Keyence LS-5000 Instruction Manual

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Read this manual carefully to ensure safe use and maximum performance from your LS-5000 series. The LS-5000 series uses a semiconductor laser as the light source. Before using the product, see “Laser Safety Precautions” on page 1 to learn the safe and correct method of using the LS-5000 series. Symbols The following symbols alert you to important messages. Be sure to read these messages carefully. Failure to follow instruction may lead to injury. (electric shock, burn, etc.) Failure to follow instructions may lead to product damage. Provides additional information on proper operation. General Precautions • At startup and during operation, be sure to monitor the functions and perfor- mance of the LS-5000 series. • We recommend that you take substantial safety measures to avoid any damage in the event a problem occurs. • Do not open or modify the LS-5000 series or use it in any way other than described in the specifications. • When the LS-5000 series is used in combination with other instruments, func- tions and performance may be degraded, depending on operating conditions and the surrounding environment. • Do not use the LS-5000 series for the purpose of protecting the human body. This is a class A (EN55011: EMI standard) product. In a domestic environment this product may cause radio interference in which case the user may be required to take adequate measures. WARNING CAUTION Note: CAUTION

The LS-5000 series includes the following items. Be sure to check that no item is missing or damaged. ■LS-5501 Package • Built-in display type controller: 1 • Instruction manual: 1 • AC power cables: 2 1. ■LS-5001 Package • Separate type controller: 1 • Instruction manual: 1 • Communication cable (OP-26401 + OP-96368): 1 • LS-VIEWER Software (3.5-inch FD, Instruction manual): 1 ■LS-5041/5121 Package • Scanning head (Transmitter, receiver and mounting base): 1 2. • Mounting brackets: 4 • ROM board: 1 2. 1. Two types of AC power cables are provided with the built-in display model LS-5501. One is for 125 VAC and the other is for 250 VAC. Select either according to your local power supply type. 2. The serial nos. of both units should be identical. Warranty See page 125. Notice • No part of this instruction manual may be reprinted or reproduced without the prior written permission of KEYENCE CORPORATION. • KEYENCE assumes no responsibility for the contents of this manual. No liability is assumed for damages resulting from a program created by customers. • The contents of this manual are subject to change without notice. ii 96M12426

1.1 Classification ..........................................................................................2 1.2 Warning Labels ......................................................................................2 1.3 Label Location ........................................................................................3 1.4 Safety Consideration .............................................................................3 1.5 Safety Features Provided with the LS-5000 Series .............................4 1.6 Preparation for Operation .....................................................................6 Chapter 2 Before Using the LS-5000 Series 2.1 System Configuration and Connections .............................................8 2.1.1 System Configuration................................................................................8 2.1.2 Connection Procedure ..............................................................................9 2.2 Names and Functions of Indicators and Switches ...........................12 2.3 Part Names ...........................................................................................13 Chapter 3 Quick Start Reference 3.1 Quick Start Reference .........................................................................16 3.1.1 Procedure for Starting Measurement ......................................................16 Chapter 4 Installation 4.1 Mounting the Scanning Head .............................................................18 4.2 Mounting the Controller ......................................................................19 Chapter 5 Outline of Measurements 5.1 Area/Segment/Edge .............................................................................22 5.2 Normal mode ........................................................................................22 5.2.1 DIA mode ................................................................................................23 5.2.2 T.EDGE (TOP EDGE) mode/B.EDGE (BOTTOM EDGE) mode ............ 23 5.2.3 SEG (m,n) mode .....................................................................................23 5.3 Pitch mode ............................................................................................24 iii Contents

6.2 Initial Screen .........................................................................................27 6.3 Setting Measuring Mode .....................................................................28 6.4 Setting Functions .................................................................................29 1 [HOLD] Hold Function......................................................................30 2 [ZERO] Auto-zero Function .............................................................31 3 [SCREEN] Screen Selection Function .............................................32 4 Limit Setup .......................................................................................35 5 [CALIB] Calibration Setup ................................................................36 6 [PROGRAM] Program Selection Function .......................................38 7 Area Setup .......................................................................................39 8 Calculation Setup.............................................................................41 9 Average ...........................................................................................44 0 Measuring Mode ..............................................................................46 A Digit Suppression Function ..............................................................54 B Offset Function ................................................................................55 C Analog Output Function ...................................................................57 D I/O Slot Setup ..................................................................................59 E Inspection ........................................................................................60 F One-scan Mode ...............................................................................62 G Program Selection Method Setup ....................................................64 H Display Unit......................................................................................65 I Area Check Function .......................................................................66 J Initialize ............................................................................................67 K Mode Change ..................................................................................68 Chapter 7 Pitch Mode 7.1 Pitch Mode Screens .............................................................................70 7.2 Initial Screen .........................................................................................71 7.3 Setting Measurement ...........................................................................72 7.4 Setting Functions .................................................................................72 1 Screen Selection Function ...............................................................73 2 Limit Setup .......................................................................................75 3 Program Selection Function ............................................................76 4 Setting Number of Pitches ...............................................................77 5 Average ...........................................................................................79 6 Digit Suppressing Function ..............................................................80 7 Measuring Mode ..............................................................................81 8 Masking ...........................................................................................84 9 Mode Change ..................................................................................85

8.2 Remote Control Function ....................................................................90 8.3 Command List ......................................................................................97 Chapter 9 Expansion I/O Board 9.1 Control I/O Board ...............................................................................100 9.1.1 Part Names and Pin Assignment ..........................................................100 9.1.2 I/O Terminal Operations........................................................................101 9.1.3 Specifications ........................................................................................102 Chapter 10 Display System Setup 10.1 Display System Setup .....................................................................104 10.1.1 Adjusting Backlight Intensity ...............................................................104 10.1.2 Reversing Display ...............................................................................105 10.1.3 Adjusting Contrast ..............................................................................106 10.1.4 Setting Backlight OFF Time ................................................................107 10.1.5 Adjusting Buzzer Volume....................................................................108 10.1.6 Numeric Keys .....................................................................................109 10.2 Display Hardware Check Function .................................................110 10.3 Replacing Protective Sheet .............................................................111 10.4 Display Panel-lock Function ...........................................................112 Appendices Appendix A Specifications ........................................................................114 Appendix B Initial Setting ..........................................................................116 Appendix C Troubleshooting Guide .........................................................118 Appendix D Error Messages ......................................................................120 Appendix E Minimum Input Time and Output Response Time .............. 121 Appendix F Dimensions ............................................................................122 WARRANTIES AND DISLAIMERS 125

1.1 Classification ........................................................................2 1.2 Warning Labels .....................................................................2 1.3 Label Location ......................................................................3 1.4 Safety Consideration ............................................................ 3 1.5 Safety Features Provided with the LS-5000 Series ........... 4 1.6 Preparation for Operation .................................................... 6

1.1 Classification 1.2 Warning Labels ■LS-5041 Warning label/Aperture label FDA Class II IEC Class 2 IEC (French) Classe 2 DIN Klasse 2 ■LS-5121 Warning label/Aperture label FDA Class II IEC Class 2 IEC (French) Classe 2 DIN Klasse 2 LS-5041 LS-5121 Laser FDA (CDRH) Part 1040.10 Class II Laser Product Class IEC60825-1 Class 2 Laser Product 1 LASER RADIATION- DO NOT STARE INTO BEAM SEMICONDUCTOR LASER WAVELENGTH OUTPUT PULSE DURATION CLASS II LASER PRODUCT CAUTION CAUTION AVOID EXPOSURE LASER RADIATION IS EMITTED FROM THIS APERTURE. 655nm 45µW 14µs

1.3 Label Location ■LS-5041 ■LS-5121 The IEC/DIN Warning labels are packed with the scanning head. Stick the Warning labels on the scanning head or the vicinity where the scanning head is mounted in order to be easily seen by the operators. 1.4 Safety Consideration Use of controls or adjustments or the performance of procedures other than those specified herein may result in hazardous radiation exposure. The LS-5041 employ a visible semiconductor laser for its light source. The beam is not harmful to the skin. The possible health hazard is in exposing the eyes to the laser beam. Damage to the eyes occur if the operator stares directly into the beam. 1 LS-5041T SCANNING AREA Aperture LS-5121T SCANNING AREA Aperture CAUTION

• Operate the LS-5000 series only according to the procedures described in this instruction manual. Otherwise, injury may occur due to exposure to the laser beam. • Do not disassemble the scanning head. Laser emission from the LS-5000 series is not automatically stopped if the scanning head is disassembled. If you disassemble the scanning head for inspection or repair, you may be exposed to the laser beam. If the LS-5000 series malfunctions, contact KEYENCE immediately. • Do not look directly into the laser beam. Looking directly into the laser beam may result in serious eye injury. • Protective enclosure We recommend that you install a protective enclosure around the scanning head to prevent any person from getting near the scanning head during opera- tion. • Protective goggles We recommend that you wear protective goggles when using the LS-5000 series. • You must stop all laser emissions before cleaning the laser aperture. Otherwise, you may be exposed to the laser beam. • Be aware of the optical axis of the laser beam. If you may be exposed to a specularly-reflected or diffused laser beam, provide an enclosure with reflectivity and thermal characteristics adequate to interrupt the laser beam. Install the LS-5041 so that the optical axis of the laser beam will not be at the same height as your eyes when operating the LS-5000 series. 1.5 Safety Features Provided with the LS-5000 Series The LS-5000 series comes with the following safety features: • Laser emission remote control terminals Chapter 1 Laser Safety Precautions 1 Rear of the LS-5001 Rear of the LS-5501 Laser emission remote control input terminal Laser emission remote control input terminal 4 WARNING

1 LS-5041T LS-5041T Laser ON alarm indicator • LASER ON alarm indicator The scanning head has an LED which indicates that the laser beam is currently being emitted or is about to start. Even when you are wearing safety goggles, you can check whether the indicator is lit or not. • Laser beam shield The LS-5000 series includes a laser beam shield which is to be attached to the scanning head’s transmitter. Attach this shield when your eyes may be exposed to the laser beam, for example during operation at the front of the scanning head. * FDA safety standards do not require a laser beam shield to be provided with Class II laser products. However, the shield should be used if necessary. 5 Appearance with the laser beam shield not attached Appearance with the laser beam shield attached LS-5041T LS-5041T Laser beam shield ■LS-5041 ■LS-5121 Appearance with the laser beam shield not attached Appearance with the laser beam shield attached LS-5121T LS-5121T

■Suppressing noise interference Be sure to isolate the connection cable from high-voltage or power lines. If the connection cable is placed in the same conduit as these lines, the LS-5000 series may malfunction due to noise interference. ■Cooling fan Do not block the cooling fan at the bottom of the LS-5501. If the cooling fan is blocked, the LS-5501 may overheat and malfunction. ■Operating environments • Use the controller at an ambient temperature of 0°C to 45°C (32 to 113°F), No freezing. • Fluctuations in the ambient temperature cause measurement errors; therefore, the ambient temperature should be kept constant. If the temperature changes by 10°C (18°F), the LS-5000 series will take approximately 60 minutes until the temperature distribution in the unit becomes even. • Do not allow any substance which may refract the laser beam, such as water and oil, to adhere to the scanning head. * Blow dust off the protective glass using clean air. Wipe off any remaining dust using a soft cloth moistened with alcohol. Note 1: Measurement conditions When the target oscillates, the measured value may fluctuate. The measurement accuracy can be improved when the number of averaging measurements is set higher. Note 2: Target When the target shape or luster varies, a measurement error may occur. In this case, place a standard target in the measuring area and perform the calibration using the [CALIB] key.

2.1 System Configuration and Connections ............................. 8 2.1.1 System Configuration .............................................................. 8 2.1.2 Connection Procedure .............................................................9 2.2 Names and Functions of Indicators and Switches .......... 12 2.3 Part Names ..........................................................................13

8 2 2.1 System Configuration and Connections The LS-5000 series includes the display unit, controller and scanning head. This section describes the system configuration and connections of the LS-5000 series. 2.1.1 System Configuration The LS-5000 series includes the display unit, controller and scanning head. The controller can be used separately. The LS-5000 series also offers I/Oboard, as well as a control unit which incorporates the display unit and controller in a single body. • Separate display type • Built-in display type Note: The scanning head and ROM board are calibrated as a pair. Be sure to combine the units that have the same serial number. LS-5501 I/O board (LS-B11) ROM board LS-5041/5121 Connection cable (option) LS-C3: 3m LS-C10: 10 m LS-C50: 50 m 24 VDC LS-5001 LS-5041/5121 Connection cable (option) LS-C3: 3m LS-C10: 10 m LS-C50: 50 m ROM board Expansion slots Power supply I/O board (LS-B11) Personal computer LS-VIEWER operating software for Windows 95

9 2 CAUTION 2.1.2 Connection Procedure Connecting the Scanning Head Be sure to turn the power off before connecting the scanning head. ■Connection of ROM Board 1. Remove the frame cover. 2. Insert the ROM board. Note: Insert the ROM board into HEAD 1 first. 3. Tighten the screws. 4. Re-attach the frame cover. Frame cover Frame cover LS-5501 LS-5001 LS-5001 Screws Screws LS-5501 LS-5001 Frame cover Frame cover LS-5501 LS-5001 LS-5501

10 2 ■Connecting Transmitter and Receiver 1. Connect the cable between the transmitter and receiver. Use the extension cable if necessary. Extension cable between transmitter and receiver: OP-26540 (3 m) OP-26816 (10 m) 2. Connect the cable between the transmitter and receiver to the scanning head and ROM board. (This cable is optional.) Connection cable LS-C3 3 m LS-C10 10 m LS-C50 50 m Transmitter Receiver Transmitter Receiver LS-C3 (3 m) To ROM board

