Keysight Technologies B1507A Operation & User’s Manual

No part of this manual may be reproduced in any form or by any means (including elec- tronic storage and retrieval or translation into a foreign language) without prior agreement and written consent from Keysight Technolo- gies as governed by United States and inter- national copyright laws. Manual Part Number B1507-90000 Edition Edition 1, October 2014 Keysight Technologies 1400 Fountaingrove Parkway  Santa Rosa, CA 95403 Warranty The material contained in this docu- ment is provided “as is,” and is subject to being changed, without notice, in future editions. Further, to the maxi- mum extent permitted by applicable law, Keysight disclaims all warranties, either express or implied, with regard to this manual and any information con- tained herein, including but not limited to the implied warranties of merchant- ability and fitness for a particular pur- pose. Keysight shall not be liable for errors or for incidental or consequential damages in connection with the fur- nishing, use, or performance of this document or of any information con- tained herein. Should Keysight and the user have a separate written agreement with warranty terms covering the mate- rial in this document that conflict with these terms, the warranty terms in the separate agreement shall control. Technology Licenses The hardware and/or software described in this document are furnished under a license and may be used or copied only in accor- dance with the terms of such license. Restricted Rights Legend If software is for use in the performance of a U.S. Government prime contract or subcon- tract, Software is delivered and licensed as “Commercial computer software” as defined in DFAR 252.227-7014 (June 1995), or as a “commercial item” as defined in FAR 2.101(a) or as “Restricted computer software” as defined in FAR 52.227-19 (June 1987) or any equivalent agency regulation or contract clause. Use, duplication or disclosure of Software is subject to Keysight Technologies’ standard commercial license terms, and non-DOD Departments and Agencies of the U.S. Government will receive no greater than Restricted Rights as defined in FAR 52.227-19(c)(1-2) (June 1987). U.S. Govern- ment users will receive no greater than Lim- ited Rights as defined in FAR 52.227-14 (June 1987) or DFAR 252.227-7015 (b)(2) (November 1995), as applicable in any tech- nical data. Declaration of Conformity To get the latest version of the declaration of conformity, go to http://www.key- sight.com/go/conformity and type in the product number in the Search field. Latest Information To get the latest firmware/software/elec- tronic manuals/specifications/support infor- mation, go to www.keysight.com and type in the product number in the Search field at the top of the page.

This is to declare that this product is in conformance with the German Regulation on Noise Declaration for Machines (Lärmangabe nach der Maschinenlärminformation-Verordnung -3.GSGV Deutschland). • Herstellerbescheinigung GERÄUSCHEMISSION Lpa < 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 T. 19 • Manufacturer’s Declaration ACOUSTIC NOISE EMISSION Lpa < 70dB operator position normal operation per ISO 7779 South Korean Class A EMC declaration This equipment is Class A suitable for professional use and is for use in electromagnetic environments outside of the home.

measurement terminals. • Usually use the interlock function. • Do not operate the instrument unless another person is around the work space who is familiar with instrument operation and hazards or administering first aid. • Potentials less than 500 V may cause death under certain conditions. Therefore, adequate preventive measures must be taken at all times! FIRST AID FOR ELECTRIC SHOCK SPECIAL ATTENTION TO RESCUE IN SAFETY • Never rush into an accidental situation. • Take special attention to the following notices to prevent second accident. • Do NOT touch the CASUALTY or conductive surface with your hands unprotected. • Shut off high voltage at once. • Disconnect AC mains. • If it is unsure to make safe, the following procedure will helps to protect your lives during the CASUALTY is rescued. • Stand on a dry insulating material; use a dry wooden or plastic implement to free the CASUALTY from contact with hazardous electrical source. • Ground the circuit to de-energize. WARNING High Voltage is used in the operation of this equipment. LETHAL VOLTAGE on CONTACT may be present at measurement terminals, if you fail to take in all safety precautions!

CALL EMERGENCY • Call your local Emergency number immediately, if any of signs or symptoms shown in the following table will be found. http://en.wikipedia.org/wiki/Emergency_telephone_number#Emergency_numbers DELAYED SYMPTOMS • In some cases, electric shock can cause injuries that are not evident and symptoms may be delayed. • Burns to the CASUALTY may be greater than they appear on the surface. • For these reasons, all electric shock CASUALTY should be taken to hospital for advanced observation. English Deutsch French Japanese Korean Simplified Chinese Traditional Chinese Symptoms Symptome Symptômes ඙ ඙ೃ 㰫䤚 ᚁೃ ᚪೃ Cardiac arrest Herz-Kreislauf-Stillsta nd Arestation cardiopulmonaire ᚰ⫵೵Ṇ 㕂䘦 㩫㰖G ᚰ⫵೵Ṇ ᚰ⫵೵Ṇ Abnormal cardiac rhythm Arrhythmia Arythmie ୙ᩚ⬦ ⿖㩫ⰻ ⬧ᚊ୙滸ġ ⬦ᚊ୙㰺 Respiratory failure (difficult or absent breathing) Respiratorischer Mißerfolg Échec respiratoire ࿧྾୙඲ 䢎䦷⿖㩚 ࿧྾୙඲ ࿧྾୙඲ Muscle pain and contractions Muskelschmerz und Zusammenziehungen Douleur du muscle et contractions ➽⫗③ / ②ᨥ ⁒㥷䐋 / 㑮㿫 ⫙⫗③ / 䕱㋃ ⫙⫗③ / ②ᨥ Seizures (heart beat stopped) Herzlähmung Paralysie cardiaque ᚰ⮚㯞⑷ 㕂㧻Ⱎ゚G ᚰ傷㯞⑶ ᚰ⮤㯞⑷ Numbness and tingling Eine Taubheit / Stachel Un engourdissement / Une épine ⑷ࢀ / ่③ 㩖Ⰲ┺ / Ṗ㔲③ ⍹㯞 / ่③ ⓐ㯞 / ่③ Unconsciousness Bewusstlosigkeit Évanouissement ព㆑୙᫂ 㦮㔳⿞ⳛ ព孮୙᫂ ព㆑୙᫂ Entrance and exit wound burns Eine elektrische Schockspur Une trace du choc électrique ឤ㟁㊧ Ṧ㩚㧦ῃ ゐ䓝⑞㏠ ゙㟁⑞㊧

Do not give compression-only CPR to infants and children — all infants and children who have a sudden cardiac arrest need conventional CPR. Also should not be used for adults whose cardiac arrest is from respiratory causes, or for an unwitnessed cardiac arrest. D Danger Check for DANGER, make SAFE first to YOU, Others, and the CASUALTY. R Response Check for a RESPONSE. Leave on back. If not conscious, 1. Ask others to emergency CALL for an ambulance immediately. 2. HELP to bring AED, ASAP. 3. Start CPR by YOU. C CPR for ADULT only Start the center of chest compressions (>100 compressions per minute) without stopping until emergency medical services arrive. One of the most famous chest compression-only CPR is AHA Hands-Only CPR which is without mouth-to-mouth rescue breaths. http://handsonlycpr.org/ http://www.youtube.com/watch?v=zuJkRpJ7Fxg Rhythm of chest compression: http://www.heart.org/HEARTORG/CPRAndECC/CommunityTraining/CommunityPro grams/CPR-Week_UCM_427219_SubHomePage.jsp http://www.youtube.com/watch?v=n5hP4DIBCEE&feature=player_detailpage Continue CPR until  Signs of life return.  AED is ready to use.  Medical services arrive and take over. If YOU have a trained rescue skill, should apply the following step. If not, only keep chest compression until others help. A Airway No foreign material Leave on back, open airway. Foreign material Place in the recovery position, clear of objects. B Breathing 30 compress & 2 breaths D Defibrillator Apply AED with following voice prompts. If no AED available, continue CPR until qualified personnel arrives. 䯲 AED: Automated External Defibrillator 䯲 CPR: Cardio Pulmonary Resuscitation 䯲 AHA: American Heart Association, Inc.

(http://www.heart.org/HEARTORG/CPRAndECC/CPR_UCM_001118_SubHomePage.j sp) • AHA Hands-only CPR (http://handsonlycpr.org/) • Save a Life (http://www.heart.org/HEARTORG/CPRAndECC/CommunityTraining/CommunityPro grams/CPR-Week_UCM_427219_SubHomePage.jsp) • AHA CPR Translated Website (http://www.heart.org/HEARTORG/CPRAndECC/International/TranslatedWebsites/Tr anslated-Websites_UCM_303149_SubHomePage.jsp) Deutsch (http://www.american-heart.de/startseite) Japanese (http://eccjapan.heart.org/) available as of March, 2012)) • Chain of Survival (http://www.heart.org/HEARTORG/CPRAndECC/WhatisCPR/ECCIntro/Chain-of-Surv ival_UCM_307516_Article.jsp) • ECC Guidelines Highlights 2010 English (http://eccjapanheart.org/pdf/ECC_Guidelines_Highlights_2010.pdf) Japanese (http://eccjapanheart.org/pdf/ECC_Guidelines_Highlights_2010JP.pdf) Deutsch (http://www.american-heart.at/fileadmin/downloads/Guidelines2010-Highl ights_D/Guidelines2010-Highlights_D.pdf) International • ILCOR (http://www.ilcor.org/home/) • ILCOR CoSTR 2010 Consensus (http://www.ilcor.org/consensus-2010/costr-2010-documents/) Europe • ERC (https://www.erc.edu/) • ERC Guidelines 2010 (http://www.cprguidelines.eu/2010/) Local language translation (https://www.erc.edu/index.php/doclibrary/en/185/1/) America • AHA (http://www.americanheart.org/) • AHA Guidelines 2010 (http://guidelines.ecc.org/2010-guidelines-for-cpr.html)

operation, service, and repair of this instrument. Failure to comply with these precautions or with specific warnings elsewhere in this manual may impair the protections provided by the instrument. In addition, it violates safety standards of design, manufacture, and intended use of the instrument. Keysight Technologies assumes no liability for customer’s failure to comply with these requirements. Product manuals may be provided on CD-ROM or in printed form. Printed manuals are an option for many products. Manuals may also be available on the Web. Go to www.keysight.com and type the product model number in the Search field at the top of the page. NOTE Do not use this instrument in any manner not specified by the manufacturer. The protective features of this instrument may be impaired if it is used in a manner not specified in the operation instructions. This instrument is an INDOOR USE product. This instrument complies with INSTALLATION CATEGORY II for mains input and INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION DEGREE 2 defined in IEC 61010-1. If an instrument is marked CAT I (IEC Measurement Category I), or it is not marked with a measurement category, its measurement terminals must not be connected to line-voltage mains. • DANGEROUS PROCEDURE WARNINGS Warnings, such as example below, shall be complied. Procedures throughout in this manual prevent you from potentially hazard. Their instructions contained in the warnings must be followed. WARNING Hazardous voltage, instrument maximum output voltage may appear at the measurement terminals (Force, Guard, and Sense) if Interlock terminal is closed. Open the Interlock terminal when the measurement terminals are accessible. Voltage applied to the terminals will be limited up to ±42 V. Do not work the interlock function intentionally in order to bring the output voltage to the safe level. While the high voltage indicator is lit, the dangerous voltage by the output voltage or the residual charge appears on the measurement terminal.

