the front panel soft-keys, via remote input signals using the digital I/O connector or RS232/RS485 commands. The VCG083 can also be configured so that the IG sensor on/off is controlled by using the pres- sure measurements from CG1, CG2 or the alternate gauge. If the user prefers di- gital I/O as the means of controlling the IG, various control input and status output signals are available from the 9-pin D-sub male DIGITAL I/O connector. The DIGITAL I/O Connector also provides pin-pin compatible signals with the GP 358 vacuum gauge controller as well as compatible signals with the GP 307. The DIGITAL I/O Connector provides three different types of signals as listed below: The IG sensor on/off, degas on/off and emission current selection can be set by applying momentary continuity to ground. This requires a momentary ground of less than 0.4 V (dc) at 10 µA for 25 msec (minimum) be applied. After this, the input must be allowed to float higher than 3.5 V (dc) for 105 msec (minimum) be- fore another low can be applied. Input signal: Apply momentary continuity to ground to turn IG sensor on or off Apply momentary continuity to ground to turn degas on or off Apply momentary continuity to ground to switch Emission Currents (100 μA or 4 mA) The IG on/off status relay is also available as both normally open and normally closed to indicate IG is on or off. This is an output signal to other external instru- ments to confirm IG filament is on or off. The IG on / off status relay is a single pole, double-throw (SPDT) relay rated at 1.0 A, 30 V (dc) resistive or 1.0 A, 30 V (ac) non-inductive. A degas status or an error condition output signal is also available from the DIGITAL I/O Connector. If programmed for DEGAS STATUS, this can be used as an output signal to other external instruments to confirm that degas is on or off. If programmed for an error condition, this can be used as an output signal to other external instruments to confirm whether any error conditions exist. 4.2.9 Digital I/O Connection Signal Type A - Control Input Signals Signal Type B - Status Output Signal Signal Type C - Status output Signal

Commun Connect RS485 Ser nications tion S 5 T T E m 9 R p 1 2 3 4 T m p sa ca y rial Signal: Open c 0 mA IC max. ransistor on = ransistor off = 9-p Pin no. Descri 1 IG Sen 2 Ground 3 Emissi 4 IG on/o 5 IG on/o Relay 6 Degas 7 Ground 8 Degas 9 IG on/o Relay Either RS232 o mands to/from pole) connec RS485 serial co orted. . RS485 with derived from . RS232 with the same as . RS232 prot Controllers. . RS485proto Controllers. he RS232 ser male to female ort. DO NOT c ame time. The ations at the s An extension may be used serial port on our PC serial n collector transi = Degas on or = Degas off or pin (DE-9P) D ption nsor on/off d ion Current off Status rela off status relay open = IG on s on/off d s/error status, off status relay closed = IG o or RS485 seria the VGC083. ctors that allow ommunication h address, star m the INFICO h start and sto s the RS485 p tocol compatib . ocol compatib . rial port is con , wired "pin-to connect both o e VGC083 can same time. On n cable wired p d to connect th the VGC083 port (a conve necessary). stor (ground e error conditio no error cond D-subminiatu ay common y - Normally C Low = degas y - Normally o n al communica There are two w independent n ports. Four s rt and stop ch N BAG302 IG p characters, protocol. ble with the Gr le with the Gra nfigured to allo o- pin" to be co of the RS232 nnot provide b nly one or the pin-to-pin he RS232 directly to rter may be emitter) rated a n exists, dition exists re DIGITAL I/ Closed on or error open tions may be o DE9 (D-subm cable connec serial commun aracters and c protocol. but no addres ranville-Phillip anville-Phillips ow, for exampl onnected from and RS485 ca both RS232 an other as progr DE-9 Conn user sup communicat D tinb29e1 at 40 V max. V /0 Connection Signal Type A A B B A C B used to send/ miniature, she ctions to the R nication protoc command/res ssing is used. ps Series 307 s Series 307 a le, a 9-pin exte m the VGC083 ables to the V nd RS485 seri rammed by th nectors for con pplied cables tion port – DE DE9S (RS232 1 (2016-11) VGC083A_B.o VCE, ns Digital I/O Connector /receive com- ell size E, RS232 and cols are sup- ponse syntax The syntax is and 358 and 358 ension cable, to your serial VGC083 at the ial communi- he user. nnections to for serial 9P (RS485), 2) om

9-co Socket no. 1 2 3 4 5 6 7 8 9 Connec AT THE 9- Pin no. 1 2 3 4 5 6 7 8 9 Connec AT THE ontact (DE-9S Description No connect Transmitted Received D No connect Signal Grou No connect No connect No connect No connect ct either RS23 E SAME TIME pin (DE-9P) D Description DATA A (–) DATA B (+) No connect No connect No connect Signal Grou No connect No connect No connect ct either RS23 E SAME TIME S) D-subminia ion d Data (OUT) Data (IN) ion und ion ion ion ion 32 or RS485 c E D-subminiatu ) ion ion ion und ion ion ion 32 or RS485 c E ature RS232 C cable to VGC re RS485 Co cable to VGC Connections RS232 Connector C083 - DO NO onnections RS485 Connector C083 - DO NO T CONNECT T CONNECT 27 BOTH BOTH

5 Operation - IG and CG 100 µA (0.1 mA), 4 mA, and 10 mA are available settings of emission current for the hot cathode ion gauge. 1) In clean applications and when operating at higher pressure ranges (5.00 × 10-6 Torr to 1.00 × 10-3 Torr) the 100 µA emission setting is preferred. 2) At lower operating pressures (1.00 × 10-9 Torr to 5.00 × 10-4 Torr) the 4 mA emission setting should be used. 3) Many vacuum measurement equipment users prefer to use the 10 mA emission current setting when making measurements in the UHV pressure regime (below 1.00 × 10-8 to 10-11 Torr). 4) When using a diffusion pump or other pumps that use fluids, there is a possibili- ty of the pump oil vapors entering the IG head. These vapors may form an insulator on the internal components of the head which can lead to instability or failure in controlling the emission. In this case, 4 mA and 10 mA emission current may provide improved operating lifetime and measurement perfor- mance. 5) The emission current can also be set to automatically switch between 100 μA, 4 mA and 10 mA. This results in optimal and stable pressure readings over the entire measurement range from low to high vacuum. For example, if an applica- tion requires that pressure measurements be performed by the ion gauge from pressures lower than VGC083A: 5.00 × 10-6 Torr up to 1.00 × 10-3 Torr VGC083B: 1.00 × 10-6 Torr up to 1.00 × 10-3 Torr, then the user may want to consider selecting the auto switching feature of the emission current. Electron bombardment degas (VC083A) or I2R resistive degas (VGC083B) is used to rid a hot cathode ion gauge sensor of adsorbed gas. The intervals at which de- gas should be applied vary for each application. The low pressure measurement performance of the head will normally improve after each degassing cycle. • Degas can only be applied while the filament is turned on and operating. • Ensure that the vacuum pressure is at or less than 5.00 × 10-5 Torr before attempting to initiate degas. • Degas will automatically turn off after 10 minutes when using factory default settings. Degas can be programmed for duration of 2 to 30 minutes. • The VGC083 will continue to measure approximate pressure while degas is in progress. • Degas will automatically turn off if the pressure exceeds 1.00 × 10-4 Torr during the degas cycle, off but the filament will remain turned on. • Degas can be interrupted by turning the IG filament off. The choice of which filament to use is primarily dependent upon the process and process gases the ion gauge will be used with. For general vacuum applications, dual yttria coated filaments are offered for use with air and inert gases such as N2, argon, etc. Optional dual tungsten filaments are available for use with gases that are not compatible with yttria coated iridium filaments. In most general vacuum applications, the yttria coated iridium filament is the best choice. Yttria coated iridium filaments typically operate at a lower temperature than tung- sten filaments and thus have a lower outgassing rate at UHV and lower chemical reactivity with active gases. Yttria coated iridium filaments typically have a longer operating life than tungsten filaments in clean applications. 5.1 IG Emission Current 5.2 IG Degas 5.3 IG Filament Material Selection / Venting the Chamber Yttria coated iridium filament

29 The yttria coated filament can survive occasional accidental start attempts at at- mosphere in air, but the overall life of the filament may be shortened during each occurrence. Good vacuum practice is to use a separate pressure gauge such as INFICON's PGE050 convection gauge to know when to turn on the ion gauge fila- ment. Typically, a bare tungsten filament is a better choice in those applications where an yttria coated filament is quickly damaged due to the gas type in use. For example, processes such as ion implantation may only use tungsten filaments. Be aware that corrosive applications are hard on any filament and filament life will be shortened while operating in such environments. Tungsten filaments are easily damaged by exposure to air/oxygen during accidental system vents or if considerable quantities of water vapor are outgassed during pump-down and bake-out. It is very important to make sure the tungsten filament is turned off before bringing the chamber up to atmosphere, especially if air is being used to vent the chamber. The use of pure N2 gas is highly recommended to vent or purge your vacuum chamber. Testing has shown that tungsten filaments can withstand limited high pressure excursions when only N2 is present. Venting with air or other gases containing oxygen can damage the tungsten fila- ments. If you try to turn on an ion gauge with tungsten filaments while it is sitting on your desk exposed to room air, you will immediately damage or destroy the fila- ment beyond repair. Do not use another gauge to automatically turn off the ion gauge when the ion gauge (IG) filament in use is constructed of tungsten (yttria coated filament is ok). The response time of other gauges may not allow for timely turn off of the tungsten filament leading to filament damage. Always turn off the IG filament manually be- fore pressure is allowed to rise above 1.00 × 10-3 Torr. Both types of filaments will suffer eventual damage if operated at high pressures. The type and amount of damage at high pressure is dependent upon the length of operating time, the pressure and the gas present. The VGC083 is provided with factory set default values for over pressure shut down. The IG will shut off automatically should the pressure reach or rise above the pressure shut down values shown below: Factory set IG overpressure shut down values Emission Current Overpressure Shut Down Torr mbar Pa 100 µA (0.1 mA) 1.00 × 10-3 1.33 × 10-3 1.33 × 10-1 4 mA 5.00 × 10-4 6.65 × 10-4 6.65 × 10-2 10 mA 1.00 × 10-4 1.33 × 10-4 1.33 × 10-2 An over temperature condition may result inside the VGC083 controller when using an ion gauge cable longer than 50 ft. When this over temperature condition exits and if degas is on, the controller will automatically turn off degas first. If the temper- ature inside the controller continues to climb, the controller will then turn off the IG filament and an "OVER TEMP" message will appear on the programming & setup screen. When this extreme condition exists, the VGC083 may need airflow around it to prevent the over temperature shut down. Tungsten filament NOTICE NOTE 5.4 IG Over Pressure Shut Down 5.5 IG Over Temperature Shut Down

Two of the most important steps for the initial setup of the convection gauges are to set zero (SET VAC) and set atmosphere (SET ATM) as described in the CONVEC GAUGE section 6.5.3. This will ensure proper operation of the gauge and accurate pressure measurements. The gauge is calibrated at the factory using nitrogen. Fur- thermore, the gauge is also installed in a certain orientation when calibrated at the factory. Without setting zero and atmosphere after the gauge is installed in your system, the gauge may not display the expected and correct pressures. This could be caused by the fact that you may be using a different gas than Nitrogen such as air to setup and calibrate the gauge (most commonly the case) and the gauge orientation is different than the orientation used at the factory. As such, it is very important to perform your own initial setup and calibration by setting zero and at- mosphere with the gauge installed in your actual system. Please note the following: Setting zero optimizes performance of the gauge when operating at a low pressure range of 1.00 × 10-4 Torr to 1.00 × 10-3 Torr. If your minimum operating pressure is higher than 1.00 × 10-3 Torr, it is not normally necessary to set zero and thus set- ting atmosphere should be adequate. If you are able to evacuate your system to below 1.00 × 10-4 Torr, it is always a good practice to check and set zero if neces- sary. See "SET VAC CG1" or SET "VAC CG2" in CONVEC GAUGE section 6.5.3. Setting atmosphere is the most important step for a newly installed gauge. If you prefer to use air to set atmosphere, vent your vacuum system chamber to expose the gauge to the local atmospheric pressure (air) and set atmosphere to match your known local uncorrected barometric pressure (air). This is the reading of ambient air pressure you will expect if you were to vent and open your vacuum chamber to the atmosphere surrounding the outside of your chamber. At sea level, this pressure is usually near 760 Torr. At elevations above sea level, the pressure decreases. Check your local aviation authority or airport web sites or your current local weather conditions online to help find your local uncorrected barometric pres- sure if you do not have this information. See "SET ATM CG1" or "SET ATM CG2" CONVEC GAUGE section 6.5.3. Setting zero and atmosphere is normally required only once during the initial setup and maybe checked by the user periodically. After power has been applied to the gauge during the initial setup, allow five minutes for the gauge to stabilize (warm- up) before setting zero and atmosphere. The information presented in sections 5.1 through 5.6, above, is intended as an introduction to the programming capabilities of the VGC083 for use in controlling the selectable parameters and functions of the BAG050 IG (VGC083A), BAG051, BAG052/053 IG (VGC083B) and PGE050 heads. 5.6 Convection Gauge (CG) Initial Setup Setting Zero (SET VAC) Setting Atmosphere (SET ATM) NOTE

6 Setup 6.1 Apply 6.2 Front Display ment Display Display 83A_B.om p and pro ying Powe t Panel Dis y - Pressure y - Units of M y - Setup Sc ogramm er splay Measure- Measure creen ing Before y the VGC nected a The VG • d head • di (CG • d an a A white urement front pa The VG screen. convect cators, e screen. you turn on po C083 to the BA and secured. GC083 provide isplay represe d (IG). isplay represe 1). isplay represe alternate gaug LED is illumin ts in Torr, mba nel; millibars u GC083 provide This screen is tion vacuum g emission curre ower to the VG AG05x nude I Turn on powe s three indepe ents pressure ents pressure ents pressure e (CG2 or CG nated next to t ar or Pa (the p unit is written s an independ s used for set auges. Other ent and select GC083 for the G and PGE05 er by pressing endent front p measurement measurement measurement G2-ALT). the selected e pascals unit of as mbar). dent setup and up, programm useful informa ted IG filamen first time, ens 50 convection the Power ke panel LED disp ts from the BA ts from the firs ts from the se engineering un f measure is w d programmin ming and oper ation such as nt are also disp sure the cable gauges are c y. plays: AG05x hot ion st convection g cond convecti nit indicating m written as 'Pa' g OLED setup ration of the io relay status in played in the s 31 s from on- gauge gauge ion or meas- on the p n and ndi- setup

ramming-keys VGC083 front p dentify what fu o begin progra elect the desir ccess the para o the previous etting addition he desired par he value of ce ange or limit. I ange of a spec NO CHANGE" nd enter a cor he following is creen menu. UNITS [Fac INFO [Facto SET CG2-A ALT GAUG ALT GAUG I - O STATU DEFAULTS (not useable programming s located belo panel. During unction each k amming, pres red menu and ameters and s menu or pres nal parameters rameter then p ertain menu pa f the user tries cific menu, the ". In this case, rrect value tha s a summary o ctory default = ory default = F ALT [Factory d GE [Factory de GE CAL [Facto US [Factory d S [Factory defa e if IG sensor of the VGC08 w the OLED s programming key represents ss the MENU k change the p save the new ss repeatedly t s, scroll with th press ENTER arameters mu s to program a e setup screen , the user nee at is within the of all factory-s = TORR] FIRMWARE V default = CG2] efault = 10 TOR ory default = F efault =DEGA ault = PRESS is on)] 83 controller is setup screen o of the VGC08 s. key. Press the parameters. Pr settings. Pres to return to the he UP and DO . st be program a value that is n will momenta ds to access t allowable ran set default valu VERSION] ] RR CDG] actory Set Nu AS STATUS] ENTER TO S tinb29e1 s done via the on the left han 83, the OLED e UP and DOW ress the ENTE ss the MENU K e main screen OWN keys unt mmed within an s outside of the arily display th the specific m nge. ues in the VGC umber] SET OR MENU 1 (2016-11) VGC083A_B.o e four pro- nd side of the display will WN key to ER key to Key to return n. To continue til you reach n allowable e allowable he message enu again, C083 setup U TO EXIT om e

33 • EMISS SELECT [Factory default = IE = 100UA] • AUTO IE1 TRIP [Factory default = DISABLED] • AUTO IE2 TRIP [Factory default = DISABLED] • SELECT FIL [Factory default = FILAMENT 1] • DEGAS TIME [Factory default = 10 MINUTES] • SENSITIVITY [Factory default = 25.00] • OVER PRES 100 [Factory default = 1.00E-03] • IG TRIP PRESSURE [Factory default = 1.00E-03] • IG CONTROL [Factory default = MANUAL MODE] • CAL FACTORS [Factory default = C0, C1, C2, C3, C4, C5 all factory-set to 50] (VGC083A only) • SET VAC CG1 [Factory default = 0.00E 00] • SET ATM CG1 [Factory default = 7.60E 02 TORR] • SET VAC CG2 [Factory default = 0.00E 00] • SET ATM CG2 [Factory default = 7.60E 02 TORR] • ASSIGN REL 1 [Factory default =ION GAUGE] • ASSIGN REL 2 [Factory default =CG1] • ASSIGN REL 3 [Factory default =CG2] • ASSIGN REL 4 [Factory default =ION GAUGE] • ASSIGN REL 5 [Factory default =CG1] • ASSIGN REL 6 [Factory default =CG2] • REL 1 LO TRIP [Factory default = 1.00E-06] • REL 1 HI TRIP [Factory default = 2.00E-06] • REL 2 LO TRIP [Factory default = 1.00E-01] • REL 2 HI TRIP [Factory default = 2.00E-01] • REL 3 LO TRIP [Factory default = 1.00E-01] • REL 3 HI TRIP [Factory default = 2.00E-01] • REL 4 LO TRIP [Factory default = 1.00E-06] • REL 4 HI TRIP [Factory default = 2.00E-06] • REL 5 LO TRIP [Factory default = 1.00E-01] • REL 5 HI TRIP [Factory default = 2.00E-01] • REL 6 LO TRIP [Factory default = 1.00E-01] • REL 6 HI TRIP [Factory default = 2.00E-01] • TEST RELAYS • ANALOG OUT 1 [Factory default = IG - CG1 0.5 - 7V] • ANALOG OUT 2 [Factory default = CG1 1 - 8 V ] • ANALOG OUT 3 [Factory default = CG2 1 - 8 V ] • AOUT CAL 1 [Factory default = Factory Set Number] • AOUT CAL 2 [Factory default = Factory Set Number] • AOUT CAL 3 [Factory default = Factory Set Number] • AOUT LIN 1 [Factory default = 1.00E 00] • AOUT LIN 2 [Factory default = 1.00E 00] • AOUT LIN 3 [Factory default = 1.00E 00] • COMM TYPE [Factory default = RS485] • BAUDRATE [Factory default = 19200 BAUD] • FRAMING [Factory default = 8 BITS NONE 1] • ADDRESS [Factory default = 01] ION GAUGE CONVEC GAUGE RELAYS ANALOG OUTPUT SERIAL COMM