11 2 Connecting I/O Board Be sure to turn the power off before connecting the I/O board. 1. Remove the frame cover. 2. Insert the I/O board. Note: Use the slot 1 first. When the slot 1 is used, use the slot 2. 3. Tighten the screws. 4. Re-attach the frame cover. CAUTION LS-5501 LS-5001 Frame cover Frame cover LS-5501 LS-5001 LS-5501 LS-5001 Screws Screws LS-5501 LS-5001

12 2 2.2 Names and Functions of Indicators and Switches This section describes the names and functions of the indicators and switches. ■Names and Functions of Indicators and Switches Display Name Description Menu button Used to move to each function’s setup screen. Setup/Select Used to set values or select settings. button Select button Used to select settings or programs. Screen Select When you press the [Screen Select] button, you button will move to the screen indicated on the button. In the example on the left, you will move to the DISPLAY DATA screen. Numeric keys Used to set values. [ENTER] key: Used to accept the setting. [ESCAPE] key: Used to exit from the numeric keys screen. [CANCEL] key: Used to reset the preset value to zero. Sign key: Used to change the sign. [▲] [ ] keys: Used to move between setting items. DISPLAY DATA LIMIT SETUP 7 8 9 4 5 6 1 2 3 0 • – ESCAPE CANCEL ENTER ■Input Procedure Using Numeric Keys Example: Enter “-5.0000”. 5 • 0 0 0 0 – ESCAPE ENTER ▲

13 2 2.3 Part Names This section describes the part names of each model. LS-5001 (Separate display type) Front 1 I/O connector (LS-B11) 2 Analog output BNC connector (LS-B11) 3 Scanning head connecting port 4 DIP switch 5 Laser emission control input terminal 6 Program selection input terminal 7 Power supply terminal (24 VDC) LS-5501 (Built-in display type) Front Rear 1 Measured value display and function setup/operating unit 2 I/O connector (LS-B11) 3 Analog output BNC connector (LS-B11) 4 Scanning head connecting port 5 DIP switch 6 Laser emission control input terminal 7 Program selection input terminal 8 Power supply switch 9 Power supply input 0 Fuse holder (250 V, 3.15 A) A Expansion slot 1 for I/O board B Expansion slot 2 for I/O board 7 1 2 3 4 2 5 6 1 10 8 9 2 3 3 4 5 12 11 7 6

14 2 LS-5041/5121 (Scanning head) 1 Laser ON alarm indicator 2 Transmitter (T) 3 Laser emission aperture 4 Receiver (R) 5 Connecting cable between scanning head and controller 6 Connecting cable between transmitter and receiver 7 Scanning head mounting frame 1 2 3 4 5 6 7 6

3.1 Quick Start Reference ........................................................ 16 3.1.1 Procedure for Starting Measurement..................................... 16

16 3 3.1 Quick Start Reference This section describes the procedures for starting measurement for trial operation. 3.1.1 Procedure for Starting Measurement Before changing the measuring mode or the number of averaging measurements, read this instruction manual thoroughly for the correct settings. For setting items, see the table of contents. The following is reference page numbers for typical operations. • Changing the DIA mode to EDGE mode ...............................................p.39, 40 • Changing the number of averaging measurements...............................p.44, 45 • Changing the measuring mode...........................................................p.46 to 51 • Simultaneous measurement ........................................................................p.32 • (X + Y)/2 measurement using two scanning heads ...............................p.41, 42 Connect the controller and scanning head. Turn the power on. Align the optical axis of the transmitter and receiver. The 5001 series starts laser emission in approximately 5 seconds, at which time the measurement begins. Place a target in the measuring area. The measured value is soon displayed. For information on the connection procedure, see p. 8. • When the transmitter and receiver are fixed to the scanning head mounting frame, optical axis alignment is not necessary. • For information on the scanning head mounting allowance, see p. 18. For information on checking the optical axis, see p. 60 and 61. For information on the measuring area, see p. 115. The factory setting for the number of averaging measurements is 768 for DIA mode. ▲ ▲ ▲ ▲ ▲

4.2 Mounting the Controller .....................................................19

18 4 4.1 Mounting the Scanning Head The LS-5000 series comes with the transmitter and receiver fixed to the scanning head mounting frame. To use the LS-5000 series with the transmitter and receiver removed from the mounting frame, mount the scanning head so that the following specifications are met. This will eliminate measurement errors caused by optical axis misalignment. Allowance for Mounting the Scanning Head ■ Horizontal deviation of transmitter and receiver positions ■ Inclination of transmitter and receiver Note: For information on the optical axis checking function, see “Head Inspection” on p. 60. Transmitter Receiver Transmitter Receiver Within ±1 mm Within ±1 mm Transmitter Receiver Transmitter Receiver Within ±1 mm Within ±1 mm Receiver Receiver Within ±0.25° Within ±0.25° Within ±0.25° Within ±0.25° Transmitter Transmitter Receiver Transmitter Transmitter Receiver * Values in parentheses are for the LS-5121.

4 4.2 Mounting the Controller This section describes how to mount the controller (LS-5001). Mounting the LS-5001 The LS-5001 can be mounted to a DIN rail. Hook the upper claw first, and then press the controller against the DIN rail until it clicks. DIN rail Mounting the Scanning Head Front Protection Cover (For LS-5121) Application example of front protection cover The LS-5121 transmitter and receiver come with a protection cover for the scan- ning head. Mount the cover as shown in order to prevent the front glass of the scanning head from being scratched or broken. Receiver LS-5121T SCANNING AREA LS-5121R SCANNING AREA Transmitter

5.1 Area/Segment/Edge ............................................................ 22 5.2 Normal Mode .......................................................................22 5.2.1 DIA Mode ...............................................................................23 5.2.2 T.EDGE (TOP EDGE) Mode / B.EDGE (BOTTOM EDGE) Mode ......................................... 23 5.2.3 SEG (m,n) Mode .................................................................... 23 5.3 Pitch Mode ...........................................................................24

22 5 5.1 Area/Segment/Edge When a target is placed in the measuring area, there are areas where the laser beam is received (laser beam enters the receiver), and where the laser beam is interrupted by the target (shadow of the target is projected on the receiver). The border between the light and dark areas is called “EDGE”. Each section divided by the edge is called a “SEGMENT”. The measurement "AREA" is determined by two edges and includes all "SEGMENTS" between these two edges. * The edge number is counted in the laser scanning direction starting at T.EDGE (top edge). Note: EDGE 0 The position of the photodiode for synchronization is called “EDGE 0”. EDGE 0 can be used as a reference point during roller oscillation measurement or sheet edge control. (No reference edge is required.) Example: Roller oscillation measurement 5.2 Normal Mode ➮ For the setting procedure, see p. 39. The LS-5000 series has two measuring modes; NORMAL and PITCH. NORMAL mode provides four types of measurement3: “DIA”, “T.EDGE (Top Edge)”, “B.EDGE (Bottom Edge)” and “SEG(m,n)”. The function of each mode is described below. Select the mode that suits your measurement condition. Edge 0 Edge 1 Edge 2 Edge 3 Edge 4 Edge 5 (n-1) Edge 6 (n) Photodiode for synchronization Laser scanning direction Target Transmitter Receiver Photodiode for synchronization Transmitter Receiver Roller Rotating This width can be measured when SEG(m,n) is set to (0,2) in Normal mode. DIA mode Measurement of outer diameter of rod or electric wire T.EDGE/B.EDGE modes Measurement of gap between rollers or position of target edge SEG(m,n) mode Setting the measurement position to measure inner diameter using a bearing

23 5 5.2.1 DIA Mode Example: Outer diameter measurement using a rod or transparent object The width between the lower edge of the first light segment and the top edge of the last light segment is measured. • When one target is measured • When several targets are measured 5.2.2 T.EDGE (TOP EDGE) Mode / B.EDGE (BOTTOM EDGE) Mode Example: Measurement of a gap between rollers T.EDGE: Measures the width of the first light segment. B.EDGE: Measures the width of the last light segment. 5.2.3 SEG (m,n) Mode Example: Inner diameter measurement using a bearing When two edges are specified, the width between these edges is measured. * (m,n) indicates any number between 0 and 254. “m” should be smaller than “n”. Note: DIA mode Since DIA mode is basically intended for outer diameter measurement of a rod, transparent tube or other round surface, the measurement error due to the round surface is calibrated. To perform outer diameter measurement of a round target, select DIA mode. Photodiode for synchronization Laser scanning direction Target Measured width Transmitter Receiver Photodiode for synchronization Target Measured width Transmitter Receiver Photodiode for synchronization Target The T.EDGE mode measures this width. The B.EDGE mode measures this width. Transmitter Receiver Photodiode for synchronization Target Both the T.EDGE and B.EDGE modes measure this width. Transmitter Receiver Photodiode for synchronization Target This width is measured when SEG(3,4) is set. Transmitter Receiver 0 1 2 3 4 5 6

24 5 5.3 Pitch Mode ➮ For the setting procedure, see p. 72. Pitch mode enables pitch measurement using connector pins or IC leads. This mode measures each center-to-center pitch, and displays the maximum and minimum values. Note 1: When Pitch mode is selected, only one measurement can be performed with one scanning head. Note 2: When Pitch mode is selected, the comparator output is activated as shown below: HI3 = Alarm output HI2 = Disabled HI1 = Output when the measured value exceeds the upper/lower limit. GO = Output when the measured value is within the upper/lower limit. LO1: Disabled LO2: Disabled LO3: Disabled The analog output and RS-232C output are activated as shown below. Analog output: Held at +10V. RS-232C output: Output according to the command. ➮ See p. 97. LASER ON DISPLAY DATA PITCH P. 1 HEAD1 OK Max Min 0.5010 0.4990 HEAD2 OK Max Min 0.6010 0.5990 HEAD3 OK Max Min 0.7020 0.6980 HEAD4 OK Max Min 0.8020 0.7980 SCREEN DISPLAY DATA LIMIT SETUP PROGRAM OPTIONS DISPLAY DATA Pitch Optical axis

6.2 Initial Screen .......................................................................27 6.3 Setting Measuring Mode .................................................... 28 6.4 Setting Functions ...............................................................29 1 [HOLD] Hold Function .................................................... 30 2 [ZERO] Auto-zero Function ............................................ 31 3 [SCREEN] Screen Selection Function ........................... 32 4 Limit Setup .....................................................................35 5 [CALIB] Calibration Setup ..............................................36 6 [PROGRAM] Program Selection Function ..................... 38 7 Area Setup .....................................................................39 8 Calculation Setup ...........................................................41 9 Average ..........................................................................44 0 Measuring Mode.............................................................46 A Digit Suppression Function ............................................ 54 B Offset Function ...............................................................55 C Analog Output Function.................................................. 57 D I/O Slot Setup .................................................................59 E Inspection .......................................................................60 F One-scan Mode.............................................................. 62 G Program Selection Method Setup .................................. 64 H Display Unit .................................................................... 65 I Area Check Function ...................................................... 66 J Initialize ..........................................................................67 K Mode Change .................................................................68

26 6 6.1 Normal Mode Screens LASER ON SCREEN NOR MAL P. 1 DISPLAY DATA DISPLAY DATA DISPLAY GRAPH DISPLAY GRAPH ON OUT1 SET SET OFF OUT2 OUT1 OFF OUT3 OFF OUT4 LASER ON DISPLAY GRAPH OUT1 NOR MAL P. 1 SETUP SCREEN 40.0000 0.0000 DATA: 25.77110 AREA OUT1 OUT4 OUTPUT INSPECT UTILITY LASER ON DISPLAY DATA NOR MAL P. 1 OUT1 HI3 HI1 20.0000 LO1 15.0000 OFF OFF ZERO HOLD SCREEN SCREEN DISPLAY DATA DISPLAY DATA LIMIT SET UP PROGRAM CALIB OPTIONS 54.21595 LASER ON SELECT OUTPUT NOR MAL P. 1 DISPLAY DATA LIMIT SET UP LIMIT SET UP PROGRAM CALIB OPTIONS OUT1 OUT2 OUT3 OUT4 Select Output No. to set the limits. LASER ON AREA SETUP NOR MAL P. 1 DIA HEAD1 ( 2, 3) ESC HELP SET HEAD No. EDGE No. A1 SEGMENT DIA HEAD2 ( 2, 3) SET HEAD No. EDGE No. A2 SEGMENT SEGMENT SEGMENT DIA HEAD3 ( 2, 3) SET HEAD No. EDGE No. A3 DIA HEAD4 ( 2, 3) SET HEAD No. EDGE No. A4 OUTPUT MODE OUT1 LASER ON P. 1 +A1 OFF OFF OFF AREA1 AREA2 AREA3 AREA4 100 AVERAGE CAL- CULATE 1 (0.833ms) MEASUR- ING MODE SELF-TIMING INTERVAL (ms) NORMAL DIGIT SUPPRESS NONE ESC HELP NEXT NOR MAL HEAD1 HEAD4 LASER ON CALIBRATE AREA NOR MAL P. 1 DISPLAY DATA LIMIT SET UP PROGRAM CALIB CALIB PROGRAM OPTIONS OPTIONS AREA1 AREA2 AREA3 AREA4 Select Area No. to calibrate. LASER ON OUTPUT MODE NOR MAL P. 1 OUT1 OUT2 OUT3 I/O SLOT SETUP OUT4 ESC Select Output to set. LASER ON I/O SLOT SETUP NOR MAL P. 1 I/O OUT1 OUT2 OUT1 OUT2 SLOT1 CH1 I/O I/O I/O CH2 SLOT2 CH1 CH2 ESC I/O SLOT SETUP LASER ON SELECT PROGRAM No. NOR MAL P. 1 DISPLAY DATA LIMIT SET UP PROGRAM CALIB OPTIONS Selected program No. 1 5 8 7 6 4 2 3 1 13 16 15 14 12 10 11 9 LASER ON INSPECT NOR MAL P. 1 HEAD1 HEAD2 HEAD3 HEAD4 ESC Select Head to inspect. INSPECT HEAD1 LASER ON P. 1 BEAM INTENSITY HEAD R : OK : OK OPTICAL AXIS ESC NOR MAL LASER ON OPTIONS NOR MAL P. 1 DISPLAY DATA LIMIT SET UP PROGRAM CALIB OPTIONS AREA OUTPUT INSPECT UTILITY Select Option to setup. MODE CHANGE Normal -> Pitch LASER ON UTILITY NOR MAL P. 1 AREA CHECK INITIALIZE ON PANEL mm ONE-SCAN MODE PROGRAM SELECT DISPLAY UNIT ESC DISPLAY DATA screen SCREEN SELECT screen DISPLAY GRAPH screen LIMIT SETUP screen AREA SETUP screen OUTPUT MODE screen CALIBRATE screen OUTPUT MODE screen I/O SLOT SETUP screen SELECT PROGRAM NO. screen INSPECT screen HEAD INSPECT screen OPTIONS screen UTILITY screen ➮ See p.30. ➮ See p. 33. ➮ See p. 33. ➮ See p.35. ➮ See p.39. ➮ See p.41-58. ➮ See p.36. ➮ See p.41. ➮ See p.59. ➮ See p.38. ➮ See p.60. ➮ See p.60. ➮ See p.39. ➮ See p.62-68.