Verify that all safety precautions are taken. Make all connections to the instrument before applying power. Note the instrument's external markings described under “Safety Symbols”. • GROUND THE INSTRUMENT This is Safety Class I instrument. To minimize shock hazard, the instrument chassis and cabinet must be connected to an electrical ground. The power terminal and the power cable must meet International Electrotechnical Commission (IEC) safety standards. • DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE Do not operate the instrument in the presence of flammable gases or fumes. Operation of any electrical instrument in such an environment constitutes a definite safety hazard. • DO NOT REMOVE COVERS No operator serviceable parts inside. Refer servicing to qualified personnel. To prevent electrical shock do not remove covers. • IN CASE OF DAMAGE Instruments that appear damaged or defective should be made inoperative and secured against unintended operation until they can be repaired by qualified service personnel. Return the instrument to a Keysight Technologies sales or service office for services and repair to ensure that safety features are maintained. • USE ONLY THE SPECIFIC ACCESSORIES Specific accessories satisfy the requirements for specific characteristics for using the instrument. Use the specific accessories, cables, adapters, and so on for safety reasons.

below. Direct current. Alternating current. Earth (ground) terminal. Protective conductor terminal. For protection against electrical shock in case of a fault. Used with field wiring terminals to indicate the terminal which must be connected to ground before operating equipment. Frame or chassis terminal. A connection to the frame (chassis) of the equipment which normally includes all exposed metal structures. Grounded terminal which indicates the earth potential. On supply. Off supply. Standby supply. The equipment will be marked with this symbol is not completely disconnected from AC mains when power switch is in the standby position. In position of a bi-stable push switch. Out position of a bi-stable push switch. Hazardous voltage and potential for electrical shock. Do not touch terminals that have this symbol when the equipment is on. Hot surface. Avoid contact. Surfaces are hot and may cause personal injury if touched. Caution, refer to accompanying documentation. The equipment will be marked with this symbol when it is necessary for the user to refer to the instruction manual. WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice, condition or the like, which, if not correctly performed or adhered to, could result in injury or death to personal. CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure, practice, condition or the like, which, if not correctly performed or adhered to, could result in damage to or destruction of part or all of the equipment. ` > ^ 

The CE mark shows that the product complies with all applicable European Directives. The CSA mark is a registered trademark of the Canadian Standards Association. The RCM mark is a registered trademark of the Australian Communications Authority. This signifies compliance with the Australian EMC Framework Regulations under the terms of the Radio communications Act. This ISM device complies with Canadian ICES-001. Cet appareil ISM est conforme à la norme NMB-001 du Canada. This is the symbol for an Industrial, Scientific and Medical, Group 1 Class A product. (CISPR 11) Korea’s safety and EMC mark China RoHS - Environmentally Green Product Label China RoHS - Product with Toxic Substance 40 yr EPUP The Chinese mark for paper-based packaging materials; Paperboard and Corrugated Fiberboard Plastic Material Coding Identification CAT I

• Power Supply Safety This instrument can output high currents and voltages. Make sure that the load or device under test can safely handle the output current and voltage. Also, make sure that the connection leads can safely withstand the expected currents and are insulated for the expected voltages. The instrument outputs may be connected so as to float relative to earth ground. Isolation or floating voltage ratings are indicated on the instrument, near the output terminal or the Circuit Common terminal. There is the danger of electric shock by touching the floated measurement terminals. Keep in mind it to protect yourself. And it is a reason of using the recommended accessories. • Voltage/Current Measurement Safety Multimeters and other instruments capable of measuring high voltages and currents are subject to specific safety concerns because of the circuits to which they may be connected. To safely use these instruments, you need to understand the markings on the instrument near the input terminals, which include the Protection Limits and the IEC Measurement Category. • Protection Limits Keysight multimeters and other voltage measurement instruments provide protection circuitry to prevent damage to the instrument and to protect against the danger of electric shock, provided the Protection Limits are not exceeded. To ensure safe operation of the instrument, do not exceed the Protection Limits shown on the input terminals. • Source/Monitor Terminals Source/monitor unit, SMU, can simultaneously perform DC voltage or current output and measurement. Typical SMU has the Force, Guard, Sense, and Circuit Common terminals as shown below. Normally the Force, Guard, and Sense terminals are the same potential. Voltage marked around the terminals indicates the Protection Limits. Force and Sense must be connected to a terminal of a device under test for the Kelvin connection which is effective for high current measurement and low resistance measurement. For the non-Kelvin connection to ease the connections, connect Force only. Do not connect Sense. It must be opened.

caused by a coaxial cable used. Guard must be never connected to anything at the device side. Circuit Common should be connected to shielding of the coaxial cable used. The following image is the Kelvin triaxial connector of Medium Power SMU. • To Avoid Risk of Residual Charge This graph shows the load capacitance vs voltage characteristics generally considered as safety. Use the instrument within the safety area up to 0.1 F or 45 C according to the voltage. Also do not connect the capacitive load over the maximum load capacitance specified for the instrument, for example 10 nF for HVSMU. Before touching the measurement terminal, confirm that it has been discharged enough. For that, ground and discharge the terminals over 10 seconds after stopping the high voltage output, and confirm that they have been safety voltage by using another volt meter. If abnormal end of measurement, breaking of cable, or device damage occurs, do not touch the terminals until they are discharged enough. Also if a series resistor is connected, do not touch the terminal until it is discharged enough. Force Sense Guard Circuit Common Guard 1.E-09 1.E-08 1.E-07 1.E-06 100 1000 10000 Capacitance (F) Voltage (V) Safety Area Q=45 μC C=0.1 μF (Based on standards IEC60950-1 and IEC61010-1.)

Keysight B1507A can force dangerous voltages (±3000 Vdc for HVSMU and ±100 Vdc for MPSMU) at the Force, Guard, and Sense terminals. To prevent electric shock hazard, the following safety precautions must be observed during the use of Keysight B1507A. • Connect the instrument to an electrical ground (safety ground) by using three-conductor AC power cable. • Before performing measurement, connect the interlock circuit to the Interlock terminal of this instrument. • Confirm periodically that the interlock function works normally. • Before touching the connections of the Force, Guard, and Sense terminals, turn the instrument off and discharge any capacitors of the measurement path. If you do not turn the instrument off, complete “all” of the following items, regardless of any instrument settings. • Terminate measurement by pressing the Stop key, confirm that the Measurement status indicator is not lit. • Confirm that the High Voltage indicator is not lit. • Open the Interlock terminal. • Discharge any capacitors if the capacitance is connected to an SMU. • Warn workers in the vicinity of the instrument about hazardous conditions. 

Von den Geräten Keysight B1507A können Spannungen an den Anschlüssen “Force”, “Guard” und “Sense” von bis zu 3000 V ausgehen. Um elektrischem Schlag vorzubeugen, ist bei der Benützung der Geräte Keysight B1507A folgendes zu beachten. • Verwenden Sie ein dreiphasiges AC-Stromkabel für die Gerätsteckvorrichtung (Eingang) und schließen Sie das Instrument an eine Erdung an (Sicherheitserdung). • Vor der Messung verbinden Sie den Verriegelungsstromkreis mit dem Interlock-Anschluss dieses Instruments. • Prüfen Sie in regelmäßigen Abständen, dass die Verriegelungsfunktion ordnungsgemäß funktioniert. • Bevor Sie die Verbindungen zu den Anschlüssen “Force”, “Guard” und “Sense” berühren, schalten Sie das Instrument aus und entladen alle Kondensatoren des Messwegs. Wenn Sie das Instrument nicht ausschalten, führen Sie, unabhängig von den Instrumenteinstellungen, alle folgenden Schritte durch. • Beenden Sie die Messung, indem Sie auf die Taste “Stop” drücken. Stellen Sie sicher, dass die Statusanzeige “Measurement” nicht leuchtet. • Stellen Sie sicher, dass die Anzeige “High Voltage” nicht leuchtet. • Öffnen des Interlock-Anschlusses. • Entladen Sie alle Kondensatoren, wenn die Kapazität mit einer SMU verbunden ist. • Warnen Sie Mitarbeiter in der Umgebung des Instruments vor den Gefahren. 

Une tension dangereuse (max. ± pour HVSMU; 3000 Vdc, max. ± pour MPSMU; 100 Vdc) émanant du dispositif Keysight B1507A peut être sortie aux bornes Force, Guard et Sense. Les précautions suivantes doivent être obserées contre commotion électrique accidentelle. • Utilisez un câble d’alimentation CA à trois conducteurs vers le coupleur secteur (entrée) et branchez l’instrument sur une mise électrique à la terre (prise de terre de sécurité). • Avant de procéder aux mesures, connectez le circuit de sécurité à la borne Interlock de l’instrument. • Vérifiez régulièrement le bon fonctionnement de la fonction de sécurité. • Avant de toucher les connexions des bornes Force, Guard et Sense, mettez l’instrument hors tension et déchargez tout condensateur du chemin de mesure. Si vous ne mettez pas l’instrument hors tension, effectuez « toutes » les opérations ci-dessous, quels que soient les paramètres de l’instrument. • Terminez les mesures en appuyant sur la touche Stop ; vérifiez que l’indicateur d’état Measurement est éteint. • Vérifiez que le témoin High Voltage est éteint. • Ouvrez la borne Interlock. • Déchargez les éventuels condensateurs si la capacité est connectée à une unité SMU. • Informez les personnes travaillant à proximité de l’instrument des conditions. 

ります（HVSMU の場合は最大±3000 Vdc、MPSMU の場合は最大±100 Vdc）。感電 事故防止のため、Keysight B1507A の使用時には必ず以下の事柄を守ってください。 • 3 極電源ケーブルを使用して本器を接地してください。 • 測定を開始する前にはインターロック回路を本器のInterlock 端子に接続してく ださい。 • インターロック機能が正常であることを定期的に確認してください。 • Force、Guard、Sense 端子に繋がる接続部に触れる前には、本器の電源をオフし てください。また、測定系のキャパシタを放電してください。電源をオフしな い場合は、以下の事項を全て実施してください。 • Stop キーを押してMeasurement インジケータが消灯したことを確認してくだ さい。 • 高電圧警告（High Voltage）インジケータが消灯していることを確認してく ださい。 • Interlock 端子を開放してください。 • キャパシタがSMU に接続されているならば、キャパシタを放電してくださ い。 • 周囲のほかの作業者に対しても、高電圧危険に対する注意を徹底してください。 

This product complies with the WEEE Directive (2002/96/EC) marking requirements. The affixed label indicates that you must not discard this electrical/ electronic product in domestic household waste. Product Category: With reference to the equipment types in the WEEE directive Annex 1, this product is classified as a “Monitoring and Control instrumentation” product. Do not dispose in domestic household waste. To return unwanted products, contact your local Keysight office or visit the following website for more information. http://about.keysight.com/en/companyinfo/environment/ • LCD Fluorescent Lamp Certain products sold by Keysight contain a liquid crystal display (LCD); backlighting for the LCD is provided by a fluorescent lamp which contains mercury, and must be managed, recycled, and/or disposed in accordance with all applicable laws, ordinances and regulations. For information on how to recycle or dispose of the fluorescent lamp contained in your own product, visit the following website. http://about.keysight.com/en/quality/env_compliance.shtml If you live in the U.S., also visit the following websites. http://www.lamprecycle.org http://www.eiae.org If you have additional questions, please visit the following website. http://www.keysight.com/go/contactus • Perchlorate Information Perchlorate Material - special handling may apply. Visit the following website. http://www.dtsc.ca.gov/hazardouswaste/perchlorate/ Equipment's real-time clock battery or coin cell battery may contain perchlorate and may require special handling when recycled or disposed of in California.

environment. Keysight B1507A requires Keysight Easy Test Navigator software, a specially-designed Windows application program. • About guarantee and support for Keysight B1507A Keysight Technologies guarantees and supports the performance of Keysight B1507A for the same condition as the preload condition when shipped from the factory. • About updating Keysight Easy Test Navigator and the Windows Update Keysight Technologies confirms the operation of Easy Test Navigator patch programs and important Windows security patches, and provides recommended update information. Visit Keysight B1507A support site, download the patches, and perform the software update. • About Windows application programs and peripherals (including driver) Using commercial products on Keysight B1507A is your responsibility. Keysight Technologies cannot provide compatibility information for commercial products. If problems arise, perform Keysight B1507A system recovery. • About servicing Bench repair service is available at your nearest Keysight Technologies service center. Be aware that the B1507A configuration might be updated to the latest one without notice because of support issues. The internal hard disk drive (HDD) might be initialized during servicing. If peripherals are connected, they will be removed. When Keysight B1507A is returned, the internal HDD might be initialized. Peripherals will be returned separately. • Other notes • Back up the internal HDD to prevent loss of data by accident or failure. • Protect Keysight B1507A from computer viruses. • If you connect Keysight B1507A to the network, take care to protect it from computer virus.