• SCREEN SETUP [Factory default = NORMAL] • SCREEN SAVER [Factory default = ON] • BRIGHTNESS [Factory default = 0] This section provides detailed information on programming and configuration of various menus and submenus of the device. This key, on the VGC083 front panel, is referred to as the 'ENTER' key throughout this manual. From the main menu (press the MENU key if the main menu is not shown), scroll Up or Down to SETUP UNIT then press the ENTER key to access the SETUP UNIT menu for configuring the VGC083 general parameters such as the units of measure, selecting CG2 verses ALTERNATE GAUGE, etc. In certain instances, during setup of the programmed functions and settings, you may need to press the ENTER key until you reach the end of a program/setup sequence before pressing the MENU key to return to the main menu or previous setup screen. [Factory default = TORR] This allows the user to display the pressure measurements in Torr, mbar or pascals. The user must program all other programming values according to their requirements. [Factory default = FIRMWARE VERSION] Provides the model number of VGC083, the firmware version numbers for both the VGC083 controller and the IG connected to it. [Factory default = CG2] This allows the user to assign the type of gauge to the CG2/ALT display. The user can either assign a second convection gauge CG2 (same type as CG1 using INFICON's PGE050 convection gauge sensor) or analog input using a 0-10 V (dc) analog input signal from an alternate gauge. The ANALOG INPUT selection allows processing of one analog input voltage signal from other gauges such as a capaci- tance diaphragm gauge or INFICON vacuum gauge modules PGE300, PGE500 or BAG302. [Factory default = 10 TORR CDG] Ignore this menu if you have selected CG2 in the SET CG2 - ALT menu above. If you have selected ANALOG INPUT in the SET CG2 - ALT menu above, the ALT GAUGE menu selection is used to assign the type of alternate gauge. • Select 100 mTORR CDG for a 100 mTorr Capacitance Manometer / Diaphragm Gauge (CDG) with 0-10 Vdc analog output. • Select 1 TORR CDG for a 1 Torr CDG with 0-10 Vdc analog output. • Select 10 TORR CDG for a 10 Torr CDG with 0-10 Vdc analog output. • Select 100 TORR CDG for a 100 Torr CDG with 0-10 Vdc analog output. • Select 1000 TORR CDG for a 1000 Torr CDG with 0-10 Vdc analog output. • Select ITI LOG CG if you are using INFICON's convection gauge modules such as the PGE300 or PGE500 with a Log-linear analog output. • Select ITI LOG IG if you are using INFICON's ionization gauge module such as the BAG302 IG with a Log-linear analog output. • Select ITI NON-LINEA if you are using INFICON's convection gauge modules such as the PGE300 or PGE500 with a non-linear analog output. DISPLAY 6.5 Programming 6.5.1 SETUP UNIT UNITS INFO SET CG2 - ALT ALT GAUGE

35 [Factory default = Factory Set Number] Ignore this menu if you have selected CG2 in the SET CG2 - ALT menu above. If you have selected ANALOG INPUT in the SET CG2 - ALT menu above, the ALT GAUGE CAL menu selection is used to optimize the analog input calibration. It is recommended that the user not make this adjustment unless the displayed alter- nate gauge pressure (CG2/ALT display channel) do not closely match the expected pressure from the analog input calculations. Example - To perform ALT GAUGE CAL if ALT GAUGE menu is selected for a 1000 TORR CDG. Connect both the CDG and a high resolution voltmeter to the + and – terminals of the VGC083 Analog Input Connector labeled AI. With CDG exposed to atmosphere, measure the analog input from the CDG at the VGC083 Analog Input Connector and calculate the corresponding pressure. In the ALT GAUGE CAL screen use the UP or DOWN keys to adjust the displayed pressure by the VGC083 to match the calculated pressure from the CDG analog signal. For example, if the analog input signal from the CDG is at 7.600 volts representing 760 Torr for a 1000 TORR CDG, then adjust the ALT GAUGE CAL so that the VGC083 also displays 760 Torr. For other CDG ranges always use CDG's full scale pressure value to perform calibration. For example, if you are using a 100 TORR CDG, evacuate your system pressure to 100 Torr and use the same calibration procedure above. Example - To perform ALT GAUGE CAL if ALT GAUGE menu is selected for ITI LOG CG, ITI LOG IG or ITI NON-LINE. When using other INFICON vacuum gauge modules such as PGE300, PGE500 or BAG302 as alternate gauges to CG2, the analog output signals from these devices can be used to display pressure in the CG2/ALT display channel. Connect the analog output from these devices to the + and – terminals of the VGC083 Analog Input Connector labeled AI. In the ALT GAUGE CAL screen use the UP or DOWN keys to adjust the displayed pressure by the VGC083 to match the pressure reading on the modules. As you adjust the analog output, the number being displayed in the ALT GAUGE CAL screen represents the millivolts offset from zero volts that is being used inter- nally for the analog input gain adjustment. [Factory default = DEGAS STATUS] A degas status or an error condition output signal is available from the DIGITAL I/O connector. If selected for DEGAS STATUS, this can be used as an output signal to other external instruments to confirm that degas is on or off. If selected for ERROR STATUS, this can be used as an output signal to other external instruments to con- firm whether there is an error condition. [Factory default = PRESS ENTER TO SET OR MENU TO EXIT] The system can be returned to the original factory settings by using the ENTER key to set factory defaults. The IG filament must be off (sensors off) in order to reset defaults. If you reset all values to original factory default settings, you would need to repeat the initial setup procedure for the convection gauges as described in section 5.6 and reprogram other parameters as required. Before you activate the ion gauge/filament, make sure you understand all instruc- tions and information provided in this manual and the Operating Manual for the PGE050 convection gauge. Furthermore, you should ensure you have fully config- ured the VGC083 control unit to your operational requirements before turning the filaments on. Prior to turning on the ion gauge filament you should ensure the pres- sure is below 1.00E-03 Torr (1 mTorr) with emission current set at 100 μA; 5.00E-04 Torr with emission current set at 4 mA and 1.00E-04 Torr with emission current set at 10 mA. ALT GAUGE CAL NOTE - I - O STATUS DEFAULTS 6.5.2 ION GAUGE NOTICE

LECT TRIP to of (y a tu p [F U A tio cu IE sw u d In to su M cu 1 A sw su S b m 1 a w p S sw th to 1 su fin tr th If za h 1 sw g [F T 1 T le 4 io su a th to NOTE CAUTION o oxidizing gas ff the ion gaug yttria coated ir llow for timely ungsten filame ressure is allo Factory defaul Use the Up and AUTO IE 100-4 on of 100 μA, urrent through E 100-10 allow witching of the rement range etails about th n clean applica o 1.00E-03 To ures (1.00E-0 Many vacuum m urrent setting .00E-08 to 1.0 As described p witch between ure readings o Select AUTO IE etween 100 μ measurements .00E-03 Torr, utomatic switc which the emis rogrammed in Select AUTO IE witch between hat pressure m o 1.00E-03 To 00-10 automa ure trip point a ned by the val rip point at whi he value progr you plan to u ation gauge fil ave 100 μA an 0 mA emissio witching featu auge and ope Factory defaul he default set 00 μA. If the E RIP value pro ect the pressur mA. For exam on gauge will o urement range utomatically s he choice of pr o 1.00E-04 To N! Due to the r ses or gas mix ge when the io ridium filamen y turn off of the ents. Always tu owed to rise ab lt = IE = 100UA d Down key to 4, AUTO IE 10 4 mA, 10 mA hout the meas ws for automat e emission cu requires vario he emission cu ations and wh orr) the 100 μA 9 Torr to 5.00 measurement when making 00E-11 Torr). previously, the n 100 μA, 4 m over the entire E 100-4 if you A and 4 mA. F s be performed then the user ching feature o ssion current w n the AUTO IE E 100-10 if yo n 100 μA, 4 m measurements orr, then the us atic switching f at which the e lue programm ich the emissi rammed in the se a convectio lament on/off nd 4 mA emis n current). Ho ure here, you w erate at the 10 lt = 1.00E-05] tting is DISAB EMISS SELEC ogrammed her re at which em mple, if the AU operate at the e of 1.00E-03 switch to 4 mA rogramming th orr. risk of filamen xtures, never u on gauge filam t is okay). The e filament lead urn the tungst bove 1.00E-03 A] o select emiss 00-10. Then p A results in ope surement rang tic switching o rrent is recom ous emission c urrent selectio en operating a A emission set 0E-04 Torr) the t equipment us measuremen emission curr A and 10 mA. e measuremen would like the For example, d by the ion ga r may want to of the emissio will switch from E1 TRIP menu ou would like th A and 10 mA. s be performed ser may want feature of the mission curre med in the AUT on current wil e AUTO IE2 T on gauge or a function (see ssion current s owever by sele would be able 0 mA emission LED if EMISS CT menu is se re (Factory de mission curren UTO IE1 TRIP emission curr Torr to 1.00E A at pressure o he AUTO IE1 t failure cause use another g ment in use is c e response tim ding to filamen en IG filament 3 Torr. ion current to ress ENTER t eration of the u e. Selection o of the emission mended when current setting on. at higher pres tting is preferre e 4 mA emissi sers prefer to nts in the UHV rent can also b This results i nt range from e emission cur if an applicatio auge from 5.00 consider selec n current. The m 100 μA to 4 below. he emission c For example, d by the ion ga to consider se emission curr nt will switch f TO IE1 TRIP m l switch from 4 RIP menu bel n alternate ga IG CONTROL selections avai ecting the AUT to use these d current as we S SELECT me et to AUTO IE fault = 1.00E- nt automaticall value is set to rent of 100 μA -05 Torr. The of 1.00E-05 To TRIP point an tinb29e1 ed by inadvert gauge to autom constructed o me of other ga nt damage esp t OFF manual 100 μA, 4 mA to save setting unit with a fixe of AUTO IE 10 n current. The n the user’s pr gs. See sectio ssure ranges ( ed. At lower o ion setting sho use the 10 mA V pressure reg be set to auto n optimal and low to high va rrent to autom on requires th 0E-07 Torr up cting the AUT e pressure trip mA is defined current to auto , if an applicat auge from 4.0 electing the AU rent. In this ca from 100 μA to menu below a 4 mA to 10 mA low. auge to contro L menu below ilable (not ava TO IE 100-10 devices to con ell. nu above is se 100-4, then th -05) allows the ly switches fro o 1.00E-05 To A over the pres emission curr orr or lower. T nywhere betwe 1 (2016-11) VGC083A_B.o tent exposure matically turn f tungsten uges may not pecially for lly before A, 10 mA, g. The selec- ed emission 00-4 or AUTO e automatic ressure meas- n 5.1 for more 5.00E-06 Torr operating pres- ould be used. A emission ime (below matically stable pres- acuum. matically switch at pressure p to TO IE 100-4 p point at d by the value matically tion requires 00E-10 Torr up UTO IE se, the pres- o 4 mA is de- nd pressure A is defined by ol the ioni- w), you will only ailable with automatic ntrol the ion et to 4 mA or he AUTO IE1 e user to se- om 100 μA to orr, then the ssure mea- rent will then he user has een 1.00E-06 om - e r - h p y y

AUTO SELE DEG SENS 83A_B.om O IE2 TRIP ECT FIL GAS TIME SITIVITY (VG NOTIC GC083A) [Factory The def 100 μA. TRIP va lect the 10 mA. ion gaug program current w lower. T where b is set to gramme switches [Factory Allows t It is high filament an exten tain emi filament that hav [Factory The leng cycle ca [Factory The leng cycle ca When u tivity to 2 25 per T Sensitiv based o measure Ic = P × where P emissio 1) Sensi create emiss the re reach Typic CA a value to ensur is used damage as a res E y default = 1.0 fault setting is If the EMISS alue programm pressure at w For example, ge will operate mmed for the A will then autom The user has t between 1.00E o AUTO IE 100 ed to select th s from 100 μA y default = FIL the user to sel hly recommen ts are the coat nded period o ission current. t coating may ve outgassed f y default = 10 gth of time, in an be selected y default = 25. gth of time, in an be selected sing the BAG 25 per Torr. If Torr, you may vity constant u on the followin ement: S × Ie P is Pressure, n current. itivity for the B-A t ed and collected ( sion current from w eadout of pressure [email protected] f cal sensitivity for th AUTION! The not matching re that the VG with may resu e due to incorr sult of incorrec 00E-07] DISABLED if SELECT men med here (Fac which emission if the AUTO I e at the emiss AUTO IE1 TRI matically switc he choice of p E-06 to 1.00E- 0-10, then the e desired pres A to 4 mA. LAMENT 1] lect which filam nded to period ted iridium typ f time can cau . This will beco become poiso from the proce MINUTES] minutes, deg d from 2 to 30 00] minutes, deg d from 2 to 30 050 nude UHV f you are using set the actua sed by the op g mathematic S is Sensitivit type ionization gau (collector current) which the ion curr e when measured for further discuss he nude UHV EB- user assumes the actual hea GC083A is prog ult in pressure rect pressure r ct pressure me EMISS SELE nu is set to AU ctory default = n current autom E2 TRIP value ion current of IP menu abov ch to 10 mA at programming t -08 Torr. Note AUTO IE1 TR ssure at which ment to operat ically alternate pe. An inactive use failure of t ome more pro oned by proce ess materials. assing will run minutes in du assing will run minutes in du V EB-degas IG g an IG with a l sensitivity for erating system al formula for ty1) ; Ic is the c uge is a constant. per unit measure ent is generated. by the ion gauge sion on the use of degas ionization g s all risks if the ad (sensor) se grammed for t readings that readings and i easurement re ECT menu abo UTO IE 100-10 1.00E-07) allo matically switc e is set to 1.00 4 mA from th ve to 1.00E-07 t pressure of 1 the AUTO IE2 e that if the EM RIP value abo h emission cur ate: either Filam e operating fila e, coated filam that filament to oblematic in ap ess gas byprod n after it is init uration. n after it is init uration. G or equivalen a known sensit r the IG head m for the pres the B-A ion g collector curre . A number define of pressure per th This setting can b e for gases other th this setting for co gauge used is 25 e SENSITIVIT ensitivity desc the actual sen t are not true p improper syst eadings may r ove is set to 4 0, then the AU ows the user t ches from 4 m 0E-07 Torr, th e trip pressure 7 Torr. The em 1.00E-07 Torr 2 TRIP point a MISS SELECT ve must still b rrent automati ment 1 or Fila aments 1 and ment not opera o establish an pplications wh ducts or mater iated. The deg iated. The deg nt nude IG, se tivity other tha you are using sure calculatio auge pressure nt and Ie is the d as the quantity o he controlled quan be useful for comp han nitrogen/air. ompensated readin per torr (25 Torr - TY is programm ribed above. F nsitivity of the pressure. Equ em control fun result. 37 mA or UTO IE2 to se- mA to hen the e value mission r or ny- T menu be pro- cally ment 2. 2 if the ated for d main- here the rials gas gas et sensi- an g. The on is e e of ions ntity of pensating Consult ngs. 1). med to Failure head it ipment nctions

IG CONTRO TY (VGC083 ES 100 RES OL [F W g yo th b m Ic w e 1) a to is d a [F T w T is 1 fic m of T 1 ca [F T a is e S A T 1 se yo g m T 4 fix 1 [F T b G S th 3B) NOTE Factory defaul When using the lass enclosed ou are using a he actual sens y the operatin mathematical fo c = P × S × Ie where P is Pres mission curren Sensitivity for t created and co emission curre the readout of reachus@infico Typical sensitiv CAUTION value not ma o ensure that t s used with ma amage due to s a result of in Factory defaul his function al when the emiss he overpressu s 100 μA. How .00E-03 Torr ( cations to dete measuring (BA f 1.00E-03 To he overpressu .00E-04 Torr w annot be chan Factory defaul his setting allo lternate gauge s operating at mission curren SELECT = AUT ALT GAUGE. he IG TRIP P .00E-03 Torr b etting the IG T our ion gauge auge head is measuring a m he user does mA or 10 em xed at 5.00E-0 0 mA respecti Factory defaul his function al e controlled fr GAUGE (altern Select MANUA he ion gauge h lt = 10.00] e resistive or I d IG (BAG052 an IG with a kn sitivity for the I ng system for t formula for the ssure, S is Se nt. the B-A type ioniz ollected (collector ent from which the pressure when m on.com for further vity for the resistiv N! The user as tching the act the VGC083B ay result in pre o incorrect pre ncorrect press lt = 1.00E-03] llows the user sion current is ure shut down wever, when se (1.00E-02 Tor ermine the ma AG05x series h orr). ure shut down when emissio nged by the us lt = 1.00E-03] ows the user t e can turn the 100 μA or 4 m nt) or in the au TO IE) and the RES default v but it can be s TRIP PRES va e head specific capable of me maximum press not have the c ission current 04 Torr and 1 ively. lt = MANUAL llows the user rom the Front nate gauge). AL MODE if yo head filament I2R degas nud / 053, or equiv nown sensitivi IG head you a the pressure c e B-A ion gaug ensitivity1) ; Ic i ation gauge is a c current) per unit m e ion current is gen easured by the io r discussion on the ve or I2R degas io ssumes all risk ual head (sen is programme essure reading ssure reading sure measurem r to set the pre s running at 10 n values are ad etting the over rr maximum), aximum press heads are cap n value is facto n current sele ser. to select a pre IG filament o mA emission c utomatic emis e IG CONTRO value when us set to value as alue at a highe cations to dete easuring (BAG sure of 1.00E- choice to sele has been sel .00E-04 when MODE] r to choose the Panel (MANU ou wish to use to the on or o de IG (Series B valent) set sen ity other than are using. The calculation is b ge pressure m s the collector constant. A numbe measure of pressu nerated. This setti n gauge for gases e use of this settin nization gauges u ks if the SENS sor) sensitivity ed for the actu gs that are no s and imprope ment readings essure at whic 00 μA. djustable whe rpressure valu review your io ure your ion g able of measu ory set to 5.00 cted is 4 mA o essure value a n. This is appl urrent setting sion current s OL mode below ing an emissio s high as 1.00E er pressure tha ermine the ma G05x series he -03 Torr). ct a turn on po ected. The IG n the emission e source of co UAL MODE), C the front pane ff state. tinb29e1 BAG051, or eq nsitivity to 10 10 per Torr, y Sensitivity co based on the f measurement: r current and I er defined as the q ure per the contro ing can be useful s other than nitrog ng for compensate used is 10 per torr SITIVITY is pro y described a ual sensitivity ot true pressur er system con s may result. ch the gauge w en emission cu ue at a higher on gauge head gauge head is uring a maxim 0E-04 Torr and or 10 mA resp at which CG1 o licable only wh (not applicab switching mod w is set to CG on current of E-02 Torr. Ho an 1.00E-03 T aximum pressu eads are capa oint for the IG G turn on and o n current is set ontrol for the IG CG1, CG2 or t el programmin 1 (2016-11) VGC083A_B.o quivalent) or per Torr. If you may set onstant used following Ie is the quantity of ions lled quantity of for compensating gen/air. Consult ed readings. (10 Torr -1). ogrammed to bove. Failure of the head it e. Equipment ntrol functions will turn off urrent selected pressure than d speci- capable of mum pressure d pectively and or CG2 or hen the gauge le with 10 mA e (EMISSION G1, CG2 or 100 μA is wever, when Torr, review ure your ion able of when the off is always t for 4 mA or G. The IG can the ALT ng keys to turn om d n e n n