27 6 6.2 Initial Screen Laser ON/OFF status Screen title Measuring mode Program No. Hold switch Screen selecting switch To the OPTION S screen To the SELECT PROGRAM NO. screen To the CALIB screen To the LIMIT SETUP screen To the DISPLAY DATA screen Auto-zero switch Displays the measured value, comparator output and upper/lower limits (HI1, LO1) for OUT1. LASER ON DISPLAY DATA NOR MAL P. 1 OUT1 54.21595 HI1 20.0000 LO1 15.0000 HI3 OUT2 54.21595 HI1 20.0000 LO1 15.0000 HI3 OFF OFF ZERO HOLD OUT3 54.21595 HI1 20.0000 LO1 15.0000 HI3 OUT4 54.21595 HI1 20.0000 LO1 15.0000 HI3 SCREEN DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS

28 6 6.3 Setting Measuring Mode Setting Scanning Head and Measurement 1. Setting Measuring Area The LS-5000 series can simultaneously perform four measurements and outputs with one scanning head, and different measurements and outputs with four scan- ning heads. (➮ See note.) The place for which the measurement condition is set is called the “measuring area” (A1 to A4), where the scanning head number and measuring mode can be set. Note: The LS-5002 and 5502 can only control a single scanning head. 2. Setting Output Mode The LS-5000 series can accept measurement data from multiple scanning heads and perform calculations on the data for displaying and outputting the comparator result. Using the preset measuring area (A1 to A4), you can set various calculation and measuring modes, as well as the number of averaging measurements as shown below. LASER ON AREA SETUP NOR MAL P. 1 DIA HEAD1 ( 2, 3) ESC HELP SET HEAD No. EDGE No. A1 SEGMENT SEGMENT SEGMENT SEGMENT DIA HEAD2 ( 2, 3) SET HEAD No. EDGE No. A2 DIA HEAD1 ( 2, 3) SET HEAD No. EDGE No. A3 DIA HEAD1 ( 2, 3) SET HEAD No. EDGE No. A4 AREA OPTIONS A3 A4 A1 A2 DIA HEAD2 ( 2, 3) SET HEAD No. EDGE No. A2 SEGMENT Set the measurement mode [DIA, T.EDGE, B.EDGE, SEG(m,n)]. (AREA SETUP screen) A2 (Measuring area 2) Set the scanning head number (1 to 4). OUTPUT MODE OUT1 LASER ON P. 1 +A1 OFF OFF OFF AREA1 AREA2 AREA3 AREA4 100 AVERAGE CAL- CULATE 1 (0.833ms) MEASUR- ING MODE SELF-TIMING INTERVAL (ms) NORMAL DIGIT SUPPRESS NONE ESC HELP NEXT NOR MAL OUTPUT OPTIONS Digit Calculation No. of Averaging Measurements Measurement mode

29 6 6.4 Setting Functions Names and functions Tag/Button Function Description Reference page DISPLAY HOLD Hold A measured value can be held or reset. 30 DATA ZERO Auto-zero A measured value can be instantaneously reset to “0.000”. 31 SCREEN Screen Selection The DISPLAY DATA screen or DISPLAY GRAPH screen 32 to 34 can be selected. LIMIT SETUP Limit Setup 7 level tolerance limits can be set for each output. 35 CALIB Calibration Setup Minute measurement fluctuations caused by a change in the 36 target surface condition or target inclination can be corrected. PROGRAM Program Selection Measurement data is stored and called as programs. 38 AREA Area Setup DIA, T.EDGE, B.EDGE or SEG(m,n) can be selected. 39 OUTPUT Calculation Setup Calculation can be performed with each measuring area 41 (A1 to A4). Average Measurement results can be averaged. 44 M. Mode Nine measuring modes are provided. 46 to 53 Offset Any value can be added to or subtracted from the displayed 55 value. Digit Sets the number of digits after the decimal point. 54 Analog Output An analog voltage (within ±10 V) proportional to the displayed 57 value can be output. I/O Slot Setup Expansion I/O boards can be set. 59 INSPECT Inspect The scanning head conditions (optical axis, intensity) can 60 be checked. UTILITY One-Scan Function Data obtained with only one surface of the 12-surface polygon 62 mirror becomes effective. Program Selection The program selection method (front panel or rear terminals) 64 can be selected. Display Unit The display units can be selected (“mm” or “inch”). 65 Area Check The number of edges in the measuring area can be 66 checked. Initialize All settings are reset to the initial values. 67 Mode Change Normal mode or Pitch mode can be selected. 68 OPTIONS LASER ON DISPLAY DATA NOR MAL P. 1 OFF OFF ZERO HOLD SCREEN DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS Button Tag

30 6 1 1 1 1 1 [HOLD] Hold Function The hold function allows the displayed value and output value to be held or reset regardless of the measuring mode. ■Setting Procedure 1. Select the DISPLAY DATA screen. Press the [DISPLAY DATA] button. The screen shown below is displayed. 2. Set the hold function. Press the [HOLD OFF] button. [HOLD OFF] is changed to [HOLD ON]. Note: The hold function cannot be set separately for each output from this screen. To set this function separately for each output, send the hold signal from the control I/O board (Option). (Short-circuit the Tim input terminal and the GND terminal.) DISPLAY DATA OFF HOLD HOLD ON LASER ON DISPLAY DATA NOR MAL P. 1 OUT1 54.21595 HI1 20.0000 LO1 15.0000 HI3 OUT2 54.21595 HI1 20.0000 LO1 15.0000 HI3 OFF OFF ZERO HOLD OUT3 54.21595 HI1 20.0000 LO1 15.0000 HI3 OUT4 54.21595 HI1 20.0000 LO1 15.0000 HI3 SCREEN DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS LASER ON DISPLAY DATA NOR MAL P. 1 OUT1 54.21595 HI1 20.0000 LO1 15.0000 HI3 OUT2 54.21595 HI1 20.0000 LO1 15.0000 HI3 OFF ON ZERO HOLD OUT3 54.21595 HI1 20.0000 LO1 15.0000 HI3 OUT4 54.21595 HI1 20.0000 LO1 15.0000 HI3 SCREEN DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS

31 6 2 2 2 2 2 [ZERO] Auto-zero Function The auto-zero function can instantaneously reset the displayed value to “0.0000”. This function simplifies zero-point adjustment when targets are changed over. ■Setting Procedure 1. Select the DISPLAY DATA screen. Press the [DISPLAY DATA] button. The screen below is displayed. 2. Set the auto-zero function. Press the [ZERO OFF] button. [ZERO OFF] is changed to [ZERO ON]. The following two methods will also activate the auto-zero input. • Short-circuit the auto-zero input terminal and the GND terminal of the control I/O board (Option). The auto-zero function can be set separately for each output. • Send a command through the RS-232C board from external equipment such as a computer. You can reset the auto-zero function by sending the command. ➮ See p. 93. Note 1: The auto-zero function cannot be reset with the control I/O input. Note 2: When the displayed value is “- - - - -”, the auto-zero function cannot be activated. Note 3: When the auto-zero function is activated from the front panel, all outputs are simultaneously reset to “0.0000”. DISPLAY DATA OFF ZERO ZERO ON LASER ON DISPLAY DATA NOR MAL P. 1 OUT1 54.21595 HI1 20.0000 LO1 15.0000 HI3 OUT2 54.21595 HI1 20.0000 LO1 15.0000 HI3 OFF OFF ZERO HOLD OUT3 54.21595 HI1 20.0000 LO1 15.0000 HI3 OUT4 54.21595 HI1 20.0000 LO1 15.0000 HI3 SCREEN DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS LASER ON DISPLAY DATA NOR MAL P. 1 OUT1 0.00000 0.00000 0.00000 0.00000 HI1 20.0000 LO1 15.0000 LO1 OUT2 HI1 20.0000 LO1 15.0000 LO1 OFF ON ZERO HOLD OUT3 HI1 20.0000 LO1 15.0000 LO1 OUT4 HI1 20.0000 LO1 15.0000 LO1 SCREEN DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS

32 6 3 3 3 3 3 [SCREEN] Screen Selection Function The screen selection function allows you to select the DISPLAY DATA screen (1 to 4 data displays) or the DISPLAY GRAPH screen. Example 1: When several scanning heads are used Example 2: Measurement of wire’s outer diameter ■Setting Procedure 1. Select the DISPLAY DATA screen. Press the [DISPLAY DATA] button. The screen shown below is displayed. 2. Select the SCREEN SELECT screen. Press the [SCREEN] button. LASER ON DISPLAY DATA NOR MAL P. 1 OUT1 54.21595 HI1 20.0000 LO1 15.0000 HI3 OUT2 54.21595 HI1 20.0000 LO1 15.0000 HI3 OFF OFF ZERO HOLD OUT3 54.21595 HI1 20.0000 LO1 15.0000 HI3 OUT4 54.21595 HI1 20.0000 LO1 15.0000 HI3 SCREEN DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS DISPLAY DATA SCREEN DISPLAY DATA DISPLAY GRAPH or OUT1 54.21595 H13 OUT3 5421595 H13 HI LO OUT2 54.21595 H13 OUT4 5421595 H13 HI LO HI LO HI LO 200000 200000 200000 200000 200000 200000 200000 200000

33 6 3. Set the output to be displayed. (➮ For setting outputs, see p.41.) Turn ON the output to be displayed. If an output is not to be displayed, press the [ON] button once to turn it OFF. 4. Return to the DISPLAY DATA screen. Press the [DISPLAY DATA] button to return to the DISPLAY DATA screen. ■Setting Procedure 1. Perform steps 1 and 2 described on the previous page to go to the SCREEN SELECT screen shown below. 2. Select “DISPLAY GRAPH”. Select the output to be graphically displayed. OUT1 to OUT4 are switched in the above order. Press the [DISPLAY GRAPH] button. 3. Perform “GRAPH SETUP”. Press the [SETUP] button. OUT1 OUT2 OUT3 OUT4 LASER ON SCREEN NOR MAL P. 1 DISPLAY DATA DISPLAY GRAPH ON OUT1 SET SET OFF OUT2 OUT1 OFF OUT3 OFF OUT4 LASER ON DISPLAY GRAPH OUT1 NOR MAL P. 1 SETUP SCREEN 40.0000 0.0000 DATA: 25.77110 LASER ON SCREEN NOR MAL P. 1 DISPLAY DATA DISPLAY GRAPH ON OUT1 SET SET OFF OUT2 OUT1 OFF OUT3 OFF OUT4

34 6 4. Set the range of GRAPH display. Perform “RANGE SETUP”. Press the [RANGE] button. Select the item from MAX or MIN using the [▲] [ ] arrow keys. Enter a value using the numeric keys and press [ENTER]. 5. Perform “TIME SETUP”. Press the [TIME] button. Select the item from SAMPLING FREQ or NO. OF DATA using the [▲] [ ] arrow keys. Enter a value using the numeric keys and press [ENTER]. Note 1: Range Setup The maximum and minimum range setup values are as follows: Max.: 999.9999 (9.99999) Min.: -99.9999 (-0.99999) * Values in ( ) are the maximum and minimum values displayed in inches. When the displayed value exceeds the above range, “OVER” is displayed and the entered value cannot be accepted. Note 2: Time Setup The maximum and minimum values for the sampling frequency and the number of displayed data are as follows: Sampling frequency Max.: 30000 x 0.1 s (3000 s) Min.: 1 (0.1 s) Number of displayed data Max.: 600 Min.: 2 When the sampling frequency or the number of displayed data exceeds the above range, “OVER” is displayed and the entered value cannot be accepted. Note 3: The above maximum and minimum values are independent of tolerance limits. LASER ON SETUP OUT1 NOR MAL P. 1 RANGE TIME MAX: MIN: 40.0000 0.0000 SAMPLING FREQ: NO. OF DATA: 1 X 0.1S 100 ▲ ▲ Press [ESCAPE] to complete the entry. Press [CANCEL] to cancel the entry. The value returns to the previous value. Press [ESCAPE] to complete the entry. Press [CANCEL] to cancel the entry. The value returns to the previous value. SETUP OUT2 LASER ON NOR MAL P. 1 8 7 5 6 4 2 3 1 0 9 ENTER CANCEL ESCAPE MAX: 40.0000 MIN: SAMPLING FREQ: NO. OF DATA: 0.0000 1 X 0. 100 SETUP OUT1 LASER ON NOR MAL P. 1 8 7 5 6 4 2 3 1 . - 0 9 ENTER CANCEL ESCAPE MAX: 40.0000 MIN: SAMPLING FREQ: NO. OF DATA: 0.0000 1 X 0. 100