To optimize your comfort and productivity, it is important that you set up your work area correctly and use your instrument properly. With that in mind, we have developed some set-up and use recommendations for you to follow based on established ergonomic principles. Improper and prolonged use of keyboards and input devices are among those tasks that have been associated with repetitive strain injury (RSI) to soft tissues in the hands and arms. If you experience discomfort or pain while using the instrument, discontinue use immediately and consult your physician as soon as possible. For more information on RSI you may wish to consult the About Repetitive Strain Injury section. Please study the recommendations described below. Included there are references to relevant parts of international standards, regulations and guidelines, such as ISO 9241 and the European Community Display Screen Equipment directive. You may also wish to consult your employer’s human resources department or other relevant departments for guidance specific to your company. About Repetitive Strain Injury Because your comfort and safety are our primary concern, we strongly recommend that you use the instrument in accordance with established ergonomic principles and recommendations. Scientific literature suggests that there may be a relationship between injury to soft tissues -especially in the hands and arms- and prolonged improper use of keyboards or other equipment requiring repeated motions of the hands and forearms. This literature also suggests that there are many other risk factors that may increase the chance of such injury, commonly called Repetitive Strain Injury. What is RSI? Repetitive Strain Injury (RSI -also known as cumulative trauma disorder or repetitive motion injury) is a type of injury where soft tissues in the body, such as muscles, nerves, or tendons, become irritated or inflamed. RSI has been a reported problem for those who perform repetitive tasks such as assembly line work, meatpacking, sewing, playing musical instruments, and computer work. RSI also has been observed in those who frequently engage in activities such as carpentry, knitting, housework, gardening, tennis, windsurfing and lifting children. What causes RSI? The specific causes of RSI have not been established. Nevertheless, the incidence of RSI has been associated with a variety of risk factors, including: • Too many uninterrupted repetitions of an activity or motion. • Performing an activity in an awkward or unnatural posture.

• Failing to take frequent short breaks. • Other environmental and psychosocial factors. In addition, there have been reports associating the occurrence of RSI with the use of keyboards, mice, and other input devices. Also, certain medical conditions, such as rheumatoid arthritis, obesity and diabetes, may predispose some people to this type of injury. What if I experience discomfort? If you are experiencing any discomfort, seek professional medical advice immediately. Typically, the earlier a problem is diagnosed and treated, the easier it is to resolve. Mice and Other Input Devices Various aspects of using mice and other input devices may increase your risk of discomfort or injury. Observing the following recommendations may reduce that risk. • Try to keep your hand, wrist, and forearm in a neutral position while using your mouse or other input device. • If you use your thumb to rotate the ball on a trackball or spaceball, keep it in a relaxed, natural shape, and maintain a neutral posture in your hand, wrist, and forearm. • Hold the mouse gently by draping your fingers over it. Keep your hand relaxed and fingers loose. Do not grip the mouse tightly. • It takes very little pressure or force from your fingers to activate the buttons or scroll wheel on your mouse, scrolling mouse, trackball, or other input device. Using too much force can place unnecessary stress on the tendons and muscles in your hands, wrists, and forearms. • If you are using a scrolling mouse, be sure to keep your fingers and hand in a relaxed, neutral position when activating the scroll wheel. Also, this type of mouse features software that can minimize the number of mouse movements or button clicks. • When using a mouse, trackball, or other input device, position it as close to the keyboard as possible, and keep it at the same level as you do not have to stretch while using it. • Be sure to keep your mouse and trackball clean. Regular removal of accumulated dust and dirt helps ensure proper tracking and reduces unnecessary hand and wrist motions.

This manual describes the product overview, installation information, measurement operation, and software reference information of Keysight Technologies B1507A. This manual consists of the following chapters: • Chapter 1, “Introduction” This chapter describes basic features of Keysight B1507A. • Chapter 2, “Installation” This chapter describes installation and maintenance. • Chapter 3, “How To Perform Measurement” This chapter explains how to perform measurement by using Keysight B1507A. • Chapter 4, “GUI Reference” This chapter provides the reference information of Keysight Easy Test Navigator software.

1. Introduction Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3 Mainframe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4 Test Fixture and Selector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4 Mainframe Front View. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5 Mainframe Rear View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11 Test Fixture Front View. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12 Measurement Terminals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13 Test Fixture Rear View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-15 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-15 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-16 Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-17 Easy Test Navigator Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-17 EasyEXPERT Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-18 Utility Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-18 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-20 Options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-22 Measurement Resources . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-23 GNDU - Ground Unit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-23 About SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-24 MPSMU - Medium Power SMU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-25 HVSMU - High Voltage SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-28 MFCMU - Multi Frequency CMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-30

Contents 2. Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3 Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4 Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4 Operating Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4 Storaging/Shipping Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4 Installation Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-5 Power Cable. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-6 Inspection and Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8 To Inspect Shipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-8 To Perform Initial Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-9 To Connect Selector and Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11 To Check Operation of Selector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13 To Change Windows Logon Setting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13 To Change GPIB Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14 To Enable System Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15 Connecting Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-16 3-pin Inline Package Socket Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17 Accessories for Connecting a DUT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19 Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19 Self-test and Diagnosis. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-19

Calibration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-19 Before Shipping to Service Center . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-20 To Make Backup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-20 To Check Module Slots . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-20 To Collect Equipment and Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-20 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-20 3. How To Perform Measurement How To Perform Capacitance Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3 Preparing Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4 Executing Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5 Setting Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8 How To Perform I/V Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9 Preparing Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-10 Executing Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-11 Setting Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-17 How To Calculate Power Loss . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-18 Calculating Power Loss . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-19 Extracted Parameters By Power Loss Calculation . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-25 Displaying and Operating Graph . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-26 How To Select and Display Characteristics Curve. . . . . . . . . . . . . . . . . . . . . . . . . . . .3-26 How To Use the Marker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-27 4. GUI Reference Software Palette . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3 Capacitance Measurement Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4 GUI Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5 Main Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6 Toolbar. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

Contents Work Area. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-11 Data List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28 Dialog Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-30 Summary of Files. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-31 I/V Measurement Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-32 GUI Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-33 Main Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-34 Toolbar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-36 Work Area. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-38 Data List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-57 Dialog Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-59 Summary of Files. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-60 Power Loss Calculation Software. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-61 GUI Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-62 Main Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-63 Toolbar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-65 Work Area. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-67 Data List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-74 Dialog Boxes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-76 Summary of Files. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-77 Common GUI Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-78 Module Configuration Dialog Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-78

Introduction This chapter describes the basic functions and features of Keysight B1507A Power Device Capacitance Analyzer, and consists of the following sections. • “Overview” • “Mainframe Front View” • “Mainframe Rear View” • “Test Fixture Front View” • “Test Fixture Rear View” • “Software” • “Accessories” • “Options” • “Measurement Resources”

1- 3 Introduction Overview Overview Keysight B1507A Power Device Capacitance Analyzer provides a complete solution for the evaluation of power device capacitance (such as input, output, and reverse transfer capacitances). Intuitive GUI allows you to automatically measure all capacitances under a wide range of operating voltages. In addition, it makes it easy to switch back and forth between leakage tests (to verify the device is not damaged) and capacitance measurements without having to do any recabling. The B1507A can help identify substandard devices under actual circuit operating voltage biases (up to 3 kV). This is an ideal complement to conventional IV test equipment (such as curve tracers) that do not have either capacitance or leakage testing capabilities. The furnished software presents the user with an intuitive user interface that makes it easy to characterize devices without going through any formal training. Integrated switching circuitry within the test fixture supports fully-automated testing, with the ability to automatically make the correct connections for all types of capacitance measurements. This includes the insertion of DC blocking capacitors and AC blocking resistors as well as making the connections necessary for correct gate and drain/collector leakage measurements. Unique plug-in style device test fixture socket adapter helps to eliminate cable connection and other human-related errors. The B1507A contains the mainframe, the test fixture, the connection cables, and the control software. For the furnished accessories, see Table 1-1.

Introduction Overview Mainframe Mainframe is equipped with the measurement resources listed below, the 15-inch touch screen LCD panel, hard disk drive, DVD drive, USB, LAN, GPIB, GPIO interfaces, and so on. For more information on the measurement resources, see “Measurement Resources” on page 1-23. • HVSMU, high voltage source/monitor unit, 1 ea. • MFCMU, multi frequency capacitance measurement unit, 1 ea. • MPSMU, medium power source/monitor unit, 1 ea. • GNDU, ground unit, 1 ea. The B1507A provides an intuitive graphical user interface, touch screen LCD, stylus pen, USB keyboard, and USB mouse for easy and effective measurement and analysis on the Windows environment, and supports the following B1507A control software. For more information, see “Software” on page 1-17. • Easy Test Navigator software • EasyEXPERT software Test Fixture and Selector The test fixture is required to connect your device under test (DUT). The following furnished accessories are available. • Socket module for connecting a 3-pin inline package device • Accessories for connecting other type of device • Connection wire • Clip • Banana pin adapter The selector is connected between the mainframe and the test fixture. And it is used for switching the IV measurement and the CV measurement. NOTE Selector may emit a noise sound during operation. However it is not abnormal status.

1- 5 Introduction Mainframe Front View Mainframe Front View This section describes the front view of the mainframe. 1. Standby switch Turns on/off the mainframe. Pressing the button in the ON state makes it in the standby state. The green LED lights when it is in the ON state. NOTE Opening measurement terminals Open the measurement terminals at the device side when turning the B1507A on. Also disconnect the device from the measurement terminals and open the measurement terminals after the measurement. If you leave the connection with the device, the device may be damaged by unexpected operations or charge-up of measurement cables. 2. HDD access indicator This green LED lights in the access status of HDD or DVD drive. Do not turn the instrument off during this LED lights. 1 5 12 6 7 8 9 10 11 4 2 3

Introduction Mainframe Front View 3. LCD adjustment keys LCD Off enables or disables the LCD panel. The green LED lights when the LCD is disabled. Four keys are available for adjusting brightness. Use + and - to adjust it and then press Set to fix it. Pressing Cancel instead of Set cancels the adjustment. 4. USB interfaces USB, 2 ports. For keyboard, mouse, and so on. To remove USB devices from the instrument, use “Safely Remove Hardware” on Windows taskbar. If it is not used, the instrument may cause the internal USB communication error. If the error occurs, turn the instrument off and disconnect the power cable from it. Leave it about 30 seconds before rebooting it, and connect the power cable again, and then turn the instrument on. 5. LCD panel 15 inch TFT XGA display, 1024  768 resolution. Displays the Windows screen, the B1507A control software window, and so on. Touch screen operation is available when the Touch Panel Off indicator does not light. To adjust the touch panel, use Microchip TSHARC Control Panel which is opened by selecting Microchip TSHARC Control Panel from the Start menu. 6. Stop key Stops the present measurement or source output immediately. 7. High voltage status indicator This red LED lights when a source channel applies dangerous voltage. 8. Measurement status indicator This green LED lights when a measurement channel performs measurement. 9. Rotary knob Works on the execution environment of the B1507A control software. Rotating the knob moves the marker on the graph, or increases/decreases/changes the value in the active entry field. Pressing the knob sets or enters the value. 10. Softkeys Seven softkeys are available for the B1507A control software. Used to select an alternative for the entry field specified or the dialog box.

1- 7 Introduction Mainframe Front View 11. DVD-R drive For data backup, software update, and so on. With the option DR1, the drive is changed to the DVD-ROM drive. 12. Touch Panel Off key Works on the execution environment of the B1507A control software. Enables or disables the touch screen operation. The green LED lights when the touch screen is disabled.

Introduction Mainframe Rear View Mainframe Rear View This section describes the rear view of the mainframe. WARNING To avoid electrical shock and instrument damage, turn the all instruments off before connecting or disconnecting measurement cable. Mettez la machine hors tension pour fixer le connecteur ou pour retirer le connecteur de l’unité centrale. WARNING There are potentially hazardous voltages (± 3000 Vdc for HVSMU and ± 100 Vdc for MPSMU) present at the Force, Sense, and Guard terminals of the instruments. To prevent electrical shock, the following safety precautions must be observed during the use of instruments. • Connect the instrument to an electrical ground (safety ground) by using three-conductor AC power cable. • Connect the mainframe Interlock terminal to the selector Interlock terminal by using an interlock cable. Also connect the selector Interlock terminal to the test fixture Interlock terminal by using an interlock cable. • Confirm periodically that the interlock function works normally. • Before touching the connections on the Force, Sense, and Guard terminals in the test fixture, turn the instruments off and discharge any capacitors. If you do not turn the instruments off, complete all of the following items, regardless of the instrument settings. • Press the front panel Stop key to set the source output off. • Confirm that the front panel High Voltage indicator is not lit. • Open the Interlock terminal (open the fixture cover). • Discharge any capacitors connected to a measurement resource. • Warn persons working around the instrument about dangerous conditions.