CAL (VGC 83A_B.om FACTORS C083A only) NOT Select C or the A filament CA when th filament other ga possible sure is a When C ion gaug when th value pr when th value pr If the ion when th 04 Torr. CG2 or If the ion turned o Howeve able to u emissio When C cannot t of the fro ment tur Gauge. [Factory Do not c enhance CAL FA to a num measure CA emissio capacit gauge o ing that may res To mini the ion precise 1) Befo sho 2) Con 3) App 4) Next 5) Sele It is alw E CG1, CG2 or A Alternate Gaug t on and off. AUTION! Nev he ion gauge fi t such as the y auges may no e filament dam allowed to rise CG1, CG2 or A ge emission c he pressure m rogrammed in he pressure m rogrammed fo n gauge emiss he pressure m . The ion gaug Alternate Gau n gauge emiss on using the p er by selecting use these dev n current as w CG1, CG2 or A turn on or turn ront panel, RS rn on or turn o y default = C0 change CAL F ement of the V ACTORS value mber other tha ements. AUTION! You on (turning th tance diaphra on and off. Fa t you do not i sult in equipm imize the risk gauge head ely: ore selecting uld turn off p nnect the alte ply power to t xt apply powe ect ALTERNA ways good ind ALT GAUGE i ge is to be use ver use anothe ilament in use yttria coated ir t allow for time mage. Always e above 1.00E ALT GAUGE is current is set to easured by CG the IG TRIP P easured by CG or the IG TRIP sion current is easured by CG ge filament wil uge rises abov sion current is ressure meas g the AUTO IE vices to contro well. ALT GAUGE is n off the IG fila S232, RS485 o off is automatic , C1, C2, C3, FACTORS val VGC083A cap es at the facto an 50 will resu u must be aw he IG filament agm gauge as ailure to follo inadvertently ment damage k associated w filament, follo ALTERNATE power to the V rnate gauge t the alternate er to the VGC ATE GAUGE i dustry practic f the pressure ed to automatic er gauge to au e is constructe ridium version ely turn off of t turn the IG fila E-03 Torr. s selected in t o 100 μA, the G1, CG2 or A PRES above. G1, CG2 or A PRES. s set to 4 mA, G1, CG2 or A l turn off when ve 5.00E-04 T s set to 10 mA surements from E 100-10 autom ol the ion gaug s selected in t ament manuall or DIGITAL I/O cally controlle C4, C5 all fac ues. This men pabilities. Leav ry default sett lt in inaccurate ware of possib t to ON) when s a source of ow the recom y allow the ion e. with this usin ow these rec E GAUGE in t VGC083. to the VGC08 gauge. 083. n the SETUP ce to avoid h e measuremen cally turn the utomatically tu ed of tungsten is okay). The the tungsten f ament OFF m the IG CONTR ion gauge fila Alternate Gaug The ion gaug Alternate Gaug the ion gauge Alternate Gaug n the pressure Torr. A, the ion gaug m CG1, CG2 o matic menu ab ge and operate the IG CONTR ly using the IG O signals. In th ed by CG1, CG ctory-set to 50] nu is intended ve C0, C1, C2 ting of 50. Cha e vacuum pre ble risks of in n using an al f control for t mended proc n gauge head ng an alterna commended s the SETUP U 83. P UNIT menu. ot-swapping nt from CG1 o ion gauge hea rn off the ion g material (a co e response tim filament leadin anually before ROL menu and ament will turn ge drops below e filament will ge rises above e filament will t ge drops below e measured by ge filament can or Alternate G bove, you wou e at the 10 mA ROL menu, the G ON/OFF sof his case the IG G2 or the Alter ] for future 2, C3, C4, and anging these v essure nadvertently s ternate gaug urning the io cedures for e d filament to ate gauge to c steps below NIT menu, th of Cables. 39 or CG2 ad gauge oated me of ng to e pres- d the on w the l turn off e the turn on w 5.00E- y CG1, nnot be Gauge . uld be A e user ft-keys G fila- rnate C5 values starting e like a n ensur- turn on control e user

It is important to set vacuum and atmosphere when initially setting up the con- vection gauges. See Convection Gauge Initial Setup section 5.6 This programming menu allows the user to set the atmospheric pressure reading (also known as the "span" adjustment) and vacuum reading ("zero" point) for con- vection gauges CG1 and CG2. INFICON advises that you first determine if the "span" (ATM) adjustment of your measurement device is set properly before set- ting the "zero" (VAC) adjustment. It is good practice to perform the sequence of checking and adjusting ATM (span) then VAC (zero) and then, finally re-checking the ATM setting to ensure that the circuitry is properly balanced for use in measur- ing pressure throughout the intended measurement range. Press the ENTER key to access the CONVEC GAUGE menu for configuring the convection gauges. [Factory default = 0.00E 00] Press the ENTER key to access the SET VAC CG1 screen. 1. To properly set the vacuum reading (“zero” point), with CG1 installed on your vacuum system, the gauge should be evacuated to a pressure below 1.00E- 04 Torr (0.1 mTorr). [Factory default = 0.00E+0 Torr] 2. When the known vacuum system pressure is below 0.1 mTorr and If you want to set zero at 0.00E+0, then press the ENTER key repeatedly until the SET VAC CG1 appears on the display again. The zero point (displayed pressure reading with gauge exposed to vacuum) is now set. If you want to set the ‘zero’ pressure reading to a number higher than 0.00E+0, then press the UP or DOWN keys at each of the high-lighted numeral locations until the desired number is reached; then press the ENTER key repeatedly until the SET VAC CG1 appears on the display again. The new "zero point" is now set. Due to the nature of circuit operation and head electrical control that cover a wide range of measurement by a convection gauge, it is advised that one first check and adjust, if necessary, the "span" and "zero" to ensure that all measurements made between these two, adjusted settings are as accurate as possible. [Factory default = 7.60E 02 TORR] Press the ENTER key to access the SET ATM CG1 screen. Backfill the vacuum vessel /chamber with nitrogen gas to a known pressure bet- ween 400 Torr and 1000 Torr. Alternatively, if your local uncorrected barometric pressure (air) is known, simply vent your vacuum system chamber to expose the gauge to the local atmospheric pressure. When desired system pressure is stable, adjust the pressure on the screen to the known value using the UP or DOWN keys. Press the ENTER key to move to the next digit and use the UP or DOWN keys to decrease or increase the value of that digit. Continue pressing the ENTER key until the SET ATM CG1 reappears on the display. The new atmosphere point is now set. For example, if your known local uncorrected barometric pressure is 760 Torr, enter 760 in the SET ATM screen. The main pressure measurement screen will now display 760 Torr while the gauge is at atmosphere. [Factory default = PRESS ENTER TO SET VAC] Same as SET VAC CG1 above, except for CG2 [Factory default = 7.60E 02 TORR] Same as SET ATM CG1 above, except for CG2. Press the ENTER key to access the RELAYS menu for configuring the setpoint relays. 6.5.3 ION GAUGE NOTICE SET VAC CG1 SET ATM CG1 SET VAC CG2 SET ATM CG2 6.5.4 RELAYS

41 [Factory default = ION GAUGE] This assigns Relay #1 to the ion gauge, CG1, CG2 or ALT GAUGE (alternate gauge). [Factory default = CG1] ASSIGN RELAY 2; same choices as ASSIGN RELAY 1 above [Factory default = CG2] ASSIGN RELAY 3; same choices as ASSIGN RELAY 1 above [Factory default = ION GAUGE] ASSIGN RELAY 4; same choices as ASSIGN RELAY 1 above [Factory default = CG1] ASSIGN RELAY 5; same choices as ASSIGN RELAY 1 above [Factory default = CG2] ASSIGN RELAY 6; same choices as ASSIGN RELAY 1 above [Factory default = 1.00E-06] This setpoint corresponds to the turn on point for Relay #1. Relay #1 will turn on when the pressure drops below this setting. If you are unable to increase the value of REL 1 LO TRIP (VGC083 responding with the message "NO CHANGE"), you must first access the REL 1 HI TRIP menu below and increase that value to a number higher than the value of the REL 1 LO TRIP you are trying to set. Ensure the REL 1 LO TRIP setpoint value you are programming is within the measurement range of the specific gauge the relay is assigned to. [Factory default = 2.00E-06] This setpoint corresponds to the turn off point for Relay #1. Relay #1 will turn off when the pressure rises above this setting. If you are unable to decrease the value of REL 1 HI TRIP (VGC083 responding with the message "NO CHANGE"), you must first access the REL 1 LO TRIP menu above and decrease that value to a number lower than the value of the REL 1 HI TRIP you are trying to set. Ensure the REL 1 HI TRIP setpoint value you are programming is within the measurement range of the specific gauge the relay is assigned to. [Factory default = 1.00E-01] (RELAY 2 LO TRIP; same info as RELAY 1 LO TRIP above) [Factory default = 2.00E-01] (RELAY 2 HI TRIP; same info as RELAY 1 HI TRIP above) [Factory default = 1.00E-01] (RELAY 3 LO TRIP; same info as RELAY 1 LO TRIP above) [Factory default = 2.00E-01] (RELAY 3 HI TRIP; same info as RELAY 1 HI TRIP above) ASSIGN REL 1 ASSIGN REL 2 ASSIGN REL 3 ASSIGN REL 4 ASSIGN REL 5 ASSIGN REL 6 REL 1 LO TRIP REL 1 HI TRIP REL 2 LO TRIP REL 2 HI TRIP REL 3 LO TRIP REL 3 HI TRIP

[Factory default = 1.00E-06] (RELAY 4 LO TRIP; same info as RELAY 1 LO TRIP above) [Factory default = 2.00E-06] (RELAY 4 HI TRIP; same info as RELAY 1 HI TRIP above) [Factory default = 1.00E-01] (RELAY 5 LO TRIP; same info as RELAY 1 LO TRIP above) [Factory default = 2.00E-01] (RELAY 5 HI TRIP; same info as RELAY 1 HI TRIP above) [Factory default = 1.00E-01] (RELAY 6 LO TRIP; same info as RELAY 1 LO TRIP above) [Factory default = 2.00E-01] (RELAY 6 HI TRIP; same info as RELAY 1 HI TRIP above) [Factory default = OFF] This allows the user to manually toggle the relays on and off to test for correct external circuit wiring and ensure polarity is as desired. Press ENTER to access the TEST RELAYS menu. Select a specific relay by pressing the ENTER key so that the relay number is highlighted. Press the UP or DOWN key to energize the specific relay. Relays will return to the previous state after exiting the TEST RELAYS menu. The VGC083 provides three analog outputs proportional to the pressure measured by the ionization gauge, the selected convection gauge (CG1 or CG2) or a continu- ous, combined output signal from the IG and CG1 (IG - CG1) for full range meas- urement. Press the ENTER key to access the ANALOG OUTPUT menu for config- uring the analog outputs. [Factory default = CG1 - CG1] This menu provides various scaling and gauge type selections for Analog Output #1. Use the UP and DOWN keys to select the desired analog output configuration from the following available choices. IG - CG1 0.5 - 7V Log-linear analog output combining IG & CG1 as one signal IG LOG N - 10 Log-linear analog output for IG only, output also compatible with GP 307, 350 - IG LOG N - 11 Log-linear analog output for IG only, output also compatible with GP 307, 350, 358 IG LOG N - 12 Log-linear analog output for IG only, output also compatible with GP 307, 350 IG 1.8 - 8.7V Log-Linear analog output for IG only IG LINEAR Linear analog output for IG only, output also compatible with GP 307 ALT LINEAR Linear analog output for alternate gauge only ALT CG 1-8V Log-linear analog output if alternate gauge connected is an INFICON PGE300 or PGE500 ALT IG LOGN10 Log-linear analog output if alternate gauge connected is an INFICON BAG302 REL 4 LO TRIP REL 4 HI TRIP REL 5 LO TRIP REL 5 HI TRIP REL 6 LO TRIP REL 6 HI TRIP TEST RELAYS 6.5.5 Analog Output ANALOG OUT 1

43 CG1 1 - 8V Log-linear analog output for CG1 CG2 1 - 8V Log-linear analog output for CG2 CG1 0 - 7V Log-linear analog output for CG1 , output also compatible with GP 307,350,358 CG2 0 - 7V Log-linear analog output for CG2 , output also compatible with GP 307,350,358 CG1 NON - LIN Non-linear analog output for CG1 CG2 NON - LIN Non-linear analog output for CG2 CG1 LINEAR Linear analog output for CG1 CG2 LINEAR Linear analog output for CG2 Select "IG - CG1 0.5 - 7V" as the analog output type to set the analog output vol- tage proportional to the pressure measured by the combination of IG plus CG1. This selection combines the analog output from the IG and CG1 as one signal to provide a log-linear analog output voltage of 0.5 volts to 7 volts with a scaling factor of 0.5 V/decade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar: P = 10 (volts – 5.5) / (0.5) where P is the pressure in Torr or mbar, and V is the output signal in volts. Refer to section 7.1 for details regarding this type of out- put signal. Select "IG LOG N - 10" as the analog output type to set the analog output voltage proportional to the pressure measured by the ion gauge only. This selection pro- vides an output voltage that is linear with respect to the common logarithm of pres- sure, i.e., log-linear analog output of 0 to 9 volts with a scaling factor of 1 V/decade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar: P= 10(volts – 10) where P is the pressure in Torr or mbar, and V is the output signal in volts. Refer to section 7.2 for details regarding this type of output signal. This selection is compatible with the analog output scaling from the Granville-Phillips 307 and 350 controllers. Select "IG LOG N - 11" as the analog output type to set the analog output voltage proportional to the pressure measured by the ion gauge only. This selection pro- vides an output voltage that is linear with respect to the common logarithm of pres- sure, i.e., log-linear analog output of 0 to 10 volts with a scaling factor of 1 V / de- cade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar: P= 10(volts – 11) where P is the pressure in Torr or mbar, and V is the output signal in volts. Refer to section 7.3 for details regarding this type of output signal. This se- lection is also compatible with a certain analog output scaling from the Granville- Phillips 307, 350 and 358 controllers. Select "IG LOG N - 12" as the analog output type to set the analog output voltage proportional to the pressure measured by the ion gauge only. This selection pro- vides an output voltage that is linear with respect to the common logarithm of pres- sure, i.e., log-linear analog output of 0 to 11 volts with a scaling factor of 1 V / de- cade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar: P= 10(volts – 12) where P is the pressure in Torr or mbar, and V is the output signal in volts. Refer to section 7.4 for details regarding this type of output signal. This se- lection is also compatible with a certain analog output scaling from the Granville- Phillips 307 and 350 controllers. Select "IG 1.8 - 8.7V" as the analog output type to set the analog output voltage proportional to the pressure measured by the ion gauge only. This selection pro- vides an output voltage that is linear with respect to the common logarithm of pres- sure, i.e., log-linear analog output of 1.8 to 8.7 volts with a scaling factor of 0.8 V/decade of measured pressure. The log-linear output signal and pressure are re- lated by the following formulas when Pressure Unit of measurement is in Torr P= 10((1.25 × volts) – 12.875)) where P is the pressure in Torr and V is the output signal in volts. Refer to section 7.5 for details regarding this type of output signal. Select "IG LINEAR" as the analog output type to provide a 0-10 Vdc output signal that has a direct linear relationship to the displayed pressure measured by the ion gauge only. This selection covers 3 decades of pressure change. For example, if the maximum pressure selected is 1.00E-03 Torr (value programmed for AOUT LIN 1 or AOUT LIN 2 or AOUT LIN 3 menu below), then the instrument provides a 10 volt analog output signal when pressure is at 1.00E-03 Torr and the minimum pressure is automatically set to 1.00E-06 Torr, with a corresponding minimum volt-

age output of 0.01 volts. If your application requires the IG analog output voltage to cover a pressure range exceeding three decades, then consider using the log- linear analog outputs. Refer to section 7.6 for details regarding this type of output signal. This selection is also compatible with a certain analog output scaling from the Granville-Phillips 307 controller. Select "ALT LINEAR" only if you have selected ANALOG INPUT in the SET CG2 - ALT menu intended for use with a CDG device as an alternate gauge to CG2. If such is the case, this analog output type provides a 0-10 Vdc analog output signal that has a direct linear relationship to the displayed pressure measured by the alternate gauge. This selection covers 3 decades of pressure change. Essentially, this allows retransmission of the same analog input signal being received by the VGC083. For example, if ALT GAUGE selected is 1000 TORR CDG, the maximum pressure should also be programmed as 1.00E03 Torr (value programmed for AOUT LIN 1 or AOUT LIN 2 or AOUT LIN 3 menu below), then the instrument pro- vides a 10 volt analog output signal when pressure is at 1.00E03 Torr and the minimum pressure is automatically set to 1.00 Torr, with a corresponding minimum voltage output of 0.01 volts. Select "ALT CG 1-8V" only if you have selected ANALOG INPUT in the SET CG2 - ALT menu intended for use with an INFICON PGE300 or PGE500 convection vacuum gauge module as an alternate gauge to CG2. Essentially, this allows re- transmission of the same analog input signal being received from the PGE300 or PGE500. This selection provides an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 1 to 8 volts with a scaling factor of 1 V/decade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measure- ment is in Torr and mbar: P= 10(volts – 5) where P is the pressure in Torr or mbar, and V is the output signal in volts. Select "ALT IG LOGN10" only if you have selected ANALOG INPUT in the SET CG2 - ALT menu intended for use with an INFICON BAG302 ionization vacuum gauge module as an alternate gauge to CG2. Essentially, this allows retransmis- sion of the same analog input signal being received from the BAG302. This selec- tion provides an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 0 to 9 volts with a scaling factor of 1 V/decade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar: P= 10(volts – 10) where P is the pressure in Torr or mbar, and V is the output signal in volts. Select "CG1 1 - 8V" as the analog output type to set the analog output voltage proportional to the pressure measured by convection gauge CG1. This selection provides an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 1 to 8 volts with a scaling factor of 1 V/decade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar: P= 10(volts – 5) where P is the pressure in Torr or mbar, and V is the output signal in volts. Refer to section 7.7 for details regarding this type of output signal. Select "CG2 1 - 8V" for CG2. Same as CG1 1 - 8V above, except for CG2. Select "CG1 0 - 7V" as the analog output type to set the analog output voltage proportional to the pressure measured by convection gauge CG1. This selection provides an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 0 to 7 volts with a scaling factor of 1 V / decade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar: P= 10(volts – 4) where P is the pressure in Torr or mbar, and V is the out- put signal in volts. Refer to section 7.8 for details regarding this type of output sig- nal. This selection is compatible with the analog output scaling from the Granville- Phillips 307, 350 and 358 controllers. Select "CG2 0 - 7V" for CG2. Same as CG1 0 - 7V above, except for CG2.^ Select "CG1 NON - LIN" as the analog output type to set the analog output (non- linear) voltage proportional to the pressure measured by convection gauge CG1. This produces a non-linear analog output signal of 0.375 to 5.659 V (dc) for 0 to 1000 Torr of N2, roughly in the shape of an "S" curve. Refer to section 7.9 for details regarding this type of output signal. Note - This non-linear analog output is also equivalent to the Granville- Phillips® Mini-Convectron® non-linear S-curve analog output.