35 6 4 4 4 4 4 Limit Setup 7-level-tolerance-limits can be set separately for four outputs. (➮ See p.41 for setting output.) ■Setting Procedure 1. Select the LIMIT SETUP screen. Press the [LIMIT SETUP] button. The screen shown below is displayed. 2. Set tolerance limits. Press the button corresponding to the output for which you wish to set tolerance limits. Select a desired tolerance limit using the [▲]/[ ] arrow keys. Enter a value using the numeric keys, and press [ENTER]. Press [ESCAPE] to complete the entry. Press [CANCEL] to cancel the entry. The value returns to the previous value. Note 1: When a measured value exceeds the tolerance range, the measured value is displayed in reverse. The differentiation result corresponding to the tolerance limits is output from the display unit and the control I/O (option) board. Note 2: Tolerance limits must conform to the following condition: HI3 > HI2 > HI1 > LO3 > LO2 > LO1 Otherwise, the tolerance value cannot be entered. (The “ERR” message appears on the display and the entered value cannot be accepted.) Note 3: The maximum and minimum tolerance limit values are as follows: Max.: 999.9999 (9.99999) Min.: -99.9999 (-0.99999) * Values in ( ) are the maximum and minimum values displayed in inches. OUT1 • • • OUT4 LIMIT SETUP LASER ON SELECT OUTPUT NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS OUT1 OUT2 OUT3 OUT4 Select Output No. to set the limits. LIMIT SETUP OUT1 LASER ON NOR MAL P. 1 8 7 5 6 4 2 3 1 . - 0 9 ENTER CANCEL ESCAPE HI3 30.0000 HI2 25.0000 HI3 20.0000 LO1 15.0000 LO2 10.0000 LO3 5.0000 ▲

36 6 5 5 5 5 5 [CALIB] Calibration Setup Minute measurement fluctuations caused by a change in the target surface condi- tion or target inclination can be corrected with each AREA. (➮ See p.39 for setting AREA.) ■Setting Procedure 1. Select the CALIBRATE AREA screen. Press the [CALIB] button. The screen shown below is displayed. 2. Press the button corresponding to the area for which you wish to perform calibration. Press the [RESET] button to reset the calibration. The calibration value is reset to the factory setting. Press the [CALIBRATE] button to go to the CALIBRATE screen. 3. Insert sample workpiece 1 to check the measured value. Enter the value of sample workpiece 1 using the numeric keys, and accept the value by pressing the [ENTER] button. AREA1 CALIB • • • AREA4 CALIBRATE AREA2 LASER ON NOR MAL P. 1 DATA 54.21595 ESC CALIBRATE RESET LASER ON CALIBRATE AREA NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS AREA1 AREA2 AREA3 AREA4 Select Segment No. to calibrate. CALIBRATE AREA1 LASER ON NOR MAL P. 1 8 7 5 6 4 2 3 1 . 0 9 ENTER CANCEL ESCAPE TARGET1 0.0000 DATA 54.21595 TARGET1 0.0000 Enter calibration values for targets 1 and 2, and press OK. OK

37 6 4. Insert sample workpiece 2 to check the measured value. Enter the value of sample workpiece 2 using the numeric keys, and accept the value by pressing the [ENTER] button. When you press the [OK] button, the calibration is performed and a message regarding the calibration result is displayed. Input Conditions Workpiece 1 < Workpiece 2 0.5 ≤ Span ≤ 2 If the above conditions are not satisfied, the “Calibration Error” message is displayed. When the above conditions are satisfied, the “Calibration OK” message is displayed.

38 6 6 6 6 6 6 [PROGRAM] Program Selection Function The LS-5000 series can store all measurement conditions as a program. Up to 16 programs can be stored and loaded easily. ■ Setting Procedure 1. Select the SELECT PROGRAM NO. screen. Press the [PROGRAM] button. 2. Select a program number. Press the button corresponding to the program number to be loaded. Note 1: When the program selection method is set to the rear terminals, the program number cannot be switched on the front panel. ➮ See p. 63. Note 2: To switch a program number using the rear terminals, change the combi- nation of the following four terminals and GND terminal. ON: This terminal and the GND terminal are short-circuited. OFF: This terminal is open. Note 3: The system setup for the display unit (➮ see p. 104) cannot be stored by the program function. Terminal No. Program No. P1 P2 P3 P4 1 OFF OFF OFF OFF 2 ON OFF OFF OFF 3 OFF ON OFF OFF 4 ON ON OFF OFF 5 OFF OFF ON OFF 6 ON OFF ON OFF 7 OFF ON ON OFF 8 ON ON ON OFF 9 OFF OFF OFF ON 10 ON OFF OFF ON 11 OFF ON OFF ON 12 ON ON OFF ON 13 OFF OFF ON ON 14 ON OFF ON ON 15 OFF ON ON ON 16 ON ON ON ON P1 P2 P3 P4 GND • • • PROGRAM 1 16 LASER ON SELECT PROGRAM No. NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS Selected program No. 1 5 8 7 6 4 2 3 1 13 16 15 14 12 10 11 9

39 6 7 7 7 7 7 Area Setup The scanning head (Head 1 to Head 4) and measuring mode (DIA, T.EDGE, B.EDGE, SEG(m,n))can be selected for a measuring area. Up to 4 areas can be set at the same time. (➮ see p. 22 for Area.) ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Select the AREA SETUP screen. Press the [AREA] button. 3. Set the scanning head number. When you press the [HEAD No.] button, the scanning head number is switched in the following order. 4. Set the segment. When you press the [SEGMENT] button, the segment is switched in the follow- ing order. Note 1: The edge number setting is effective only when “SEG” is selected as the SEGMENT. Note 2: When either of DIA, T.EDGE, or B.EDGE is selected for a scanning head, SEG cannot be selected for the same head. Also, when SEG is selected, DIA, T.EDGE, and B.EDGE cannot be selected for the same head. Note 3: When only one scanning head is connected, the head number remains “HEAD 1” even if the head number button is pressed. LASER ON OPTIONS NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS AREA OUTPUT INSPECT UTILITY Select Option to setup. MODE CHANGE Normal -> Pitch LASER ON AREA SETUP NOR MAL P. 1 DIA HEAD1 ( 2, 3) ESC HELP SET HEAD No. EDGE No. A1 SEGMENT SEGMENT SEGMENT SEGMENT DIA HEAD2 ( 2, 3) SET HEAD No. EDGE No. A2 DIA HEAD3 ( 2, 3) SET HEAD No. EDGE No. A3 DIA HEAD4 ( 2, 3) SET HEAD No. EDGE No. A4 HEAD1 HEAD2 HEAD3 HEAD4 DIA T. EDGE B. EDGE SEG OPTIONS AREA

40 6 ■Procedure for Setting Edge Number (Only when SEG is selected.) 1. Select the AREA SETUP screen. Perform steps 1 and 2 described on the previous page to go to the screen shown below. 2. Set the EDGE number. Press the [SET] button corresponding to the area for which you wish to set the edge number. You can enter a value in the space indicated by the dotted line . Enter a value using the numeric keys, and press [ENTER] key. Press [ESCAPE] to complete the entry. Press [CANCEL] to cancel the entry. The value returns to the previous value. Note 1: The edge number (m,n) must conform to the condition: m < n. When “m” is larger than “n”, the “ERR” message is displayed and the entered value cannot be accepted. Note 2: When you press the [HELP] button, descriptions about the measuring mode (DIA, T.EDGE/B.EDGE and SEG) are displayed on the screen. LASER ON AREA SETUP NOR MAL P. 1 SEG HEAD1 ( 2, 3) ESC HELP SET HEAD No. SEGMENT SEGMENT SEGMENT SEGMENT EDGE No. A1 SEG HEAD1 ( 2, 3) SET HEAD No. EDGE No. A2 SEG HEAD1 ( 2, 3) SET HEAD No. EDGE No. A3 SEG HEAD1 ( 2, 3) SET HEAD No. EDGE No. A4 LASER ON AREA SETUP NOR MAL P. 1 SEG HEAD1 ( 2 , 3) SET HEAD No. EDGE No. A1 SEGMENT SEGMENT SEG HEAD1 ( 2, 3) SET HEAD No. EDGE No. A2 8 7 5 6 4 2 3 1 . - 0 9 ENTER CANCEL ESCAPE ( 2 , 3) LASER ON AREA SETUP NOR MAL P. 1 SEG HEAD1 SET HEAD No. EDGE No. A3 SEGMENT SEGMENT SEG HEAD1 ( 2, 3) SET HEAD No. EDGE No. A4 8 7 5 6 4 2 3 1 . - 0 9 ENTER CANCEL ESCAPE

41 6 8 8 8 8 8 Calculation Setup The following calculation modes can be set for the area (A1 to A4) specified on the AREA SETUP screen. Addition and subtraction using data of several areas can be set. ■ Calculation for each area OFF : The measured value is not used for calculation. +A# : The measured value is output without changes. +A#/2 : The measured value is multiplied by “1/2”. +A#/3 : The measured value is multiplied by “1/3”. : –A#/4 : The measured value is multiplied by “-1/4”. * A# indicates either of A1 to A4. Calculation using data of several areas Calculation setup When the calculation modes are set as shown above, the calculation result of “+A1+(+A2)+(-A3)” is output. [Example 1] When two scanning heads are installed along two axes, the average value of the wire’s outer diameter is output. Setting Status 1/2 of the outer diameters measured with HEAD 1 and HEAD 2 are added. [AREA SETUP] OPTIONS OUTPUT OUT1 • • • OUT4 OUTPUT MODE OUT1 LASER ON P. 1 +A1 +A2 +A3 OFF AREA1 AREA2 AREA3 AREA4 500 AVERAGE CAL- CULATE 1 (0.833ms) MEASUR- ING MODE SELF-TIMING INTERVAL (ms) NORMAL DIGIT SUPPRESS NONE ESC HELP NEXT NOR MAL +A1 +A2 –A3 OFF AREA1 AREA2 AREA3 AREA4 LASER ON AREA SETUP NOR MAL P. 1 EDGEI EDGEI HEAD1 ( 2, 3) ESC HELP SET HEAD No. EDGE No. A1 SEGMENT HEAD2 ( 2, 3) SET HEAD No. EDGE No. A2 SEGMENT DIA HEAD3 ( 2, 3) SET HEAD No. EDGE No. A3 SEGMENT DIA HEAD4 ( 2, 3) SET HEAD No. EDGE No. A4 SEGMENT +A1/2 +A2/2 OFF OFF AREA1 AREA2 AREA3 AREA4

42 6 [Example 2] Two scanning heads are used to measure a sheet width. Setting Status The measured values of HEAD 1 and HEAD 2 are both multi- plied by “-1”, and the resulting values are added. ■Setting Procedure 1. Select the OUTPUT MODE screen. Press the [OPTIONS] button. The screen shown below is displayed. 2. Select the output number to be set. Press the [OUTPUT] button. Press the button corresponding to the output number for which calculation setup is to be performed. [AREA SETUP] [OUTPUT] button LASER ON AREA SETUP NOR MAL P. 1 EDGEI EDGEI HEAD1 ( 2, 3) ESC HELP SET HEAD No. EDGE No. A1 SEGMENT HEAD2 ( 2, 3) SET HEAD No. EDGE No. A2 SEGMENT DIA HEAD3 ( 2, 3) SET HEAD No. EDGE No. A3 SEGMENT DIA HEAD4 ( 2, 3) SET HEAD No. EDGE No. A4 SEGMENT –A1 –A2 OFF OFF AREA1 AREA2 AREA3 AREA4 LASER ON OPTIONS NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS AREA OUTPUT INSPECT UTILITY Select Option to setup. MODE CHANGE Normal -> Pitch LASER ON OUTPUT MODE NOR MAL P. 1 OUT1 OUT2 OUT3 I/O SLOT SETUP OUT4 ESC Select Output to set.