1- 9 Introduction Mainframe Rear View 1. Serial number You need this serial number when using Keysight Technologies telephone assistance program. 2. LED status indicator For troubleshooting. Followings are some examples. • Both LEDs turn off: The instrument is in the standby state and Standby switch is OFF position. • One LED turns green: Power supply works normally. • Both LEDs turn orange: The instrument is in the standby state and Standby switch is ON position. 3. LINE input receptacle AC power cable is connected to this receptacle. 1 10 9 8 C D 5 3 4 11 14 12 13 7 2 B A 6

Introduction Mainframe Rear View 4. GPIB interface Use an Keysight 82357A USB/GPIB interface or Keysight 10833A/B/C/D GPIB cable to connect to an external computer or equipment. 5. Video output terminal VGA connector. For an external display. Signal to the built-in LCD is also applied to this terminal. 6. Measurement Resources See A to D described later. 7. Circuit Common ( ) and frame ground ( ) terminals Normally, connect the terminals together by using the shorting bar. For floating measurement, remove the shorting bar. WARNING If the Circuit Common terminal is not connected to the frame ground terminal (for floating measurement), a potential shock hazard may present. Do not touch any of measurement circuit at any time while a floating measurement is in progress. CAUTION For floating measurement, do not apply dangerous voltage to the Circuit Common terminal. Failure to heed this caution may result in damage to the instrument. 8. Zero Check terminal Ground reference point of the instrument. CAUTION The Zero Check terminal can be used for the service purpose only. For the normal operation, leave this terminal open and do not connect anything to this terminal. Connecting anything can damage the instrument. 9. GNDU terminal 0 V constant voltage source. Used for the reference of measurement ground. Triaxial connector. 10. LAN interface RJ45 connector. 11. USB interfaces USB, 2 ports. For keyboard, mouse, or peripherals.

1- 11 Introduction Mainframe Rear View To remove USB devices from the instrument, use “Safely Remove Hardware” on Windows taskbar. If it is not used, the instrument may cause the internal USB communication error. If the error occurs, turn the instrument off and disconnect the power cable from it. Leave it about 30 seconds before rebooting it, and connect the power cable again, and then turn the instrument on. 12. Ext Trig terminals Two BNC connectors, one for trigger input, and one for trigger output. For details about the trigger function, see Programming Guide. 13. Digital I/O terminal Used to connect the test fixture. 14. Interlock terminal Used to connect the test fixture. If the fixture cover is open, maximum output is limited to ±42 V. To verify the interlock function, perform the Interlock Open/Close test on the Main Frame tab screen of the EasyEXPERT Configuration window. WARNING Dangerous voltage, instrument maximum output voltage may appear at Force, Sense, and Guard terminals if the fixture cover is closed. A. GNDU/ADC Ground unit (GNDU) and A/D converter. B. MPSMU Medium power source/monitor unit (MPSMU) has two triaxial connectors, force and sense, for the Kelvin connections. C. MFCMU Multi frequency capacitance measurement unit (MFCMU) has four coaxial connectors, Lcur, Lpot, Hpot, and Hcur, for the four-terminal pair connection. CAUTION Do not apply voltage more than ±25 V to the MFCMU input terminals. Failure to heed this caution may result in damage to the MFCMU. D. HVSMU High voltage source/monitor unit (HVSMU) has the force connector.

Introduction Test Fixture Front View Test Fixture Front View This section describes the front view of the test fixture and selector. 1. Fixture cover The fixture cover should be closed to avoid electrical shock by touching measurement terminals and to prevent a device under test from external noise. When the fixture cover is open, maximum output voltage is limited to ± 42 V. WARNING Hazardous voltage, instrument maximum output voltage may appear at the Force, Sense, and Guard terminals if the fixture cover is closed. WARNING Make sure that the cover is closed properly before starting measurement. Do not perform the measurement when a wire is protruding from the fixture cover. Assurez-vous que le couvercle est fermé correctement avant de commencer la mesure. Ne pas effectuer la mesure lorsqu’un câble dépasse du couvercle de l'appareil. 2. 3-pin inline package socket module Attach the module to the measurement terminals if your device under test (DUT) is a 3-pin inline packaged device. 3. Measurement terminals Connects the connection wire or attaches the socket module for connecting your DUT. For more information, see “Measurement Terminals” on page 1-13. 1 2 Test fixture 6 3 5 4 Selector 7

1- 13 Introduction Test Fixture Front View 4. Terminal for connecting wrist strap 5. DUT stage (silicon plate) 6. Hazardous voltage status indicator This red LED lights when a measurement resource applies dangerous voltage. This indicator is connected to the mainframe via the Interlock terminal and works with the High Voltage indicator on the mainframe front panel. Warming labels written in French, German, and Japanese are furnished. Attach the label to the front panel of the fixture if you need. WARNING The red light indicates that hazardous voltage (maximum ± 3000 Vdc) may appear at measurement terminals. Check this indicator before accessing. Le témoin rouge indique qu'une tension dangereuse (± 3000 V Max) risque d’apparaître au niveau des bornes de mesure. Vérifiez cet indicateur avant d’accéder. 7. Status indicator Power LED turns yellow when the AC power is applied to the test fixture. Power LED turns green when the test fixture is ready to use. IV LED lights when the B1507A is in the IV measurement condition. CV LED lights when the B1507A is in the capacitance measurement condition. Measurement Terminals WARNING Set the instrument output off before connecting or disconnecting connection wire. Press the mainframe front panel Stop key to set the source output off. And confirm that the mainframe front panel High Voltage indicator is not lit. WARNING Do not connect or disconnect your device under test (DUT) while Keysight B1507A is applying voltage or current. Otherwise, the DUT may be damaged. When you touch the DUT after measurement, devise a countermeasure of residual charge and heat to prevent electrical shock and burn. Use glove and any tool. Also have enough time for discharge and radiation. Pour éviter toute électrocution et tout risque d'endommagement de l'appareil, ne retirez pas les câbles pendant le fonctionnement.

Introduction Test Fixture Front View Lorsque vous touchez le MST après la mesure, élaborez une contre-mesure de la charge résiduelle et du chauffage afin d'éviter tout choc électrique et toute brûlure. Utilisez des gants et des outils. Prévoyez également du temps pour la décharge et la radiation. CAUTION Never connect the terminals to any output, including circuit common and chassis ground. Connecting other output may damage the connected one. NOTE To use the 3-pin inline package socket module, attach it to the Base/Gate, Collector/Drain, and Emitter/Source terminals. Then do not use the AC/DC Guard terminal. If you do not use the 3-pin inline package socket module, connect your device under test (DUT) to the terminals by using connection wire, clip, adapter, and so on. 1. Base/Gate terminal Connect the terminal to the gate or base terminal of DUT. 2. Collector/Drain terminal Connect the terminal to the drain or collector terminal of DUT. 3. Emitter/Source terminal Connect Force and Sense to the source or emitter terminal of DUT. 4. AC/DC Guard terminal When the CV LED lights, this terminal works as the AC guard. When the IV LED lights, this terminal works as the DC guard. In the most cases, never connect anything to this terminal for safety and to prevent instrument damage. 5. Chassis common terminal Use for grounding or shielding. AC/DC Guard Emitter/Source Collector/Drain Base/Gate ±3 kV&Max

1- 15 Introduction Test Fixture Rear View Test Fixture Rear View This section describes the rear view of the test fixture and selector. For connecting the cables, see “To Connect Selector and Test Fixture” on page 2-11. 1. Power switch Turns on/off the test fixture. 2. LINE input receptacle AC power cable is connected to this receptacle. 3. Digital I/O terminal This terminal is used to connect the Digital I/O cable from the mainframe Digital I/O terminal. 4. Interlock terminal This terminal is used to connect the interlock cable from the mainframe Interlock terminal. The interlock cable is included in the system cable. 5. Connectors for connecting the system cable from the mainframe The following measurement resources in the mainframe are connected by using the system cable. • HVSMU 1 2 11 12 10 8 3 5 6 7 To avoid electrical shock and instrument damage, do not connect/disconnect the cables during operation. Output Input HVSMU ±3 kV&Max T2 T1 T3 T4 Lcur(LC) Hcur(HC) Lpot(LP) Hpot(HP) ±3 kV&Max ±5 V&Max ±100 V&Max ±3 kV&Max ±25 V&Max ±100 V&Max #LINE 100-240 V# 50/60 Hz 70 VA Max Digital I/O Base/Gate MFCMU SMU SMU 1 SMU 2 GNDU Collector/Drain AC/DC Guard Emitter/Source Interlock Interlock Force (1F) Force (2F) Sense (1S) Base/Gate T1 T2 T3 T4 Collector/Drain Emitter/Source AC/DC Guard ±3 kV&Max Input Interlock 9 4

Introduction Test Fixture Rear View • MPSMU • GNDU 6. Connectors for connecting the CMU cable The connectors are used to connect the CMU cable from the MFCMU in the mainframe. 7. Connectors for connecting the system cable from the test fixture The connectors are used to connect the system cable for connecting the test fixture. 8. Earth terminal Screw terminal for earthing. This terminal is used to connect the earthing wire for connecting the test fixture. The wire is included in the system cable. 9. Interlock terminal This terminal is used to connect the interlock cable for connecting the test fixture. The interlock cable is included in the system cable. 10. Interlock terminal This terminal is used to connect the interlock cable from the selector. WARNING Potentially hazardous voltage may be present at the test fixture measurement terminals when the Interlock terminals are shorted on the test fixture. 11. Earth terminal Screw terminal for earthing. This terminal is used to connect the earthing wire from the selector. 12. Connectors for connecting the system cable from the selector The connectors are used to connect the system cable from the selector.

1- 17 Introduction Software Software Keysight B1507A realizes easy and effective measurement and analysis on the Windows environment using an intuitive graphical user interface, touch screen LCD, stylus pen, keyboard, and mouse. The following software is previously installed or stored in the mainframe. • “Easy Test Navigator Software” • “EasyEXPERT Software” • “Utility Software” Easy Test Navigator Software The Easy Test Navigator software provides measurement control programs for power device characterization. It supports various types of measurement task with ease-of-use and simple operation. Some of the functions are listed below. For more information on the Easy Test Navigator software, see Chapters 3 and 4. • Programs included: • Three-terminal device capacitance measurement program • I/V characteristics measurement program • Device power loss calculation program • Ready-to-use measurement templates for typical power device characteristics measurements • Ability to automatically accumulate measurement data on the HDD in exportable formats

Introduction Software EasyEXPERT Software The EasyEXPERT software is an application program for controlling Keysight B1500 series. Some of the functions are listed below. For more information, see Keysight EasyEXPERT User’s Guide. • Single measurement, repeat measurement, and append measurement • Module selector control • Measurement/setup data management by workspace • Graph display and analysis with markers, cursors, and lines; and auto analysis • Data import/export capability, data output by CSV/XML format, and graph output by EMF/BMP/GIF/PNG format • Maintenance; self-test and self-calibration • Remote control function from an external computer The EasyEXPERT has the following measurement execution environments. • Application test • Classic test • Tracer test • Quick test NOTE Application Library The EasyEXPERT contains an application library that is a set of test definitions. The application test can be performed by selecting a test definition and setting the test condition for the actual DUT (device under test). All test definitions are just sample. If the samples damage your devices, Keysight Technologies is NOT LIABLE for the damage. Utility Software Followings are the utility software available for the B1507A. For more information on the utility software, see Keysight EasyEXPERT User’s Guide Vol. 2. • Desktop EasyEXPERT software EasyEXPERT software runs on an external Windows PC. Not installed. • 4155/4156 setup file converter

1- 19 Introduction Software Program for converting the 4155/4156 measurement setup files (file extension MES or DAT) into EasyEXPERT classic test setup files. This program is stored in the following folder. \Agilent\B1500\EasyEXPERT\415xC\Conversion\ • MDM file converter Program for converting EasyEXPERT data files (file extension XTR or ZTR) into Keysight IC-CAP MDM files. This program is stored in the following folder. \Agilent\B1500\EasyEXPERT\IC-CAP Support\MDM\ • Prober control programs Execution files for controlling the probers listed below. The files are stored in the following folder. \Agilent\B1500\EasyEXPERT\Utilities\ Probers supported: • Cascade Microtech Summit 12K or S300 • SUSS MicroTec PA200 or PA300 • Vector Semiconductor VX-2000 or VX-3000 • sleep.exe program Execution file for inserting a wait time in the test execution flow of an EasyEXPERT application test. This file is stored in the following folder. \Agilent\B1500\EasyEXPERT\Utilities\ NOTE Notations is as follows. Then, is the drive the B1507A control software has been installed. For Windows 7 64 bit version, :\Program Files (x86) For Windows 7 32 bit version, Vista, or XP, :\Program Files