45 Select "CG2 NON - LIN" for CG2. Same as CG1 NON - LIN above, except for CG2. Select "CG1 LINEAR" as the analog output type to provide a 0-10 Vdc output signal that has a direct linear relationship to the displayed pressure measured by CG1 only. This selection covers 3 decades of pressure change. For example, if the maximum pressure selected is 1.00 Torr (value programmed for AOUT LIN 1 menu below), then the instrument provides a 10 volt analog output signal when pressure is at 1.00 Torr and the minimum pressure is automatically set to 1 mTorr (1.00E-03 Torr), with a corresponding minimum voltage output of 0.01 volts. If your application requires CG1 or the analog output voltage to cover a pressure range exceeding three decades, then consider using the log-linear analog output type. Refer to section 7.10 for details regarding this type of output signal. Select "CG2 LINEAR" for CG2. Same as CG1 LINEAR above, except for CG2. [Factory default = CG1 1 - 8V] (Same selection choices as ANALOG OUT 1 above) [Factory default = CG2 1 - 8V] (Same selection choices as ANALOG OUT 1 above) [Factory default = Factory Set] This has been pre-set in the factory and is used to optimize the analog output calibration. It is recommended that the user not make this adjustment unless the displayed pressure on the VGC083 and the resulting pressure recorded from the analog output do not match closely. To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for IG LOG, IG LINEAR or ALT IG LOGN10. Connect the IG to the VGC083 and connect the VGC083 analog output 1 to a high resolution voltmeter, your system, PLC, etc. Evacuate your vacuum system to a low enough pressure for the IG to operate. Establish a system pressure so that the displayed IG reading is preferably at the high end of any decade (for example 9.00E-05 as opposed to 1.00E-05). In the AOUT CAL 1 screen use the UP or DOWN keys to adjust the analog output to match the corresponding pressure displayed on the IG pressure measurement display or the CG2/ALT display channel if using a BAG302 ion gauge module as an alternate gauge to CG2. Example: ANALOG OUTPUT 1 is programmed for "IG LOG N - 10". The VGC083 IG display is registering a pressure reading of 9.00E-05 Torr. Based on the equation and table given in section 7.2 the expected analog output at 9.00E-05 Torr is 5.9542 V. While in the AOUT CAL 1 screen, use the UP or DOWN keys to set the analog output to 5.9542 V as recorded by your voltmeter. Alternatively, if the IG analog output is used to display the IG pressure on your PLC or system display console, simply adjust the AOUT CAL 1 so that the IG pressure displayed by your PLC (pressure established at the high end of any decade preferred) matches the IG pressure displayed by the VGC083. Note - As you adjust the analog output, the number being displayed in the AOUT CAL 1 screen represents the millivolts offset from zero volts that is being used internally for the analog output gain adjustment. To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for IG - CG1, CG1, CG2, CG1/CG2NON-LIN, CG1/CG2 LINEAR, ALT CG 1-8V. Connect CG1 or CG2 to the VGC083 and connect the VGC083 analog output 1 to a high resolution voltmeter, your system, PLC, etc. While in the AOUT CAL 1 screen and with CG1 or CG2 exposed to atmosphere, use the UP or DOWN keys to adjust the analog output to match the corresponding pressure displayed on CG1 or CG2 pressure measurement display. Example: The VGC083 ANALOG OUTPUT 1 is programmed for "CG1 1 - 8V". The VGC083 CG1 display is registering a pressure reading of 7.60E+02 Torr. Based on the equation and table given in section 7.7 the expected analog output at 7.60E+02 Torr is 7.881 V. Use the UP or DOWN keys in the AOUT CAL 1 screen to set the analog output to 7.881 V as recorded by your voltmeter. Alternatively, if the CG1 analog output is used to display the CG1 pressure on your PLC or system display console, simply adjust the AOUT CAL 1 while the gauge is exposed to atmosphere so that the CG1 atmospheric pressure displayed by your PLC matches the CG1 atmospheric pressure displayed by the VGC083. The AOUT CAL can be per- ANALOG OUT 2 ANALOG OUT 3 AOUT CAL 1

formed at any pressure between 400 Torr to 999 Torr (atmosphere recommended). Note - As you adjust the analog output, the number being displayed in the AOUT CAL 1 screen represents the millivolts offset from zero volts that is being used internally for the analog output gain adjustment. To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for ALT LINEAR: Connect the CDG to the VGC083 and connect the VGC083 analog output 1 to a high resolution voltmeter, your system, PLC, etc. While in the AOUT CAL 1 screen and with the 1000 TORR CDG exposed to atmosphere, use the UP or DOWN keys to adjust the analog output to match the corresponding pressure displayed for the alternate gauge (CG2/ALT display channel). Example: The VGC083 ANALOG OUTPUT 1 is programmed for "ALT LINEAR" and a 1000 TORR CDG is connected to the VGC083. The VGC083 CG2/ALT dis- play channel is registering a pressure reading of 7.60E02 Torr. For a 1000 TORR CDG with a 0-10 VDC output, the expected analog output at 760 Torr is 7.60 volts. Use the UP or DOWN keys in the AOUT CAL 1 screen to set the analog output to 7.60 V as recorded by your voltmeter. Alternatively, if the alternate gauge analog output is used to display the pressure on your PLC or system display console, simply adjust the AOUT CAL 1 while the gauge is exposed to atmosphere so that the alternate gauge atmospheric pressure displayed by your PLC matches the atmospheric pressure displayed by the CG2/ALT display channel of the VGC083. For other CDG ranges always use CDG's full scale pressure value to perform calibration. For example, if you are using a 100 TORR CDG, evacuate your system pressure to 100 Torr and use the same calibration procedure described above. Note - As you adjust the analog output, the number being displayed in the AOUT CAL 1 screen represents the millivolts offset from zero volts that is being used internally for the analog output gain adjustment. [Factory default = Factory Set] (Same info as AOUT CAL 1 above, except for AOUT CAL 2) [Factory default = Factory Set] (Same info as AOUT CAL 1 above, except for AOUT CAL 3) [Factory default = 1.00E00 TORR] This programming parameter is only used if you have assigned IG LINEAR, CG1 LINEAR or CG2 LINEAR to ANALOG OUTPUT 1 above. This analog output type provides a 0-10 Vdc output signal that has a direct linear relationship to the dis- played pressure measured by the IG, CG1 or CG2. The AOUT LIN 1 value pro- grammed here represents the maximum pressure as measured by the IG, CG1 or CG2 corresponding to a voltage output of 10 volts. This selection covers, at most, a 3 decade range of pressure. For example, if AOUT LIN 1 is programmed for 1.00E-03 Torr, then the instrument provides a 10 volt analog output signal when pressure is at 1.00E-03 Torr. There- after, minimum pressure is automatically set to 1.00E-06 torr, with a corresponding minimum voltage output of 0.01 volts. If your application requires the IG, CG1 or CG2 analog output voltage to cover a pressure range exceeding three decades, then consider using the log-linear analog outputs. Refer to section 7.6 and section 7.10 for details regarding this type of output signal. [Factory default = 1.00E00 TORR] (Same info as AOUT LIN 1 above, except for AOUT LIN 2) [Factory default = 1.00E00 TORR] (Same info as AOUT LIN 1 above, except for AOUT LIN 3) AOUT CAL 2 AOUT CAL 3 AOUT LIN 1 AOUT LIN 2 AOUT LIN 3

47 The VGC083 provides both RS232 and RS485 serial communications. Press the ENTER key to access the SERIAL COMM menu for configuring the serial com- munications. [Factory default = RS485] The VGC083 supports four different protocols listed below (See section 9 for details). • RS485 RS485 with start and stop characters and address, derived from INFICON BAG302 • RS232 RS232 with start and stop characters, like RS485 above but no address • GP485 RS485 compatible with Granville-Phillips 307 and 358 controllers • GP232 RS232 compatible with Granville-Phillips 307 and 358 controllers [Factory default = 19200] This sets the baud rate for the RS485 and the RS232 serial communications. The baud rate can be set to various values listed below. • 38400 BAUD • 19200 BAUD • 9600 BAUD • 4800 BAUD • 2400 BAUD • 1200 BAUD • 600 BAUD • 300 BAUD [Factory default = 8 BITS, NONE 1] This sets the character framing by providing the user various selections to control the number of characters, parity and number of stop bits. Character framing can be set to one of the following. • 8 BITS NONE 1 (This selection sets the character framing to 8 data bits, no parity, 1 stop bit) • 7 BITS ODD 2 • 7 BITS EVEN 2 • 7 BITS ODD 1 • 7 BITS EVEN 1 • 8 BITS ODD 1 • 8 BITS EVEN 1 [Factory default = 01] This sets the two byte RS485 device address. For example, an ADDRESS of 05 will make the address 0x05 in hexadecimal. An address of 15 will set the ADDRESS to 0x15 in hexadecimal. The DISPLAY menu allows the user to configure the OLED setup screen. The user can configure the set-up screen to normal or research mode for IG, enable or dis- able screen saver and adjust the display intensity. Press the ENTER key to access the DISPLAY menu for configuring the setup screen. 6.5.6 SERIAL COMM COMM TYPE BAUDRATE FRAMING ADDRESS 6.5.7 DISPLAY

e configured t he UP and DO ollowing menu NORMAL RESEARCH Select "NORMA arameters in t Select "RESEA G parameters roubleshooting Factory defaul he VGC083 s eriod of time c erses pixels th o minimize the ramming the S on turned on, isplay will app 2 hours and w ou like to have me of the day OFF and then O o increase lon aver function r Factory defaul he BRIGHTN creen display. rast) and 10 th o increase lon ess function re lt = NORMAL] figures the dis to display the OWN keys to s u choices. Normal d H Research AL" if you wou the normal mo ARCH" if you w in the researc g IG issues. lt = ON] set-up screen can start to sh hat are not. Th e burned-in ef SCREEN SAV the setup scre pear in the nor will then switch e the 12 hour y, simply acces ON again. Thi ngevity of the remains ON a lt = 0] ESS menu all . The brightne he highest. ngevity of the emains at 0 a ] splay mode fo IG parameters select the desi display mode f h display mod uld like to conf ode shown be would like to c ch mode show uses an OLED how divergenc his could resu ffect, a screen VER menu sel een changes d rmal mode wit h to a back-lit period for the ss the SCREE is initiates the OLED display as shipped from ows the user ess setting of 0 OLED display s shipped from r the setup sc s in NORMAL red setup scre for IG e for IG figure the setu low. onfigure the s wn below. This D type display e between pix lt in pixels exh n saver functio ection to ON. display appea h a dark back background co normal displa EN SAVER me screen saver y, INFICON rec m the factory. to select the b 0 provides the y, INFICON rec m the factory. tinb29e1 creen. The set L or RESEARC een mode from up screen to d setup screen t s is particularly y which over a xels that are o hibiting a burn on can be activ With the scre arance every 1 kground color f color for the ne ay mode to sta enu and chang r function imm commends th brightness of t lowest brightn commends th 1 (2016-11) VGC083A_B.o up screen can CH mode. Use m the isplay the IG o display the y helpful when n extended n at all times ed-in effect. vated by pro- een saver func 12 hours. The for the first ext 12 hours. I art at a specific ge setting to ediately. at the screen the setup ness (con- at the bright- om n e n c- f c

7 Analo 7.1 Analo range IG - C (Nitro 83A_B.om og Outpu og Output e measure CG1 0.5 - 7 ogen / Air ut Charts t wide ement for 7V only) s & Equa This sec the VGC When th the anal range m gen/air. Analog A) The by the fo in Torr a P = 10(v Where P output s B) The by the fo in pasca P = 10(v Where P signal in Notes: T +11 V (d 1) The and the 2) The emissio current, BAG05x connect 3) Any IG or CG The follo pressure the outp ations (N ction provides C083. he analog outp log output volt measurements output: Wid log-linear out ollowing formu and mbar: volts - 5.5)/(0.5) P is the pressu signal in volts. log-linear out ollowing formu als: volts - 4.5)/(0.5) P is the pressu n volts. The output v dc) under the IG sensor is t CG1 is dama pressure exce n current, 5.00 1.00 × 10-4 T x series ion ga ted. IG or CG fault G range respe owing chart sh e measureme put signal is pl itrogen/A various chart put is setup, a tage represen s. Refer to sec e Range Log- put signal and ulas when unit V = ((0.5 × ure in Torr or put signal and ulas when unit V = ((0.5 × ure in pascals voltage will sw e following co urned off, any aged or discon eeds 1.00 × 10 0 × 10-4 Torr a orr at 10 mA e auges and CG ts condition w ectively. hows the grap ents in Torr. Pr otted on the Y Air Only) s & equations as described in ts a combinat tion 8.3.2 if yo -linear 0.5 to 7 d pressure are ts of measure × log10(P)) + 5 mbar, and V is d pressure are ts of measure × log10(P)) + 4 s, and V is the witch to abov onditions: y IG fault cond nected. 0-3 Torr at 100 at 4 mA emiss emission curre G1 is damaged while operating phical results o ressure is plot Y-axis on a line ) s for analog ou n section 6.5.6 tion of the IG a ou are using a 7 V (dc), 0.5 V e related ement is 5.5 s the e related ement is 4.5 output ve dition 0 µA sion ent for d or dis- g in the P 1. 1 1 1 1 1 1 1 1 1 1. 1. 1. 1. se of table and fo tted on the X-a ear scale. utputs availabl 6 for IG - CG1 and CG1 for w a gas other tha V per decade ressure [Torr] V [V .00E-10 .00E-9 .00E-8 .00E-7 .00E-6 .00E-5 .00E-4 .00E-3 .00E-2 .00E-1 00E+00 00E+01 00E+02 00E+03 ee notes ormulas above axis with a log 49 le from 0.5-7V, wide an nitro- Voltage V (dc)] 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 ≥11 e for g scale;

Air only) utput for IG 0 (Nitroge W th g A A b in P W o B b in P W si N + 1 2 e cu B T m si G en / When the analo he analog outp en/air only. Re Analog output A) The log-line y the following n Torr and mba P= 10(volts - 10) Where P is the utput signal in B) The log-line y the following n pascals: P= 10(volts - 8) Where P is the ignal in volts. Notes: The ou 11 V (dc) und ) The IG sens ) The pressur mission curren urrent, 1.00 × BAG05x series he following c measurements ignal is plotted og output is se put voltage rep efer to section t: IG Log-line ear output sign g formulas wh ar: V= log10( pressure in T n volts. ear output sign g formulas wh V= log10( pressure in p utput voltage der the follow sor is turned o re exceeds 1.0 nt, 5.00 × 10-4 10-4 Torr at 1 s ion gauges. chart shows th s in Torr. Press d on the Y-axi etup, as descr presents the p n 8.3.1 if you a ar 0 to 9 V (dc nal and pressu en units of me (P) + 10 Torr or mbar, a nal and pressu en units of me (P) + 8 pascals, and V will switch to wing conditio off or any IG fa 00 × 10-3 Torr 4 Torr at 4 mA 0 mA emissio he graphical re sure is plotted s on a linear s ribed in sectio pressured mea are using a ga c), 1 V per dec ure are related easurement is and V is the ure are related easurement is V is the output o above ns: ault condition. at 100 µA emission n current for esults of table d on the X-axis scale. tinb29e1 on 6.5.6 for IG asured by the as other than n cade d s d s Pressure [Torr] 1.00E-10 1.00E-9 1.00E-8 1.00E-7 1.00E-6 1.00E-5 1.00E-4 1.00E-3 1.00E-2 5.00E-2 see notes and formulas s with a log sc 1 (2016-11) VGC083A_B.o LOG N - 10, IG for nitro- nitrogen/air. e Voltage [V (dc)] 0 0.0 1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 8.698 s ≥11 above for cale; the outpu om ut

7.3 Analo LOG Air on 83A_B.om og Output N - 11 (Nit nly) t for IG trogen / When th the anal gen/air o Analog A) The by the fo in Torr a P= 10(vo Where P output s B) The by the fo in pasca P= 10(vo Where P signal in Notes: T +11 V (d 1) The 2) The emissio current, BAG05x The follo pressure the outp he analog outp log output volt only. Refer to output: IG L log-linear out ollowing formu and mbar: olts - 11) V P is the pressu signal in volts. log-linear out ollowing formu als: olts - 9) V P is the pressu n volts. The output v dc) under the IG sensor is t pressure exce n current, 5.00 1.00 × 10-4 T x series ion ga owing chart sh e measureme put signal is pl put is setup, a tage represen section 8.3.1 Log-linear 0 to put signal and ulas when unit = log10(P) + 1 ure in Torr or put signal and ulas when unit = log10(P) + 9 ure in pascals voltage will sw e following co urned off or a eeds 1.00 × 10 0 × 10-4 Torr a orr at 10 mA e auges. hows the grap ents in Torr. Pr otted on the Y as described in ts the pressur if you are usin 10 V (dc), 1 V d pressure are ts of measure 1 mbar, and V is d pressure are ts of measure 9 s, and V is the witch to abov onditions: ny IG fault con 0-3 Torr at 100 at 4 mA emiss emission curre phical results o ressure is plot Y-axis on a line n section 6.5.6 red measured ng a gas othe V per decade e related ement is s the e related ement is output ve ndition. 0 µA sion ent for P 1. 1. 1 1 1 1 1 1 1 1 5 se of table and fo tted on the X-a ear scale. 6 for IG LOG N by the IG for r than nitrogen ressure [Torr] V [V .00E-11 .00E-10 .00E-9 .00E-8 .00E-7 .00E-6 .00E-5 .00E-4 .00E-3 .00E-2 5.00E-2 9 ee notes ormulas above axis with a log 51 N - 11, nitro- n/air. Voltage V (dc)] 0.0 1.0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 9.698 ≥11 e for g scale;

Air only) utput for IG 2 (Nitroge W th g A A b in P W o B b in P W si N + 1 2 e cu B T p th G en / When the analo he analog outp en/air only. Re Analog output A) The log-line y the following n Torr and mba P= 10(volts - 12) Where P is the utput signal in B) The log-line y the following n pascals: P= 10(volts - 10) Where P is the ignal in volts. Notes: The ou 11 V (dc) und ) The IG sens ) The pressur mission curren urrent, 1.00 × BAG05x series he following c ressure meas he output sign og output is se put voltage rep efer to section t: IG Log-line ear output sign g formulas wh ar: V= log10( pressure in T n volts. ear output sign g formulas wh V= log10( pressure in p utput voltage der the follow sor is turned o re exceeds 1.0 nt, 5.00 × 10-4 10-4 Torr at 1 s ion gauges. chart shows th surements in T al is plotted o etup, as descr presents the p n 8.3.1 if you a ar 0 to 11 V (d nal and pressu en units of me (P) + 12 Torr or mbar, a nal and pressu en units of me (P) + 10 pascals, and V will switch to wing conditio off or any IG fa 00 × 10-3 Torr 4 Torr at 4 mA 0 mA emissio he graphical re Torr. Pressure n the Y-axis o ribed in sectio pressured mea are using a ga dc), 1 V per de ure are related easurement is and V is the ure are related easurement is V is the output o above ns: ault condition. at 100 µA emission n current for esults of table is plotted on t n a linear sca tinb29e1 on 6.5.6 for IG asured by the as other than n ecade d s d s Pressure [Torr] 1.00E-12 1.00E-11 1.00E-10 1.00E-9 1.00E-8 1.00E-7 1.00E-6 1.00E-5 1.00E-4 1.00E-3 1.00E-2 5.00E-2 see notes and formulas the X-axis wit ale. 1 (2016-11) VGC083A_B.o LOG N - 12, IG for nitro- nitrogen/air. e Voltage [V (dc)] 2 0.0 1 1.0 0 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0 10.698 s ≥11 above for h a log scale; om