43 6 OFF –A1/4 +A1 +A1/2 +A1/3 +A1/4 –A1 –A1/2 –A1/3 3. Set the calculation modes. Every time you press the [CALCULATE] button, the setting changes as shown below. (For AREA 1) OFF: Calculation is set to OFF. +A1: The measured value is output without changes. +A1/2: The measured value is multiplied by “1/2”. +A1/3: The measured value is multiplied by “1/3”. +A1/4: The measured value is multiplied by “1/4”. –A1: The measured value is multiplied by “–1”. –A1/2: The measured value is multiplied by –1/2”. –A1/3: The measured value is multiplied by “–1/3”. –A1/4: The measured value is multiplied by “–1/4”. Note: OFF +A2 +A2/2 +A2/3 OFF +A3 +A3/2 +A3/3 OFF +A4 +A4/2 +A4/3 For AREA 2 For AREA 3 For AREA 4 OUTPUT MODE OUT1 LASER ON P. 1 +A1 OFF OFF OFF AREA1 AREA2 AREA3 AREA4 100 AVERAGE CAL- CULATE 1 (0.833ms) MEASUR- ING MODE SELF-TIMING INTERVAL (ms) NORMAL DIGIT SUPPRESS NONE ESC HELP NEXT NOR MAL [CALCULATE] button

44 6 9 9 9 9 9 Average The number of averaging measurements can be set based on the application as follows. • Increase the number of averaging measurements: To average fluctuations in measured values to obtain stable data • Reduce the number of averaging measurements: To increase high speed differentiation speed ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Select the OUTPUT MODE screen. Press the [OUTPUT] button. 3. Set the number of averaging measurements. Press the button corresponding to the output number for which the number of averaging measurements is to be set. Press the [AVERAGE] button and set a number of averaging measurements. OPTIONS OUTPUT OUT1 • • • OUT4 LASER ON OPTIONS NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS AREA OUTPUT INSPECT UTILITY Select Option to setup. MODE CHANGE Normal -> Pitch LASER ON OUTPUT MODE NOR MAL P. 1 OUT1 OUT2 OUT3 I/O SLOT SETUP OUT4 ESC Select Output to set. OUTPUT MODE OUT1 LASER ON P. 1 +A1 OFF OFF OFF AREA1 AREA2 AREA3 AREA4 100 AVERAGE CAL- CULATE 1 (0.833ms) MEASUR- ING MODE SELF-TIMING INTERVAL (ms) NORMAL DIGIT SUPPRESS NONE ESC HELP NEXT NOR MAL

45 6 [Relationship between number of averaging measurements and averaging time] No. of averaging Averaging time measurements 1 0.833 ms 2 1.67 ms 4 3.33 ms 8 6.67 ms 12 10 ms 24 20 ms 48 40 No. of averaging Averaging time measurements 96 80 ms 192 160 ms 384 320 ms 768 640 ms 1538 1.28 s 3072 2.56 s 6144 5.12 s Note: The averaging time is not the same as output response time. ➮ For output response time, see p. 121.

46 6 0 0 0 0 0 Measuring mode The LS-5000 series provides the following nine measuring modes. Mode Description Normal The measured value and comparator output are displayed/ output at any time. Peak hold The maximum value during a specified period is measured. Bottom hold The minimum value during a specified period is measured. Difference hold The difference between the maximum and minimum values during a specified period is measured. Auto peak hold The maximum measured value is retained. Auto bottom hold The minimum measured value is retained. Auto difference hold The difference between the maximum and minimum values is retained. Sample hold The instantaneous value at a specified time is measured. Self-timing Automatic measurement without using external synchronous input. Only with DIA or SEG (m, n). [Applications of each mode] • Normal mode Used for normal continu- ous measurement. • Peak hold • Auto peak hold Used to measure the maxi- mum value of the target. Measures this diameter. • Bottom hold • Auto bottom hold Used to measure the minimum value of the target. Measures this diameter. • Difference hold • Auto difference hold Measures this width. OPTIONS OUTPUT OUT1 • • • OUT4

47 6 ■ Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Select the OUTPUT MODE screen. Press the [OUTPUT] button. Press the button corresponding to the output number for which the measuring mode is to be set. 3. Set the measuring mode. Press the [MEASURING MODE] button to set the measuring mode. Every time the [MEASURING MODE] button is pressed, the indication changes in the above order. [When the self-timing mode is selected] [Only with DIA or SEG (m, n)] 4. Set the self-timing interval. Press the [SELF-TIMING INTERVAL] button to set the self-timing interval. Every time the [SELF-TIMING INTERVAL] button is pressed, the setting changes in the following order. LASER ON OPTIONS NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS AREA OUTPUT INSPECT UTILITY Select Option to setup. MODE CHANGE Normal -> Pitch LASER ON OUTPUT MODE NOR MAL P. 1 OUT1 OUT2 OUT3 I/O SLOT SETUP OUT4 ESC Select Output to set. NORMAL PEAK BOTTOM DIFFERENCE AUTO-DIFFERENCE AUTO-BOTTOM AUTO-PEAK SELF-TIMING SAMPLE OUTPUT MODE OUT1 LASER ON P. 1 +A1 OFF OFF OFF AREA1 AREA2 AREA3 AREA4 100 AVERAGE CAL- CULATE 1 (0.833ms) MEASUR- ING MODE SELF-TIMING INTERVAL (ms) NORMAL DIGIT SUPPRESS NONE ESC HELP NEXT NOR MAL 500 1000 10 50 100 200

48 6 Note 1: The self-timing setting is effective only when self-timing mode is selected. Note 2: The self-timing interval should be set longer than the averaging time. Note 3: Self-timing mode is enabled only when DIA or SEG(m,n) is selected. (When T.EDGE or B.EDGE is selected, self-timing mode is disabled.) ●Normal mode The measurement value/comparator output can be displayed/output at any time. Timing Diagram ●Peak hold mode The maximum value during a specified period can be measured. The sampling period is the duration between the falling edge and the next rising edge of the synchronous input. Timing Diagram Note: When the reset input terminal and the GND terminal are short-circuited, the retained value is reset and measurement starts again. * When the synchronous input is ON, the displayed value/comparator output is retained. Preset upper limit Displayed value Preset lower limit HI OUT ON OFF ON OFF ON OFF ON OFF GO OUT LO OUT Synchronous input (t) Internal measurement Measured value ON OFF Synchronous input Power-ON or RESET input (t) After the power-ON or RESET input is activated, “-----” is displayed until the synchronous input is turned ON. Peak hold value Sampling period Sampling period Sampling period

49 6 ●Bottom hold mode The minimum value during a specified period can be measured. The sampling period is the duration between the falling edge and the next rising edge of the synchronous input. Timing Diagram ●Difference mode The difference between the maximum and minimum values during a specified period can be measured. Timing Diagram Note: When the reset input terminal and the GND terminal are short-circuited, the retained value is reset to the present value and measurement starts again. ON OFF Synchronous input Power-ON or RESET input (t) After the power-ON or RESET input is activated, “-----” is displayed until the synchronous input is turned ON. Bottom hold displayed value Sampling period Sampling period Sampling period Internal measurement Measured value ON OFF Synchronous input Measured value Power-ON or RESET input (t) After the power-ON or RESET input is activated, “-----” is displayed until the synchronous input is turned ON. Difference hold displayed value Sampling period Sampling period Internal measurement b b' P P' (P-b) (P'-b')

50 6 ●Auto peak hold mode The maximum value after measurement starts can be measured. Timing Diagram ●Auto bottom hold mode The minimum value after measurement starts can be measured. Timing Diagram Note: When the reset input terminal and the GND terminal are short-circuited, the retained value is reset to the present value and measurement starts again. ON OFF Synchronous input ON OFF Reset input (t) Auto bottom hold value Measured value Internal measurement ON OFF Synchronous input ON OFF Reset input (t) Auto peak hold value Internal measurement Measured value

51 6 ●Auto difference hold mode The difference between the maximum and minimum values after measurement starts can be measured. Timing Diagram ●Sample hold mode The instantaneous value at a specified time can be measured. Timing Diagram Note: When the reset input terminal and the GND terminal are short-circuited, the retained value is reset to the present value and measurement starts again. ON OFF Synchronous input ON OFF Power-ON or RESET input (t) Auto difference hold value Measured value Internal measurement ON OFF Synchronous input Power-ON or RESET input (t) Sample hold value Measured value Internal measurement After the power-ON or RESET input is activated, “-----” is displayed until the synchronous input is turned ON.

52 6 ●Self-timing mode Measurement is automatically performed according to the internal synchronous signal. Timing Diagram Note 1: When the self-timing hold mode is used, the external synchronous input is ignored. Note 2: When the reset input terminal and the GND terminal are short-circuited, the retained value is reset and measurement starts again. ■Target recognition method in self-timing mode The LS-5000 series’ self-timing mode takes a specified duration to start sample- holding after the LS-5001 has recognized that a target has been placed in the measuring area. (The target recognition method varies depending on the SEGMENT.) The LS-5001 can measure a target regardless of the direction it enters the measuring area from. Internal measurement Self-timing value No target No target Target enters the measuring area Target goes out of the measur- ing area Preset self-timing interval Preset self-timing interval Internal synchronous signal Measured value ON (t) OFF After the power-ON or RESET input is activated, “-----” is displayed until the internal synchronous signal is turned ON. Target enters the measuring area Target goes out of the measur- ing area

53 6 1 Edge No. 2 1 Edge No. 2 3 4 Target recognition method by measuring mode • DIA mode: A target is recognized when the number of edges in the measuring area is two or more. The target has not yet been recog- nized. The LS-5001 recognizes that a target has been placed in the measuring area when the number of edges in the measuring area is two or more. • SEG (m, n) mode: A target is recognized when a specified number of edges is generated in the measuring area. When SEG(2,3) is set: The target has not yet been recog- nized because the specified number of edges (Edge No.) is not present in the measuring area. The target has been recognized when the specified number of edges is generated in the measuring area.

54 6 A A A A A Digit Suppression Function The digits after the decimal point can be suppressed as required. ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Select the OUTPUT MODE screen. Press the [OUTPUT] button. 3. Change the number of digits. Press the button corresponding to the output number for which the number of digits is to be changed. Every time you press the [DIGIT SUPPRESS] button, the display changes in the following order. The value indicates the number of digit to be suppressed. Note: The relationship between each switch setting and the number of displayed digits is as follows: Example (Displays 5 digits after the decimal point: 10.00000 mm/1.000000 inch) (Displays 4 digits after the decimal point: 10.0000 mm/1.00000 inch) (Displays 3 digits after the decimal point: 10.000 mm/1.0000 inch) (Displays 2 digits after the decimal point: 10.00 mm/1.000 inch) (Displays 1 digit after the decimal point: 10.0 mm/1.00 inch) OPTIONS OUTPUT OUT1 • • • OUT4 LASER ON OPTIONS NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS AREA OUTPUT INSPECT UTILITY Select Option to setup. MODE CHANGE Normal -> Pitch LASER ON OUTPUT MODE NOR MAL P. 1 OUT1 OUT2 OUT3 I/O SLOT SETUP OUT4 ESC Select Output to set. OUTPUT MODE OUT1 LASER ON P. 1 +A1 OFF OFF OFF AREA1 AREA2 AREA3 AREA4 100 AVERAGE CAL- CULATE 1 (0.833ms) MEASUR- ING MODE SELF-TIMING INTERVAL (ms) NORMAL DIGIT SUPPRESS NONE ESC HELP NEXT NOR MAL NONE 1 2 3 4 NONE 1 2 3 4

55 6 B B B B B Offset Function The desired value can be added to or subtracted from the displayed value. ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Select the OUTPUT MODE screen. Press the [OUTPUT] button. 3. Press the button corresponding to the output number for which the offset function is to be set. 4. Press the [NEXT] button. 5. Set the offset function. Press the [OFFSET] button. OPTIONS OUTPUT OUT1 • • • OUT4 LASER ON OPTIONS NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS AREA OUTPUT INSPECT UTILITY Select Option to setup. MODE CHANGE Normal -> Pitch LASER ON OUTPUT MODE NOR MAL P. 1 OUT1 OUT2 OUT3 I/O SLOT SETUP OUT4 ESC Select Output to set. OUTPUT MODE OUT1 LASER ON P. 1 +A1 OFF OFF OFF AREA1 AREA2 AREA3 AREA4 100 AVERAGE CAL- CULATE 1 (0.833ms) MEASUR- ING MODE SELF-TIMING INTERVAL (ms) NORMAL DIGIT SUPPRESS NONE ESC HELP NEXT NOR MAL OUTPUT MODE OUT1 LASER ON P. 1 NOR MAL OFFSET +10 V= -10 V= 40.0000 0.0000 0.0000 ANALOG OUT ESC PREV

56 6 6. Enter an offset value using the numeric keys, and press [ENTER]. Note: The maximum and minimum offset values are as follows: Max.: 999.9999 (9.99999) Min.: -99.9999 (-0.99999) Values in ( ) are in inches. OUTPUT MODE OUT1 LASER ON P. 1 NOR MAL 8 7 5 6 4 2 3 . - 1 0 9 ENTER CANCEL ESCAPE OFFSET +10 V= -10 V= 40.0000 0.0000 0.0000 ANALOG OUT Press [ESCAPE] to complete the entry. Press [CANCEL] to cancel the entry. The value returns to the previous value.