Introduction Accessories Accessories Furnished accessories and the available accessories for Keysight B1507A are listed in Tables 1-1 and 1-2. Table 1-1 Furnished Accessories Description Quantity System cable between mainframe and selector 1 System cable between selector and fixture 1 CMU cable 1 Digital I/O cable 1 3-pin inline package socket module 1 Connection wire, 200 mm 4 Banana pin adapter for connection wire 4 Mini alligator clip 4 USB keyboard 1 USB mouse 1 Stylus pen 1 Power cable 2 Product Reference CD-ROM 1

1- 21 Introduction Accessories Table 1-2 Available Accessories Model Number Option Item Description 16444A Accessories for B1500 series 16444A-001 USB keyboard 16444A-002 USB mouse 16444A-003 Stylus pen 16493G Digital I/O connection cable 16493G-001 1.5 m length 16493G-002 3 m length N1300A CMU connection cable N1300A-001 1.5 m length N1300A-002 3 m length

Introduction Options Options Options available for Keysight B1507A are listed in Table 1-3. Table 1-3 Options Option Item Description Calibration B1507A-A6J ANSI Z540-1-1994 Calibration B1507A-UK6 Commercial calibration certificate with test data Documentation B1507A-ABA User’s Guide, English B1507A-ABJ User’s Guide, Japanese Drive option B1507A-DR1 Replace a built-in DVD-R drive with a read-only DVD drive

1- 23 Introduction Measurement Resources Measurement Resources Keysight B1507A is equipped with the following measurement resources. • “GNDU - Ground Unit” • “MPSMU - Medium Power SMU” • “HVSMU - High Voltage SMU” • “MFCMU - Multi Frequency CMU” See Keysight EasyEXPERT User’s Guide Vol. 1 for the functions available for Keysight EasyEXPERT software. See Programming Guide for the functions available for the GPIB remote mode. GNDU - Ground Unit The ground unit (GNDU) is a 0 V constant voltage source, and used for the reference of measurement ground. Also the GNDU can sink up to ±4.2 A, so it is effective for using MPSMU or HVSMU. Figure 1-1 is a simplified circuit diagram of GNDU. Figure 1-1 Simplified GNDU Circuit Diagram GNDU 0 V Force Common

Introduction Measurement Resources About SMU Source/monitor unit (SMU) can apply DC voltage or current, and can measure DC current or voltage. Figure 1-2 is a simplified SMU circuit diagram. The MPSMU can perform the following operations: • Apply voltage and measures current or voltage • Apply current and measures current or voltage The HCSMU, MCSMU, and HVSMU can perform the following operations: • Apply voltage and measures current and/or voltage • Apply current and measures current and/or voltage NOTE To select the SMU operation mode in the GPIB remote condition, enter the CMM command. Figure 1-2 Simplified SMU Circuit Diagram Compliance The SMU has a compliance feature that limits output voltage or current to prevent damage to the device under test. When the SMU applies voltage, you can specify current compliance. When the SMU applies current, you can specify voltage compliance. For details on the compliance, see Keysight EasyEXPERT User’s Guide Vol. 1. SMU Force Common V A + - + -

1- 25 Introduction Measurement Resources MPSMU - Medium Power SMU This section describes typical specification of the medium power source/monitor unit (MPSMU). • Maximum voltage, current, output power: ± 100 V, ± 100 mA, 2 W • Minimum range: 0.5 V, 1 nA • Output/measurement value and resolution: see Table 1-4 to Table 1-7. Figure 1-3 MPSMU Output and Measurement Ranges 100 100 40 40 20 20 100 50 20 50 20 100 Voltage (V) Current (mA) - - - - - -

Introduction Measurement Resources Table 1-4 MPSMU Output Voltage Ranges and Resolutions Table 1-5 MPSMU Output Current Ranges and Resolutions Range Output Value Setting Resolution Maximum Current 0.5 V 0 |V|  0.5 V 25 V ± 100 mA 2 V 0  |V|  2 V 100 V ± 100 mA 5 V 0  |V|  5 V 250 V ± 100 mA 20 V 0  |V|  20 V 1 mV ± 100 mA 40 V 0  |V|  20 V 2 mV ± 100 mA 20 V < |V|  40 V 2 mV ± 50 mA 100 V 0  |V|  20 V 5 mV ± 100 mA 20 V < |V|  40 V 5 mV ± 50 mA 40 V < |V|  100 V 5 mV ± 20 mA Range Output Value Setting Resolution Maximum Voltage 1 nA 0  |I|  1.15 nA 50 fA ± 100 V 10 nA 0  |I|  11.5 nA 500 fA ± 100 V 100 nA 0  |I|  115 nA 5 pA ± 100 V 1 A 0  |I|  1.15 A 50 pA ± 100 V 10 A 0  |I|  11.5 A 500 pA ± 100 V 100 A 0  |I|  115 A 5 nA ± 100 V 1 mA 0  |I|  1.15 mA 50 nA ± 100 V 10 mA 0  |I|  11.5 mA 500 nA ± 100 V 100 mA 0  |I|  20 mA 5 A ± 100 V 20 mA < |I|  50 mA 5 A ± 40 V 50 mA < |I|  100 mA 5 A ± 20 V

1- 27 Introduction Measurement Resources Table 1-6 MPSMU Measurement Voltage Values and Resolutions Table 1-7 MPSMU Measurement Current Values and Resolutions Range Measurement Value a Measurement Resolutions High Speed ADC High Resolution ADC 0.5 V 0  |V|  0.55 V 25 V 0.5 V 2 V 0  |V|  2.2 V 100 V 2 V 5 V 0  |V|  5.5 V 250 V 5 V 20 V 0  |V|  22 V 1 mV 20 V 40 V 0  |V|  44 V 2 mV 40 V 100 V 0  |V|  100 V 5 mV 100 V Range Measurement Value a a. This column is applied to the auto ranging or the limited auto ranging. For fixed ranging, maximum measurement value is Range column value. Measurement Resolutions High Speed ADC High Resolution ADC 1 nA 0  |I|  1.15 nA 50 fA 10 fA 10 nA 0  |I|  11.5 nA 500 fA 10 fA 100 nA 0  |I|  115 nA 5 pA 100 fA 1 A 0  |I|  1.15 A 50 pA 1 pA 10 A 0  |I|  11.5 A 500 pA 10 pA 100 A 0  |I|  115 A 5 nA 100 pA 1 mA 0  |I|  1.15 mA 50 nA 1 nA 10 mA 0  |I|  11.5 mA 500 nA 10 nA 100 mA 0  |I|  100 mA 5 A 100 nA

Introduction Measurement Resources HVSMU - High Voltage SMU This section describes typical specification of the high voltage source/monitor unit (HVSMU). • Maximum voltage/current: 3000 V/4 mA, -3000 V/-4 mA, 1500 V/8 mA, or -1500 V/-8 mA • Maximum output power: 12 W • Minimum range: 200 V, 1 nA • Output/measurement value and resolution: see Table 1-8 and Table 1-9. CAUTION Never connect the HVSMU Force and Guard terminals to any output, including circuit common, chassis ground, or any other measurement resource such as SMU. Connecting other measurement resource may damage the connected one. Figure 1-4 HVSMU Output and Measurement Ranges 3000 3000 1500 1500 8 4 4 8 Voltage (V) Current (mA) - - - - 1 - 1

1- 29 Introduction Measurement Resources Table 1-8 HVSMU Voltage Ranges and Resolutions Table 1-9 HVSMU Current Ranges and Resolutions Range Output Value and Measurement Value Setting/ Measurement Resolution Maximum Current |Imax| 200 V 0  |V|  200 V 200 V 8 mA 500 V 0  |V|  500 V 500 V 8 mA 1500 V 0  |V|  1500 V 1.5 mV 8 mA 3000 V 0  |V|  3000 V 3 mV 4 mA Range Output Value and Measurement Value Setting/ Measurement Resolution Maximum Voltage |Vmax| 1 nAa a. DC only 0  |I|  1.15 nA 10 fA 3000 V 10 nA 0  |I|  11.5 nA 100 fA 3000 V 100 nA 0  |I|  115 nA 100 fA 3000 V 1 A 0  |I|  1.15 A 1 pA 3000 V 10 A 0  |I|  11.5 A 10 pA 3000 V 100 A 0  |I|  115 A 100 pA 3000 V 1 mA 0  |I|  1.15 mA 1 nA 3000 V 10 mA 0  |I|  8 mA 10 nA 1500 V 0  |I|  4 mA 3000 V

Introduction Measurement Resources MFCMU - Multi Frequency CMU This section describes typical specification of the multi frequency capacitance measurement unit (CMU). The CMU performs the impedance measurement and returns the specified measurement data such as Cp-G. • Measurement parameters: See Table 1-10. • AC signal, output frequency: 1 kHz to 5 MHz Setting resolution: 1 mHz (1 kHz to), 10 mHz (10 kHz to), 0.1 Hz (100 kHz to), or 1 Hz (1 MHz to 5 MHz) • AC signal, output level: 10 mVrms to 250 mVrms, 1 mV resolution • DC bias: 0 to ± 25 V, using MFCMU internal DC bias 0 to ± 3000 V, using HVSMU and high voltage bias-tee • Measurement range: For the fixed ranging mode, measurement range (impedance range) must be specified to perform measurement. Table 1-11 shows the available measurement ranges and the corresponding impedance value. And Figure 1-5 shows the calculation example of the impedance vs frequency characteristics of a capacitive load. Use these information to decide the measurement range. Impedance Z is calculated by the following formula. Z = 1 / (2 f C) where f is frequency (Hz) and C is capacitance (F).

1- 31 Introduction Measurement Resources Table 1-10 Measurement Parameters Primary Parameter Secondary Parameter R (resistance, ) X (reactance, ) G (conductance, S) B (susceptance, S) Z (impedance, )  (phase, radian) Z (impedance, )  (phase, degree) Y (admittance, S)  (phase, radian) Y (admittance, S)  (phase, degree) Cp (parallel capacitance, F) G (conductance, S) Cp (parallel capacitance, F) D (dissipation factor) Cp (parallel capacitance, F) Q (quality factor) Cp (parallel capacitance, F) Rp (parallel resistance, ) Cs (series capacitance, F) Rs (series resistance, ) Cs (series capacitance, F) D (dissipation factor) Cs (series capacitance, F) Q (quality factor) Lp (parallel inductance, H) G (conductance, S) Lp (parallel inductance, H) D (dissipation factor) Lp (parallel inductance, H) Q (quality factor) Lp (parallel inductance, H) Rp (parallel resistance, ) Ls (series inductance, H) Rs (series resistance, ) Ls (series inductance, H) D (dissipation factor) Ls (series inductance, H) Q (quality factor)

Introduction Measurement Resources Table 1-11 Measurement Range for Fixed Ranging Mode Figure 1-5 Impedance vs Frequency Characteristics of Capacitive Load, Calculation Example Impedance Z Measurement range (impedance range) 1 kHz  f  200 kHz 200 kHz < f  2 MHz 2 MHz < f  5 MHz 0  Z < 100  50  50  50  100   Z < 300  100  100  100  300   Z < 1 k 300  300  300  1 k  Z < 3 k 1 k 1 k 1 k 3 k  Z < 10 k 3 k 3 k 3 k 10 k  Z < 30 k 10 k 10 k 30 k  Z < 100 k 30 k 30 k 100 k  Z < 300 k 100 k 300 k  Z 300 k 10 n7 100 n7 1 M7 10 M7 100 M7 1 m7 10 m7 100 m7 1 7 10 7 100 7 1 k7 10 k7 100 k7 1 M7 10 M7 100 M7 1 G7 10 G7 100 G7 1 T7 10 T7 1 kHz 10 kHz 100 kHz 1 MHz 5 MHz Frequency f Impedance Z 10 MF 100 MF 1 mF 10 mF 100 mF 1 F 10 pF 100 pF 1 nF 10 nF 100 nF 1 MF 100 fF 1 pF 10 fF 100 aF 1 fF 300 k7 range 50 7 range 3 k7 range

Installation This chapter describes how to install Keysight B1507A. • “Requirements” • “Inspection and Installation” • “Connecting Accessories” • “Maintenance” • “Before Shipping to Service Center” WARNING To avoid electrical shock and instrument damage, turn the all instruments off before connecting or disconnecting measurement cable. Mettez la machine hors tension pour fixer le connecteur ou pour retirer le connecteur de l’unité centrale. WARNING The mainframe and the test fixture are heavy and require a two person lift. Le châssis principale et l'équipement de test sont lourds et nécessitent un levage par deux personnes. CAUTION Do not grab the fixture cover when lifting the test fixture.