7.5 Analo - 8.7 V only) 83A_B.om og Output V (Nitroge t for IG 1.8 en / Air When th the anal gen/air o Analog The log-line following for P (Torr)= 10 P (mbar)= 1 P (pascals) Where P is t Notes: The +11 V (dc) u 1) The IG s 2) The pres emission cu 1.00 × 10-4 T series ion ga The follo pressure the outp 8 he analog outp log output volt only. Refer to output: IG L ear output sign rmulas: 0((1.25* volts) - 12.8 10((1.25*volts) - 12 ) = 10((1.25*volts) the pressure a output volta under the fol sensor is turne ssure exceeds urrent, 5.00 × 1 Torr at 10 mA auges. owing chart sh e measureme put signal is pl put is setup, a tage represen section 8.3.1 Log-linear 0 to nal and pressu 875) V= 1 .75) V= 1 ) - 10.75) V= 8 and V is the o ge will switch lowing condi ed off or any IG s 1.00 × 10-3 T 10-4 Torr at 4 m A emission cur hows the grap ents in Torr. Pr otted on the Y as described in ts the pressur if you are usin 9.259 Vdc, 0 ure are related 0.3 + (0.8)×lo 0.2 + (0.8)×lo 8.6 + (0.8)×log utput signal in h to above tions: G fault conditio Torr at 100 µA mA emission c rent for BAG0 phical results o ressure is plot Y-axis on a line n section 6.5.6 red measured ng a gas othe .8 V per deca d by the og10(P) og10(P) g10(P) n volts. on. A current, 05x P 2. 4. 7. 1 2 4 7 1 5 fila of table and fo tted on the X-a ear scale. 6, for IG 1.8 – by the IG for r than nitrogen de ressure [Torr] V [V .00E-11 .20E-11 .50E-10 .30E-8 2.40E-7 4.20E-6 7.50E-5 .30E-3 5.00E-2 9 ament is OFF ormulas above axis with a log 53 8.7V, nitro- n/air. Voltage V (dc)] 1.741 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.698 ≥11 e for g scale;

When the analog output is setup, as described in section 6.5.6, for IG LINEAR, the analog output voltage represents the pressure measured by the IG for nitrogen/air only. The Linear analog output type provides a 0-10 V (dc) output signal that has a direct linear relationship to the displayed pressure measured by the ion gauge only. This selection covers 3 decades of pressure change. For example, if ANALOG OUT 1 is programmed for IG LINEAR and the maximum pressure for AOUT LIN 1 selected is 1.00E-03 Torr, then the instrument provides a 10 volt analog output sig- nal when pressure as measured by IG is at 1.00E-03 Torr. Furthermore, the mini- mum pressure is automatically set to 1.00E-06 Torr, with a corresponding minimum voltage output of 0.01 volts. Constructing a table of these parameters may be useful in documenting the re- lationship of displayed pressure (measured by the IG) to the analog output voltage. The following table is representative of a typical setup where the IG may be used in a limited range of pressure measurement where a direct linear relationship exists between the displayed pressure (mantissa) and the analog output signal. Linear Analog Output Voltage - volts Measured (Displayed) Pressure - torr 0.01 1.00E-06 0.10 1.00E-05 1.00 1.00E-04 10.00 1.00E-03 If your application requires the analog output voltage to cover a pressure range exceeding three decades, then consider using a log-linear analog output type for the IG. The information discussed above regarding the Linear IG analog output applies only to N2 / air. If you are using a gas other than N2 / air, refer to section 8.3.1. Apply the Sensitivity Correction Factor by dividing the pressure derived (from using the Linear IG output discussed above) by the specific Gas Sensitivity Correction Factor to obtain the true pressure of the specific gas in your vacuum chamber. Notes: The output voltage will switch to above +11 V (dc) under the following conditions: 1) The IG sensor is turned off or any IG fault condition. 2) The pressure exceeds 1.00 × 10-3 Torr at 100 µA emission current, 5.00 × 10-4 Torr at 4 mA emission current, 1.00 × 10-4 Torr at 10 mA emission current for BAG05x series ion gauges. When the analog output is setup, as described in section 6.5.6, for CG1 1 – 8 V or CG2 1 – 8 V, the analog output voltage represents the pressure measured by CG1 or CG2 for nitrogen/air only. Refer to section 8.3.3.1 if you are using a gas other than nitrogen/air. Analog output: Convection Gauge Log-linear 1 to 8 V (dc), 1 V per decade A) The log-linear output signal and pressure are related by the following formulas when units of measurement is in Torr and mbar: P = 10(volts - 5) V = log10(P) + 5 Where P is the pressure in Torr or mbar, and V is the output signal in volts. The output voltage is 1 V when pressure is at 1.00E-04 Torr. The output voltage is 8 V when pressure is at 1.00E+03 Torr. B) The log-linear output signal and pressure are related by the following formulas when units of measurement is in pascals: P = 10(volts - 3) V = log10(P) + 3 Where P is the pressure in pascals, and V is the output signal in volts. Notes: An analog output of above +11 volts indicates a faulty convection gauge or unplugged gauge cable. 7.6 Analog Output for IG LINEAR (Nitrogen / Air only) NOTE 7.7 Analog Output for CG1 or CG2 1 - 8 V (Nitrogen / Air only)

Pressu [Torr 1.00E- 2.00E- 5.00E- 1.00E- 2.00E- 5.00E- 1.00E- 2.00E- 5.00E- 1.00E- The follo pressure ure r] Volta [V] -04 1.00 -04 1.30 -04 1.69 -03 2.00 -03 2.30 -03 2.69 -02 3.00 -02 3.30 -02 3.69 -01 4.00 owing chart sh e measureme ge Press [To 00 2.00E 01 5.00E 99 1.00E 00 2.00E 01 5.00E 99 1.00E 00 2.00E 01 5.00E 99 1.00E 00 2.00E hows the grap ents in Torr. sure rr] Volt [V E-01 4.3 E-01 4.6 E+00 5.0 E+00 5.3 E+00 5.6 E+01 6.0 E+01 6.3 E+01 6.6 E+02 7.0 E+02 7.3 phical results o tage V] Pres [T 301 3.00 699 4.00 000 5.00 301 6.00 699 7.00 000 7.60 301 8.00 699 9.00 000 1.00 301 of table and fo ssure Torr] Vo 0E+02 7 0E+02 7 0E+02 7 0E+02 7 0E+02 7 0E+02 7 0E+02 7 0E+02 7 0E+03 8 ormulas above 55 oltage [V] .477 .602 .699 .778 .845 .881 .903 .954 .000 e for

When the analog output is setup, as described in section 6.5.6, for CG1 0 – 7 V or CG2 0 – 7 V, the analog output voltage represents the pressure measured by CG1 or CG2 for nitrogen/air only. Refer to section 8.3.3.2 if you are using a gas other than nitrogen/air. Analog output: Convection Gauge Log-linear 0 to 7 V (dc), 1 V per decade A) The log-linear output signal and pressure are related by the following formulas when units of measurement is in Torr and mbar: P = 10(volts - 4) V = log10(P) + 4 Where P is the pressure in Torr or mbar, and V is the output signal in volts. The output voltage is 0 V when pressure is at 1.00E-04 Torr. The output voltage is 7 V when pressure is at 1.00E+03 Torr. B) The log-linear output signal and pressure are related by the following formulas when units of measurement is in pascals: P = 10(volts - 2) V = log10(P) + 2 Where P is the pressure in pascals, and V is the output signal in volts. Notes: An analog output of above +11 volts indicates a faulty convection gauge or unplugged gauge cable. Pressure [Torr] Voltage [V] Pressure [Torr] Voltage [V] Pressure [Torr] Voltage [V] 1.00E-04 0.000 2.00E-01 3.300 3.00E+02 6.480 2.00E-04 0.301 5.00E-01 3.700 4.00E+02 6.600 5.00E-04 0.699 1.00E+00 4.000 5.00E+02 6.700 1.00E-03 1.000 2.00E+00 4.300 6.00E+02 6.780 2.00E-03 1.300 5.00E+00 4.700 7.00E+02 6.850 5.00E-03 1.700 1.00E+01 5.000 7.60E+02 6.880 1.00E-02 2.000 2.00E+01 5.300 8.00E+02 6.900 2.00E-02 2.300 5.00E+01 5.700 9.00E+02 6.950 5.00E-02 2.700 1.00E+02 6.000 1.00E+03 7.000 1.00E-01 3.000 2.00E+02 6.300 The following chart shows the graphical results of table and formulas above for measurements in Torr. 7.8 Analog Output for CG1 or CG2 0 - 7 V (Nitrogen / Air only)

7.9 Analo or CG (Nitro 83A_B.om og Output G2 NON - L ogen / Air t for CG1 LIN only) When th or CG2 CG1 or other tha The first controlle "S-curve proportio Phillips® later yea various VGC083 1.00 × 1 In gener terpolati the pres analog o a specif calculate sented b output v curve" u order po tion liste he analog outp NON - LIN, th CG2 for nitrog an nitrogen/ai t convection e er for the Conv e" which repre onal to the pre ® Convectron® ars, the non-li signal spans 3 duplicates th 10-4 torr to 5.6 ral, one may u ion techniques ssure using th output voltage fic pressure. Y e the N2/air pr by the non-line voltage for the using a multi-s olynomial func ed on the follo put is setup, a he analog outp gen/air only. R ir. enhanced pira vectron® prov esented the ac essure inside ® controllers w near voltage a of the original he original S-c 59 volts at 100 use linear in- s to calculate e non-linear e measured at You may also ressure repre- ear analog original "S- segment, nth ction calcula- wing page. as described in put voltage rep Refer to sectio ni head introd vided an analo ctual voltage a the pressure h were designed applied to the "S-curve". Th curve of 0.375 00 torr, nitroge - n section 6.5.6 presents the p on 8.3.3.3 if yo uced was the og output sign applied across head enclosur to output this head was sca he non-linear a 5 volts at press en or air. 6, for CG1 NO pressure meas ou are using a Convectron®. al referred to s the head circ re. The Granv head voltage aled to provide analog output sure less than 57 ON - LIN sured by gas . The as the cuit, ville- and in e of the

Pressure [Torr] Voltage [V] Pressure [Torr] Voltage [V] Pressure [Torr] Voltage [V] 0.000 0.3751 1.00E-01 0.8780 2.00E+02 5.0190 1.00E-04 0.3759 2.00E-01 1.1552 3.00E+02 5.1111 2.00E-04 0.3768 5.00E-01 1.6833 4.00E+02 5.2236 5.00E-04 0.3795 1.00E+00 2.2168 5.00E+02 5.3294 1.00E-03 0.3840 2.00E+00 2.8418 6.00E+02 5.4194 2.00E-03 0.3927 5.00E+00 3.6753 7.00E+02 5.4949 5.00E-03 0.4174 1.00E+01 4.2056 7.60E+02 5.5340 1.00E-02 0.4555 2.00E+01 4.5766 8.00E+02 5.5581 2.00E-02 0.5226 5.00E+01 4.8464 9.00E+02 5.6141 5.00E-02 0.6819 1.00E+02 4.9449 1.00E+03 5.6593 Note - An analog output of above +11 volts indicates a faulty convection gauge or unplugged gauge cable. The equations and coefficients for the nth order polynomial equation defined for various pressure measurement ranges for the Non-linear analog output (S-curve) for CG1 or CG2 for N2/air described above are given in the following table: For 0 mTorr to about 2 Torr, the Non-Linear Analog Output voltage range of 0.375 to 2.842 volts, use this table. Coefficients for y(x) = a + bx + cx2 + dx3 + ex4 +fx5 a -0.02585 b 0.03767 c 0.04563 d 0.1151 e -0.04158 f 0.008738 For 2 torr to about 100 torr, the Non-Linear Analog Output voltage range of 2.842 to 4.945 volts, use this table. Coefficients for ���� = �������� ������������ a 0.1031 b -0.3986 c -0.02322 d 0.07438 e 0.07229 f -0.006866 For 100 torr to 1000 torr, the Non-Linear Analog Output voltage range of 4.94 to 5.659 volts, use this table. Coefficients for ���� = ���� �������� a 100.624 b -0.37679 c -20.5623 d 0.0348656 Where y(x) = pressure in Torr, x= measured analog output in volts Example: Measured analog output voltage is 0.3840 V. From first table shown above use equation: y(x) = a + bx + cx2 + dx3 + ex4 +fx5 x = 0.3840 volts a = -0.02585, b=0.03767, c=0.04563, d=0.1151, e=-0.04158, f=0.008738 y(x) = Pressure = 1.0E-03 Torr

59 When the analog output is setup, as described in section 6.5.6 , for CG1 LINEAR or CG2 LINEAR, the analog output voltage represents the pressure measured by the CG1 or CG2 for nitrogen/air only. The Linear analog output type provides a 0- 10 V (dc) output signal that has a direct linear relationship to the displayed pres- sure measured by the CG1 or CG2 only. This selection covers 3 decades of pres- sure change. For example, if ANALOG OUT 1 is programmed for CG1 LINEAR and the maximum pressure for AOUT LIN 1 selected is 1.00 Torr, then the instru- ments provides a 10 volt analog output signal when pressure as measured by CG1 is at 1.00 Torr. Furthermore, the minimum pressure is automatically set to 1.00E-03 torr, with a corresponding minimum voltage output of 0.01 volts. Constructing a table of these parameters may be useful in documenting the re- lationship of displayed pressure (measured by the IG) to the analog output voltage. The following table is representative of a typical setup where the CG may be used in a limited range of pressure measurement where a direct linear relationship exists between the displayed pressure (mantissa) and the analog output signal. Linear Analog Output Voltage - volts Measured (Displayed) Pressure - torr 0.01 1.00E-03 0.10 1.00E-02 1.00 1.00E-01 10.00 1.00E+00 If your application requires the analog output voltage to cover a pressure range exceeding three decades, then consider using a log-linear analog output type for CG1 or CG2. Note - An analog output of above +11 volts indicates a faulty convection gauge or unplugged gauge cable. 7.10 Analog Output for CG1 or CG2 LINEAR (Nitrogen / Air only)

8 Using the Gauge with Different Gases The following tables and explanation contain important information regarding the use of ionization and convection gauges when used to measure pressure of gases other than nitrogen /air. For both types of gauge heads, corrections must be applied to both the display and analog outputs. This is particularly critical when using convection gauges at higher pressures than measured by the ion gauge when using gases other than N2/air. There are two methods that can be used for monitoring the IG display when using gases other than nitrogen/air: 1) If you are using a gas other than N2 / air, you must manually apply a gas sensi- tivity correction factor to the IG displayed measurement. Post a label on your ion gauge display showing the correction factor to be used for the pressure of the gas type you are measuring. The table below provides typical correction factors for ion gauges when used with gas types other than N2 / air. To correct the display mea- surements, divide the displayed measured pressure by the correction factor for the gas type you are measuring: Ion Gauge Gas Sensitivity Correction Factors for selected gases Gas Sensitivity CorrectionFactor Gas Sensitivity Correction Factor He 0.18 H2O 1.12 Ne 0.30 NO 1.16 D2 0.35 Ar 1.29 H2 0.46 CO2 1.42 N2 1.00 Kr 1.94 Air 1.00 SF6 2.50 O2 1.01 Xe 2.87 CO 1.05 Hg 3.64 For example, if the gas in use is argon (Ar) and the ion gauge measured pressure is displayed as 4.00 × 10-7 Torr, the actual, true pressure of argon is then deter- mined by the following equation: 2) Alternatively, you may correct the display for a direct reading of pressure for the type of gas you are using by adjusting the sensitivity factor for the IG. If you adjust the sensitivity factor for your ion gauge to compensate the readout of pressure for a gas type other than nitrogen / air, the displayed pressure readout for that device must be annotated to indicate that the displayed pressure is for the gas type the readout is compensated for. In the above example, if the N2 sensitivity of the ion gauge being used is 10 torr-1 ("10 per torr"), the sensitivity factor programmed during setup of the VGC083 could be set for 12.9 (~13) so that the pressure readout would directly indicate the true pressure of argon. Again, the display line for that particular device pressure read- out would require annotation (a user applied label) so as to not conflict with the gas type selection/notation of nitrogen (N2). 8.1 Ion Gauge Display Correction Factors for Selected Gases