57 6 C C C C C Analog Output Function An analog voltage proportional to the displayed value can be output using an optional I/O board in the range of ±10 V. The analog output scaling range is between -99.9999 and 999.9999 in “mm” (- 0.99999 and -99.9999 in “inch”), and the ripple is 5 mV. ●Scaling The analog output is scaled to set the changing rate (inclination) of the analog output relative to the displayed value. Enter a value to be displayed, relative to +10 V and -10 V respectively. When the analog output is set to “+10 V = 30.000” and “-10 V = 10.000”, the relation between analog output and displayed value is as follows: Note: Resolution The resolution of the LS-5000 series’ analog output is 5 mV. The resolution in displayed value varies depending on the scaling. Example 1 When the analog output is set to “+10 V = 10.000” and “-10 V = -10.000”: 20 (V) : 0.005 (V) = 20 (mm) : x (mm) x = 0.005 mm Example 2 When the analog output is set to “+10 V = 40.000” and “-10 V = 0.0000”: 20 (V) : 0.005 (V) = 40 (mm) : x (mm) x = 0.010 mm ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Select the OUTPUT MODE screen. Press the [OUTPUT] button. +10 V Analog output Displayed value -10 V 10.000 30.000 LASER ON OPTIONS NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS AREA OUTPUT INSPECT UTILITY Select Option to setup. MODE CHANGE Normal -> Pitch

58 6 3. Set the analog output function. Press the button corresponding to the output for which the analog output func- tion is to be set. 4. Press the [NEXT] button. 5. Press the [ANALOG OUTPUT] button. Using the numeric keys, enter an analog output value in the location indicated by the dotted line. Note 1: When “-----” is displayed, the analog output is retained at +10 V. Note 2: When the displayed value exceeds the preset scaling range, the analog output is retained at +10 V. (When the displayed value falls below the scaling range, the analog output is retained at -10 V.) [Example] When the analog output is set to “+10 V = 30.000” and “-10 V = 10.000”: When the displayed value is 30 or more, the analog output is retained at +10 V. When the displayed value is 10 or less, the analog output is retained at -10 V. LASER ON OUTPUT MODE NOR MAL P. 1 OUT1 OUT2 OUT3 I/O SLOT SETUP OUT4 ESC Select Output to set. OUTPUT MODE OUT1 LASER ON P. 1 +A1 OFF OFF OFF AREA1 AREA2 AREA3 AREA4 100 AVERAGE CAL- CULATE 1 (0.833ms) MEASUR- ING MODE SELF-TIMING INTERVAL (ms) NORMAL DIGIT SUPPRESS NONE ESC HELP NEXT NOR MAL OUTPUT MODE OUT1 LASER ON P. 1 NOR MAL OFFSET +10 V= -10 V= 40.0000 0.0000 0.0000 ANALOG OUT ESC PREV OUTPUT MODE OUT1 LASER ON P. 1 NOR MAL 8 7 5 6 4 2 3 . - 1 0 9 ENTER CANCEL ESCAPE OFFSET +10 V= -10 V= 40.0000 0.0000 0.0000 ANALOG OUT +10 V -10 V 10.000 30.000 Press [ESCAPE] to complete the entry. Press [CANCEL] to cancel the entry. The value returns to the previous value.

59 6 D D D D D I/O Slot Setup The expansion I/O board can be set. ➮ See p. 100. ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Select the OUTPUT MODE screen. Press the [OUTPUT] button. 3. Press the [I/O SLOT SETUP] button. 4. Set the output number. Every time you press the button, the display changes in the following order. Note 1: When there is no I/O board mounted in the expansion slot, the display is as shown on the right. Note 2: When an I/O board is mounted in the expansion slot, the same output number cannot be set for different channels. OPTIONS OUTPUT MODE I/O SLOT SET UP LASER ON OPTIONS NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS AREA OUTPUT INSPECT UTILITY Select Option to setup. MODE CHANGE Normal -> Pitch LASER ON OUTPUT MODE NOR MAL P. 1 OUT1 OUT2 OUT3 I/O SLOT SETUP OUT4 ESC Select Output to set. OUT1 OUT2 OUT3 OUT4 NONE LASER ON I/O SLOT SETUP NOR MAL P. 1 I/O OUT1 HEAD1 NONE HEAD2 NONE HEAD1 NONE HEAD2 SLOT1 CH1 I/O CH2 NONE SLOT2 CH1 NONE CH2 ESC The I/O board mounted in the expansion slot is shown. LASER ON I/O SLOT SETUP NOR MAL P. 1 NONE NONE NONE NONE NONE NONE NONE NONE SLOT1 CH1 CH2 SLOT2 CH1 CH2 ESC

60 6 E E E E E Inspection The scanning head can be checked for conditions such as dust on the front surface, laser condition, and optical axis alignment. ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Select the INSPECT screen. Press the [INSPECT] button. 3. Check the condition of the scanning head. Press the button corresponding to the scanning head to be inspected. When the condition of the scanning head is normal, the display is as shown below. Note 1: During the scanning head inspection, measurement is interrupted. (The comparator output and analog output are the same as when “-----” is displayed.) Comparator output: All outputs are OFF. Analog output: Retained at +10 V. Note 2: When any problem occurs with the laser diode, the message “LASER” is displayed on the screen. OPTIONS OUTPUT OUT1 • • • OUT4 LASER ON OPTIONS NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS AREA OUTPUT INSPECT UTILITY Select Option to setup. MODE CHANGE Normal -> Pitch LASER ON INSPECT NOR MAL P. 1 HEAD1 HEAD2 HEAD3 HEAD4 ESC Select Head to inspect. INSPECT HEAD1 LASER ON P. 1 BEAM INTENSITY HEAD R : OK : OK OPTICAL AXIS ESC NOR MAL

61 6 ●Optical axis misalignment indications Optical axis misalignment is indicated when the receiver is tilted relative to the optical axis. INSPECT HEAD1 LASER ON P. 1 BEAM INTENSITY HEAD R : OK : NG OPTICAL AXIS ESC NOR MAL INSPECT HEAD1 LASER ON P. 1 BEAM INTENSITY HEAD R : OK : NG OPTICAL AXIS ESC NOR MAL INSPECT HEAD1 LASER ON P. 1 BEAM INTENSITY HEAD R : OK : NG OPTICAL AXIS ESC NOR MAL INSPECT HEAD1 LASER ON P. 1 BEAM INTENSITY HEAD R : OK : OK OPTICAL AXIS ESC NOR MAL INSPECT HEAD1 LASER ON P. 1 BEAM INTENSITY HEAD R : OK : NG OPTICAL AXIS ESC NOR MAL INSPECT HEAD1 LASER ON P. 1 BEAM INTENSITY HEAD R : OK : NG OPTICAL AXIS ESC NOR MAL INSPECT HEAD1 LASER ON P. 1 BEAM INTENSITY HEAD R : OK : NG OPTICAL AXIS ESC NOR MAL INSPECT HEAD1 LASER ON P. 1 BEAM INTENSITY HEAD R : OK : NG OPTICAL AXIS ESC NOR MAL INSPECT HEAD1 LASER ON P. 1 BEAM INTENSITY HEAD R : OK : NG OPTICAL AXIS ESC NOR MAL INSPECT HEAD1 LASER ON P. 1 BEAM INTENSITY HEAD R : NG : NG OPTICAL AXIS ESC NOR MAL INSPECT HEAD1 LASER ON P. 1 ESC NOR MAL Laser beam is tgurned off. Optical axis cannot be checked. Receiver Transmitter Receiver Transmitter Receiver Transmitter Receiver Transmitter Receiver Transmitter Receiver Transmitter Receiver Transmitter Receiver Transmitter Receiver Transmitter The receiver is tilted upward. The receiver is tilted to the upper left (viewed from the transmit- ter). The transmitter is tilted to the right (viewed from the transmitter). The optical axis is aligned. The receiver is tilted to the left (viewed from the transmitter). The receiver is tilted to the lower right (viewed from the transmitter). The receiver is tilted downward. The receiver is tilted to the lower left (viewed from the transmit- ter). The receiver is tilted to the upper right (viewed from the transmitter). No optical axis enters the receiver. Laser beam is not emitted. Normal Alignment

62 6 F F F F F One-scan Mode Data on only one of the 12 surfaces of the polygon mirror becomes effective. (This mode negates slight changes in the optical axis caused by the polygon mirror surface runout.) This is effective for measuring a narrow gap as shown below. ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Select the UTILITY screen. Press the [UTILITY] button. 3. Set the one-scan mode. Press the [ONE-SCAN MODE] button to turn it ON. Every time you press this button, the display toggles between ON and OFF. LASER ON OPTIONS NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS AREA OUTPUT INSPECT UTILITY Select Option to setup. MODE CHANGE Normal -> Pitch LASER ON UTILITY NOR MAL P. 1 AREA CHECK INITIALIZE ON PANEL mm ONE-SCAN MODE PROGRAM SELECT DISPLAY UNIT ESC Optical axis OPTIONS UTILITY

63 6 Note: The laser beam spot diameter is 0.2 mm at a distance of 80 mm from the transmitter. For gap measurement, however, a gap width of 0.3 mm or more is required. When the one-scan mode is used, the averaging time1. is longer than in normal measuring mode. No. of averaging measurements and averaging time when one-scan mode is ON/OFF 1. The averaging time is not the same as mean output response time. For the output response time, see p. 121. 0.3 mm or more gap width is required. OFF ON Averaging time 1 1 10 ms 2 1 10 ms 4 1 10 ms 8 1 10 ms 12 1 10 ms 24 2 20 ms 48 4 40 ms 96 8 80 ms 192 16 160 ms 384 32 320 ms 768 64 640 ms 1536 128 1280 ms 3072 256 2460 ms 6144 512 5120 ms

64 6 G G G G G Program Selection Method Setup The program selection method can be set to the front panel or the rear terminals. ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Select the UTILITY screen. Press the [UTILITY] button. 3. Set the program selection method. Press the [PROGRAM SELECT] button to select [PANEL] or [EXT]. Every time you press the button, the display toggles between [PANEL] and [EXT]. Note 1: When the program selection method is set to [PANEL], program selection can be performed using the front panel and the RS-232C input. Note 2: When the program selection method is set to [EXT], program selection can be performed using the terminal input only. Note 3: When the panel lock function is used, program selection is performed as shown below. ➮ For information on the panel lock function, see p. 112. OPTIONS UTILITY LASER ON OPTIONS NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS AREA OUTPUT INSPECT UTILITY Select Option to setup. MODE CHANGE Normal -> Pitch LASER ON UTILITY NOR MAL P. 1 AREA CHECK INITIALIZE ON PANEL mm ONE-SCAN MODE PROGRAM SELECT DISPLAY UNIT ESC Program selection Panel Terminal Front panel Enabled Disabled Terminal input Disabled Enabled RS-232C input Enabled Disabled Program selection Panel Terminal Front panel Disabled Disabled Terminal input Disabled Enabled RS-232C input Enabled Disabled

65 6 H H H H H Display Unit The measured value can be displayed in millimeters or inches. Note: When the display units setting is changed, the preset values (tolerance limits, etc.) of the selected program number are reset to the initial settings. ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Select the UTILITY screen. Press the [UTILITY] button. 3. Set the display unit. Press the [DISPLAY UNIT] button to select [mm] or [inch]. Every time you press the button, the display toggles between [mm] and [inch]. OPTIONS UTILITY LASER ON OPTIONS NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS AREA OUTPUT INSPECT UTILITY Select Option to setup. MODE CHANGE Normal -> Pitch LASER ON UTILITY NOR MAL P. 1 AREA CHECK INITIALIZE ON PANEL mm ONE-SCAN MODE PROGRAM SELECT DISPLAY UNIT ESC

66 6 I I I I I Area Check Function When the number of edges changes during measurement, the area check function displays the “----” error message. It also cancels the measured value by detecting the difference from the preset total number of edges. ■Effective Application When dust or oil adheres to the scanning head or no target is placed in the measuring area, the area check function prevents an abnormal measured value from being displayed or output. ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Select the UTILITY screen. Press the [UTILITY] button. 3. Press the [AREA CHECK] button. 4. Set the number of edges. Press the [SET] button. Enter a value using the numeric keys. Press the [OFF] button to turn it ON. Every time you press the button, the display toggles between [ON] and [OFF]. LASER ON OPTIONS NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS AREA OUTPUT INSPECT UTILITY Select Option to setup. MODE CHANGE Normal -> Pitch LASER ON UTILITY NOR MAL P. 1 AREA CHECK INITIALIZE ON PANEL mm ONE-SCAN MODE PROGRAM SELECT DISPLAY UNIT ESC LASER ON AREA CHECK NOR MAL P. 1 OFF ESC SET HEAD No. HEAD1 A1 NO. OF EDGES ( 4 ) DIA SEGMENT OFF SET HEAD No. HEAD1 A2 NO. OF EDGES ( 4 ) DIA SEGMENT SEGMENT SEGMENT OFF SET HEAD No. HEAD1 A3 NO. OF EDGES ( 4 ) DIA OFF SET HEAD No. HEAD1 A4 NO. OF EDGES ( 4 ) DIA

67 6 J J J J J Initialize This function resets all settings to the initial values. ➮ See p. 116 and 117. ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Select the UTILITY screen. Press the [UTILITY] button. 3. Perform initialization. Press the [INITIALIZE] button. 4. Press the [YES] button. 5. Press the [OK] button. OPTIONS UTILITY AREA CHECK LASER ON OPTIONS NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS AREA OUTPUT INSPECT UTILITY Select Option to setup. MODE CHANGE Normal -> Pitch LASER ON UTILITY NOR MAL P. 1 AREA CHECK INITIALIZE ON PANEL mm ONE-SCAN MODE PROGRAM SELECT DISPLAY UNIT ESC LASER ON INITIALIZE NOR MAL P. 1 Initialize the current settings? YES NO LASER ON INITIALIZE NOR MAL P. 1 The current settings will be initialized. OK CANCEL

68 6 K K K K K Mode Change The measuring mode can be changed from Normal mode to Pitch mode. ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Change the measuring mode. Press the [CHANGE MODE Normal -> Pitch] button. 3. Press the [YES] button. Press the [OK] button. OPTIONS MODE CHANGE Normal Pitch LASER ON OPTIONS NOR MAL P. 1 DISPLAY DATA LIMIT SETUP PROGRAM CALIB OPTIONS AREA OUTPUT INSPECT UTILITY Select Option to setup. MODE CHANGE Normal -> Pitch LASER ON MODE CHANGE NOR MAL P. 1 Change the Pitch Mode? YES NO LASER ON MODE CHANGE NOR MAL P. 1 Mode changed to Pitch. OK CANCEL

7.1 Pitch Mode Screens ............................................................ 70 7.2 Initial Screen .......................................................................71 7.3 Setting Measurement ......................................................... 72 7.4 Setting Functions ...............................................................73