2- 3 Installation WARNING There are potentially hazardous voltages (± 3000 Vdc for HVSMU and ± 100 Vdc for MPSMU) present at the Force, Guard, and Sense terminals of the instruments. To prevent electrical shock, the following safety precautions must be observed during the use of instruments. • Connect the instrument to an electrical ground (safety ground) by using three-conductor AC power cable. • Connect the mainframe Interlock terminal to the selector Interlock terminal by using an interlock cable. Also connect the selector Interlock terminal to the test fixture Interlock terminal by using an interlock cable. • Confirm periodically that the interlock function works normally. • Before touching the connections on the Force, Guard, and Sense terminals in the test fixture or the shielding box, turn the instruments off and discharge any capacitors. If you do not turn the instruments off, complete all of the following items, regardless of the instrument settings. • Press the front panel Stop key to set the source output off. • Confirm that the front panel High Voltage indicator is not lit. • Open the Interlock terminal (open the fixture cover or the shielding box access door). • Discharge any capacitors connected to a measurement resource. • Warn persons working around the instruments about dangerous conditions.

Installation Requirements Requirements This section describes the requirements for the environment this instrument is used. • “Power Requirements” • “Operating Environment” • “Storaging/Shipping Environment” • “Installation Requirements” • “Power Cable” Power Requirements This instrument can operate from any single-phase AC power source supplying 100/ 240 V (±10 %) at 50/60 Hz. The maximum power consumption is shown below. • Mainframe: 900 VA • Selector: 70 VA Operating Environment This instrument must be operated within the following environmental conditions: Temperature: +5 C to +40 C Humidity: 20 % to 70 % RH, no condensation Altitude: 0 to 2,000 m (6,561 ft.) Storaging/Shipping Environment This instrument must be stored/shipped within the following environmental conditions: Temperature: -20 C to +60 C Humidity: 10 % to 90 % RH, no condensation Altitude: 0 to 4,600 m (15,092 ft.)

2- 5 Installation Requirements Installation Requirements WARNING Do not operate the instrument in dusty environment, or in the presence of flammable gasses, corrosive gasses, or fumes. Ne pas utiliser l’appareil dans un endroit poussiéreux, ou en présence de gaz inflammables, corrosifs ou de fumée. • Environmental conditions for this instrument are documented in the previous page. In principle, this instrument should only be operated indoors in a controlled environment. • Install the instrument horizontal place then face the roof up. • The dimensions of this instrument are shown below. Fan cools the instrument by drawing air through the sides and exhausting it out the back. The instrument must be installed in a location that allows sufficient space at the sides and back of the instrument for adequate air circulation. • Mainframe: 420 mm (W)  575 mm (D)  330 mm (H) • Selector: 420 mm (W)  575 mm (D)  75 mm (H) • Test fixture: 340 mm (W)  345 mm (D)  200 mm (H) If the airflow is restricted, the internal operating temperature will be higher. This may reduce the instrument’s reliability, or cause the thermal-protection circuits to turn the instrument off. • Make sure that there is enough space for connecting/disconnecting the power cable easily.

Installation Requirements Power Cable WARNING FIRE HAZARD: Use only the power cable supplied with your instrument. Using other types of power cable may cause overheating of the power cable, resulting in fire. SHOCK HAZARD: The power cable provides the chassis ground through a third conductor. Be sure to connect to a three-conductor type power outlet with the correct pin grounded. RISQUE D’INCENDIE : utilisez uniquement le câble d'alimentation fourni avec votre appareil. L’utilisation d’autres types de câble d’alimentation peut provoquer une surchauffe du câble d’alimentation et provoquer un incendie. RISQUE DE CHOC ÉLECTRIQUE: le câble d’alimentation fournit la masse du châssis par le biais d’un troisième conducteur. Assurez-vous de connecter la prise d'alimentation de type trois conducteurs avec la broche correcte mise à la terre. NOTE The detachable power cable may be used as an emergency disconnecting device. Removing the power cable will disconnect AC input power to the instrument. Connect the power cable to the IEC 320 connector on the rear of the instrument. If the wrong power cable was shipped with your instrument, contact your nearest Keysight Sales and Support Office. The AC input on the back of your instrument is a universal AC input. It accepts nominal line voltages in the range of 100 to 240 VAC.

2- 7 Installation Requirements Option 900 • Plug: BS 1363/A, 250 V, 10 A • PN: 8120-4420 Option 901 • Plug: AS/NZS 3112, 250 V, 10 A • PN: 8120-4419 Option 902 • Plug: IEC 60277-1, 250 V, 10 A • PN: 8121-1226 Option 903 • Plug: NEMA 5-15P, 125 V, 10 A • PN: 8120-6825 Option 904 • Plug: NEMA 6-15P, 250 V, 10 A • PN: 8120-3996 Option 906 • Plug: SEV 1011, 250 V, 10 A • PN: 8120-4416 Option 912 • Plug: SB 107-2-D1, 250 V, 10 A • PN: 8121-1655 Option 917 • Plug: IS 1293 and IS 6538, 250 V, 10 A • PN: 8121-1690 Option 918 • Plug: JIS C 8303, 125 V, 12 A • PN: 8121-0743 Option 919 • Plug: Israel SI 32, 250 V, 10 A • PN: 8121-0724 Option 920 • Plug: IRAM 2073, 250 V, 10 A • PN: 8121-0725 Option 921 • Plug: CEI 23-16, 250 V, 10 A • PN: 8121-0722 Option 922 • Plug: GB 1002 figure 3, 250 V, 10 A • PN: 8120-8376 Option 923 • Plug: SANS 164-1, 250 V, 10 A • PN: 8121-0564 Option 927 • Plug: NEMA WD-6, 250 V, 10 A • PN: 8120-0674 Option 930 • Plug: NBR 14136, 250 V, 10 A • PN: 8121-1809 Option 931 • Plug: CNS 10917-2, 125 V, 10 A • PN: 8121-1635 Option 932 • Plug: CS 0017, 250 V, 10 A • PN: 8121-1638

Installation Inspection and Installation Inspection and Installation Do the following when this instrument arrived. • “To Inspect Shipment” • “To Perform Initial Setup” • “To Connect Selector and Test Fixture” • “To Check Operation of Selector” Do the following setup if you need. • “To Change Windows Logon Setting” • “To Change GPIB Address” • “To Enable System Controller” To Inspect Shipment 1. Before unpacking any components, inspect all boxes for any signs of damage that might have occurred during shipment, such as: • dents • scratches • cuts • water marks If you suspect any damage, contact Keysight Technologies. 2. When you open the boxes that contain the instrument and accessories, check the components against the contents lists attached to the boxes. If anything is missing, contact Keysight Technologies. After the inspection, move the instrument and accessories to the installation site. For the requirements for the installation site, see “Requirements” on page 2-4.

2- 9 Installation Inspection and Installation To Perform Initial Setup 1. Place the mainframe at the installation site. 2. Make sure that the Standby switch is set to off. 3. On the rear panel, connect the Circuit Common terminal to the frame ground terminal by using a shorting-bar. 4. If you use the furnished USB keyboard and/or USB mouse, connect it to an USB port of the mainframe. 5. Connect the power cable from the mainframe to an AC power outlet. 6. Open the measurement terminals and press the Standby switch to turn on the mainframe. If the mainframe is operating correctly, the power-on self-test is automatically performed. If problems arise, contact Keysight Technologies. 7. Follow the Windows setup wizard and complete the initial setup. a. Set the system display language to English. The language must be English. If you set another language, you must perform the system recovery of the B1507A. See Keysight EasyEXPERT User’s Guide Vol. 2 for the system recovery. b. Set Country or region, Time and currency, and Keyboard layout. If you use the furnished USB keyboard, the Keyboard layout must be US. c. Accept the End User License Agreement. d. Set Time zone, date and time. If the mainframe has been already connected to your site LAN, you can proceed the network connection setup. If you connect the mainframe to the network, take care to protect it from computer virus. NOTE Other Windows setup You can set other setup of Windows after the initial setup. It is your responsibility. NOTE Keysight Technologies cannot guarantee the performance and provide compatibility information for all B1507As under several conditions. If problems arise, perform Keysight B1507A system recovery. To perform recovery, see Keysight EasyEXPERT User’s Guide Vol. 2.

Installation Inspection and Installation Users listed in Table 2-1 are available just after the initial setup. Table 2-1 Users Available Just After the Initial Setup You can add users after the initial setup. Add users as you need. User Account Description Keysight B1500 User Account for automatic logon. Password is not set to this account. keysightOnly Account for Keysight service personnel. Do not delete this account. This account is password protected. Administrator Administrator. Password is not set to this account.

2- 11 Installation Inspection and Installation To Connect Selector and Test Fixture WARNING To avoid electrical shock and instrument damage, turn the all instruments off before connecting or disconnecting measurement cable. Mettez la machine hors tension pour fixer le connecteur ou pour retirer le connecteur de l’unité centrale. Figure 2-1 B1507A Rear View Connect the system cables between the mainframe, selector, and test fixture as shown in Figure 2-1. Also see Tables 2-2 and 2-3. 1. Connect the System cable between the mainframe and the selector. 2. Connect the CMU cable. 3. Connect the Digital I/O cable. System cable 1 CMU cable Digital I/O cable System cable 2 Selector Test fixture Mainframe

Installation Inspection and Installation 4. Connect the System cable between the selector and the test fixture. Table 2-2 System Cable Connections between Mainframe and Selector Table 2-3 System Cable Connections between Selector and Test Fixture Mainframe Label of Cable Selector System Cable 1 Interlock none none Interlock GNDU GNDU GNDU GNDU SMU1 Sense 1S 1S Sense (1S) SMU SMU1 Force 1F 1F Force (1F) SMU2 Force 2 2 Force (2F) HVSMU SMU2 CMU Cable MFCMU Hpot HP Hpot (HP) MFCMU Lpot LP Lpot (LP) Hcur HC Hcur (HC) Lcur LC Lcur (LC) Digital I/O Cable Digital I/O none none Digital I/O Selector Label of Cable Test Fixture System Cable 2 AC/DC Guard T4 T4 AC/DC Guard Emitter/Source T3 T3 Emitter/Source Base/Gate T1 T1 Base/Gate Collector/Drain T2 T2 Collector/Drain Earth terminal none none Earth terminal Interlock none none Interlock

2- 13 Installation Inspection and Installation To Check Operation of Selector 1. Complete the cable connections described in “To Connect Selector and Test Fixture” on page 2-11. 2. Connect the power cable from the selector to an AC power outlet. 3. Connect the power cable from the mainframe to an AC power outlet. 4. Open the measurement terminals of the test fixture and close the fixture cover. 5. Set the selector power switch to the ON position to turn on the selector. 6. Press the mainframe Standby switch to turn on the mainframe. 7. After boot up, launch the Capacitance Measurement software. 8. Click the Configuration > Module menu to display the Module Configuration dialog box. 9. Perform diagnosis of the selector by using the Module Configuration dialog box. If problems arise, contact Keysight Technologies. To Change Windows Logon Setting Windows automatic logon has been enabled initially. If you want to change this setting, select All Programs > Control Auto Logon from the Start menu. Control Auto Logon is displayed on the browser. Then click one of the following buttons on the browser and follow the setup script. • Enable Auto Logon • Disable Auto Logon NOTE If you set a password for the user account Keysight B1500 User, disable the automatic logon.

Installation Inspection and Installation To Change GPIB Address When this instrument is shipped from the factory, the GPIB address is set to 17. To change the GPIB address, perform the following procedure. 1. If the EasyEXPERT software is running, terminate it as shown below: a. Select the menu function File > Exit on the EasyEXPERT main screen. b. Click [x] at the upper right corner of the Start EasyEXPERT button. 2. Select All Programs > Keysight IO Libraries Suite > Keysight Connection Expert from the Start menu. Keysight Connection Expert window appears. 3. At the Instrument I/O on this PC area, select GPIB0, and click the Change Properties... button. Keysight 82350 PCI GPIB Interface - GPIB0 window appears. 4. Change the GPIB Address value. 5. Remove the check from the Auto-discover instruments connected to this interface box. 6. Click the OK button on Keysight 82350 PCI GPIB Interface - GPIB0 window. 7. On the Reboot Required dialog box, click the Reboot Now button, and reboot the mainframe.