8.2 Effec Gase Gaug 83A_B.om cts of Diffe es on Conv ge Display erent vection y Convect of the ga sensor w rounding mal con ent. INF are norm tion mus gas in u play from For nitro agreeme 1000 To gases a at these thermal At press cantly fr gauge b and perf geometr General but even sures. F readings ally disp containe The Y- a manome gas com gauge u (CVG) a the resp tion gauge op as inside the g wire. This hea g the sensor w nductivities, the FICON convec mally calibrate st be made fo use. The chart m an INFICON ogen gas (N2) ent between i orr. At pressur are similar. The e low pressure conductivities sures above a rom true press become the pr rformance at p ry and mounti lly, air and N2 n these two ga For example, w s change by a places the N2 i ed in atmosph axis of the abo eter, a diaphra mposition. The under test. Thi and Granville- ponse for both peration is bas gauge head. T at loss depend wire. Since dif e indicated pre ction gauges (a ed using nitrog r the differenc s and tables b N convection g the calibration ndicated and res below abo e difference in es is usually a s of the gases about 1 torr, in sure. At these redominant ca pressures high ng orientation are considere ases will exhib when venting a about 30 to 40 in the gauge. heric air. ove chart is ac agm gauge th e X-axis is the is chart shows Phillips® Conv h of these type ed on the phy The convection s on the therm ferent gases, essure readin and most othe gen. When a g ce in thermal c below indicate gauge. n of the conve true pressure ut 1 torr, the c n readings (be constant; a fu . dicated pressu higher pressu ause of heat lo her than about as well as ga ed the same a bit slight differe a system to at torr after the This is due to ctual pressure at measures t pressure read s readings for vectron® gaug es of gauges is ysical effect of n gauge sens mal conductivi and mixtures, gs and output er thermal, he gas other than conductivity be e how different ection gauge s throughout th calibration curv etween indicat unction of the ure readings m ures, convecti oss from the se t 1 torr depend as properties. as far as therm rences in read tmosphere us chamber is op the partial pre e as measured true total pres ding indicated an INFICON c ge to illustrate s virtually indis f thermal cond es heat loss in ty of the gas s , have differen ts will also be at loss type ga N2 is used, co etween N2 and t gases affect shows excelle he range from ves for the diff ed and true pr difference bet may diverge s on currents in ensor. Calibra ds on gauge tu mal conductivit ings at higher ing N2, you m pened and air essure of oxyg d by a capacita sure independ by the conve convection ga that the differe stinguishable. 61 ductivity n a sur- nt ther- differ- auges) orrec- d the the dis- nt 10-4 to fferent ressure) tween signify- the ation ube y goes, r pres- ay see gradu- gen (O2) ance dent of ction auge ence in

e the same. S Example A: If th auge will read Example B: If th will read about you are backf ressure of 760 nuing to backf ou will over pr Example C: If t ndication) Torr he chamber to le and produc pening the ch 0 torr true pre nd product tha What these exa sing accurate njury to person Suggested pre Install a pre tection from Post a warn _______ To using) so th gauge will n Do not as may not be the Risk of ov xists when us as type. Use a ontainment ve he vacuum/pre Using a th alibrated could n this manual w Exercise cautio heric pressure our vacuum / ressure inside ated device - i ictated by the er. An O-ring rom the fitting e this data app See Table 1 be he gas is nitro d 500 Torr. he gas is argo 9 Torr. kfilling your vac 0 Torr true pre fill your system ressurize your the gas is heliu r when pressu o atmosphere ct. You probab amber to atmo essure, may pr at may be insi amples illustra gas conversio nnel and/or da ecautions wh essure relief va m the dangers ning label on y orr Indicated P hat an operato not exceed a s ssume this dat e same. ver pressurizin ing pressure m a pressure rel essel to less th essure system hermal conduc d result in dea when measur on when admit e) of gas into a pressure vess e the devices a n some cases type of conne compression if internal pres plies to other c elow and note ogen (N2), whe on (Ar), when cuum system essure your ga m, attempting r chamber whi um (He), the g ure reaches ab prematurely m bly will not cau osphere with t resent other h de the chamb ate is that usin on data and o amage to equi hen using gas alve or burst d associated wi your gauge rea Pressure" (fill i or using the va safe operating ta applies to o ng a gas conta measurement ief device to s han the maxim m and all devic ctivity gauge w ath or serious ing pressures tting positive p any enclosed sel or chambe and vessel int s, the maximu ections or fittin fitting type dev ssure exceeds convection gau the following en the true tot the true press with Ar, when auge will be re to increase th ch may prese gauge will read bout 10 Torr tr may present ot se damage to the internal ch azards for bot ber/vessel. ng gases other ther proper pr pment. ses other tha disk on your ch ith over pressu adout such as n the blank fo acuum chambe g pressure. ther convectio ainment vesse devices that a safely limit the mum allowable ces attached to with gases oth injury. Be sure of gases othe pressures (abo volume. Insta r to limit the m ernal volume m allowable w ngs used to att vice may be fo s the local bar tinb29e1 uges which m examples: tal pressure is sure is 100 To n your system eading about 2 he reading up ent a hazard. d 1.10E+03 (o rue pressure a ther hazards f o your vacuum hamber pressu th personnel i r than nitrogen recautions cou an N2: hamber to pro urizing the cha s "Do Not Exce or the gas type er system and on gauges, wh el and attache are calibrated internal press e working pres o the system. her than that fo e to use gas c er than N2 / air ove local amb all pressure rel maximum allow to less than th working pressu tach devices t orcibly release rometric, amb 1 (2016-11) VGC083A_B.o ay or may not s 500 Torr, the rr, the gauge reaches a 23 Torr. Con- to 760 Torr, overpressure and opening for both peo- m system, but ure at only n the proximity n (N2) without uld result in ovide pro- amber. eed e you are d connected hich may or d apparatus for a specific sure of a ssure rating fo or which it is correction data r. bient, atmos- lief devices on wable working he lowest ure may be to your cham- ed (ejected) ient pressure. om t e y or a n g

63 The table below shows the convection gauge displayed readings at various pressures for several commonly used gas types: True Pressure (Torr) N2 Ar He O2 CO2 Kr Freon12 Freon22 D2 Ne CH4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 1.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 2.00E-4 5.00E-4 5.00E-4 5.00E-4 5.00E-4 5.00E-4 5.00E-4 3.00E-4 5.00E-4 5.00E-4 5.00E-4 5.00E-4 5.00E-4 1.00E-3 1.00E-3 7.00E-4 8.00E-4 1.00E-3 1.10E-3 4.00E-4 1.50E-3 1.50E-3 1.30E-3 7.00E-4 1.70E-3 2.00E-3 2.00E-3 1.40E-3 1.60E-3 2.00E-3 2.30E-3 1.00E-3 3.10E-3 3.10E-3 2.40E-3 1.50E-3 3.30E-3 5.00E-3 5.00E-3 3.30E-3 4.00E-3 5.00E-3 4.40E-3 2.30E-3 7.60E-3 7.00E-3 6.00E-3 3.50E-3 7.70E-3 1.00E-2 1.00E-2 6.60E-3 8.10E-3 9.70E-3 1.10E-2 4.80E-3 1.47E-2 1.35E-2 1.21E-2 7.10E-3 1.53E-2 2.00E-2 2.00E-2 1.31E-2 1.61E-2 1.98E-2 2.22E-2 9.50E-3 2.99E-2 2.72E-2 2.43E-2 1.41E-2 3.04E-2 5.00E-2 5.00E-2 3.24E-2 4.05E-2 4.92E-2 5.49E-2 2.35E-2 7.25E-2 6.90E-2 6.00E-2 3.48E-2 7.72E-2 1.00E-1 1.00E-1 6.43E-2 8.20E-2 9.72E-2 1.07E-1 4.68E-2 1.43E-1 1.36E-1 1.21E-1 7.00E-2 1.59E-1 2.00E-1 2.00E-1 1.26E-1 1.65E-1 1.94E-1 2.10E-1 9.11E-2 2.75E-1 2.62E-1 2.50E-1 1.41E-1 3.15E-1 5.00E-1 5.00E-1 3.12E-1 4.35E-1 4.86E-1 4.89E-1 2.17E-1 6.11E-1 5.94E-1 6.87E-1 3.59E-1 7.81E-1 1.00E+0 1.00E+0 6.00E-1 9.40E-1 9.70E-1 9.50E-1 4.00E-1 1.05E+0 1.04E+0 1.55E+0 7.45E-1 1.60E+0 2.00E+0 2.00E+0 1.14E+0 2.22E+0 1.94E+0 1.71E+0 7.00E-1 1.62E+0 1.66E+0 4.13E+0 1.59E+0 3.33E+0 5.00E+0 5.00E+0 2.45E+0 1.35E+1 4.98E+0 3.34E+0 1.28E+0 2.45E+0 2.62E+0 2.46E+2 5.24E+0 7.53E+0 1.00E+1 1.00E+1 4.00E+0 OP 1.03E+1 4.97E+0 1.78E+0 2.96E+0 3.39E+0 OP 2.15E+1 2.79E+1 2.00E+1 2.00E+1 5.80E+0 OP 2.23E+1 6.59E+0 2.29E+0 3.32E+0 3.72E+0 OP 5.84E+2 3.55E+2 5.00E+1 5.00E+1 7.85E+0 OP 7.76E+1 8.22E+0 2.57E+0 3.79E+0 4.14E+0 OP OP 8.42E+2 1.00E+2 1.00E+2 8.83E+0 OP 2.09E+2 9.25E+0 2.74E+0 4.68E+0 4.91E+0 OP OP OP 2.00E+2 2.00E+2 9.79E+0 OP 2.95E+2 1.23E+1 3.32E+0 5.99E+0 6.42E+0 OP OP OP 3.00E+2 3.00E+2 1.13E+1 OP 3.80E+2 1.69E+1 3.59E+0 6.89E+0 7.52E+0 OP OP OP 4.00E+2 4.00E+2 1.35E+1 OP 4.85E+2 2.24E+1 3.94E+0 7.63E+0 8.42E+0 OP OP OP 5.00E+2 5.00E+2 1.61E+1 OP 6.04E+2 2.87E+1 4.21E+0 8.28E+0 9.21E+0 OP OP OP 6.00E+2 6.00E+2 1.88E+1 OP 7.30E+2 3.64E+1 4.44E+0 8.86E+0 9.95E+0 OP OP OP 7.00E+2 7.00E+2 2.18E+1 OP 8.59E+2 4.61E+1 4.65E+0 9.42E+0 1.07E+1 OP OP OP 7.60E+2 7.60E+2 2.37E+1 OP 9.41E+2 5.39E+1 4.75E+0 9.76E+0 1.11E+1 OP OP OP 8.00E+2 8.00E+2 2.51E+1 OP 9.97E+2 5.94E+1 4.84E+0 9.95E+0 1.14E+1 OP OP OP 9.00E+2 9.00E+2 2.85E+1 OP OP 7.95E+1 4.99E+0 1.05E+1 1.20E+1 OP OP OP 1.00E+3 1.00E+3 3.25E+1 OP OP 1.11E+2 5.08E+0 1.11E+1 1.27E+1 OP OP OP Values listed under each gas type are in Torr units Over Pressure (OP)= 1.10E+03 Torr When using gases other than nitrogen/air, you must use the above look-up table to determine the true pressures of selected gases as measured by convection gauges. For example, if the gas you are using in your vacuum system chamber is predominately argon (Ar), a displayed pressure of 1.14E+00 Torr means the actual true pressure of argon is 2.00E+00 Torr based on the conversion information pro- vided in the above table. Example: If the gas is argon (Ar), when the true pressure is 100 Torr, the gauge will read only about 9 torr.

Output Co Factors fo Gases 1 IG-CG1 0 Output C - Ion Gau Different Analog O e Analog O n Factors f Gases 0.5 - 7V An orrection or Selected 0.5 - 7V Ana Correction Fa uge Range T u ty W fo co A re B th b Io A is P P P A a T ra W fo d A lis d B 1 p A d o to B ce utput Output for alog d alog actors he following ta se of ionizatio ypes of gauge When using an ollowing steps orrection facto A) Refer to se eceiving instru B) Apply the S he pressure va elow: on Gauge Gas Gas C He Ne D2 H2 N2 Air O2 CO ANALOG OUT s 4 volts. Press P (nitrogen) = 1 P = 10 (4 - 10) P = 1.00 x 10-6 Applying the Se bove, he correction ange measure When using the or gases other ifferent pressu A) Pressure ra sted in section etermine pres B) Pressure ra 000 Torr Use ressure from t A) When using ecade) for gas utput to press o overpressure B) Refer to sec eiving instrum ables and exp on and convec s, corrections ny of the analo to convert the ors for selecte ection 7 and us ument to press Sensitivity Cor alue obtained s Sensitivity C Sensitivity CorrectionFact 0.18 0.30 0.35 0.46 1.00 1.00 1.01 1.05 T 1 selected is sure unit is to 10 (volts - 10) Torr (based o ensitivity Corr factor must be ed by the ion g e IG - CG1 an r than N2 / Air, ure ranges as ange for IG fro n 5.4, use the ssure from the ange of overp the correction the voltage fo g the IG - CG1 ses other than sure for IG whe e shut down v ction 7.1 and ment to pressu planation conta ction gauges o must be appl og outputs ass e analog outpu ed gases: se the related sure. This pres rrection Facto in step A. Use Correction Fact tor IG LOG N-10 rr. on nitrogen) ection Factor e applied to th gauge. nalog output m , the analog ou discussed be om 4.00 × 10-1 correction fac e voltage for se pressure shut d n factors listed r selected gas 1 analog outpu n N2 / Air, use en operating i values listed in related equati re. This press ains important on gases other ied to the ana signed to ion g ut to pressure equation to c ssure value is r for the partic e correction fa tors for selecte Gas Co H2O NO Ar CO2 Kr SF6 Xe Hg . The gas in u of 1.29 for arg he analog outp mode (Log-Line utput is interpr low: 0 Torr to overp ctors listed in s elected gases down value lis in section 8. ses (convectio ut mode (Log- the following n the pressure n section 5.4. on to convert ure value is ba tinb29e1 t information r r than N2 / Air alog outputs. gauge only, us e: Ion gauge a convert the vol s based on nitr cular gas you a actors and exa ed gases Sensitivity orrection Facto 1.12 1.16 1.29 1.42 1.94 2.50 2.87 3.64 use is argon. V gon listed in th put over the en ear 0.5 - 7 V, 0 reted different pressure shut section 8.3.2.1 (ion gauge ra sted in section 3.2.2 below to on gauge rang -Linear 0.5 - 7 steps to conv e range of 4.0 the voltage in ased on nitrog 1 (2016-11) VGC083A_B.o regarding the . For both se the nalog output ltage in your rogen gas. are using to ample listed or Voltage output he table ntire pressure 0.5 V/decade) tly over two down value 1 below to ange). n 5.4 to o determine e). V, 0.5 V / ert the analog 0 × 10-10 Torr n your re- gen. om t e ) g

Exam 83A_B.om mple C) App pressure below). Ion Gau Gas He Ne D2 H2 N2 Air O2 CO The gas The sam measure ly the sensitiv e value obtain uge Gas Sens Sen Correct 0 0 0 0 1 1 1 1 s in use is argo me correction ed by the ion vity correction ned in step A ( itivity Correcti sitivity tionFactor 0.18 0.30 0.35 0.46 .00 .00 .01 .05 on. Output vo factor must be gauge. factor for the p (Use correctio on Factors for Gas H2O NO Ar CO2 Kr SF6 Xe Hg ltage is 3 volts e applied over particular gas on factors and r selected gas Sens Correctio 1.1 1.1 1.2 1.4 1.9 2.5 2.8 3.6 s. Pressure un r the entire pre you are using example liste ses itivity on Factor 12 16 29 42 94 50 87 64 nit is torr. essure range a 65 g to the d as

When using the IG - CG1 analog output mode (Log-Linear 0.5 - 7 V, 0.5 V/decade) for gases other than N2 / Air, use the following look-up table and information to convert the analog output to pressure when operating in the pressure range of overpressure shutdown value listed in section 5.4 to 1000 Torr. The look-up table has been derived from equation listed in section 7.1. Analog output IG - CG1 when in the pressure range of overpressure shutdown value to 1000 Torr True Pressure (Torr) N2 Ar He O2 CO2 KR Freon12 Freon22 D2 Ne CH4 1.00E-3 4.000 3.923 3.952 4.000 4.021 3.801 4.088 4.088 4.057 3.923 4.115 2.00E-3 4.151 4.073 4.102 4.151 4.181 4.000 4.246 4.246 4.190 4.088 4.259 5.00E-3 4.349 4.259 4.301 4.349 4.322 4.181 4.440 4.423 4.389 4.272 4.443 1.00E-2 4.500 4.410 4.454 4.493 4.521 4.341 4.584 4.565 4.541 4.426 4.592 2.00E-2 4.651 4.559 4.603 4.648 4.673 4.489 4.738 4.717 4.693 4.575 4.741 5.00E-2 4.849 4.755 4.804 4.846 4.870 4.686 4.930 4.919 4.889 4.771 4.944 1.00E-1 5.000 4.904 4.957 4.994 5.015 4.835 5.078 5.067 5.041 4.923 5.101 2.00E-1 5.151 5.050 5.109 5.144 5.161 4.980 5.220 5.209 5.199 5.075 5.249 5.00E-1 5.349 5.247 5.319 5.343 5.345 5.168 5.393 5.387 5.418 5.278 5.446 1.00E+0 5.500 5.389 5.487 5.493 5.489 5.301 5.511 5.509 5.595 5.436 5.602 2.00E+0 5.651 5.528 5.673 5.644 5.616 5.423 5.605 5.610 5.808 5.601 5.761 5.00E+0 5.849 5.695 6.065 5.849 5.762 5.554 5.695 5.709 6.695 5.860 5.938 1.00E+1 6.000 5.801 6.006 5.848 5.625 5.736 5.765 6.166 6.223 2.00E+1 6.151 5.882 6.174 5.909 5.680 5.761 5.785 6.883 6.775 5.00E+1 6.349 5.947 6.445 5.957 5.705 5.789 5.809 6.963 1.00E+2 6.500 5.973 6.660 5.983 5.719 5.835 5.846 2.00E+2 6.651 5.995 6.735 6.045 5.761 5.889 5.904 3.00E+2 6.739 6.027 6.790 6.114 5.778 5.919 5.938 4.00E+2 6.801 6.065 6.843 6.175 5.798 5.941 5.963 5.00E+2 6.849 6.103 6.891 6.229 5.812 5.959 5.982 6.00E+2 6.889 6.137 6.932 6.281 5.824 5.974 5.999 7.00E+2 6.923 6.169 6.967 6.332 5.834 5.987 6.015 7.60E+2 6.940 6.187 6.987 6.366 5.838 5.995 6.023 8.00E+2 6.952 6.200 6.999 6.387 5.842 5.999 6.028 9.00E+2 6.977 6.227 6.450 5.849 6.011 6.040 1.00E+3 7.000 6.256 6.523 5.853 6.023 6.052 Values listed under each gas type are in volts (V). The gas in use is O2. Voltage output is 5.144 volts. True pressure of O2 is 2.00E-01 Torr If you intend to use any of the analog outputs to represent measurements from CG1 or CG2 for gases other than N2 / Air, you must also apply corrections to the analog output. Use the following tables to determine pressure from voltage for gases other than nitrogen or air. 8.3.2.2 IG-CG1 0.5 - 7V Analog Output Correction Factors - Convection Gauge Range Example 8.3.3 Convection gauge analog output for selected gases

67 When using the Log-Linear convection gauge analog output mode (Log-Linear 1 - 8 V, 1 V/decade) for gases other than N2 / Air, use the following look-up table and information to convert the analog output to pressure. The look-up table has been derived from the equation provided in section 7.7 Analog Output for Log-Linear CG1 1-8V or CG2 1-8V True Pressure (Torr) N2 Ar He O2 CO2 KR Freon12 Freon22 D2 Ne CH4 1.00E-4 1.000 1.000 1.000 1.000 1.000 1.000 1.000 1.000 1.000 1.000 1.000 2.00E-4 1.301 1.301 1.301 1.301 1.301 1.301 1.301 1.301 1.301 1.301 1.301 5.00E-4 1.699 1.699 1.699 1.699 1.699 1.477 1.699 1.699 1.699 1.699 1.699 1.00E-3 2.000 1.845 1.903 2.000 2.041 1.602 2.176 2.176 2.114 1.845 2.230 2.00E-3 2.301 2.146 2.204 2.301 2.362 2.000 2.491 2.491 2.380 2.176 2.519 5.00E-3 2.699 2.519 2.602 2.699 2.643 2.362 2.881 2.845 2.778 2.544 2.886 1.00E-2 3.000 2.820 2.908 2.987 3.041 2.681 3.167 3.130 3.083 2.851 3.185 2.00E-2 3.301 3.117 3.207 3.297 3.346 2.978 3.476 3.435 3.386 3.149 3.483 5.00E-2 3.699 3.511 3.607 3.692 3.740 3.371 3.860 3.839 3.778 3.542 3.888 1.00E-1 4.000 3.808 3.914 3.988 4.029 3.670 4.155 4.134 4.083 3.845 4.201 2.00E-1 4.301 4.100 4.217 4.288 4.322 3.960 4.439 4.418 4.398 4.149 4.498 5.00E-1 4.699 4.494 4.638 4.687 4.689 4.336 4.786 4.774 4.837 4.555 4.893 1.00E+0 5.000 4.778 4.973 4.987 4.978 4.602 5.021 5.017 5.190 4.872 5.204 2.00E+0 5.301 5.057 5.346 5.288 5.233 4.845 5.210 5.220 5.616 5.201 5.522 5.00E+0 5.699 5.389 6.130 5.697 5.524 5.107 5.389 5.418 7.391 5.719 5.877 1.00E+1 6.000 5.602 6.013 5.696 5.250 5.471 5.530 6.332 6.446 2.00E+1 6.301 5.763 6.348 5.819 5.360 5.521 5.571 7.766 7.550 5.00E+1 6.699 5.895 6.890 5.915 5.410 5.579 5.617 7.925 1.00E+2 7.000 5.946 7.320 5.966 5.438 5.670 5.691 2.00E+2 7.301 5.991 7.470 6.090 5.521 5.777 5.808 3.00E+2 7.477 6.053 7.580 6.228 5.555 5.838 5.876 4.00E+2 7.602 6.130 7.686 6.350 5.595 5.883 5.925 5.00E+2 7.699 6.207 7.781 6.458 5.624 5.918 5.964 6.00E+2 7.778 6.274 7.863 6.561 5.647 5.947 5.998 7.00E+2 7.845 6.338 7.934 6.664 5.667 5.974 6.029 7.60E+2 7.881 6.375 7.974 6.732 5.677 5.989 6.045 8.00E+2 7.903 6.400 7.999 6.774 5.685 5.998 6.057 9.00E+2 7.954 6.455 6.900 5.698 6.021 6.079 1.00E+3 8.000 6.512 7.045 5.706 6.045 6.104 Values listed under each gas type are in volts (V). The gas in use is O2. Voltage output is 4.288 volts. True pressure of O2 is 2.00E-01 Torr 8.3.3.1 CG1 1 - 8 V or CG2 1 - 8 V Analog Output Correction Factors - Convection Gauge Example