70 7 7.1 Pitch Mode Screens LASER ON OPTIONS P. 1 PITCH DISPLAY DATA LIMIT SET UP PROGRAM OPTIONS HEAD1 HEAD2 HEAD3 HEAD4 MODE CHANGE Pitch -> Normal MODE CHANGE Pitch -> Normal LASER ON DISPLAY DATA P. 1 PITCH HEAD1 OK Max 0.5010 Min ESC ON HEAD1 OFF HEAD2 OFF HEAD3 OFF HEAD4 Set Output to display data. LASER ON DISPLAY SETUP PITCH P. 1 0.4990 SCREEN SCREEN HEAD1 HEAD4 DISPLAY DATA LIMIT SET UP PROGRAM OPTIONS LASER ON DISPLAY DATA PITCH P. 1 HEAD1 OK Max Min 0.5010 0.4990 HEAD2 OK Max Min 0.6010 0.5990 HEAD3 OK Max Min 0.7020 0.6980 HEAD4 OK Max Min 0.8020 0.7980 SCREEN DISPLAY DATA LIMIT SET UP PROGRAM OPTIONS LASER ON DISPLAY DATA PITCH P. 1 HEAD1 OK Max Min 0.5010 0.4990 HEAD2 OK Max Min 0.6010 0.5990 HEAD3 OK Max Min 0.7020 0.6980 SCREEN DISPLAY DATA LIMIT SET UP PROGRAM OPTIONS DISPLAY DATA LIMIT SETUP PROGRAM LASER ON LIMIT SETUP P. 1 PITCH DISPLAY DATA LIMIT SET UP PROGRAM OPTIONS HEAD1 HEAD2 HEAD3 HEAD4 Select Head to set the limits. LIMIT SETUP HEAD1 LASER ON P. 1 PITCH 8 7 5 6 4 2 3 1 0 9 ENTER CANCEL ESCAPE +0.0100 1.0000 UPPER LIMIT: REFERENCE: LOWER LIMIT: -0.0100 HEAD1 HEAD4 LASER ON DISPLAY DATA PITCH P. 1 HEAD1 OK Max 0.5010 Min 0.4990 HEAD2 OK Max 0.6010 Min 0.5990 SCREEN DISPLAY DATA LIMIT SET UP PROGRAM OPTIONS OPTIONS HEAD1 LASER ON P. 1 PITCH MASK1: PITCH No. NO. OF PITCHES MASKING 10 0 MASK2: PITCH No. 0 MASK3: PITCH No. 0 AVERAGE 8 DIGIT SUPPRESS NONE MEASUR- ING MODE NORMAL SELF-TIMING INTERVAL (ms) 100 ESC LASER ON SELECT PROGRAM No. P. 1 PITCH DISPLAY DATA LIMIT SET UP PROGRAM OPTIONS Selected program No. 1 5 8 7 6 4 2 3 1 13 16 15 14 12 10 11 9 OPTIONS LASER ON MODE CHANGE P. 1 PITCH Change to Normal mode? YES NO ➮ See p.73. ➮ See p.73. ➮ See p.73. ➮ See p.75. ➮ See p.75. ➮ See p.73. ➮ See p.76. ➮ See p.77 - 84. ➮ See p.73. ➮ See p.77. ➮ See p.85. DISPLAY DATA screen DISPLAY SETUP screen DISPLAY DATA screen LIMIT SETUP screen LIMIT SETUP screen DISPLAY DATA screen SELECT PROGRAM NO. screen MEASUREMENT SETUP screen DISPLAY DATA screen OPTIONS screen MODE CHANGE screen

71 7 7.2 Initial Screen LASER ON DISPLAY DATA PITCH P. 1 HEAD1 OK Max Min 0.5010 0.4990 HEAD2 OK Max Min 0.6010 0.5990 HEAD3 OK Max Min 0.7020 0.6980 HEAD4 OK Max Min 0.8020 0.7980 SCREEN DISPLAY DATA LIMIT SETUP PROGRAM OPTIONS Laser ON/OFF status Screen title Measuring mode Program No. Screen selection switch To the OPTIONS screen To the SELECT PROGRAM NO. screen To the LIMIT SETUP screen To the DISPLAY DATA screen Only the maximum and minimum values of scanning head 1 are displayed.

72 7 7.3 Setting Measurement When Pitch mode is selected, only one measurement can be performed with one scanning head, unlike in Normal mode. Therefore, Pitch mode setup must be performed for each scanning head. ■Setting Procedure OPTIONS OUT1 LASER ON P. 1 PITCH MASK1: PITCH No. NO. OF PITCHES MASKING HEAD1 HEAD4 10 0 MASK2: PITCH No. 0 MASK3: PITCH No. 0 AVERAGE 8 DIGIT SUPPRESS NONE MEASUR- ING MODE NORMAL SELF-TIMING INTERVAL (ms) 100 ESC OPTIONS Indicates the scanning head number for which Pitch mode is being set. Set the number of averaging measurements. Set the digit suppression function. Set the measuring mode. Set the masking function. Set the number of pitches.

73 7 7.4 Setting Functions Switch Function Description Reference page DATA DISPLAY Screen Selection Measurement results are 72, 73 displayed. LIMIT SETUP Limit Setup Upper and lower limits can be set 75 relative to the reference value for each output. PROGRAM Program Measurement conditions can be 76 SELECT Selection stored and retrieved as programs. OPTIONS No. of Pitches Set the number of pitches 77 according to the target. Average Measurement results can be 79 averaged. Digit suppression The number of digits after the 80 decimal point can be set. M. Mode Three measuring modes are 81-83 provided. Masking Set the pitch number for the 84 measurement to be canceled. Mode Change Normal mode or Pitch mode 85 can be selected. For each scanning head 1 1 1 1 1 Screen Selection Function Using the screen selection function, set the measured value display screen (OUT1 to OUT4). [Example 1: Four measurement results are displayed.] [Example 2: One measurement result is displayed.] DISPLAY DATA SCREEN LASER ON DISPLAY SETUP P. 1 ON HEAD1 ON HEAD2 ON HEAD3 ON HEAD4 ESC Set Output to display data. LASER ON DISPLAY DATA PITCH PITCH P. 1 HEAD1 OK Max Min 0.5010 0.4990 HEAD2 OK Max Min 0.6010 0.5990 HEAD3 OK Max Min 0.7020 0.6980 HEAD4 OK Max Min 0.8020 0.7980 SCREEN DISPLAY DATA LIMIT SETUP PROGRAM OPTIONS LASER ON DISPLAY SETUP P. 1 ON HEAD1 OFF HEAD2 OFF HEAD3 OFF HEAD4 ESC Set Output to display data. LASER ON DISPLAY DATA PITCH PITCH P. 1 HEAD1 OK Max 0.5010 Min 0.4990 SCREEN DISPLAY DATA LIMIT SET UP PROGRAM OPTIONS

74 7 ■Setting Procedure 1. Select the DISPLAY DATA screen. Press the [DISPLAY DATA] button. Press the [SCREEN] button. 2. Select the data display screen. Press the button corresponding to the output to be displayed to turn it ON. Press the [ESC] button. 3. The screen has been changed. LASER ON DISPLAY DATA PITCH P. 1 HEAD1 OK Max 0.5010 Min 0.4990 HEAD2 OK Max 0.6010 Min 0.5990 SCREEN DISPLAY DATA LIMIT SETUP PROGRAM OPTIONS LASER ON DISPLAY SETUP P. 1 ON HEAD1 ON HEAD2 ON HEAD3 ON HEAD4 ESC Set Output to display data. PITCH LASER ON DISPLAY DATA PITCH P. 1 HEAD1 OK Max Min 0.5010 0.4990 HEAD2 OK Max Min 0.6010 0.5990 HEAD3 OK Max Min 0.7020 0.6980 HEAD4 OK Max Min 0.8020 0.7980 SCREEN DISPLAY DATA LIMIT SETUP PROGRAM OPTIONS

75 7 2 2 2 2 2 Limit Setup The reference value, upper limit, and lower limit can be set separately for each of the four scanning heads. ■Setting Procedure 1. Select the LIMIT SETUP screen. Press the [LIMIT SETUP] button. 2. Set tolerance limits. Press the button corresponding to the output for which tolerance limits are to be set. Set tolerance limits using the numeric keys, and press [ENTER]. Press [ESCAPE] to complete the entry. Press [CANCEL] to cancel the entry. The value returns to the previous value. Note: When the measured value exceeds the tolerance range, the value is dis- played in reverse. The differentiation result relative to the tolerance limits is output from the display unit and the control I/O board (optional). When the measured value exceeds the upper limit or falls below the lower limit, the HI1 output is turned on. In PITCH mode, the Upper-Lower Limit indicates the difference from the Reference value. If a measured value of more than 1.1000 mm is to be checked and the Reference value is set to 1.000 mm, the Upper Limit should be +0.1000. If 0.9000 mm is to be checked, the Lower Limit should be -0.1000 mm. HEAD1 • • • HEAD4 LIMIT SETUP LASER ON LIMIT SETUP P. 1 PITCH DISPLAY DATA LIMIT SETUP PROGRAM OPTIONS HEAD1 HEAD2 HEAD3 HEAD4 Select Head to set the limits. LIMIT SETUP HEAD1 LASER ON P. 1 PITCH 8 7 5 6 4 2 3 1 0 9 ENTER CANCEL ESCAPE +0.0100 1.0000 UPPER LIMIT: REFERENCE: LOWER LIMIT: -0.0100

76 7 3 3 3 3 3 Program Selection Function The LS-5000 series can store all the measurement conditions as a program. Up to 16 programs can be stored and loaded easily. ■Setting Procedure 1. Select the SELECT PROGRAM NO. Screen. Press the [PROGRAM] button. 2. Select a program number. Press the button corresponding to the desired program number. Note: When the program selection method is set to the rear terminals, the program number cannot be changed using the front panel. ➮ See p. 64. LASER ON SELECT PROGRAM No. P. 1 PITCH DISPLAY DATA LIMIT SETUP PROGRAM OPTIONS Selected program No. 1 5 8 7 6 4 2 3 1 13 16 15 14 12 10 11 9 • • • PROGRAM 1 16

77 7 4 4 4 4 4 Setting Number of Pitches The number of pitches can be set up to 100, depending on the target. Example: IC lead pitch measurement ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Set the number of pitches. Press the button corresponding to the output for which the number of pitches is to be set. 3. Press the [NO. OF PITCHES] button. 4. Enter a value using the numeric keys, and press [ENTER]. Press [ESCAPE] to complete the entry. Press [CANCEL] to cancel the entry. The value returns to the previous value. 1 2 3 The number of pitches is "3". HEAD1 NO. OF PITCHES • • • HEAD4 OPTIONS LASER ON OPTIONS P. 1 PITCH DISPLAY DATA LIMIT SETUP PROGRAM OPTIONS HEAD1 HEAD2 HEAD3 HEAD4 MODE CHANGE Pitch -> Normal OPTIONS HEAD1 LASER ON P. 1 PITCH MASK1: PITCH No. NO. OF PITCHES MASKING 10 0 MASK2: PITCH No. 0 MASK3: PITCH No. 0 AVERAGE 8 DIGIT SUPPRESS NONE MEASUR- ING MODE NORMAL SELF-TIMING INTERVAL (ms) 100 ESC OPTIONS HEAD1 LASER ON P. 1 PITCH 8 7 5 6 4 2 3 1 0 9 ENTER CANCEL ESCAPE NO. OF PITCHES MASKING 10 AVERAGE 8 MASK1: PITCH No. 0 MASK2: PITCH No. 0 MASK3: PITCH No. 0

78 7 Note 1: Up to 100 pitches can be set. Note 2: When the number of pitches for a target is different from the preset number of pitches, “-----” is displayed and "Err" appears. (When the error message is displayed, the HI3 output of the control I/O board (optional) is turned ON.) Missing pin LASER ON DISPLAY DATA PITCH P. 1 HEAD1 Err Max - - - - - - - Min - - - - - - - SCREEN DISPLAY DATA LIMIT SETUP PROGRAM OPTIONS

79 7 5 5 5 5 5 Average The number of averaging measurements can be set, according to the application, as follows: • Increase the number of averaging measurements to average fluctuations in measured values to obtain stable data. • Reduce the number of averaging measurements to increase differentiation speed. ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Set the number of averaging measurements. Press the button corresponding to head number for which the number of averaging measurements is to be set. Press this button and set the number of averaging measurements. Every time you press this button, the display changes in the following order. [Relationship between No. of averaging measurements and averaging time] Note: The averaging time is not the same as mean output response time. For information on output response time, see p. 121. HEAD1 • • • HEAD4 OPTIONS LASER ON OPTIONS P. 1 PITCH DISPLAY DATA LIMIT SETUP PROGRAM OPTIONS HEAD1 HEAD2 HEAD3 HEAD4 MODE CHANGE Pitch -> Normal 1 2 4 8 16 OPTIONS HEAD1 LASER ON P. 1 PITCH MASK1: PITCH No. NO. OF PITCHES MASKING 10 0 MASK2: PITCH No. 0 MASK3: PITCH No. 0 AVERAGE 8 DIGIT SUPPRESS NONE MEASUR- ING MODE NORMAL SELF-TIMING INTERVAL (ms) 100 ESC No. of averaging measurements Averaging time 1 10 ms 2 20 ms 4 40 ms 8 80 ms 16 160 ms