2- 15 Installation Inspection and Installation To Enable System Controller To allow this instrument to control external GPIB devices, perform the following procedure. After the procedure, you cannot control the instrument from an external computer. 1. If the EasyEXPERT software is running, terminate it as shown below: a. Select the menu function File > Exit on the EasyEXPERT main screen. b. Click [x] at the upper right corner of the Start EasyEXPERT button. 2. Select All Programs > Keysight IO Libraries Suite > Keysight Connection Expert from the Start menu. Keysight Connection Expert window appears. 3. At the Instrument I/O on this PC area, select GPIB0, and click the Change Properties... button. Keysight 82350 PCI GPIB Interface - GPIB0 window appears. 4. Set the GPIB Address value to 21 that is the typical address number for the system controller. 5. Check the System Controller box. 6. Remove the check from the Auto-discover instruments connected to this interface box. This disables the automatic device detection. So the Connection Expert cannot detect the instruments connected to the GPIB interface by itself. 7. Click the OK button on Keysight 82350 PCI GPIB Interface - GPIB0 window. 8. On the Reboot Required dialog box, click the Reboot Now button, and reboot the mainframe. NOTE To Disable System Controller To disable the system controller, change the steps 4 and 5 for setting the GPIB Address value to not 21 and removing the check from the System Controller box, and perform the procedure to the step 8.

Installation Connecting Accessories Connecting Accessories The test fixture is used to connect your device under test (DUT). The B1507A is furnished with the following accessories. • “3-pin Inline Package Socket Module” • “Accessories for Connecting a DUT” WARNING Set the instrument output off before connecting or disconnecting connection wire. Press the mainframe front panel Stop key to set the source output off. And confirm that the mainframe front panel High Voltage indicator is not lit. WARNING To prevent electrical shock and DUT damage, do not connect or disconnect the DUT while the instrument is applying voltage or current. When you touch the DUT after measurement, devise a countermeasure of residual charge and heat to prevent electrical shock and burn. Use glove and any tool. Also have enough time for discharge and radiation. Pour éviter toute électrocution et tout risque d'endommagement de l'appareil, ne retirez pas les câbles pendant le fonctionnement. Lorsque vous touchez le MST après la mesure, élaborez une contre-mesure de la charge résiduelle et du chauffage afin d'éviter tout choc électrique et toute brûlure. Utilisez des gants et des outils. Prévoyez également du temps pour la décharge et la radiation.

2- 17 Installation Connecting Accessories 3-pin Inline Package Socket Module Use the socket module to connect a three-terminal inline packaged device. See the following simple instruction. Requirements • 3-pin inline package socket module • DUT Procedure 1. If the earthing wire is not connected to the socket module, connect it. 2. Attach the socket module directly to the Base/Gate, Collector/Drain, and Emitter/Source terminals of the test fixture. 3. Connect the earthing wire of the socket module to the chassis common terminal. 4. Set your DUT on the socket. 5. Close the fixture cover and perform measurement. WARNING Hazardous voltage, instrument maximum output voltage may appear at the measurement terminals if the fixture cover is closed. WARNING Open the Guard terminal of the test fixture. Do not connect anything to it. NOTE Short plate is furnished with the socket module. It is used for performing the short correction before the capacitance measurement. Set it on the socket before the short correction and remove it after the correction. Socket module Test fixture DUT Chassis common

Installation Connecting Accessories Accessories for Connecting a DUT Use the connection wire, clip, adapter, and so on to connect a device other than 3-pin inline package. Requirements • Connection wire, clip, adapter, and so on. Use the furnished accessories. • DUT (other than 3-pin inline package device) Procedure 1. Put your DUT on the DUT stage (silicon plate). The device size should be smaller than approximately 280 mm (W)  140 mm (D)  100 mm (H). 2. Connect your DUT to the measurement terminals of the test fixture by using connection wire, clip, adapter, and so on. 3. Close the fixture cover and perform measurement. WARNING Hazardous voltage, instrument maximum output voltage may appear at the measurement terminals if the fixture cover is closed. WARNING Open the AC/DC Guard terminal to avoid electrical shock, instrument damage, or DUT damage. Do not connect anything to this terminal which may have the same potential as the Collector/Drain terminal. WARNING Make sure that the cover is closed properly before starting measurement. Do not perform the measurement when a wire is protruding from the fixture cover. Assurez-vous que le couvercle est fermé correctement avant de commencer la mesure. Ne pas effectuer la mesure lorsqu’un câble dépasse du couvercle de l'appareil. Base Low is internally connected to Emitter. Base Base Emitter Low High Collector AC/DC Guard Emitter/Source Collector/Drain Base/Gate ±3 kV&Max

2- 19 Installation Maintenance Maintenance Maintenance should be performed periodically to keep the instrument in good condition. Cleaning Before performing cleaning, turn off the instrument, and disconnect power cable from the rear panel. Use a dry cloth to clean the external case parts. To prevent electrical shock, do not perform cleaning when the instrument is turned on, and do not use a wet cloth. Self-test and Diagnosis This instrument provides the following functions to check the operation. Perform the following functions as necessary. Open the measurement terminals to perform self-test, self-calibration, or diagnosis. • Self-test • Self-calibration • Diagnosis If problems arise, contact Keysight Technologies. NOTE Interlock Open/Close test and High Voltage LED test Interlock function limits the maximum output voltage to ± 42 V when the measurement terminal is touchable. For safety, this function must be checked before using the instrument after power on at least once a day by performing the diagnosis. Calibration Calibration and adjustments must be performed periodically so that the instruments satisfy the specifications, and keep a good condition. It is recommended to perform the calibration once a year at least. For the calibration and adjustments, contact Keysight Technologies. Trained service personnel will perform the calibration and adjustments.

Installation Before Shipping to Service Center Before Shipping to Service Center Before shipping this instrument to service center, you have to do following: • “To Make Backup” • “To Check Module Slots” • “To Collect Equipment and Accessories” To Make Backup If the internal hard disk drive (HDD) is failed, you will lose all data stored in the HDD. So it is important to make backup constantly. Before shipping the instrument to the service center, make backup of data in the HDD. And keep the backup media in trust. You may need to perform data recovery of the instrument returned from the service center. If the HDD is replaced, the instrument will be returned with the latest revision of the software. To Check Module Slots Do not remove the plug-in module from the mainframe. The instrument must be shipped with all modules. The module cannot be repaired or calibrated without the mainframe. If a module is removed and installed, the specifications are not guaranteed. The specifications are guaranteed after the calibration is performed at Keysight Technologies service center. To Collect Equipment and Accessories The mainframe, test fixture, and all connection cables are required for servicing and must be shipped to the service center. For details, contact the service center. WARNING To prevent electrical shock, turn off the instrument and remove the power cable before removing the connection cables. Mettez la machine hors tension pour fixer le connecteur ou pour retirer le connecteur de l’unité centrale.

How To Perform Measurement This chapter describes how to measure the power devices by using Keysight B1507A and Keysight Easy Test Navigator Software, and consists of the following sections: • How To Perform Capacitance Measurement This section describes how to perform the measurement using the capacitance measurement software. • How To Perform I/V Measurement This section describes how to perform the measurement using the I/V measurement software. • How To Calculate Power Loss This section describes how to calculate the power loss using the power loss calculation software.

3- 3 How To Perform Measurement How To Perform Capacitance Measurement How To Perform Capacitance Measurement This section describes how to perform a measurement using the capacitance measurement software and consists of the following sub-sections: • Preparing Measurement • Executing Measurement • Setting Parameter Figure 3-1 Capacitance Measurement Software

How To Perform Measurement How To Perform Capacitance Measurement Preparing Measurement WARNING Set the instrument output off before connecting or disconnecting connection wire. Press the mainframe front panel Stop key to set the source output off. And confirm that the mainframe front panel High Voltage indicator is not lit. WARNING To prevent electrical shock and DUT damage, do not connect or disconnect the DUT while the instrument is applying voltage or current. When you touch the DUT after measurement, devise a countermeasure of residual charge and heat to prevent electrical shock and burn. Use glove and any tool. Also have enough time for discharge and radiation. Step 1. Prepare the test fixture and other accessories to connect your device under test (DUT). For more information on the test fixture and its accessories, see the following sections: • “To Connect Selector and Test Fixture” on page 2-11 • “3-pin Inline Package Socket Module” on page 2-17 • “Accessories for Connecting a DUT” on page 2-18 Step 2. Connect the test fixture and, 3-pin inline package socket module or other accessories that is adequate for your DUT. For more information, see the following sections: • “To Connect Selector and Test Fixture” on page 2-11 • “3-pin Inline Package Socket Module” on page 2-17 • “Accessories for Connecting a DUT” on page 2-18 Step 3. Turn the instrument on.  Don’t connect your DUT to the test fixture at this time.

3- 5 How To Perform Measurement How To Perform Capacitance Measurement Executing Measurement NOTE This section explains the procedure using an example that selects MOSFET as a device type of DUT and Ciss, Coss, Crss as a measurement item. Execute a measurement as follows: Step 1. On the software palette, click the Capacitance Measurement icon . The Capacitance Measurement software (Figure 3-1) opens. Step 2. At the Setup area in work area, select a device type of your DUT and a measurement item to be measured. • Device Type Select a device type from the Device Type drop-down list. NOTE This example selects MOSFET. • Measurement Item From the radio buttons located on the right of a Device Type selection, which is MOSFET in this example, select a measurement item to be measured. NOTE This example selects Ciss, Coss, Crss. NOTE For information on the available device types and measurement items, see Table 3-1 on page 3-8 By selecting a device type and measurement item, the setup items displayed in the Setup area are automatically switched.

How To Perform Measurement How To Perform Capacitance Measurement Step 3. Enter the measurement frequency in the Frequency of General settings located at the left part of Setup area. By clicking the Details chevron, the area expands to set more detail conditions. For more information on setting items, see “Setup” on page 4-11. Step 4. Enter the bias voltage value in the Bias of Base/Gate Voltage Bias at the center of Setup area. Step 5. Enter or select the voltage sweep conditions in the Collector/Drain Voltage Sweep at the right of Setup area. Start Enter a start voltage value of sweep. Stop Enter a stop voltage value of sweep. Sweep Mode Select a sweep mode. LinearSingle One-way linear sweep from the Start to the Stop. LogSingle One-way logarithmic sweep from the Start to the Stop. LinearDouble Linear-sweep from the Start to the Stop and then return linear-sweep from the Stop to the Start. LogDouble Logarithmic-sweep from the Start to the Stop and then return logarithmic-sweep from the Stop to the Start. By clicking the Details chevron, the area expands to set more detail conditions.

3- 7 How To Perform Measurement How To Perform Capacitance Measurement For more information on setting items, see “Setup” on page 4-11. Step 6. Click the Start Calibration... button in the toolbar to measure the calibration data of measurement path. Follow the instruction displayed on the dialog to measure the open and short calibration data. If you have measured and saved the calibration data of measurement path, click the Select Calibration Data... button in the toolbar to select and load the stored calibration data. Step 7. Set your DUT on the test fixture and click the Start Measurement button to start a measurement. You can stop the measurement by clicking the Stop Measurement button during a measurement execution. NOTE If your DUT is diode, connect the cathode of your DUT to the Collector/Drain terminal of the test fixture and the anode of your DUT to the Emitter/Source terminal of the test fixture. Step 8. Click the Characteristics tab to display the Characteristics area. After a measurement is finished, a measured capacitance characteristics curve is displayed on the Characteristics area. This example shows the Ciss, Coss, and Crss, characteristics curves.