When using the Log-Linear convection gauge analog output mode (Log-Linear 0 - 7 V, 1 V/decade) for gases other than N2 / Air, use the following look-up table and information to convert the analog output to pressure. The look-up table has been derived from the equation provided in section 7.8 True Pressure (Torr) N2 Ar He O2 CO2 KR Freon12 Freon22 D2 Ne CH4 1.00E-4 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 0.000 2.00E-4 0.301 0.301 0.301 0.301 0.301 0.301 0.301 0.301 0.301 0.301 0.301 5.00E-4 0.699 0.699 0.699 0.699 0.699 0.477 0.699 0.699 0.699 0.699 0.699 1.00E-3 1.000 0.845 0.903 1.000 1.041 0.602 1.176 1.176 1.114 0.845 1.230 2.00E-3 1.301 1.146 1.204 1.301 1.362 1.000 1.491 1.491 1.380 1.176 1.519 5.00E-3 1.699 1.519 1.602 1.699 1.643 1.362 1.881 1.845 1.778 1.544 1.886 1.00E-2 2.000 1.820 1.908 1.987 2.041 1.681 2.167 2.130 2.083 1.851 2.185 2.00E-2 2.301 2.117 2.207 2.297 2.346 1.978 2.476 2.435 2.386 2.149 2.483 5.00E-2 2.699 2.511 2.607 2.692 2.740 2.371 2.860 2.839 2.778 2.542 2.888 1.00E-1 3.000 2.808 2.914 2.988 3.029 2.670 3.155 3.134 3.083 2.845 3.201 2.00E-1 3.301 3.100 3.217 3.288 3.322 2.960 3.439 3.418 3.398 3.149 3.498 5.00E-1 3.699 3.494 3.638 3.687 3.689 3.336 3.786 3.774 3.837 3.555 3.893 1.00E+0 4.000 3.778 3.973 3.987 3.978 3.602 4.021 4.017 4.190 3.872 4.204 2.00E+0 4.301 4.057 4.346 4.288 4.233 3.845 4.210 4.220 4.616 4.201 4.522 5.00E+0 4.699 4.389 6.130 4.697 4.524 4.107 4.389 4.418 6.391 4.719 4.877 1.00E+1 5.000 4.602 5.013 4.696 4.250 4.471 4.530 5.332 5.446 2.00E+1 5.301 4.763 5.348 4.819 4.360 4.521 4.571 6.766 6.550 5.00E+1 5.699 4.895 5.890 4.915 4.410 4.579 4.617 6.925 1.00E+2 6.000 4.946 6.320 4.966 4.438 4.670 4.691 2.00E+2 6.301 4.991 6.470 5.090 4.521 4.777 4.808 3.00E+2 6.477 5.053 6.580 5.228 4.555 4.838 4.876 4.00E+2 6.602 5.130 6.686 5.350 4.595 4.883 4.925 5.00E+2 6.699 5.207 6.781 5.458 4.624 4.918 4.964 6.00E+2 6.778 5.274 6.863 5.561 4.647 4.947 4.998 7.00E+2 6.845 5.338 6.934 5.664 4.667 4.974 5.029 7.60E+2 6.881 5.375 6.974 5.732 4.677 4.989 5.045 8.00E+2 6.903 5.400 6.999 5.774 4.685 4.998 5.057 9.00E+2 6.954 5.455 5.900 4.698 5.021 5.079 1.00E+3 7.000 5.512 6.045 4.706 5.045 5.104 Values listed under each gas type are in volts (V (dc)). The gas in use is O2. Voltage output is 3.288 volts. True pressure of O2 is 2.00E-01 Torr 8.3.3.2 CG1 0 - 7 V or CG2 0 - 7 V Analog Output Correction Factors - Convection Gauge Example

69 When using the Non-Linear convection gauge analog output mode for gases other than N2 / Air, use the following look-up table and information to convert the analog output to pressure. The look-up table has been derived from the equation provided in section 7.9 True Pressure (Torr) N2 Ar He O2 CO2 KR Freon12 Freon22 D2 Ne CH4 0 0.3751 0.375 0.375 0.375 0.375 0.375 0.375 0.375 0.375 0.375 0.375 1.00E-4 0.3759 0.3757 0.3755 0.376 0.376 0.3755 0.376 0.376 0.376 0.3757 0.3766 2.00E-4 0.3768 0.376 0.3765 0.377 0.377 0.3768 0.378 0.378 0.377 0.3763 0.378 5.00E-4 0.3795 0.378 0.379 0.38 0.381 0.3772 0.382 0.381 0.381 0.3782 0.3825 1.00E-3 0.384 0.381 0.382 0.384 0.385 0.379 0.388 0.388 0.386 0.381 0.3896 2.00E-3 0.3927 0.387 0.389 0.392 0.395 0.384 0.401 0.4 0.396 0.388 0.403 5.00E-3 0.4174 0.403 0.409 0.417 0.412 0.395 0.437 0.432 0.425 0.405 0.438 1.00E-2 0.4555 0.429 0.441 0.453 0.462 0.415 0.488 0.48 0.47 0.433 0.492 2.00E-2 0.5226 0.477 0.497 0.521 0.536 0.451 0.581 0.566 0.549 0.484 0.584 5.00E-2 0.6819 0.595 0.637 0.679 0.705 0.544 0.778 0.764 0.727 0.608 0.796 1.00E-1 0.878 0.745 0.814 0.868 0.9 0.668 1.009 0.99 0.944 0.768 1.053 2.00E-1 1.1552 0.962 1.068 1.141 1.179 0.847 1.315 1.291 1.265 1.002 1.392 5.00E-1 1.6833 1.386 1.589 1.664 1.668 1.194 1.826 1.805 1.914 1.469 2.014 1.00E+0 2.2168 1.818 2.164 2.195 2.172 1.536 2.257 2.247 2.603 1.976 2.632 2.00E+0 2.8418 2.333 2.939 2.814 2.695 1.921 2.647 2.666 3.508 2.631 3.313 5.00E+0 3.6753 3.028 4.387 3.672 3.316 2.429 3.029 3.09 5.059 3.715 1.00E+1 4.2056 3.48 5.774 4.225 3.67 2.734 3.204 3.33 6.361 4.605 4.699 2.00E+1 4.5766 3.801 7.314 4.62 3.903 2.966 3.308 3.414 5.406 5.172 5.00E+1 4.8464 4.037 4.916 4.071 3.075 3.43 3.509 6.159 5.583 1.00E+2 4.9449 4.122 5.026 4.154 3.134 3.618 3.66 6.483 5.72 2.00E+2 5.019 4.192 5.106 4.336 3.269 3.827 3.883 6.661 5.86 3.00E+2 5.1111 4.283 5.2 4.502 3.384 3.938 4.005 6.726 4.00E+2 5.2236 4.386 5.315 4.621 3.466 4.016 4.088 6.767 6.103 5.00E+2 5.3294 4.477 5.422 4.708 3.526 4.076 4.151 6.803 6.00E+2 5.4194 4.55 5.515 4.775 3.573 4.124 4.203 6.843 6.342 7.00E+2 5.4949 4.611 5.592 4.83 3.613 4.166 4.247 6.89 7.60E+2 5.534 4.643 5.633 4.86 3.632 4.19 4.271 6.92 8.00E+2 5.5581 4.663 5.658 4.877 3.645 4.203 4.286 6.942 6.519 9.00E+2 5.6141 4.706 5.713 4.919 3.674 4.237 4.321 7 1.00E+3 5.6593 4.745 5.762 4.955 3.69 4.27 4.354 7.056 6.642 Values listed under each gas type are in volts (V (dc)). 8.3.3.3 CG1 NON-LIN or CG2 NON-LIN Analog Output Correction Factors - Convection Gauge

9 Communication Protocol (Serial Interface) The VGC083 provides RS232 and RS485 serial communications capability. The following information and the command protocol summaries listed in the following sub-sections of this chapter can be used to establish serial communications with the device. Four distinct protocols (COM type) are defined: INFICON RS232 and RS485 protocol as well as the RS232 and RS485 protocols compatible with GP Series 307 and 358 controllers. The user has access from the front panel main menu to change settings for COM Type, Baud Rate, Data Bits, Parity, Stop Bits and device Address (when using RS485). Baud Rate is selectable at 300, 600, 1200, 2400, 4800, 9600, 19200 or 38400 baud. Data bits may be set to either 7 or 8. Parity selection may be set to None, Even or Odd. Either 1 or 2 Stop Bits may be selected. The device address when using RS485 can be within the range 00 to FF hexadeci- mal (Default = 01). There is a finite period of time between the time a command is sent from a terminal (PC COM Port, for example) and the point in time in which the VGC083 starts to send a response to that command. This delay is dependent upon the command sent and the baud rate. The maximum command repetition rate will depend on the length of the command sent and the response received, as well as the baud rate. The maximum repetition rate for the baud rate you are using can be found in the following table: Selected Baud Rate Repetition Rate Receive to Transmit Time 38400 38 ms 26 μs 19200 46 ms 52 μs 9600 61 ms 1.0 ms 4800 93 ms 2.0 ms 2400 156 ms 4.1 ms 1200 280 ms 8.3 ms 600 530 ms 16 ms 300 1030 ms 33 ms The following notes are intended to be understood by the user when using INFICON's RS232 and RS485 command protocol with the VGC083. 1. Default settings are 19,200 baud rate, 8 data bits, No Parity, 1 stop bit. 2. The baud rate can be set to different values using the front panel soft-keys. 3. All Responses are 13 characters long. 4. 'xx' is the address of the device (00 thru FF). For RS232, 'xx' is replaced with two space characters. 9.1 Device Specific Serial Communication Info 9.2 INFICON RS232 / RS485 Command Protocol Summary

71 5. is a carriage return, a non-printable character. Do not enter from your keyboard. A carriage return, non-printable character may be entered as the Unicode C0 controls specified value: 0D hexadecimal (13 decimal). From your keyboard, a key entry sequence of CNTL-M may be used to obtain the required character for a carriage return when using certain terminal emulator programs. 6. '_' represents a 'space' character. Press the space bar on your keyboard. Do not enter a '_' (underscore) character. 7. All commands sent to the module start with a '#' character, and all normal responses from the module start with a '*' character. Error responses start with a "?". 8. A valid address must be used [Factory default = 01] when using the RS485 protocol. The VGC083 will not respond to a command with an invalid address while using RS485. 9. The command syntax examples used in the protocol summary table for ASCII are shown in scientific notation. However, floating point notation is acceptable as long as a leading digit is entered as '0.' or '1.', etc. There must be a digit to the left of the decimal point. For example, when constructing the syntax for the command to set the CGn zero value (e.g., #xxTZn_x.xxE-pp when using scientific notation), use either #xxTZn_0.00, or #xxTZn_0. A simple '0' is valid for the pressure entry. The RS232 mode is the same as RS485, except ADDRESS is ignored in RS232 mode and can be eliminated from the command string or replaced with space characters. Responses will not return ADDRESS; the ADDRESS is replaced with space characters. All pressure measurement responses are in absolute pressure units as selected by the user. Table "INFICON RS232 and RS485 Command Protocol Summary" COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES READ ION GAUGE PRESSURE Read the current displayed pressure of the ion gauge in the same units of measure on display #xxRDIG e.g., : #01RDIG where, xx = the two digit address of the device (node) *xx_y.yyEzpp where, y.yy = mantissa, z = sign of the exponent +/- and pp = the exponent e.g., : *01_1.53E-06 When IG is off: *01_1.10E+03 When IG is not connected: *01_9.90E+09 READ CGn PRESSURE Read the current pressure for CGn in the same units of measure on display #xxRDCGn e.g., : #01RDCG1 where, n=1 or 2 (CG1 or CG2) *xx_ y.yyEzpp e.g., : *01_7.60E+02 When CG is over ranged: *01_1.10E+03 READ AI Pressure Read the current pressure for AI in the same units of measure on display #xxRDAI e.g., : #01RDAI *xx_ y.yyEzpp e.g., : *01_7.60E+02 When AI is over ranged or not powered: *01_1.10E+03 (continued) 9.3 INFICON RS232 and RS485 Command Protocol Summary

Table "INFICON RS232 and RS485 Command Protocol Summary" (continued) COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES READ all Process Control (PC, or Relay) states Read the current state of all process control setpoint relays #xxRL e.g., : #01RL *xx_003F_RL_ In the example response above, the 'F' represents the first 4 re- lays; relays 5 and 6 are the sec- ond digit (the '3') of the response. This example shows that all relays are ON, i.e., energized. The '3F' would represent the binary string of 0011 1111, where 0011 is the 3 and 1111 is the F in '3F' A response of 0003 means that only RL1 and RL2 are ON, i.e., energized READ one PC state Read the current state of one process control setpoint #xxRLn where n = 1,2,3,4,5 or 6 e.g., : #01RL1 *xx_0_RL_OFF *xx_1_RL_ON_ READ IG on/off STATUS Find out if Ion Gauge is turned to ON and gauge is reading pressure #xxIGS e.g., : #01IGS *xx_0_IG_OFF *xx_1_IG_ON_ When IG device is not connected: ?01_INVALID_ TURN IG ON Turn the Ion Gauge ON #xxIG1 e.g., : #01IG1 #xxIGy where, Y=1= Turn ON; y=0= Turn OFF *xx_PROGM_OK When IG error exists: ?01_INVALID_ When IG controlled by CG: ?01_INVALID_ When IG is not connected: ?01_INVALID_ To clear IG errors send an IG OFF command: y=0=IG OFF (this clears IG errors and allows user to reactivate IG control) TURN IG OFF Turn the Ion Gauge OFF #xxIG0 e.g., : #01IG0 #xxIGy where, Y=1= Turn ON; y=0= Turn OFF *xx_PROGM_OK Even though the IG will already be OFF, when an IG Error occurs, sending the IG OFF command will clear errors When IG device is not connected: ?01_INVALID_ READ DEGAS on/off STATUS Find out if Degas is ON or OFF #xxDGS e.g., : #01DGS *xx_0_DG_OFF *xx_1_DG_ON_ When IG device is not connected: ?01_INVALID_ TURN ON Degas Turn ON the Ion Gauge Degas #xxDG1 e.g., : #01DG1 #xxDGy where, Y=1= Turn ON; y=0= Turn OFF *xx_PROGM_OK When IG off: ?01_INVALID_ When device does not exist: ?01_INVALID_ When P > 5E-05 Torr: ?01_INVALID_ TURN OFF Degas Turn OFF the Ion Gauge Degas #xxDG0 e.g., : #01DG0 #xxDGy where, Y=1= Turn ON; y=0= Turn OFF *xx_PROGM_OK When IG device is not connected: ?01_INVALID_ (continued)

73 Table "INFICON RS232 and RS485 Command Protocol Summary" (concluded) COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES SET EMISSION Current Choose 10 mA, 4mA or 100uA emission current #xxSEy e.g., : #01SE1 where, y=1=4mA; y=0=100μA y=2=10mA xx_PROGM_OK When IG device is not connected: ?01_INVALID_ When in Auto Ie mode: ?01_INVALID_ SET FILAMENT Choose Filament 1 or 2 #xxSFy e.g., : #01SF1 where, y=1 for F1; y=2 for F2 *xx_PROGM_OK Read EMISSION Current Read emission current setting #xxSES e.g., : #01SES *xx_0.1MA_EM *xx_4.0MA_EM *xx_10_MA_EM When IG device is not connected: ?01_INVALID_ READ IG STATUS Finds out the cause of the specified device inactive reading #xxRSIG e.g., : #01RSIG When IG or device is not connected, response is: ?01_INVALID_ *xx_00_ST_OK (IG status is OK) *xx_01_OVPRS (overpressure- system pressure is too high) *xx_02_EMISS (Ie control fail) *xx_04_ FLVLO (low filament voltage condition) *xx_08_ FLOPN (selected filament is open circuit) *xx_10_ DEGAS (IG is in DEGAS mode of operation) *xx_20_ ICLOW (IG collector current is below normal range) *xx_40_ FLIHI (filament drive current is too high) *xx_80_ OVTMP READ SW VERSION Read the part number and revision number (version) of the firmware #xxVER e.g., : #01VER *xx_mmmmm-vv e.g., : *01_01306-11 SET CGn ZERO Set the zero or vacuum calibration point for CGn #xxTZCGn e.g., : #01TZCG1_0 e.g., : #01TZCG2_1.23E-02 where, n=1 or 2 (for, CG1 or CG2) y.yy = mantissa, z = sign of the exponent +/- and pp = the exponent *xx_PROGM_OK When P > 100 mTorr: ?01_INVALID_ When device is not connected: ?01_INVALID_ When requested gauge number <1 or >2: ?01_SYNTX_ER SET CGn SPAN Set the span or atmosphere calibration point for CGn #xxTSCGn_y.yyEzpp e.g., : #01TSCG1_ 7.60E+02 where, n=1 or 2 (for, CG1 or CG2) y.yy = mantissa, z = sign of the exponent +/- and pp = the exponent *xx_PROGM_OK When P < 400 Torr: ?01_INVALID_ When requested P < 400Torr: ?01_INVALID_ When requested P > 1000mT: ?01_INVALID_ When device is not connected: ?01_INVALID_ When requested gauge number <1 or >2: ?01_SYNTX_ER