80 7 6 6 6 6 6 Digit Suppression Function The number of digits after the decimal point can be suppressed as desired. ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Set the number of digits. Press the button corresponding to the scanning heads for which the number of digits is to be set. Press this button to select the number of digits. Every time you press this button, the display changes in the following order. Note: The relationship between each switch setting and the displayed digits is as follows: Example (Displays 5 digits after the decimal point: 10.00000 mm/1.000000 inch) (Displays 4 digits after the decimal point: 10.0000 mm/1.00000 inch) (Displays 3 digits after the decimal point: 10.000 mm/1.0000 inch) (Displays 2 digits after the decimal point: 10.00 mm/1.000 inch) (Displays 1 digit after the decimal point: 10.0 mm/1.00 inch) LASER ON OPTIONS P. 1 PITCH DISPLAY DATA LIMIT SETUP PROGRAM OPTIONS HEAD1 HEAD2 HEAD3 HEAD4 MODE CHANGE Pitch -> Normal NONE 1 2 3 4 OPTIONS HEAD1 LASER ON P. 1 PITCH MASK1: PITCH No. NO. OF PITCHES MASKING 10 0 MASK2: PITCH No. 0 MASK3: PITCH No. 0 AVERAGE 8 DIGIT SUPPRESS NONE MEASUR- ING MODE NORMAL SELF-TIMING INTERVAL (ms) 100 ESC HEAD1 • • • HEAD4 OPTIONS NONE 1 2 3 4

81 7 7 7 7 7 7 Measuring Mode The LS-5000 series provides the following three measuring modes. LASER ON OPTIONS P. 1 PITCH DISPLAY DATA LIMIT SETUP PROGRAM OPTIONS HEAD1 HEAD2 HEAD3 HEAD4 MODE CHANGE Pitch -> Normal NORMAL SAMPLE SELF-TIMING OPTIONS HEAD1 LASER ON P. 1 PITCH MASK1: PITCH No. NO. OF PITCHES MASKING 10 0 MASK2: PITCH No. 0 MASK3: PITCH No. 0 AVERAGE 8 DIGIT SUPPRESS NONE MEASUR- ING MODE NORMAL SELF-TIMING INTERVAL (ms) 100 ESC 100 200 500 1000 10 50 OPTIONS HEAD1 LASER ON P. 1 PITCH MASK1: PITCH No. NO. OF PITCHES MASKING 10 0 MASK2: PITCH No. 0 MASK3: PITCH No. 0 AVERAGE 8 DIGIT SUPPRESS NONE MEASUR- ING MODE NORMAL SELF-TIMING INTERVAL (ms) 100 ESC ■ Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Set the measuring mode. Press the button corresponding to the head for which the measuring mode is to be set. Press this button to select the measuring mode. Every time you press this button, the display changes in the following order. [When self-timing mode is selected] 3. Set the self-timing interval. Every time you press this button, the display changes in the following order. Note: The self-timing interval can be set only when self-timing mode is selected. Mode Description Normal The measured value and differentiation results are displayed/output at any time. Sample hold The instantaneous value at a specified time is measured. Self-timing Automatic measurement without using external synchronous input.

82 7 ●Normal mode The maximum and minimum values of the measured pitch and the differentiation result can be displayed/output at any time. Timing Diagram • The output when the synchronous input is turned ON is retained. • When the reset input is turned ON while the synchronous input is ON, “—” is displayed and the Err output is turned ON. ●Sample hold mode The instantaneous value at a specified time can be measured. Timing Diagram • The value when the synchronous input is turned ON is retained. • When the reset input is turned ON, “—” is displayed and the Err output is turned ON. OK OUT ON Upper limit Max. Value Min. value Lower limit OFF NG OUT Synchronous input retains the output status until it turns off. ON OFF Err Synchronous input ON OFF ON OFF OK ON OFF NG ON OFF Err ON OFF ON OFF Upper limit Max. Value Min. value Lower limit Synchronous input

83 7 ●Self-timing hold mode Measurement can be automatically performed according to the internal synchro- nous signal. Timing Diagram • When the self-timing period has passed after a target is placed in the measuring area, the measured value is retained. • The previous value is retained until the self-timing period has passed after the next target is placed in the measuring area. • If the number of pitches of an actual target is different from the preset number of pitches, self-timing mode is not activated even when the target is placed in the measuring area. OK ON OFF NG ON OFF OFF Err ON No target Target enters the measuring area No target Preset self-timing interval Preset self-timing interval Upper limit Max. value Min. value Lower limit Target enters the measuring area Target goes out of the measuring area

84 7 8 8 8 8 8 Masking Up to three pitches can be excluded from measurement, based on the application, as shown below. If pitch (1) and pitch (13) are included in the measurement of connector lead pitches as shown on the right, the maximum value becomes larger than the actual value. The masking function is useful to cancel these unnecessary part in such a case. ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Set the masking function. Press the button corresponding to the output for which the masking function is to be set. 3. Press the [MASKING] button. Enter the pitch number to be canceled using the numeric keys, and press [ENTER]. Press [ESCAPE] to complete the entry. Press [CANCEL] to cancel the entry. The value returns to the previous value. Note 1: Pitch number is counted from Pitch 1 in the scanning direction (from the top of the scanning head to the bottom). Note 2: When the total number of pitches changes (i.e. due to lead breakage), the control I/O board’s HI3 output is turned ON which indicates an "Error with No. of Pitches”. (Except for the self-timing mode) 1 13 Pitches to be canceled Scanning direction Optical axis HEAD1 • • • HEAD4 OPTIONS LASER ON OPTIONS P. 1 PITCH DISPLAY DATA LIMIT SETUP PROGRAM OPTIONS HEAD1 HEAD2 HEAD3 HEAD4 MODE CHANGE Pitch -> Normal OPTIONS HEAD1 LASER ON P. 1 PITCH MASK1: PITCH No. NO. OF PITCHES MASKING 10 0 MASK2: PITCH No. 0 MASK3: PITCH No. 0 AVERAGE 8 DIGIT SUPPRESS NONE MEASUR- ING MODE NORMAL SELF-TIMING INTERVAL (ms) 100 ESC OPTIONS HEAD1 LASER ON P. 1 PITCH 8 7 5 6 4 2 3 1 0 9 ENTER CANCEL ESCAPE NO. OF PITCHES MASKING 10 AVERAGE 8 MASK1: PITCH No. 0 MASK2: PITCH No. 0 MASK3: PITCH No. 0 In this example, set the No. of Pitches to 13. In this example, set MASK1 to 1 and MASK2 to 13.

85 7 9 9 9 9 9 Mode Change The measuring mode can be changed from Pitch mode to Normal mode. ■Setting Procedure 1. Select the OPTIONS screen. Press the [OPTIONS] button. 2. Change the measuring mode from Pitch mode to Normal mode. Press the [MODE CHANGE Pitch ➞ Normal] button. 3. Press the [YES] button. 4. Press the [OK] button. LASER ON OPTIONS P. 1 PITCH DISPLAY DATA LIMIT SETUP PROGRAM OPTIONS HEAD1 HEAD2 HEAD3 HEAD4 MODE CHANGE Pitch -> Normal LASER ON MODE CHANGE P. 1 PITCH Change to Normal mode? YES NO LASER ON MODE CHANGE P. 1 PITCH Mode changed to Normal. OK CANCEL OPTIONS MODE CHANGE Pitch Normal

8.2 Remote Control Function ................................................... 90 8.3 Command List .....................................................................97

88 8 8.1 RS-232C Communication Protocol Using the RS-232C interface, the LS-5000 series can communicate with a personal computer. Data transmission and setting changes can be remotely controlled. ■ Pin Assignment 1 2 3 4 5 6 Pin No. Signal code Description Direction of signal 1 — No connection — 2 — No connection — 3 SD (TXD) Inputs data from Input external equipment 4 SG (GND) Signal ground — 5 RD (RXD) Outputs measured Output value data 6 — No connection — Example of Connections Do not connect terminals (1), (2) and (6). ■ Communication Protocol Conforming to EIA RS-232C These settings can be changed by adjusting DIP switch 2. When DIP switch 2 is set to ON and “STX + ETX” is selected, OUT1’s measured value is output continuously. 3 5 4 2 3 4 6 7 8 5 SD RD SG SD RD RS CS DR ER SG LS PC RJ11 modular connector 9 pin D-sub connector 3 5 4 2 3 4 5 6 20 7 SD RD SG SD RD RS CS DR ER SG LS PC RJ11 modular connector 25 pin D-sub connector DIP switch 2 setting OFF ON Duplex Full Synchronization Start-stop Data format ASCII Data length 8 Stop bit length 1 Parity check None Even Baud rate 9600 Delimiter CR STX + ETX Applicable Personal computer, KV series (KV mode) external equipment KV-300 with KV-L2 (Non procedure mode) ■Setting Delimiter 1 2 3 4 ON OFF ON OFF STX +ETX CR DIP switch 2 DIP switch

89 8 ■Examples of Connections • Connection with a personal computer Delimiter: CR • Connection with the KV series * KV-300 series is not available in European area. OP-26401 + OP-96368 (D-sub 9-pin connector + cable) Personal computer Straight cable KV-10/16/24/40/80 KV-300 Series* Cross cable OP-96607 Straight cable OP-96368 (cable) + OP96369 (D-sub 25-pin connector) AC power supply KV-U4 CPU KV-300 Serial Interface module KV-L2 Data format (Delimiter: STX + ETX) The displayed value is output continuously.

90 8 8.2 Remote Control Function You can control the LS-5000 series remotely by sending an ASCII command from external equipment, such as a personal computer. Character codes corresponding to the ASCII command can be used for remote control. Measured Value Output RS-232C command list I 1. Upper line: Character code, Lower line: ASCII code (Hex) Note 1: "#" is a character code between 0 and 4, or the ASCII code corresponding to the character code. 0: Outputs data from all output numbers. 1 to 4: Outputs data from the specified output number (OUT1 to OUT4). Note 2: When the ASCII (character) command given in command list I is received, the measured value is sent either once or continuously. ■Operating Procedure Example: Send the measured value from OUT No. 1 once. Function command received1. Description [M] [#] [CR] Send a measured value once. 4DH#0DH [N] [#] [CR] Send a measured value continuously. 4EH#0DH [O] [CR] Stop continuous transmission of 4FH 0DH meas ured value. Output of measured value LS-5000 series During measurement During measurement Sends the measured value once Personal computer Sends [M] [1] [CR] End Waiting to receive data

91 8 Example: Send the measured value from OUT No. 2 continuously. Note 1: When the LS-5000 series receives the “N” (continuous output) command in either peak hold, bottom hold, difference hold, sample hold or self-timing mode, the LS-5000 series sends the measured value once every time the synchronous input is turned on (the measured value is confirmed). Note 2: When the LS-5000 series receives the “N” (continuous output) command in either normal, auto peak, auto bottom or auto difference hold mode, the LS-5000 series continuously sends the measured value. ■Data format • Received Command: [M] [1] [CR] • Transmitted data In Normal mode In Pitch mode LS-5000 series During measurement Sends the measured value continuously Stops the continuous data transmission Personal computer Sends [N] [2] [CR] Sends [O] [CR] End Receives data continuously During continuous data transmission First data Second data Third data 4th data 5th data 6th data 7th data 8th data 9th data 10th data 1 2 3 . 4 5 6 7 0 CR (Displayed value: 123.45670) – SP 0 . 9 8 7 6 5 CR (Displayed value:-0.98765) First data Second data Third data 4th data 5th data 6th data 7th data 8th data 9th data 10th data 11th data 12th data 13th data 14th data 15th data 16th data 17th data 18th data 19th data 20th data SP SP 1 . 2 3 4 5 6 , SP SP 0 . 9 8 7 6 5 CR (Displayed value: Max: 1.23450, Min.: 0.98765)

92 8 • Received Command: [M] [0] [CR] • Transmitted data In Normal mode In Pitch mode First data Second data Third data 4th data 5th data 6th data 7th data 8th data 9th data 10th data 11th data 12th data 13th data 14th data 15th data 16th data 17th data 18th data 19th data 20th data 1 2 3 . 4 5 6 7 0 , – SP 0 . 9 8 7 6 5 , 21th data 22th data 23th data 24th data 25th data 26th data 27th data 28th data 29th data 30th data SP SP 1 . 2 3 4 5 5 , 31th data 32th data 33th data 34th data 35th data 36th data 37th data 38th data 39th data 40th data – 9 8 . 7 6 5 4 0 CR (Displayed value: OUT1: 123.45670, OUT2: -0.98765, OUT3: 1.23455, OUT4: -98.76540) First data Second data Third data 4th data 5th data 6th data 7th data 8th data 9th data 10th data 11th data 12th data 13th data 14th data 15th data 16th data 17th data 18th data 19th data 20th data SP SP 1 . 2 3 4 0 0 , SP SP 1 . 2 3 0 0 0 , 21th data 22th data 23th data 24th data 25th data 26th data 27th data 28th data 29th data 30th data SP 1 0 . 5 6 7 8 5 , 31th data 32th data 33th data 34th data 35th data 36th data 37th data 38th data 39th data 40th data SP 1 0 . 5 5 7 8 5 , 41th data 42th data 43th data 44th data 45th data 46th data 47th data 48th data 49th data 50th data SP SP 2 . 3 4 5 6 0 , 51th data 52th data 53th data 54th data 55th data 56th data 57th data 58th data 59th data 60th data SP SP 2 . 4 5 6 7 0 , 61th data 62th data 63th data 64th data 65th data 66th data 67th data 68th data 69th data 70th data SP SP 0 . 3 4 5 6 0 , 71th data 72th data 73th data 74th data 75th data 76th data 77th data 78th data 79th data 80th data SP SP 0 . 2 3 4 5 5 CR (Displayed value: OUT1 Max.: 1.23400, Min.: 1.23000, OUT2 Max.: 10.56785, Min.: 10.55785, OUT3 Max.: 2.34560, Min.: 2.45670, OUT4 Max.: 0.34560, Min. 0.23455)