How To Perform Measurement How To Perform Capacitance Measurement For the operation on the graph display, see “Displaying and Operating Graph” on page 3-26. Setting Parameters Table 3-1 Available Device Types and Measurement Items Device Type Measurement Item Description MOSFET Ciss Ciss (Input capacitance) - Vds characteristics Coss Coss (Output capacitance) - Vds characteristics Crss Crss (Feedback capacitance) - Vds characteristics Ciss, Coss, Crss Ciss, Coss, and Crss characteristics Cgs Cgs (Gate to Source capacitance) - Vds characteristics Cds Cds (Drain to Source capacitance) - Vds characteristics Cgd Cgd (Gate to Drain capacitance) - Vds characteristics Cgs, Cds, Cgd Cgs, Cds, and Cgd characteristics Rg Rg (Gate resistance) - Vgs characteristics Cox Cox (Gate oxide film capacitance) - Vgs characteristics IGBT Cies Cies (Input capacitance) - Vce characteristics Coes Coes (Output capacitance) - Vce characteristics Cres Cres (Feedback capacitance) - Vce characteristics Cies, Coes, Cres Cies, Coes, and Cres characteristics Cge Cge (Gate to Emitter capacitance) - Vce characteristics Cce Cce (Collector to Emitter capacitance) - Vce characteristics Cgc Cgc (Gate to Collector capacitance) - Vce characteristics Cge, Cce, Cgc Cge, Cce, and Cgc characteristics Rg Rg (Gate resistance) - Vge characteristics Diode CT Total capacitance at reverse bias to bias voltage characteristics Generic Collector/Drain Voltage Sweep Cp-G model capacitance between Collector/Drain terminal and Emitter/Source terminal to Vce/Vds characteristics Base/Gate Voltage Sweep Cs-Rs model capacitance between Base/Gate terminal and Emitter/Source terminal to Vbe/Vgs characteristics

3- 9 How To Perform Measurement How To Perform I/V Measurement How To Perform I/V Measurement This section describes how to perform a measurement using the I/V measurement software and consists of the following sub-sections: • Preparing Measurement • Executing Measurement • Setting Parameter Figure 3-2 I/V Measurement Software

How To Perform Measurement How To Perform I/V Measurement Preparing Measurement WARNING Set the instrument output off before connecting or disconnecting connection wire. Press the mainframe front panel Stop key to set the source output off. And confirm that the mainframe front panel High Voltage indicator is not lit. WARNING To prevent electrical shock and DUT damage, do not connect or disconnect the DUT while the instrument is applying voltage or current. When you touch the DUT after measurement, devise a countermeasure of residual charge and heat to prevent electrical shock and burn. Use glove and any tool. Also have enough time for discharge and radiation. Step 1. Prepare the test fixture and other accessories to connect your device under test (DUT). For more information on the test fixture and its accessories, see the following sections: • “To Connect Selector and Test Fixture” on page 2-11 • “3-pin Inline Package Socket Module” on page 2-17 • “Accessories for Connecting a DUT” on page 2-18 Step 2. Connect the test fixture and, 3-pin inline package socket module or other accessories that is adequate for your DUT. For more information, see the following sections: • “To Connect Selector and Test Fixture” on page 2-11 • “3-pin Inline Package Socket Module” on page 2-17 • “Accessories for Connecting a DUT” on page 2-18 Step 3. Turn the instrument on and then connect your DUT to the test fixture. If your DUT is diode, connect a cathode terminal of your DUT to the Collector/Drain terminal of test fixture and a anode terminal of your DUT to the Emitter/Source terminal of test fixture.

3- 11 How To Perform Measurement How To Perform I/V Measurement Executing Measurement NOTE This section explains the procedure using an example that selects MOSFET as a device type of DUT and ID-VDS as a measurement item. Execute a measurement as follows: Step 1. On the software palette, click the I/V Measurement icon . The I/V Measurement software (Figure 3-2) opens. Step 2. At the Setup area in work area, select a device type and measurement item to be measured. • Device Type From the Device Type drop-down list, select a device type. NOTE This example selects MOSFET. • Measurement Item From the radio buttons located on the right of a Device Type selection, which is MOSFET in this example, select a measurement item to be measured. NOTE This example selects ID-VDS. NOTE For information on the available device types and measurement items, see Table 3-2 on page 3-17 By selecting a device type and measurement item, the setup items displayed in the Setup area are automatically switched.

How To Perform Measurement How To Perform I/V Measurement Step 3. Enter or select the setup conditions for the gate of MOSFET in Gate/Base Voltage Pulse Step at the center of Setup area. • Selecting Step Mode From the Step Mode drop-down list, select a step mode of pulse voltage output. LinearSingle Outputs voltage level changes from the Start value to the Stop value at equal intervals. ListSingle Specify the output voltages of each step in the List. Each step voltage in the List will be output in order from top to bottom. NOTE This example selects the ListSingle. • To change step values Click the value in the List and you can change it to new value. • To insert new step value

3- 13 How To Perform Measurement How To Perform I/V Measurement Select the step value immediately after where you want to insert new step value and click the Insert button . • To change an output order of step values Click the Move Down and the Move Up buttons to move down or up an order of the selected step value. • To delete a step value Click the Delete button to delete the selected step value. By clicking the Details chevron, the area expands to set more detail conditions. For more information on setting items, see “Setup” on page 4-38. Step 4. Enter or select the setup conditions for the drain of MOSFET in Drain/Collector Voltage Pulse Sweep at the right side of Setup area. Select or specify a sweep mode, a sweep start value, a sweep stop value, and a voltage compliance. • Sweep Mode Select a sweep mode from the Sweep Mode drop-down list. LinearSingle One-way linear sweep from the Start (sweep start value) to the Stop (sweep stop value). LogSingle One-way logarithmic sweep from the Start (sweep start value) to the Stop (sweep stop value). LinearDouble Linear-sweep from the Start (sweep start value) to the Stop (sweep stop value) and then return linear-sweep from the Stop to the Start.

How To Perform Measurement How To Perform I/V Measurement LogDouble Logarithmic-sweep from the Start (sweep start value) to the Stop (sweep stop value) and then return logarithmic-sweep from the Stop to the Start。 • Start、Stop Enter the sweep start value in the Start and the sweep stop value in the Stop. • Voltage Compliance Enter the voltage compliance value in the Voltage Compliance. If the output voltage of measurement unit connected to a drain terminal is more than this value, a measurement unit stops the output. By clicking the Details chevron, the area expands to set more detail conditions. For more information on setting items, see “Setup” on page 4-38. Step 5. Enter the setup conditions for the pulse output in General settings at the left side of Setup area. Auto Period Automatic adjustment for the pulse period. To enable this function, mark the check box. Pulse Period Pulse period. However, if the Auto Period function is enabled, the pulse period is automatically adjusted to a minimum period corresponding to the pulse width.

3- 15 How To Perform Measurement How To Perform I/V Measurement Step 6. Click the Connections tab to display Connections area. At Connections area, you can confirm a measurement circuit. Also, you can select a gate resistor/drain resistor that may be effective to suppress a device oscillation during measurement. • Base/Gate Resistor You can select a gate resistor from this drop-down list. A gate resistor may be effective to suppress a device oscillation during large current measurement. NOTE You can select a gate resistor only if a measurement resource is MCSMU. In this example, which selects MOSFET as a device type and ID-VDS as a measurement item, the default measurement resource is MCSMU and you can select a gate resistor. • Collector/Drain Resistor You can select a drain resistor from this drop-down list. A drain resistor may be effective to suppress a over current during a break-down measurement. NOTE You can select a drain resistor only if a measurement resource is HVSMU.

How To Perform Measurement How To Perform I/V Measurement In this example, which selects MOSFET as a device type and ID-VDS as a measurement item, the default measurement resource is UHCU and a drain resistor is fixed to 0 . Step 7. Click the Start Measurement tool button to start a measurement. Or, click the Repeat Measurement tool button to repeat a measurement. After starting a measurement, you can stop a measurement by clicking the Stop Measurement tool button . Step 8. Click the Characteristics tab to display the Characteristics area. After a measurement is finished, a measured I/V characteristics curve is displayed on the Characteristics area. This example shows an ID-VDS characteristics curve. For the operation on the graph display, see “Displaying and Operating Graph” on page 3-26.

3- 17 How To Perform Measurement How To Perform I/V Measurement Setting Parameter Table 3-2 Available Device Types and Measurement Items Device Type Measurement Item Description MOSFET ID-VDS ID-VDS output characteristics ID-VGS ID-VGS transmission characteristics RDS-ID RDS (Drain to Source resistance) - ID characteristics VDS-VGS VDS-VGS characteristics RDS-VGS RDS (Drain to Source resistance) - VGS characteristics IDSS Drain leak current - VDS characteristics IGSS Gate leak current - VGS characteristics IS-VSD Forward current of body diode - VSD characteristics IGBT IC-VCE IC-VCE output characteristics IC-VGE IC-VGE transmission characteristics VCE-VGE VCE-VGE characteristics VCE(sat) VCE(sat) (Collector to Emitter saturation voltage) - IC characteristics ICES Collector leak current - VCE characteristics IGES Gate leak current - VGE characteristics Diode IF-VF Forward bias current - voltage characteristics IR-VR Reverse bias current - voltage characteristics Generic Free setup on the measurement units connection and measurement conditions.

How To Perform Measurement How To Calculate Power Loss How To Calculate Power Loss This section describes how to calculate the power loss at a switching device using the power loss calculation software and consists of the following sub-sections: • Calculating Power Loss • Extracted Parameters By Power Loss Calculation Figure 3-3 Power Loss Calculation Software

3- 19 How To Perform Measurement How To Calculate Power Loss The power loss calculation software calculates the power loss from the drive conditions and the device characteristics parameters of DUT. There are the following two ways to specify the parameters for calculation: • Specify the parameter values from the datasheet of DUT. If you want to calculate the power loss of DUT at the different drive conditions or there are the parameters that are not specified in the datasheet, you may specify the predicted values. • Measure the switching device by the I/V measurement software, capacitance measurement software, and gate charge measurement software at your desired drive conditions and store the measurement data. Then, the power loss calculation software read the stored measurement data and extract the required drive conditions and characteristics parameters for power loss calculation. This section explains the procedure that specify the measurement data file of DUT. Calculating Power Loss Step 1. Prepare the measurement data The power loss calculation software uses the following measurement data files to calculate the power loss. So, measure the DUT at your desired drive conditions and save the measured data. • Measurement data file of I/V measurement software Prepare a measurement data file that measured either one of the following measurement item. • ID-VDS • RDS-ID • VDS-VGS • RDS-VGS • Measurement data file of capacitance measurement software Prepare the measurement data files that measured the following measurement items. • Rg • Crss

How To Perform Measurement How To Calculate Power Loss • Measurement data file of gate charge measurement software Prepare a measurement data file that measured any measurement item. Step 2. On the software palette, click the Power Loss Calculation icon . The Power Loss Calculation software (Figure 3-3) opens. Step 3. Select the assumed load type to calculate the power loss in the Conditions area on the work area. Inductive Inductive load Resistive Resistive load Step 4. Specify the measurement data files to be used for power loss calculation and load them. 1. Specify the measurement data file of the I/V measurement software to load. a. Click the Output Characteristics tab at the right of work area to display the Output Characteristics area.

3- 21 How To Perform Measurement How To Calculate Power Loss b. Click the Load Measurement Data button at the upper-left corner of the Output Characteristics area. After the dialog box opens, specify the measurement data of I/V measurement software. The characteristics graph of the loaded measurement item is displayed. 2. Specify the Rg measurement data file of the capacitance measurement software to load. a. Click the Gate Resistance tab to display the Gate Resistance area. b. Click the Load Measurement Data button at the upper-left corner of the Gate Resistance area. After the dialog box opens, specify the Rg measurement data of capacitance measurement software. The loaded Rg characteristics graph is displayed. 3. Specify the Crss measurement data file of the capacitance measurement software to load. a. Click the Reverse Transfer Capacitance tab to display the Revers Transfer Capacitance area. b. Click the Load Measurement Data button at the upper-left corner of the Reverse Transfer Capacitance area. After the dialog box opens, specify the Crss measurement data of capacitance measurement software. The loaded Crss characteristics graph is displayed. 4. Specify the measurement data file of the gate charge measurement software to load. a. Click the Gate Charge tab to display the Gate Charge area. b. Click the Load Measurement Data button at the upper-left corner of the Gate Charge area. After the dialog box opens, specify the measurement data of gate charge measurement software. The gate charge characteristics graph of the loaded measurement item is displayed.

How To Perform Measurement How To Calculate Power Loss For the drive conditions and the device parameters for power loss calculation that extracted from the loaded measurement data, see “Measurement Data and Extracted Drive Conditions and Device Parameters for Power Loss Calculation” on page 25”. You can confirm or change the drive conditions for power loss calculation by clicking the Drive Conditions tab at the left of work area. Also, you can confirm or change the device parameters for power loss calculation by clicking the Device Parameters tab. Step 5. Select a drive condition or device parameter to be swept and specify the sweep condition. If you select a drive condition parameter to be swept, click the Drive Condition tab and mark the check box of the desired drive parameter. If you select a device parameter to be swept, click the Device Parameters tab and mark the check box of the desired device parameter. This example select a switching frequency to be swept. 1. Click the Drive Conditions tab and mark the check box of the Switching Frequency parameter to select. 2. Specify the sweep condition in the Value column. Start Sweep start value