RS232 protocol compatible with the GP Series 307 and 358 VGC is as defined in the following table. Please see qualifying notes at bottom of table. Table "RS232 GP 307 and 358 Protocol" COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES READ IGn or, READ IG Read the current IG pressure in units of Torr only, 1 = fil1, 2 = fil2 If you have selected filament 1 to operate with the IG ON (see 'IG ON' below), then enter IG1 in the READ IGn command; use IG2 if filament 2 is turned ON DS_ IGn e.g., : DS_ IG1 or DS_ IG e.g., : DS_ IG1 y.yyEzpp e.g., : 1.53E-06 where, y.yy = mantissa, z = sign of the exponent +/- and pp = the exponent When IG device is not connected: 9.90E+09 When IG is off: 9.90E+09 READ CGn Read the current CG pres- sure in units of Torr only DS_ CGn e.g., : DS_ CG1 where, n = 1 for device CG1 and n = 2 for CG2 y.yyEzpp e.g., : 1.53E+02 When device is not connected: 9.90E+09 When CG is over ranged: 9.90E+09 READ PCs in long form Read the current Process Control setpoint relay status PCS e.g., : PCS x,x,x,x,x,x e.g., : 1,1,0,0,0,0 Relays 1 and 2 are energized; order is Relay No.1,2,3,4,5,6 from left to right. READ PCs in binary form Read the current Process Control setpoint relay status {continued on next page} {continued from previous page} PCS_B e.g., : PCS_B x e.g., : C The Latin alphabet character "C" corresponds to binary 01000011 or, 43hex, which re- presents relay 1 and relay 2 are energized (ON). Note that the positions of the relay order in the returned code character are reversed from the long form as described for the READ PCs in long form command above. In binary form, the order is Relay No.6, 5, 4, 3, 2, and 1 as read from left to right. READ individual PC Read the current individual Process Control setpoint relay status PCS_n e.g., : PCS_1 s where, s=state of relay: 1 = ON; 0 = OFF e.g., : 1 (PC Relay 1 is energized, or 0 when not) IG ON Turn specified IG filament ON Note that the functions of IG ON/OFF and Filament Se- lection are combined in the single IG ON/OFF command. When turning the IG to ON, the specific filament chosen is selected when sending the IG ON/OFF commands. IGn_ON e.g., : IG1_ON where, n = 1 = fil1, 2 = fil2 OK e.g., : OK When IG is already ON: INVALID When IG device is not connected: INVALID (continued) 9.4 RS232 GP 307 and 358 Protocol

75 Table "RS232 GP 307 and 358 Protocol" (concluded) COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES IG OFF Turn specified IG filament OFF IGn_OFF e.g., : IG1 OFF where, n = 1 = fil1, 2 = fil2 OK e.g., : OK When IG is already OFF: INVALID When IG device is not connected: INVALID IG DEGAS ON Turn IG Degas ON DG_ON e.g., : DG ON OK e.g., : OK When Degas is already ON: INVALID When IG device is not connected: INVALID When IG is OFF: INVALID IG DEGAS OFF Turn IG Degas OFF DG_OFF e.g., : DG OFF e.g., : OK When Degas is already OFF: INVALID When IG device is not connected: INVALID IG Degas Status Detect Degas on/off status DGS e.g., : DGS 1 e.g., : 1 when IG is ON, or 0 when off When IG device is not con- nected: INVALID NOTES: 1. is a carriage return (0x0D). 2. is a line feed (0x0A); this is the terminator character. 3. The '_' used in certain defined commands represent a space character. Space characters may be omitted from commands. 4. GP 307 and 358 protocol response strings are variable length. 5. Hardware handshake controls do not exist on VGC083 (e.g., RTS, CTS, DTR). RS485 protocol compatible with the GP Series 307 and 358 VGC is as defined in the following table. Please see the qualifying notes listed at bottom of table. Table "RS485 GP 307 and 358 Protocol" COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES READ IGn or, READ IG Read the current IG pressure in units of Torr only #xxDS_IGn e.g., : #01DS IG1 where, n = 1 = fil1, 2 = fil2 or DS_ IG e.g., : DS_ IG1 y.yyEzpp e.g., : 1.53E-06 where, y.yy = mantissa, z = sign of the exponent +/- and pp = the exponent When IG device is not con- nected: 9.90E+09 When IG is off: 9.90E+09 (continued) 9.5 RS485 GP 307 and 358 Protocol

Table "RS485 GP 307 and 358 Protocol" (concluded) COMMAND BRIEF DESCRIPTION COMMAND SYNTAX RESPONSE - EXAMPLES READ CGn Read the current CG pressure in units of Torr only #xxDS_CGn e.g.,: #01DS CG1 where, n = 1 or 2 (CG1 or CG2) y.yyEzpp where, y.yy = mantissa, z = sign of the exponent +/- and pp = the exponent e.g., : 1.53E+02 When device is not connected: 9.90E+09 When CG is over ranged: 9.90E+09 READ PCs long form Read the current PC setpoint status #xxPCS e.g., : #01PCS x,x,x,x,x,x e.g., : 1,1,0,0,0,0 (Relays 1 and 2 are energized; Relays 3 - 6 are not energized) READ PCs binary form Read the current PC setpoint status #xxPCS_B e.g. , : #01PCS B x e.g., : C (where ‘C’ is the Unicode character C, expressed as 01000011 in binary notation or 43 hexadecimal) READ individual PC Read the current individual PC setpoint status #xxPCS_x e.g., : #01PCS_1 x e.g., : 1 (where ‘1’ indicates PC 1 is energized; 0 when not) IG ON Turn specified IG filament ON #xxIGn_ON e.g., : #01IG1 ON where, n = 1 = fil1, 2 = fil2 OK e.g., : OK When IG already ON: INVALID When IG device is not con- nected: INVALID IG OFF Turn specified IG filament OFF #xxIGn_OFF e.g., : #01IG1 OFF n = 1 = fil1, 2 = fil2 OK e.g., : OK When IG already OFF: INVALID When IG device is not con- nected: INVALID IG DEGAS ON Turn IG Degas ON #xxDG_ON e.g., : #01DG_ON e.g., : OK When Degas already ON: INVALID When IG device is not con- nected: INVALID When IG is OFF: INVALID IG DEGAS OFF Turn IG Degas OFF #xxDG_OFF e.g.,: #01DG_OFF OK e.g., : OK When Degas already OFF: INVALID When IG device is not connected: INVALID IG Degas Status Detect Degas on/off status #xxDGS e.g., : #01DGS 1 e.g., : 1 (or 0 when off) When IG device is not connected: INVALID NOTES: 1. is a carriage return (0x0D). 2. The '_' used in certain defined commands represent a space character. Space characters may be omitted from commands. 3. GP 307 and 358 protocol response strings are variable length.

77 10 Service Every INFICON module is calibrated prior to shipment using nitrogen. Care should be exercised when using gases other than nitrogen (N2) / air (see previous sections regarding the use of gases other than N2/air). Indication Possible Cause Possible Solution Display on VGC083 controller indicates OFF No power Check cable connections and verify that power is being supplied The connector may not be wired correctly Check cable connections and verify that power is being supplied Readings appear very different from expected pressure Sensor not in the proper location on vacuum system The process gas is different from the gas (Nitrogen) used to calibrate the IG Ensure the sensor is located in appropriate location on vacuum chamber Apply gas sensitivity correction factor if applicable Sensor has been dropped causing mechanical damage Replace the ion gauge sensor tube The gauge sensor tube is contaminated Degas the sensor or replace the sensor Leak in the vacuum system Re-check for leak in the system. Re- check that all metal seals are used when operating below 1.00 × 10-7 TORR Ion gauge cannot be turned on Pressure exceeds 1.00 × 10-3 Torr at 0.10 mA (100 µA) emission current Decrease pressure below required value Pressure exceeds 5.00 × 10-4 Torr at 4 mA emission current Pressure exceeds 1.00 × 10-4 Torr at 10 mA emission current Decrease pressure below required value Decrease pressure below required value Emission Control not functioning Switch to the other filament, replace ion gauge sensor tube due to possible fila- ment failure or contamination Research Screen shows filament voltage is present but filament current stays at 0.00 Filament is open Switch to the other filament, replace sensor or electronics Research Screen shows filament voltage and filament current are present but gauge is shutting off Filament is contaminated or burned out Switch to the other filament or replace sensor Unable to initiate degas System pressure above 5.00 × 10-5 Torr Decrease pressure below the required value Voltage to filament too high Filament contaminated or near end of its life Switch to the other filament or replace sensor Setpoint does not actuate Incorrect setup Check setpoint setup 10.1 Calibration 10.2 Troubleshooting - IG Operation

Indication Possible Cause Possible Solution OVERPRESSURE The calculated pressure is greater than maximum setting for emission current System pressure too high Change to 100 µA emission current which will operate at higher pressures Reduce pressure EMIS FAIL The desired emission current (IE) could not be established Gauge contamination, possible coating on filament or grid surfaces End of filament life System pressure too high Switch to 4 mA or 10 mA emission cur- rent and attempt repeated filament starts to clean filament Switch to second filament, degas Replace the Ion gauge sensor tube Reduce pressure LV Failure The Filament voltage could not be estab- lished; Electronics Failure Contact INFICON F1 or F2 OPEN Filament 1 or 2 is open Switch to the other filament or replace the Ion gauge sensor tube F1 or F2 OPEN Faulty electronics Replace electronics CONNECT IG COMM IO FAIL IG not connected Faulty cable Internal PCB not communicating Plug in IG Replace cable Contact INFICON OVER TEMP Ion gauge cable is longer than 50 ft. Reduce cable length to less than 50 ft. or provide airflow around the VGC083 Once the cause of the IG error has been determined and resolved, the IG error must be cleared before the IG filament can be turned on again. To clear errors, simply press the IG ON/OFF key. The OLED setup screen of the VGC083 can be configured to display important, cri- tical operating parameters of the ionization gauge. These parameters can be dis- played in the Research display mode as described below. In addition to the normal pressure measurement screen VGC083 provides a diag- nostic display screen that allows you to monitor the measurements of the critical electrical parameters used for measurement of very low pressures, i.e., high vacuum, made by the ionization gauge. Over time, the hot cathode (filament) of the ionization gauge may degrade. The IG coated iridium filaments are made using yttrium oxide to lower the work function of the heated wire material and enable substantial emission of electrons from the hot cathode. These electrons are accelerated in an electric field toward the grid struc- ture of the ionization gauge device. The electron emission is commonly referred to as the 'Emission Current'. As the emission current electrons orbit within the electric field formed by the bias voltages applied to the grid, collector and filament elec- trodes, the molecules that the gas is comprised of will be ionized by these ener- getic electrons. The positive ions that are created within the grid structure are captured in another electric potential field created by the grid structure (at +180 V (dc) with respect to ground potential) and the collector wire (at zero volts, i.e., ground potential). In simple terms, the ions collected by the collector electrode (a small diameter wire within the grid electrode structure) are measured with an electrometer circuit connected to the collector. The amount of ion current measured is directly pro- portional to the density of the gas within the ion gauge head. This ion current is commonly referred to as the 'Collector Current'. 10.3 Troubleshooting - IG Error Messages 10.4 Clearing Error Messages - IG 10.5 Research Screen 10.5.1 Research Screen (Diagnostic Display - IG)

Exam 83A_B.om mple From th sity insid can be c troubles This mo current. 4.00E-1 peres. Researc Parame The Pre that the measure for the c paramet IC is the specific The pre lating th Other im also give upon fila conditio current rent. Th values w tion and to make operatin A new io ment cu requirem sentativ different record o Current over tim device o In cases conditio missible able to m the turn operatin VGC083 The follo you in u ion gaug conditio use a si general, Screen a particu he collector cu de the ion gau calculated. Th shoot issues w ode displays th In the followin 1 amperes, fil ch Display Mo eters essure, Ion Cu ionization gau ed. In the abo calculation of m ters leads to t e Ion Current, ion gauge se essure indicatio he pressure as mportant inform en in the Rese ament design on and operatin is the power d he interpretatio will change ov d possibly eve e note of these ng lifetime of th on gauge may urrent. By incre ment may incr ve; the actual v t and will vary of the filament readings) will me and give yo or the filament s where the io on after you ha e pressure for monitor the va ON / stay ON ng levels for fil 3 control circu owing table (R using the inform ge head is per ons. There are ngle measure , if you have m over time, you ular failure mo rrent measure uge head encl he Research d with the senso he emission cu ng emission c lament voltage ode of Critical urrent (Collecto uge head is op ove example, m measured pre the calculation IE is the Emiss nsor. on may be che s indicated by mation such a earch display type, materia ng emission c dissipation (V× on of these dis ver time depen n surface prop e values at init he ion gauge y operate at 10 easing the em rease to 4.5 A values you ma y over time and t heating powe l aid you in mo ou an indicatio t assembly. M on gauge sens ave made sure the emission alues displaye N trouble is rel lament voltage uitry will sense Research - Ion mation provide rforming as ex various cause ement parame monitored and u may be able ode, may prov ed, which is dir osure, the pre isplay screen r or the electro urrent, ion cur urrent is 4.00E e is 4.3 V (dc) IG Hot-Cathod or Current) an perating and p most of the cri ssure are disp n of pressure g sion Current a ecked by usin the top LED d s Filament Vo screen. These l used for cons urrent. The pr ×A) required to splayed values ndent upon the perties of the g tial installation sensor. 00 μA emissio mission current . Again, the va ay see for the d from device er (given by th onitoring the c n of when to s aximum filame sor does not tu e that the pres current setting d in the RESE ated to filame e and current; e the condition n Gauge Diagn ed in this disp xpected under es of trouble t ter as an indic recorded the e to detect a pa e to be a valu rectly proporti essure inside t is a very usef onics. rrent, filament E-3 amperes, ) and filament de Ion Gauge nd Emission C pressure (vacu itical, measure played. The re given by P = IC and S is the Se ng the displaye display line on oltage and Fila e values vary structing the f roduct of the f o maintain the s is a qualitativ e pressure, fila grid electrode n and from tim on current with t to 10 mA, the alues mention ion gauge you to device. In g he Filament Vo condition of yo schedule repla ent current is urn ON or doe ssure is below g you have ch EARCH scree ent condition. T if either of the n and force an nostic Display play as a mean r your vacuum that at times m cator of what t values displa attern or trend uable indicatio onal to the ga the ion gauge ful diagnostic voltage and fi Ion current is current is 4.2 Measuremen Current are ind uum) is being ed quantities r elationship of t C × (IE × S)-1 ensitivity of the ed values and the VGC083. ament Current widely depen filament, filame ilament voltag e set emission ve measure. T ament coating . It is a good p e-to-time durin h only 3.5 A of e filament curr ed here are re u are using wi general, keepi oltage and Fila our gauge filam acement of eit 6.5 A. es not stay in t w the maximum hosen, you will n and determi There are max ese is exceed OFF conditio ) is intended t ns to ascertain m chamber ope may make it dif the problem is ayed in the Re d that, if correl n of probable 79 as den- head tool to ilament am- nt ications required these where e calcu- . t are ding ent ge and cur- The g condi- practice ng the f fila- rent epre- ll be ing a ament ments ther the he ON m per- l be ine if ximum ed, the n. to assist n if the erating fficult to s. In search ated to cause.

The values of filament voltage and current presented below are approximate values that one may see in the Research Screen. The representative, average values used in this table may vary depending on the condition of the filament, length of ion gauge cable, and the vacuum chamber environment. The readings taken should be viewed with the notion that there may be an indication of reaching end-of-useful filament lifetime if the power required to sustain emission current continues to increase over time. Indication Possible Cause Possible Solution Filament voltage values are present for several seconds immediately after turning IG ON, but then the values are zero Filament is contaminated or filament has reached end-of-useful operating life for required emission current setting Switch emission current setting from initial setting and re-start the IG; make several attempts to establish emission current at 100 μA, 4 mA or 10 mA. Switch to second filament or replace ion gauge sensor All parameters in the RESEARCH screen are zero after IG turn ON is attempted Failed electronics Replace or repair the VGC083 IG filament current is greater than 6.5 A Filament nearing end-of-useful- operating-life Switch to second filament or replace ion gauge sensor IG filament voltage is greater than 16 V Excessive voltage drop in ion gauge cable The ion gauge cable maybe too long, wire gauge is too small or a defect in the cable or connectors In general, maintenance is not required for your INFICON ion gauge module, con- vection gauge and control unit. Periodic performance checks may be done by com- paring the gauge to a known reference standard. When using the head in gases containing contaminants or materials that react with the filaments of the hot cathode ion gauge, periodic degas and switching to the alternate filament from time-to-time is recommended for longest useable head lifetime. When the hot cathode (filament) of the ionization gauge head is at or near end-of-life, head (sensor) replacement is recommended. For cleaning the outside of the unit a slightly moist cloth will usually do. Do not use any aggressive or scouring cleaning agents. 10.6 Maintenance Cleaning the VGC083

81 11 Repair Return defective products to your nearest INFICON service center for repair. INFICON assumes no liability and the warranty is rendered null and void if repair work is carried out by the end-user or by third parties. 12 Accessories Ordering number Power supply to VGC083A & B 399-710 Ordering number Rack mount adapter for 19" 2U for one VGC083 399-714 Rack mount adapter for 19" 2U for two VGC083 399-715 Ordering number Cable 3 m / 10 ft, 200 °C, BAG050, BAG051 399-770 Cable 8 m / 25 ft, 200 °C, BAG050, BAG051 399-771 Cable 15 m / 50 ft, 200 °C, BAG050, BAG051 399-772 Ordering number Cable 3 m / 10 ft, 50 °C, BAG050, BAG051 399-780 Cable 8 m / 25 ft, 50 °C, BAG050, BAG051 399-781 Cable 15 m / 50 ft, 50 °C, BAG050, BAG051 399-722 Ordering number Cable 3 m / 10 ft, 50 °C, BAG052, BAG053 399-790 Cable 8 m / 25 ft, 50 °C, BAG052, BAG053 399-791 Cable 15 m / 50 ft, 50 °C, BAG052, BAG053 399-792 Power supply Rack mount adapter Cables 200 °C BAG050, BAG051 Cables 50 °C BAG050, BAG051 Cables 50 °C BAG052, BAG053

13 Storage Caution Caution: electronic components. Inappropriate storage (static electricity, humidity etc.) may damage electronic components. Store the product in an antistatic bag or container. Observe the rele- vant specifications under Technical Data (→  9). 14 Disposal WARNING WARNING: substances detrimental to the environment. Products or parts thereof (mechanical and electric components, operating fluids etc.) may be detrimental to the environment. Please dispose of such materials in accordance with the relevant local regulations. After disassembling the product, separate its components in accordance with the following criteria: Such components must be separated according to their materials and recycled. Separating the components Electronic and non-electronic components

83 EU Declaration of Conformity We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electromagnetic compatibility 2014/30/EU and the Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment 2011/65/EU. Vacuum Gauge Controller VGC083A, VGC083B 399-700 399-701 Harmonized and international/national standards and specifications: • EN 61000-6-2:2005 (EMC: generic immunity standard for industrial environments) • EN 61000-6-4:2007 + A1:2011 (EMC: generic emission standard for industrial environments) • EN 61010-1:2010 (Safety requirements for electrical equipment for measurement, control and laboratory use) • EN 61326-1:2013; Group 1, Class A (EMC requirements for electrical equipment for measurement, control and laboratory use) INFICON AG, Alte Landstraße 6, LI-9496 Balzers 22 November 2016 22 November 2016 Dr. Benhard Andreaus Director Product Evolution Markus Truniger Product Manager Product Part numbers Standards Manufacturer / Signatures

Fax +423 / 388 3700 Original: English [email protected] www.inficon.com t i nb29e1